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1. 发明专利

JPH11295500A ULTRAVIOLET RAY IRRADIATOR 失效
公开(公告)号：JPH11295500A
公开(公告)日：1999-10-29
申请号：JP11289798
申请日：1998-04-09
申请人： USHIO ELECTRIC INC
发明人： HISHINUMA NOBUYOSHI , SUGAWARA HIROSHI , TAKEMOTO FUMITOSHI , TOKAI HIROAKI , MURASE ATSUSHI
IPC分类号： G21K5/00 , H01L21/302 , H01L21/304 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To keep the intensity of ultraviolet radiation from degrading without the adhesion of a reaction product due to radiation of ultraviolet rays to a member of a window, and prevent the appearance of dust due to the existence of reaction product. SOLUTION: In an ultraviolet ray irradiator where a dielectric barrier discharge lamp 2 is located inside a container 1 and a window member 3 for extracting ultraviolet rays radiated from the lamp 2 into the container 1 is formed, a heating means (H) that heats the window member 3 to 100 deg.C or higher is provided. Such a structure makes it possible to keep ultraviolet-ray reaction products due to various kinds of chemicals such as organic solvents, acids and alkalis from adhering to the window member 3, restrain the intensity of the radiated ultraviolet rays and prevent dust from collecting owing to the reaction products.

2. 发明专利

JPH11317199A ELECTRIC INTRODUCTION BODY FOR VESSEL AND ITS MANUFACTURE 失效
公开(公告)号：JPH11317199A
公开(公告)日：1999-11-16
申请号：JP3883399
申请日：1999-02-17
申请人： USHIO ELECTRIC INC
发明人： TORIKAI TETSUYA , MORIMOTO YUKIHIRO , KUMADA TOYOHIKO , TAGAWA KOJI , KAI KENZO , SUGAWARA HIROSHI , NOZAWA SHIGENORI
IPC分类号： H01J9/24 , H01J61/36
摘要： PROBLEM TO BE SOLVED: To prevent leakage and removal of an electrode core rod by reliably fixing a blocking body of conductive inorganic material component and insulating inorganic material component and the electrode core rod by sintering. SOLUTION: As for this electric introduction body, in a blocking body 50 for a vessel which seals a block tube connected to an arc tube of the vessel and in which an electrode core rod 40 is inserted in a center hole of a functionally gradient material, a diffusion region, where a conductive inorganic material component of the blocking body, a metal component of the electrode core rod and a diffusion accelerator 60 to accelerate diffusion of the conductive inorganic material component of the blocking body and the metal component of the electrode core rod at a sintering temperature are mutually diffused, is formed in a boundary region of the blocking body and the electrode core rod, and the electrode core rod and the conductive inorganic material component of the blocking body are jointed.

3. 发明专利

JPH08236492A OPTICAL CLEANING METHOD 失效
公开(公告)号：JPH08236492A
公开(公告)日：1996-09-13
申请号：JP6011895
申请日：1995-02-24
申请人： USHIO ELECTRIC INC
发明人： ISO SHINICHI , MATSUNO HIROMITSU , IGARASHI RYUSHI , SUGAWARA HIROSHI , HIRAMOTO TATSUMI
IPC分类号： B08B7/00 , H01L21/302 , H01L21/304 , H01L21/3065
摘要： PURPOSE: To improve th cleaning efficiency of an optical cleaning method and, at the same time, to reduce the damage to an object to be cleaned by ultraviolet rays or heat by turning on and turning off ultraviolet lamps while the object is cleaned by repeatedly turning on and turning off the power source of the ultraviolet lamps. CONSTITUTION: About five dielectric barrier discharge lamps 4 which are composed of ultraviolet lamps are arranged closely to an object 8 to be cleaned in a cleaning duct 3 while the lamps 4 are connected in parallel with one power source 10 and the object 8 is supported by a supporting jig 5. The object 8 is cleaned by using such an irradiating device by turning on and turning off the lamps 4 while the object 8 is cleaned by repeatedly turning on and turning off the power source 10. When the lamps 4 are turned on, the object 8 is cleaned by the same action as that of the prior art optical cleaning. In addition, even when the lamps 4 are turned off, the object 8 is cleaned, because contaminants are decomposed as a result of a reaction between the contaminants and the active oxygen species remaining in the duct 3. Therefore, the object 8 can be cleaned with a cleaning efficiency which is higher than that obtained when the lamps 4 are continuously turned on. In addition, the object 8 is not damage by heat, because the temperatures of the lamps 4 do not rise.

4. 发明专利

JP2002352767A DISCHARGE LAMP 失效
公开(公告)号：JP2002352767A
公开(公告)日：2002-12-06
申请号：JP2001156356
申请日：2001-05-25
申请人： USHIO ELECTRIC INC
发明人： SUGAWARA HIROSHI , NAKASHITA KATSUYOSHI
IPC分类号： H01J61/20 , H01J61/073
摘要： PROBLEM TO BE SOLVED: To provide a discharge lamp having an electrode structure, which hardly causes dispersion in the amount of adhesion of an electron emissive material, makes the lamp characteristics proper and stable, and is superior in productivity. SOLUTION: The discharge lamp comprises electrodes 21, 22, coated with an emissive material 23, then baked and fixed to the surfaces of electrode structure members to form, where the average particle diameter of the emissive material 23, after baking, is 1 μm or more and 10 μm or less.

5. 发明专利

JPH0885861A OXIDATION OF SURFACE OF BODY TO BE TREATED OR MATERIAL ON THE SAME SURFACE UNDER REDUCED PRESSURE 失效
公开(公告)号：JPH0885861A
公开(公告)日：1996-04-02
申请号：JP24830594
申请日：1994-09-19
申请人： USHIO ELECTRIC INC
发明人： SUGAWARA HIROSHI , IGARASHI RYUSHI , HIRAMOTO TATSUMI , MATSUNO HIROMITSU
IPC分类号： C23C8/12
摘要： PURPOSE: To further increase cleaning speed and to enable uniform treatment even to a rugged surface by carrying out cleaning under reduced pressure in UV/O3 cleaning with a dielectric barriered discharge lamp contg. gaseous xenon. CONSTITUTION: Oxygen or oxygen-contg. fluid is irradiated under reduced pressure with vacuum UV radiated from a dielectric barriered discharge lamp contg. gaseous xenon or xenon-based gas to form ozone and active oxidizing decomposed matter by a photochemical reaction. These products are brought into contact with the surface of a body to be treated or a material on its surface. Cleaning speed is increased under reduced pressure as compared with the conventional speed and high concn. ozone or active oxidizing matter is obtd. without using an ozonizer. High treatment speed is attained, the interval between the light source and the body to be treated can be widened and even the rugged surface of a body to be treated can be uniformly treated.

6. 发明专利

JPH03226959A TUBULAR INCANDESCENT LAMP 失效
公开(公告)号：JPH03226959A
公开(公告)日：1991-10-07
申请号：JP1918690
申请日：1990-01-31
申请人： USHIO ELECTRIC INC
发明人： YAMAZAKI KENGO , SUGAWARA HIROSHI
IPC分类号： H01K1/32
摘要： PURPOSE:To restrain reduction in the transmission factor of light near 400nm in the case of forming on the outer surface of a bulb a multilayered dielectric film which reduces energy transmission in the wavelength range longer than 600nm by setting the optical film thickness of the outermost layer of low refractive index to 55 to 60% of that of other layers of low refractive index. CONSTITUTION:A tubular incandescent lamp wherein a layer H of high refractive index composed mainly of TiO2 and a layer L of low refractive index composed mainly of SiO2 are alternately stacked on the outer surface of a bulb 11 made of quartz glass so as to reduce energy transmission in the wavelength range longer than 600nm. The optical film thickness of the outermost layer Lo of low refractive index is 50 to 60% of that of other layers L of low refractive index. The optical film thickness of the outermost layer of low refractive index is slightly larger than 50% of that of other layers of low refractive index i.e., 55 to 60% so that reduction in the transmission factor of light near 400nm can be restrained. The transmission factor of light near 400nm is thereby increased and both red and blue manuscripts can be clearly copied.

7. 发明专利

JPH0279352A FILLER GAS ANALYZER AND ANALYSIS METHOD 失效
公开(公告)号：JPH0279352A
公开(公告)日：1990-03-19
申请号：JP22978288
申请日：1988-09-16
申请人： USHIO ELECTRIC INC
发明人： SUGAWARA HIROSHI , IGARASHI RYUSHI , MORIMOTO YUKIHIRO
IPC分类号： H01J49/04 , H01J49/26
摘要： PURPOSE:To make it possible to concurrently analyze a gas pressure of filler gas for a lamp, etc., and gas component in a short time by using a cassette-type filled body destruction room, pumping down a filler gas in the gas reservoir room to a prescribed pressure and immediately introducing this pressure-reduced filler gas to a mass spectrometer to analyze it. CONSTITUTION:A filled body destruction room 1 is of a cassette type and the destruction room 1 itself is mountable and demountable by means of O-ring seal S. The filled body destruction room 1 is linked to a gas reservoir room 2 through a valve V1 and to a turbo-molecular pump TMP through the valve V6. A standard gas supplier 5 made up of an inert gas or halogen gas cylinder is also linked to the gas reservoir room 2 through the valve 5. A diaphragm vacuum gage 3 with a changeable diaphragm arranged by pressure is installed inside the gas reservoir room 2, so that the gas pressure in the gas reservoir room 2 can be measured. Thereby, it is possible to accurately analyze a gas pressure of filler gas of a lamp, etc., and gas component in a short time and concurrently.

8. 发明专利

JP2003132849A DIELECTRIC BARRIER DISCHARGE LAMP DEVICE 审中-公开
公开(公告)号：JP2003132849A
公开(公告)日：2003-05-09
申请号：JP2001332811
申请日：2001-10-30
申请人： USHIO ELECTRIC INC
发明人： HISHINUMA NOBUYOSHI , SUGAWARA HIROSHI
IPC分类号： H01J65/00
摘要： PROBLEM TO BE SOLVED: To provide a dielectric barrier discharge lamp having a reliable feeder part of electricity, capable of preventing the leakage of cooling liquid from an inner wall and contamination of surrounding and reducing troubles of maintenance, such as part replacement. SOLUTION: Purified water is made to run in the dielectric barrier discharge lamp device, and at least one of electrodes of the discharge lamp and a feeder wire connected to the electrode are placed in contact with the water. The feeder wire is led out of the lamp via an elastic sealing material to keep airtightness in the lamp. The surface of the sealed lead-out part of the feeder wire, in contact with the sealing material, is cover with a protective layer made of a film deposited from metal alkoxide solution, a passivation film or an organic resin film, etc.

9. 发明专利

JP2002075204A MEASURING METHOD OF HALOGEN QUANTITY FILLED IN MERCURY LAMP 失效
公开(公告)号：JP2002075204A
公开(公告)日：2002-03-15
申请号：JP2000257366
申请日：2000-08-28
申请人： USHIO ELECTRIC INC
发明人： DAN MASAFUMI , SUGAWARA HIROSHI
IPC分类号： G01N1/22 , G01N1/28 , G01N1/36 , G01N30/06 , G01N30/88 , H01J9/42
摘要： PROBLEM TO BE SOLVED: To provide a measuring method of halogen quantity filled in a mercury lamp in which the total quantity of halogen filled in the mercury lamp can be precisely measured. SOLUTION: The measuring method of halogen quantity filled in the mercury lamp comprises a measuring method of halogen quantity filled in the mercury lamp which is made of mercury and halogen filled in an electric discharge container. The mercury lamp is broken in the enclosed container filled with a solvent, and a gas dissolution process in which the halogen gas filled in the mercury lamp is dissolved in the above solvent, a solid substance dissolution process in which the solid halogen compound filled in the mercury lamp is dissolved in the solution obtained by the gas dissolution process, and a measuring process in which halogen that is contained in the solution obtained by the solid substance dissolution process is measured, are performed.

10. 发明专利

JPH08236084A DIELECTRIC BARRIER DISCHARGE LAMP 失效
公开(公告)号：JPH08236084A
公开(公告)日：1996-09-13
申请号：JP6011395
申请日：1995-02-24
申请人： USHIO ELECTRIC INC
发明人： ONISHI YASUO , MATSUNO HIROMITSU , SUGAWARA HIROSHI , HISHINUMA NOBUYOSHI , IGARASHI RYUSHI
IPC分类号： G21K5/00 , H01J65/00 , H01J65/04
摘要： PURPOSE: To provide a dielectric barrier discharge lamp whose radiance is high and which is compact and has the long service life. CONSTITUTION: A dielectric barrier discharge lamp is composed of a discharge vessel 1, discharge gas which is filled in the discharge vessel and forms an excimer molecule by dielectric barrier discharge, electrodes 4 and 5 making a pair with a dielectric to perform the dielectric barrier discharge and a light taking-out window 9 which also serves as a wall of the discharge vessel and is composed of a magnesium fluoride or a calcium fluoride. In this dielectric barrier discharge lamp, a metallic joining member 20 where coaxially arranged inner tube 2 and outer tube 3 are airtightly joined together on one end, is arranged on one end of the discharge vessel, and the light taking-out window is arranged on the other end of the inner tube or the outer tube to constitute the joining member.

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