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JP2009256768A Method for producing strontium titanate thin film 审中-公开
标题翻译：生产钛酸锶薄膜的方法
公开(公告)号：JP2009256768A
公开(公告)日：2009-11-05
申请号：JP2008222109
申请日：2008-08-29
申请人： Tohoku Univ , Toyota Motor Corp , トヨタ自動車株式会社 , 国立大学法人東北大学
发明人： KAWASAKI MASASHI , OTOMO AKIRA , OKUDE MASAKI , KITA TAKUSHI
IPC分类号： C23C14/08 , C01G23/00
摘要： PROBLEM TO BE SOLVED: To provide a method for obtaining a layered strontium titanate thin film comprising an RP phase having high crystallinity.
SOLUTION: The method comprises: a step where a target arranged at the inside of a chamber is irradiated with laser light so as to be a pulse shape at a prescribed first temperature, and an SrO layer is formed on a substrate arranged at a position confronted with the target; and a step where the target arranged at the inside of the chamber is irradiated with laser light so as to be a pulse shape at a prescribed second temperature, and an SrTiO
3 layer is formed on the SrO layer formed on the substrate arranged at the position confronted with the target. The first temperature is lower than the upper limit temperature at which crystals can be grown only by the SrO layer, the second temperature is higher than the lower limit temperature required for the crystallization of the SrTiO
3 layer, and the first temperature is lower than the second temperature.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种获得包含具有高结晶度的RP相的层状钛酸锶薄膜薄膜的方法。解决方案：该方法包括：一个步骤，其中布置在腔室内部的靶用激光照射成规定的第一温度的脉冲形状，并且将SrO层形成在布置在面对目标的位置; 并且在形成有SrO层的情况下，在配置在室内的目标物的激光照射为规定的第二温度的脉冲形状的步骤，形成SrTiO 3 S层，在布置在与目标相对的位置上的基板上。第一温度低于仅通过SrO层生长晶体的上限温度，第二温度高于SrTiO 3 S 3层的结晶所需的下限温度，第一温度低于第二温度。版权所有（C）2010，JPO＆INPIT

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