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1. 发明专利

JPH0874031A PRODUCTION OF PHASE-SHIFT PHOTOMASK BLANK, PHASE-SHIFT PHOTOMASK BLANK AND PHASE-SHIFT PHOTOMASK 失效
公开(公告)号：JPH0874031A
公开(公告)日：1996-03-19
申请号：JP21479294
申请日：1994-09-08
申请人： ULVAC SEIMAKU KK , MITSUBISHI ELECTRIC CORP
发明人： TOKU AKIHIKO , KAWADA MAE , SAITO YOSHIHIRO , YAMAMOTO TSUNEO , HAYASHI ATSUSHI , YOSHIOKA NOBUYUKI , CHIBA AKIRA , MIYAZAKI JUNJI
IPC分类号： C23C14/06 , C23C14/34 , G03F1/32 , G03F1/68 , H01L21/027
摘要： PURPOSE: To provide a phase-shift photomask blank suitable to UV exposure and highly resistant to chemicals. CONSTITUTION: Gaseous nitrogen monoxide is added by 2.65-6vol.%, then a molybdenum silicide target is sputtered, and a molybdenum silicide oxynitride film is formed on a transparent substrate. This film is suitable to the phase-shift film in a KrF excimer laser wavelength and highly resistant to chemicals. Since the chemical resistance is especially improved when the proportion of the gaseoous nitrogen monoxide is low, the film is used as the protective film of the phase-shift film by adding 0.5-6vol.%. The process variation of the transmittance is reduced when the film is heat-treated at >=200 deg.C, and the transmittance is increased in the exposure wavelength.

2. 发明专利

JPH0756316A PRODUCTION OF PHASE SHIFT PHOTOMASK BLANKS 失效
公开(公告)号：JPH0756316A
公开(公告)日：1995-03-03
申请号：JP20073493
申请日：1993-08-12
申请人： ULVAC SEIMAKU KK , MITSUBISHI ELECTRIC CORP
发明人： TOKU AKIHIKO , SAITO YOSHIHIRO , YAMAMOTO TSUNEO
IPC分类号： G03F1/32 , G03F1/68 , G03F1/80 , G03F1/08
摘要： PURPOSE:To provide a method capable of producing phase shift films having a desired phase shift quantity with good accuracy. CONSTITUTION:This method for production of the phase shift photomask blanks comprises forming a phase shift film for shifting the phases of light on a substrate in an initial film forming stage (5, 9), measuring the phase shift quantity and refractive index of this phase shift film, determining the error phase shift quantity from the target phase shift quantity, calculating the additional film forming time from the error phase shift quantity and the change rate of the phase shift quantity per unit film forming time for a deficient-component (6), forming the additional film (d3) calculating an excessive film thickness (d6) from the error phase shift quantity and the phase shift quantity per unit film thickness for an excess component (11) and etching the film by as much as this excess film thickness-component. As a result, the error-component of the phase shift film is compensated by executing the additional film formation or etching under time management and, therefore, the phase shift photomask blanks having good accuracy are easily produced.

3. 发明专利

JPH0764270A PRODUCTION OF PHASE SHIFT PHOTOMASK BLANK 失效
公开(公告)号：JPH0764270A
公开(公告)日：1995-03-10
申请号：JP21461193
申请日：1993-08-30
申请人： ULVAC SEIMAKU KK
发明人： TOKU AKIHIKO , YAMAMOTO TSUNEO , SAITO YOSHIHIRO
IPC分类号： G03F1/32 , G03F1/68 , G03F1/08
摘要： PURPOSE:To provide a process for producing the phase shift photomask blank having a desired phase shift quantity and light transmittance. CONSTITUTION:The optical characteristics of phase shift films are measured during the course of film formation. The refractive index n1 and extinction coefft. k1 are calculated by an R.T. method or polarization method. The phase shift quantity and light transmittance at the end point of the time of the film formation are calculated from the value h1 of the film thickness calculated simultaneously therewith or separately measured. The formation of the phase shift films is conducted by changing film forming conditions when this value is off a permissible range. As a result, the phase shift photomask blank having the target phase shift quantity and the target light transmittance is easily obtd.

4. 发明专利

JPH0217350A MULTI-UNIT CONTROL SYSTEM FOR AIR CONDITIONER 失效
公开(公告)号：JPH0217350A
公开(公告)日：1990-01-22
申请号：JP16861088
申请日：1988-07-06
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAITO YOSHIHIRO , SATO YASUO , AWATA HIROSHI
IPC分类号： F24F11/02
摘要： PURPOSE:To incorporate air conditioners having no address in the multi-unit control by providing a data converting adapter which has the address between the central control device and respective air conditioners and converts the serial signal from the central control device to either the pulse signal or level signal to control the air conditioners. CONSTITUTION:Upon receiving the serial signal containing the address from the central control device 1 by its receiving circuit 13, the converting adapter 12 compares the address contained in the serial signal with the address input 14 in a microcomputer 15. If they agree, the output is made in the order of level output and pulse output respectively from the level output circuit 16 and the pulse output circuit 17. The air conditioners 18, 21 which receive the output signals control the signals received by the level input circuit 19 or pulse input circuit 22 by their respective control circuits 20, 23 to either start or stop the operation. In this manner, even if the air conditioners do not have the address, they can be incorporated into the multi-unit control system for the central control device 1 by providing the external input circuit 19 or 22.

5. 发明专利

JPH01300149A CONTROL DEVICE FOR AIR CONDITIONER 失效
公开(公告)号：JPH01300149A
公开(公告)日：1989-12-04
申请号：JP12783288
申请日：1988-05-25
申请人： MITSUBISHI ELECTRIC CORP
发明人： WATANABE TAKASHI , SATO YASUO , HAYASHIDA TATSUNAO , AWATA HIROSHI , SAITO YOSHIHIRO
IPC分类号： F04B49/10 , F24F11/02 , F25B1/00
摘要： PURPOSE:To prevent useless energization of a crank case heater by a method wherein the crank case heater is turned OFF during an operation of a compressor and then ON/OFF control for the crank case heater is carried out in response to a difference in temperature of a compressor temperature and the surrounding atmosphere temperature during a stoppage of the compressor. CONSTITUTION:A present operating condition is judged and if the operation is being carried out, an OFF signal is outputted to a control relay 17 for a crank case heater 8 through an output circuit 11 and a buffer 20. If the operation is stopped, a tempera ture data T1 of a compressor got through a thermistor 21 for use in sensing a tempera ture of the compressor and a resistor 23 for dividing a voltage is inputted through an input circuit 10 for a micro-computer 9. Then, a data T2 of surrounding air tempera ture got by the thermistor 22 for use in sensing the surrounding air temperature and the resistor 23 for dividing a voltage is inputted, a different in temperature T is calculated and then it is compared with a predetermined difference in temperature T3. In case of T3>= T, an ON signal is outputted to a controlling relay 17. In case of T3

6. 发明专利

JPH11327955A OPERATION INSPECTION METHOD AND ELECTRONIC EQUIPMENT 失效
公开(公告)号：JPH11327955A
公开(公告)日：1999-11-30
申请号：JP13081298
申请日：1998-05-13
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAITO YOSHIHIRO
IPC分类号： G06F11/28
摘要： PROBLEM TO BE SOLVED: To inspect the operation of an electronic equipment at the time of incorporating a GUI without the need of a lot of personnel and time by operating the electronic equipment based on a graphic user interface corresponding to event data simulating an event generated by an operation in an operation input part and inspecting the operation of the electronic equipment based on the operated result of the electronic equipment. SOLUTION: When the mode is changed to an inspection mode, the event management object 121 of the GUI 103 successively obtains the event data of an event object 125 and sends out the event corresponding to the event data to a display processing object 122 first. At the time of receiving the event, the display processing object 122 successively executes a display processing corresponding to the event.

7. 发明专利

JPH066641A MOVING IMAGE PROCESSOR 失效
公开(公告)号：JPH066641A
公开(公告)日：1994-01-14
申请号：JP16105292
申请日：1992-06-19
申请人： TOKYO ELECTRIC POWER CO , MITSUBISHI ELECTRIC CORP
发明人： AIZAWA MINORU , SAITO YOSHIHIRO , HASHIMOTO NAOKI , HARADA YOSHIHISA
IPC分类号： H04N5/21 , G06T3/00 , G06T5/00 , G06F15/66 , G06F15/68
摘要： PURPOSE:To obtain the moving image processor with high accuracy by providing a logical filter pre-processing section before a logical filter eliminating noise. CONSTITUTION:An analog video signal picked up by a camera 1 employing 2:1 interlace scanning is converted into a digital signal by an A/D converter 2 and the signal is inputted to a logical filter pre-processing section 10. When a comb-line ruggedness is formed in the horizontal direction in picture data inputted to the logical filter pre-processing section 10 due to the effect of field interlace, the logical filter pre-processing section 10 takes notice of only even number lines in the picture data and applies expansion processing to only the even number lines. Then the picture data subject to expansion processing for even number lines only are fed to a logical filter section 3 for noise elimination, in which noise elimination processing is implemented in the order of contraction 31, expansion 32, expansion 33 and contraction 34.

8. 发明专利

JP2000330821A PRODUCTION OF SOFTWARE FOR BUILT-IN SYSTEM 失效
公开(公告)号：JP2000330821A
公开(公告)日：2000-11-30
申请号：JP14248499
申请日：1999-05-21
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAITO YOSHIHIRO
IPC分类号： G06F11/28
摘要： PROBLEM TO BE SOLVED: To provide a built-in system software producing method wherein debugging and tests over the hierarchies of software components are facilitated by monitoring the movement of data between hierarchies of each of software components and the accessing of functions and displaying these monitored results. SOLUTION: Identifiers(IDs) indicating respective hierarchies and software hierarchy information 3 consisting of function specifications are stored correspondingly to respective software components 5 to 8 of built-in system software 2a and a debugger 4 is allowed to monitor the movement of data between the hierarchies of respective software components 5 to 8 and function accesses by using the information 3 and display respective monitored results. Since the monitored results can be displayed by using the information 3, debugging and tests can be easily executed.

9. 发明专利

JP2000330775A METHOD FOR DEVELOPING BUILT-IN SYSTEM 失效
公开(公告)号：JP2000330775A
公开(公告)日：2000-11-30
申请号：JP13509099
申请日：1999-05-17
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAITO YOSHIHIRO
IPC分类号： G06F9/06
摘要： PROBLEM TO BE SOLVED: To lower the cost of a system without taking great trouble to test and debug software by generating function description tables for each software component and constituting a task. SOLUTION: Functions are designed by software components. According to the function designs of the individual components, the function description tables are generated. A task configuration tool is actuated and the function description tables are inputted to generate task constitution. This tool outputs a source file defining prototype to generate a task list and a source code for the task constitution. On the basis of the outputted list or source file, programming is carried out. A built-in system software developing tool such as a compiler and a linker is used to generate software execution modules, which are tested and debugged individually.

10. 发明专利

JPH03113648A PROGRAM DEBUG SYSTEM 失效
公开(公告)号：JPH03113648A
公开(公告)日：1991-05-15
申请号：JP25311189
申请日：1989-09-28
申请人： MITSUBISHI ELECTRIC CORP
发明人： SAITO YOSHIHIRO , YAMAMOTO OSAMU
IPC分类号： G06F11/28
摘要： PURPOSE:To easily execute debugging paying attention to the operation of a specific task at high speed by eliminating setting and clearing against respective BP in a multi-task program in a specific task designation means and a task ID detection means, both of which are set in a debugger. CONSTITUTION:The program 1 consists of tasks 2a-2c, and breaks only when BP 8 are effective if the breake points (BP) 8 are recognized while the task 2 is executed. The debugger 4 has a means setting BP 8 effective and a means judging whether the task is the specific one 2 or not. A present task detection means 9 detecting the broken task is when the program is broken recognizes the task. When the task agrees with the task which the task designation means 8 designating the task setting BP 8 to be effective, control is shifted to the debugger 4. When they do not agree, the program is executed as it is. Thus, debugging is easily executed at high speed.

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