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1. 发明专利

JP2002310872A MEASURING METHOD AND MEASURING DEVICE 失效
公开(公告)号：JP2002310872A
公开(公告)日：2002-10-23
申请号：JP2001109352
申请日：2001-04-06
申请人： ULVAC CORP
发明人： ITO ATSUSHI , MAEHIRA KEN , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide a technique for stabilizing an oscillation frequency of a quartz resonator inside a sample at a certain value. SOLUTION: The measuring device has a cell 20 having a housing part 20a housing predetermined solution 7, the quartz resonator 3 having a pair of electrodes 31 and 32 which can be connected to a predetermined oscillation source and composed so one electrode 31 of the pair of the electrodes 31 and 32 is dipped in the solution 7, an agitating member 50 for agitating the solution 7 by the quartz resonator 3, and a lid part 11 for preventing evaporation of the solution 7.

2. 发明专利

JP2002243609A ANALYSIS DEVICE 失效
公开(公告)号：JP2002243609A
公开(公告)日：2002-08-28
申请号：JP2001039453
申请日：2001-02-16
申请人： ULVAC CORP
发明人： ITO ATSUSHI , MAEHIRA KEN , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N29/02 , G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide an analysis device, capable of accurately measuring changes in the oscillation frequencies of a plurality of oscillators capable of solving the problems of the difficulty in preventing interference among the oscillators by only arranging the oscillators in different containers, since it is caused by electrical interference inside a frequency measuring device and that it is difficult to accurately measure the oscillation frequencies of the oscillators since the amount of change in the oscillation frequencies with the progress of reaction being very small, even if it is possible to prevent the interference. SOLUTION: Oscillators 61-64 are immersed in liquids 211-214 and connected to and oscillating circuit 4 at a prescribed period one by one by a switching circuit 5 to oscillate the oscillating circuit 4. Difference in frequency is created from the oscillation frequency of the oscillating circuit 4 and the oscillation frequency of a reference frequency creating circuit 12 and measured by a low-frequency measuring circuit 15, to obtain the oscillation frequency of the oscillating circuit 4. By measuring the approximate value of the oscillation frequency of the oscillating circuit 4 using a high-frequency measuring circuit 11 and setting the oscillation frequency of the reference frequency creating circuit 12, on the basis of the approximate value, obtain the frequency of the oscillating circuit 4 of which the oscillation frequency varies can be obtained accurately.

3. 发明专利

JP2002156368A CHARACTERISTIC MEASURING INSTRUMENT AND ANALYZER 失效
公开(公告)号：JP2002156368A
公开(公告)日：2002-05-31
申请号：JP2000350781
申请日：2000-11-17
申请人： ULVAC CORP
发明人： ITO ATSUSHI , NAKAMURA SHIZUO , MAEHIRA KEN , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N29/02 , G01N33/00
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of shortening the time required for analysis in the technology of analyzing the components of liquid based on the oscillation state of a crystal oscillator in liquid. SOLUTION: A network analyzer 3 feeds an AC input signal to crystal oscillators 61-64, dipped in water while changing the frequencies so as to find the resonance frequencies of the respective crystal oscillators 61-64. Since the crystal oscillators 61-64 do not oscillate, as long as being fed the input signal having the frequency approximately same to the resonance frequency these will be no continuous oscillation. Therefore, compared with the conventional method sequentially oscillating the crystal oscillators, the time required for stabilizing the oscillation states of the crystal oscillators 61-64 in the liquid becomes shorter than those in conventional ones. This constitution can drastically shorten the time required for stabilizing the oscillation states, inputting a sample into the water, and until becomes it capable of analyzing the sample.

4. 发明专利

JP2000208088A ION IRRADIATION DEVICE 失效
公开(公告)号：JP2000208088A
公开(公告)日：2000-07-28
申请号：JP718899
申请日：1999-01-14
申请人： ULVAC CORP
发明人： AGAWA YOSHIAKI , SASAKI NORIYASU , YUYAMA JUNPEI
IPC分类号： H01J37/09 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To measure a correct secondary electron current by cleaning the surface of a sample in advance when the secondary electron current generated by secondary electrons emitted from a sample is measured. SOLUTION: A moving mechanism 75 is formed on beam forming units 61, 62 for decelerating ions 80 emitted from an ion source and forming them into an ion beam 81 by reducing the beam diameter, so that the ions 80 are prevented from being applied on the beam forming units 61, 62 before a secondary electron current is measured. Then, the ions 80 are widely applied on a surface of a sample 21 arranged in the downstream of the beam forming units 61, 62, and the surface of the sample 21 undergoes ion milling to be cleaned. Since the surface of the sample can easily be cleaned like this and thus, the surface of the sample can be cleaned in advance every time the secondary electron emission quantity of the sample 21 is measured, the secondary electron emission quantity of the sample 21 can accurately be provided.

5. 发明专利

JPH08152212A DOUBLE INLET TYPE PULSE PIPE REFRIGERATING MACHINE AND TEMPERATURE RAISING OPERATION METHOD FOR THE SAME 失效
公开(公告)号：JPH08152212A
公开(公告)日：1996-06-11
申请号：JP31748794
申请日：1994-11-28
申请人： ULVAC CORP
发明人： SEKI NOBUAKI , KANEDA TOSHINOBU , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE: To provide a temperature raising operation method of a double inlet type pulse pipe refrigerating machine as a means capable of easily regenerating a cryogenic trap and a cryopump in a short period of time and a double inlet type pulse pipe refrigerating machine suitable for the temperature raising operation. CONSTITUTION: In temperature raising operation of a double inlet type pulse pipe refrigerating machine 10, a compressor 1 is operated with an orifice 5 being totally closed and a bypass valve 8 being opened to an opening larger than an appropriate opening during cooling operation. A double inlet type pulse pipe refrigerating machine 20 suitable for temperature raising operation is constituted by adding an open/close valve 6 for a buffer container 7 and an open/close valve 9 provided parallelly with the bypass valve 8 to the conventional double inlet type pulse pipe refrigerating machine 10.

6. 发明专利

JP2006320792A SPACER COATING APPARATUS, AND SPACER COATING METHOD 审中-公开
公开(公告)号：JP2006320792A
公开(公告)日：2006-11-30
申请号：JP2005144118
申请日：2005-05-17
申请人： ULVAC CORP
发明人： UCHIDA HIROTO , HANE KOJI , KOSHINA HIROSHI , TSUJI TAKANORI , MURATA MASAAKI , TANAKA YASUZO , YAHAGI MITSURU , YUYAMA JUNPEI
IPC分类号： B05C5/00 , B05D1/26 , G02F1/1339
摘要： PROBLEM TO BE SOLVED: To provide a technique which enables the arrangement of a spacer on the desired position relating to an apparatus arranging the spacer to a treatment object. SOLUTION: In a spacer coating apparatus 1, a condition of a discharge hole is tested previously to specify an abnormal discharge hole. When a discharge of a discharge liquid to the treatment object 11 is carried out, a discharge operation of the abnormal discharge hole is stopped such that the discharge from a normal discharge hole be carried out to a discharge position for which the abnormal discharge hole is responsible. An adjacent hole to the abnormal discharge hole is unbalanced, and in the discharge position for which the abnormal discharge hole is responsible, the number of spacers is counted. To a deficient defect discharge position, the discharge liquid is discharged from the normal discharge hole, and the spacer is added. COPYRIGHT: (C)2007,JPO&INPIT

7. 发明专利

JP2002200584A CARRYING DEVICE 失效
公开(公告)号：JP2002200584A
公开(公告)日：2002-07-16
申请号：JP2001181775
申请日：2001-06-15
申请人： ULVAC CORP
发明人： MINAMI NOBUFUMI , YUYAMA JUNPEI
IPC分类号： B25J9/06 , B25J17/02 , B65G49/07 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a carrying device capable of reducing a turning radius and having a high carrying speed with a simple structure. SOLUTION: The carrying device 1 includes first and second arms 21, 22 having first and second driving shafts 11, 12 arranged concentrically on one end parts, and third and fourth arms 23, 24 which one end parts are rotatably connected to other end parts of the first and second arms 21, 22. Support shafts 33a, 34a provided on other end parts of the third and fourth arms 23, 24 are concentrically arranged. The carrying device includes a joint mechanism part 3 having an attitude controlling mechanism 4 structured so as to apply rotating power of an opposite phase to the support shafts 33a, 34a each other.

8. 发明专利

JP2001304114A RECIPROCATION TYPE VACUUM PUMP 失效
公开(公告)号：JP2001304114A
公开(公告)日：2001-10-31
申请号：JP2000120995
申请日：2000-04-21
申请人： ULVAC CORP
发明人： MURAKAMI YOSHIO , YUYAMA JUNPEI
IPC分类号： F04B37/14 , F04B45/04
摘要： PROBLEM TO BE SOLVED: To provide a dry type vacuum pump formed that a valve disc is provided for reliably opening and closing even when a differential pressure between pressures on both sides of a valve plate is below approximate hundreds Pa and further, an actuator for a rod elevating to open and close the valve disc is situated outside a flow passage for gas and prevented from resistance against exhaust gas. SOLUTION: This reciprocation type vacuum pump comprises a coil spring 36 to press a valve disc 40 against a valve seat 38 by a low given force during closing of a suction valve 20; a rod 22 to forcibly lower the valve disc 40 against energization of the coil spring 36 during opening and separate it from the valve seat 38; and an actuator 30 to loosely fit in a cylindrical guide 23 in which the upper end part of the rod 22 is inserted and displace an annular permanent magnet 24 on the atmosphere side magnetically coupled to a soft iron piece 21 at the tip end part of the rod 22 through the wall of the guide 23 together with an annular disc 25. A direct current flowing to a solenoid coil 28 is brought into an ON and Off state to elevate the rod 22.

9. 发明专利

JPH08254365A DOUBLE INLET TYPE PULSE PIPE FREEZER AND ITS OPERATING METHOD 失效
公开(公告)号：JPH08254365A
公开(公告)日：1996-10-01
申请号：JP8477995
申请日：1995-03-15
申请人： ULVAC CORP
发明人： KANEDA TOSHINOBU , SEKI NOBUAKI , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE: To provide a double inlet type pulse freezer and its operating method in which a stable freezing temperature can be attained even if the freezer is operated for a long period of time. CONSTITUTION: A temperature sensor 13 for measuring a freezing temperature is fixed to a low temperature end of a pulse pipe 4 of a conventional type double inlet type pulse pipe freezer, resulting in making a double inlet type pulse pipe freezer 10 in which a pressure changing-over valve 2 is controlled by a controller 14 to which its temperature signal is inputted and an intermittent operation can be performed. The freezing temperature is kept stable for a long period of time by keeping it within a desired temperature range and by performing the intermittent operation.

10. 发明专利

JPH06107336A MAGNETIC LEVITATION CARRYING DEVICE, AND RECOVERING METHOD FOR FALLEN CARRYING ARM IN THIS DEVICE 失效
公开(公告)号：JPH06107336A
公开(公告)日：1994-04-19
申请号：JP9478092
申请日：1992-03-21
申请人： ULVAC CORP
发明人： TAKAHASHI MASAYUKI , MINAMI NOBUFUMI , YUYAMA JUNPEI
IPC分类号： B60L13/04 , B65G54/02
摘要： PURPOSE:To facilitate the recovery of a carrying arm when it is fallen onto a cooler by mounting a pair of parallel guide rails on a place on a hollow cooling vessel corresponding to the moving line of a high temperature superconductor. CONSTITUTION:On a place on a hollow cooling vessel 22 corresponding to the moving line of a plurality of high temperature superconductors 27a, 27b moved together with a carrier 16, a pair of parallel guide rails 1a, 1b are mounted. When the temperature of the two high temperature superconductors is raised during the horizontal movement of a carrying arm 34 to weaken or lose magnetic repelling force, the carrying arm 34 is fallen onto the hollow cooling vessel 2, but no lateral slippage is caused because the carrying arm 34 is fallen between the parallel guide rails 1a, 1b. The high temperature superconductors 27a, 27b are moved together with the carrier 26, and the fallen carrying arm 34 is moved to the position of raising and lowering mechanisms 27a, 27b together with carrying permanent magnets 36a, 36b, and brought up by the raising and lowering mechanisms.

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