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1. 发明专利

JP2002277368A MEASURING INSTRUMENT, AND ANALYZER 失效
公开(公告)号：JP2002277368A
公开(公告)日：2002-09-25
申请号：JP2001078827
申请日：2001-03-19
申请人： ULVAC CORP
发明人： MAEHIRA KEN , ITO ATSUSHI , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide a tecnique for stabilizing an oscillation frequency of a quartz oscillator in a sample at a constant value. SOLUTION: This measuring instrument of the present invention has a cell 20 having a storage part 20a for storing a prescribed solution 7, the quartz oscillator 3 having a pair of electrodes 31, 32 connectable to a prescribed oscillation source, of which the one electrode 31 is constituted to be immersed into the solution 7, and a stirring member 50 for stirring the solution 7. The sample is supplied via an introduction pipe 55 and the stirring member 50, and the solution 7 is discharged to a discharge part 9 via a discharge pipe 29.

2. 发明专利

JP2002243608A CELL FOR MEASUREMENT AND ANALYSIS DEVICE 失效
公开(公告)号：JP2002243608A
公开(公告)日：2002-08-28
申请号：JP2001040207
申请日：2001-02-16
申请人： ULVAC CORP
发明人： MAEHIRA KEN , ITO ATSUSHI , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide a cell for measurement of a compact and simple constitution. SOLUTION: The cell for measurement comprises a cell body 20 with a housing part 20a for housing a prescribed sample liquid. A crystal oscillator 3 is provided integrally in the vicinity of the bottom part of the cell body 20. The crystal oscillator 3 comprises a pair of electrodes 31 and 32 connectable to a prescribed oscillation source and is constituted, in such a way as to obstruct the flow of the sample liquid with one electrode 31 among the pair of electrodes 31 and 32, arranged outside the housing part 20a of the cell body 20.

3. 发明专利

JP2002243607A MEASURING DEVICE AND METHOD 失效
公开(公告)号：JP2002243607A
公开(公告)日：2002-08-28
申请号：JP2001039610
申请日：2001-02-16
申请人： ULVAC CORP
发明人： ITO ATSUSHI , MAEHIRA KEN , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide technology capable of improving measurement accuracy, when measuring the oscillation frequencies of crystal oscillators in a liquid. SOLUTION: In this measuring method, a measuring operation for oscillating the oscillators to be measured 61-64 in the liquid and measuring their oscillation frequencies and an operation for oscillating a reference oscillator 60 with a low oscillation frequency, which oscillates in the air are alternately switched from one to the other. Therefore, even if the oscillators to be measured 61-64 oscillate in the liquid to lower the oscillation stability of an oscillating circuit 4, the oscillation of the oscillating circuit 4 returns to a stable state, when the reference oscillator 60 is oscillated. Therefore, even if a plurality of measuring operations are repeated, it is possible to perform measurements, without reduction in the oscillation stability of the oscillating circuit 4 and to improve measurement accuracy more than by conventional methods.

4. 发明专利

JP2002148295A METHOD AND INSTRUMENT FOR FREQUENCY MEASUREMENT AND ANALYTICAL EQUIPMENT 失效
公开(公告)号：JP2002148295A
公开(公告)日：2002-05-22
申请号：JP2000342850
申请日：2000-11-10
申请人： ULVAC CORP
发明人： ITO ATSUSHI , NAKAMURA SHIZUO , MAEHIRA KEN , FUWA KO , YUYAMA JUNPEI
IPC分类号： G01R23/02 , G01N5/02 , G01R29/22
摘要： PROBLEM TO BE SOLVED: To provide a technology which can shorten the time needed for measurement for an instrument and a method for frequency measurement, which measure the oscillation frequencies of crystal oscillators in a liquid. SOLUTION: Using this frequency measuring method, the crystal oscillators 61 to 64 are oscillated intermittently but are not oscillated continuously. Consequently, the crystal oscillators are oscillated with a small vibration energy, and the time needed before the oscillation frequencies of the crystal oscillators 61 to 64 become stable in liquid become shorter than that, when the crystal oscillators are continuously oscillated. Further, two or more of the crystal oscillators 61 to 64 are not made to oscillate at the same time, so two or more of the crystal oscillators will not oscillate at the same time, to interfere with each other and measurements can be take without lowering the stability of the oscillation frequencies due to interference.

5. 发明专利

JP2001041713A MINUTE REGION MEASURING DEVICE 失效
公开(公告)号：JP2001041713A
公开(公告)日：2001-02-16
申请号：JP21731699
申请日：1999-07-30
申请人： ULVAC CORP
发明人： ITO ATSUSHI
IPC分类号： G01B11/06
摘要： PROBLEM TO BE SOLVED: To provide a minute region measuring device having excellent repeatability and capable of measuring in a short time. SOLUTION: In this device, light from a light source 2 is irradiated onto a minute region on the surface of a substrate 1 on which a thin film is formed, and reflected light is received by a light receiving part 4, to measure the thickness, a refractive index or the like of the thin film. In this case, a light size of the light source 2 is adjusted to have a larger area than the minute region, and a CCD camera 4a is installed on the light receiving part 4, and reflected light quantities from each part of the region on the surface are measured respectively by each electrode of a charge coupled element of the CCD camera 4a. A spectral ellipsometer is formed by installing a monochromator 3 in front of the light source 2 or by installing an acoustooptic spectral filter in front of the CCD camera 4a, and besides, an interference thicknessmeter is formed by interposing a half mirror for transmitting incident light onto the substrate 1 and reflected light on an optical path from the light source 2 to the CCD camera 4a via the substrate 1.

6. 发明专利

JP2020118513A 層厚及び粘弾性係数の測定方法、及び層厚及び粘弾性係数の測定装置审中-公开
公开(公告)号：JP2020118513A
公开(公告)日：2020-08-06
申请号：JP2019008711
申请日：2019-01-22
申请人： ULVAC CORP
发明人： ITO ATSUSHI , AZUMA MICHIRU , ICHIHASHI MOTOKO
IPC分类号： G01N19/00 , G01N11/00 , G01R27/02
摘要：【課題】圧電素子に形成される層の厚みを初期の段階から高精度に測定する。【解決手段】層厚及び粘弾性係数の測定方法では、共振周波数を持つ圧電素子を有するセンサが溶液に浸漬される。溶液中で圧電素子に層が形成されることにより生ずる、共振周波数の基本周波数Fs1がシフトする変化量ΔFs1と、共振周波数の高次波の周波数Fsnがシフトする変化量ΔFsnと、基本周波数を頂点とするピーク波形の半値半幅Fw1がシフトする変化量ΔFw1と、高次波を頂点とするピーク波形の半値半幅Fwnがシフトする変化量ΔFwnとが取得される。変化量ΔFs1、変化量ΔFsn、変化量ΔFw1、及び変化量ΔFwnから評価関数を利用して、上記層の厚みhと、上記層の貯蔵弾性率G'と、上記層の基本周波数Fs1に基づく損失弾性率G1''と、上記層の上記高次波の周波数Fsnに基づく損失弾性率Gn''とが算出される。【選択図】図1

7. 发明专利

JPH11160057A PIEZOELECTRIC CRYSTAL OSCILLATION TYPE FILM THICKNESS GAUGE 失效
公开(公告)号：JPH11160057A
公开(公告)日：1999-06-18
申请号：JP34405597
申请日：1997-11-28
申请人： ULVAC CORP
发明人： ITO ATSUSHI , OKUNO TORU , MIYAJIMA TAKAAKI , KURAUCHI TOSHIHARU
IPC分类号： G01B17/02 , C23C14/54
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric crystal oscillation type film thickness gauge capable of reducing the exchange frequency of a piezoelectric crystal and prolonging the service life than before. SOLUTION: The natural frequency of the piezoelectric crystal 3 is made lower than 5 MHz, influence by the stress of a film deposited on a surface 3a is reduced and the fundamental vibration of the piezoelectric crystal is maintained. Also, electrode films 10a and 10b formed on the front and back surfaces 3a and 3b of the piezoelectric crystal 3 are respectively formed in an island shape, the formation areas of the electrode films 10a and 10b are prevented from being overlapped on the front surface 3a and the back surface 3b at the peripheral edge part of the piezoelectric crystal 3, parasitic vibration appearing at the peripheral edge part of the piezoelectric crystal 3 is suppressed and the fundamental vibration of the piezoelectric crystal 3 is maintained. Thus, the service life of the piezoelectric crystal 3 is prolonged substantially longer than before.

8. 发明专利

JPH0882516A FILM THICKNESS MONITORING CONTROLLER FOR VACUUM EVAPORATOR 失效
公开(公告)号：JPH0882516A
公开(公告)日：1996-03-26
申请号：JP21746494
申请日：1994-09-12
申请人： ULVAC CORP
发明人： ITO ATSUSHI , YODA HIDENORI , OKUNO TORU
IPC分类号： G01B17/02 , C23C14/54 , G01B17/00 , G01B21/08
摘要： PURPOSE: To enable feedback controlling of a vacuum evaporation source stably even at a low evaporation rate by dividing a difference between the frequency of a piezo-electric crystal and a beat frequency generated from a beat frequency oscillator in a fixed or variable manner. CONSTITUTION: A quartz oscillator 1 is arranged in a chamber of a vacuum evaporator. An output of a transmitter 2 is connected to an input of a double balance mixer 3. The mixer 3 forms an absolute value of the sum of a transmitted frequency signal F from the transmitter 2 and a frequency signal FC from a beat frequency signal oscillator 4 and the difference therebetween, namely, |F-FC| and |F+FC|. The output of the mixer 3 is connected to a frequency divider 7 through an LPF 5 and an amplifier 6 and the LPF 5 passes the signal |F-FC| alone of the difference among the outputs of the mixer 3. The frequency divider 7 is connected to a CPU 10 through a gate 8 and a counter 9 on one hand and directly to the CPU 10 on the other. This achieves a higher resolving power in frequency measurement while stabilizing a feedback control of an evaporation source.

9. 发明专利

JPH074943A FILM-FORMATION MONITORING AND CONTROL APPARATUS 失效
公开(公告)号：JPH074943A
公开(公告)日：1995-01-10
申请号：JP14176393
申请日：1993-06-14
申请人： ULVAC CORP
发明人： ITO ATSUSHI
IPC分类号： C23C14/54 , G01B17/00 , G01B17/02
摘要： PURPOSE:To control and measure a film thickness with good accuracy during a film-formation process by a method wherein the film-formation state of every film for a multilayer film is monitored by using a specific expression obtained by applying the relation between incident light and reflected light in an optical system to a one-dimensional acoustic resonator. CONSTITUTION:A resonant frequency from an oscillation circuit 4 is measured by a counter circuit 5, and the circuit 4 and the circuit 5 constitute a means to measure the fundamental resonant frequency fc of a piezoelectric crystal for a micro-balance sensor 3. The resonant frequency which has been measured by the circuit 5 is sent to a microprocessor 6. By using the resonant frequency fc, the film thickness and the vapor-depositon speed of a layer are computed on the basis of the relational expression between a film thickness and a frequency when tfi represents the film thickness of an ith film on the piezoelectric crystal, Zi represents the acoustic impedance ratio of the ith film, pfi represents the density of the ith film, pq represents the density of the piezoelectric crystal, vq represents the speed of shear waves of the piezoelectric crystal, tq represents the thickness of the piezoelectric crystal and kai represents a wave-number vector.

10. 发明专利

JP2003139505A SENSOR HEAD FOR QUARTZ OSCILLATING TYPE FILM THICKNESS MONITOR AND MONITORING METHOD FOR FILM THICKNESS USING IT 审中-公开
公开(公告)号：JP2003139505A
公开(公告)日：2003-05-14
申请号：JP2001339436
申请日：2001-11-05
申请人： ULVAC CORP
发明人： OMURA FUMIHIKO , SAITO KEN , OKUNO TORU , ITO ATSUSHI
IPC分类号： G01B7/06 , C23C14/52 , G01B17/02
摘要： PROBLEM TO BE SOLVED: To provide a sensor head for a quartz oscillating type film thickness monitor having a structure capable of carrying out easy and positive operation, and capable of accurately monitoring the film thickness of a thin film during a film forming process. SOLUTION: The sensor head 11 for the quartz oscillating type film thickness monitor is provided with a stainless steel made quartz plate holder 13 holding quartz plates 12X (121 -1212 ), a PTEF resin made electrode holder 15 holding vane type electrodes 14X (141 -1412 ) for detecting a resonance frequency of the quartz plates 12X (121 -1212 ), a vacuum pulse motor 18 arranged so that a driving shaft is journaled to a rotation center shaft 17 of a rotatable disc 16 comprising the quartz plate holder 13 and the electrode holder 15, a stainless steel made water cooled jacket 19 covering the quartz plate holder 13, the electrode holder 15 and the vacuum pulse motor 18, and a stainless steel made mask 20 with a window 21 covering the quartz plate holder 13 from a film forming direction. It is composed so that the quartz plates 12X (121 -1212 ) can be changed by rotating the quartz plate holder 13 by the vacuum pulse motor 18.

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