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    • 5. 发明专利
    • ACTUATOR WITH SENSOR FUNCTION
    • JPH10257785A
    • 1998-09-25
    • JP5656697
    • 1997-03-11
    • UBE INDUSTRIES
    • FUKUDA TAKETOKIMURA TAKAYUKIHASHIMOTO KAZUO
    • G01L1/16H01L41/08H02N2/00
    • PROBLEM TO BE SOLVED: To detect the strain of a structure by forming a piezoelectric crystal membrane on a titan metal surface provided on a substrate by means of a hydrothermal synthesis means, and giving the electrodes for voltage driving and strain detection to the piezoelectric crystal membrane. SOLUTION: A Ti substrate 1 is fixed in a mixed solution of Pb(NO3 )2 aqueous solution 200mmol/l, ZrOCl2 aqueous solution 100mmol/l, TiCl4 aqueous solution 2.0mmol/l and KOH aqueous solution 2.1mmol/l and is subjected to surface treatment with hydrothermal surface treatment for 12 hours at 180 deg.C. To grow crystal obtained Pb(ZrxTi1- X)O3 further, the Ti substrate 1 is subjected to hydrothermal treatment in a mixed solution of Pb(NO3 )2 aqueous solution 94mmol/l, ZrOCl2 aqueous solution 38mmol/l TiCl4 aqueous solution 37mmol/l and KOH aqueous solution 3.8mmol/l for 48 hours at 130 deg.C to generate a piezoelectric crystal membrane 2 of Pb(ZrxTi1- X)O3 (x=0.52). Ultrasonic cleaning is conducted in pure water for 3 minutes twice, and ultrasonic cleaning is conducted in 1mmol/l acetic acid aqueous solution for one minute twice. 12-hour drying is conducted at 100 deg.C, and a sensor electrode 3 and an actuator electrode 4 are separated from each other for vacuum evaporation.