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1. 发明专利

JPH06193576A SLIDE BEARING FOR VACUUM PUMP 失效
公开(公告)号：JPH06193576A
公开(公告)日：1994-07-12
申请号：JP36183892
申请日：1992-12-22
申请人： ULVAC CORP , NIPPON OIL CO LTD
发明人： IIDA TOSHIRO , FUKAURA YUJI , YAHAGI MITSURU , NAKA KATSUNORI , TATENO SHUNICHI , HAYATA YOSHIHO , KONO TAKESHI
IPC分类号： F04C25/02 , F04C29/00
摘要： PURPOSE:To manufacture a vacuum pump which is high in durability by providing a bearing freed from a defect and corrosion by forming a slide bearing for a vacuum pump by using a carbon/carbon composite material. CONSTITUTION:In a vacuum pump used under environment wherein corrosive gas for a semiconductor manufacturing device is generated, a slide bearing to support the shaft of a rotating rotor is formed by using a carbon/carbon composite material. The carbon/carbon composite material is a composite material consisting mainly of carbon fibers and a carbonaceous matrix. Normally 10-80%, preferably 30-65%, a fiber volume content, normally 20-90% a matrix volume content, and 1-30%, preferably 5-25%, a gap volume ratio are used for the carbon/carbon composite material. Fibers such as a pitch system, a polyacrylonitrile system and a rayon system, is used as carbon fibers.

2. 发明专利

JPH07269479A PUMP VANE FOR VACUUM PUMP 失效
公开(公告)号：JPH07269479A
公开(公告)日：1995-10-17
申请号：JP36183992
申请日：1992-12-22
申请人： ULVAC CORP , NIPPON OIL CO LTD
发明人： IIDA TOSHIRO , FUKAURA YUJI , YAHAGI MITSURU , NAKA KATSUNORI , TATENO SHUNICHI , HAYATA YOSHIHO , KONO TAKESHI
IPC分类号： F04C25/02 , F01C21/08 , F01C21/10 , F04C18/344 , F04C29/00
摘要： PURPOSE:To make improvements in durability under a corrosive atmosphere by forming a pump vane for a vacuum pump from carbon/carbon composite materials. CONSTITUTION:In a vacuum pump used under environment with the generation of corrosive gas as in a semiconductor manufacturing device or the like, plural vanes 1 are attached to a rotor 3 via each spring 2, and in time of eccentric rotation of the assembly of each vane 1, the upper vane 1 is thrust inwards but the lower vane 1 is pushed outwards instead, and thus they are always stuck close to an inner wall of a casing 4. Each of these vanes 1 is formed with carbon/carbon composite materials using a carbon fiber and a carbonaceous matrix as the main constituent elements, and as for material of this carbon fiber, those of fibers of, for example, pitch, polyacrylonitrile, rayon systems or their precursors, etc., are used. In addition, the carbon fiber is formed into one-way laminates, two-dimensional fabrics, three-dimensional fablics or the like, and then they are made so as to form a molding approximate to the vane.

3. 发明专利

JP2003129957A METHOD AND DEVICE FOR VACUUM EXHAUST 审中-公开
公开(公告)号：JP2003129957A
公开(公告)日：2003-05-08
申请号：JP2001328674
申请日：2001-10-26
申请人： ULVAC CORP
发明人： AIKAWA JUNICHI , SUGAYA YUKIO , TANAKA TOMONARI , FUKAURA YUJI , YAHAGI MITSURU
IPC分类号： F04C23/00 , F04B23/12 , F04B37/16 , F04B49/06 , F04C25/02
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for vacuum exhaust capable of efficiently saving energy of the whole vacuum exhaust device including a main pump and an auxiliary pump. SOLUTION: This vacuum exhaust device is provided with the main pump 2, a check valve 4 for releasing discharge gas of the main pump 2 into the atmosphere, and the auxiliary pump 3 for exhausting a discharge side of the main pump 2 arranged in parallel with the check valve 4. An exhaust air speed ratio of the auxiliary pump for the main pump is set to 3% or less to save energy of the whole device efficiently. The enlargement of the auxiliary pump 3 is suppressed to reduce an installation space.

4. 发明专利

JPH08296556A VACUUM EXHAUSTER FOR REFRIGERATING CYCLE 失效
公开(公告)号：JPH08296556A
公开(公告)日：1996-11-12
申请号：JP12702895
申请日：1995-04-27
申请人： ULVAC CORP
发明人： FUKAURA YUJI
IPC分类号： F04B37/16
摘要： PURPOSE: To minimize the flow of purge gas by maintaining pressure in a vacuum exhaust line always to the specified value in order to prevent the contraflow of oil vapor from a vacuum exhauster body. CONSTITUTION: In a line 2 connecting a vacuum exhauster body 1 to a refrigerating cycle 3, a vent valve 4, an automatic cutoff valve 5 and couplers 6a, 6b are connected in this order from the vacuum exhauster body 1 side, and a purge gas feed line 8 for leading in purge gas from a purge gas source G is connected to a line part 2a between the couplers 6a, 6b and the automatic cutoff valve 5. In addition, the purge gas feed line 8 is provided with a purge gas flow control valve 10 and a purge gas lead-in valve 11. A pressure gauge 7 or a flow meter is connected to the line part 2a, and the detection output is supplied to a controller 20 so as to control the opening degree and/or opening/ closing of the purge gas flow control valve 10 and/or purge gas lead-in valve 11 on the basis of the detection output. Pressure in the line part 2a can thereby be maintained to the specified value.

5. 发明专利

JP2003139055A EVACUATION DEVICE 审中-公开
公开(公告)号：JP2003139055A
公开(公告)日：2003-05-14
申请号：JP2001334587
申请日：2001-10-31
申请人： ULVAC CORP
发明人： FUKAURA YUJI , MIZUSHIMA KOICHI , YAHAGI MITSURU , SHIBAYAMA KOJI , AIKAWA JUNICHI
IPC分类号： F04B49/06 , F04B37/16
摘要： PROBLEM TO BE SOLVED: To provide an evacuation device capable of realizing the low power consumption in an auxiliary pump, and efficiently saving the energy as a whole. SOLUTION: This evacuation device comprises a dry vacuum pump 20, a check valve 28 for releasing a discharge side of the dry vacuum pump 20 to the atmospheric air, and the auxiliary pump 30 mounted in parallel with the check valve 28 and evacuating the discharge side of the dry vacuum pump 20. A control device 33 is mounted for controlling an operating condition of the auxiliary pump 30 on the basis of the output of a pressure sensor 35 detecting the discharge-side pressure of the dry vacuum pump 20, so that a rotating speed of the auxiliary pump 30 is reduced or the operation of the auxiliary pump 30 is stopped when the discharge-side pressure of the dry vacuum pump 20 is less than a predetermined pressure, to reduce the power consumption in the auxiliary pump.

6. 发明专利

JP2003139054A EVACUATION DEVICE 审中-公开
公开(公告)号：JP2003139054A
公开(公告)日：2003-05-14
申请号：JP2001334586
申请日：2001-10-31
申请人： ULVAC CORP
发明人： FUKAURA YUJI , MIZUSHIMA KOICHI , TAIHICHI TORU , AIKAWA JUNICHI , OGATA SEIJI , YUYAMA JUNPEI
IPC分类号： F04B49/06 , F04B37/16
摘要： PROBLEM TO BE SOLVED: To provide an evacuation device capable of mounting a plurality of dry vacuum pumps while reducing an installation space of an auxiliary pump, reducing the maintenance cost, and improving the energy saving effect of an evacuation system. SOLUTION: Discharge sides of a plurality of dry vacuum pumps 20A-20C arranged in parallel are arranged to perform evacuation in common by one auxiliary pump 30, and pipes 12A-12C respectively communicating the discharge side of each of the dry vacuum pumps 20A-20C with the auxiliary pump 30 are provided with switch valves 40A-40C for communicating and cutting them. A control device 33 controls the switching of the switch valves 40A-40C and the operation of the auxiliary pump 30 on the basis of the outputs from intake pressure sensors 34A-34C of the dry vacuum pumps, a discharge pressure sensor 35, and driving current sensors 36A-36C.

7. 发明专利

JPH07197884A OIL STEAM REVERSE FLOW PREVENTING DEVICE FOR EVACUATION LINE 失效
公开(公告)号：JPH07197884A
公开(公告)日：1995-08-01
申请号：JP35423993
申请日：1993-12-28
申请人： ULVAC CORP
发明人： HAYASHI CHIKARA , FUKAURA YUJI
IPC分类号： F04C25/02 , F04B37/16
摘要： PURPOSE:To provide an oil steam reverse flow preventing device in an evacuation line which is constituted to maintain a pressure in the evacuation line at a constantly given value to prevent the reverse flow of oil steam from an evacuating device and reduce a flow rate of purge gas as much as possible. CONSTITUTION:A vent valve 4, an automatic shut-off valve 5, and a main valve 6 are interconnected, in the order, from an evacuating device 1 in a line 2 through which the evacuating device 1 is connected to a vacuum vessel 3. A purge gas feed line part 8 through which purge gas is introduced from a gas source 9 is connected to a line part 2a between the main valve 6 and the automatic shut-off valve 5, and a purge gas flow rate control valve 10 and a purge gas introduction valve 11 are located therein. A pressure gauge 7 is connected to the line part 2a, and a detecting output therefrom is fed to a controller 20. Based on a detecting output, the opening and/or opening and closing of a purge gas flow rate control valve and/or the purge gas introduction valve 11 is controlled. This constitution maintains a pressure in the line part 2a at a given value.

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