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    • 10. 发明专利
    • Multilayer substrate
    • 多层基板
    • JP2010103311A
    • 2010-05-06
    • JP2008273419
    • 2008-10-23
    • Toyota Central R&D Labs IncToyota Motor Corpトヨタ自動車株式会社株式会社豊田中央研究所
    • YAGI YUJIWADA KENSUKEYAMADA YASUSHIATSUMI TAKASHINAKAGAWA IKURO
    • H01L23/36
    • H01L2924/0002H01L2924/00
    • PROBLEM TO BE SOLVED: To provide technique such that a multilayer substrate having aluminum nitride and copper laminated has no crack in an insulating layer no matter how many times thermal loads of heating and cooling are placed repeatedly. SOLUTION: The multilayer substrate 2 has the insulating layer 6 of aluminum nitride and a conductive layer 4 of copper formed on the insulating layer 6. The conductive layer 4 has a thick portion 4a and a thin portion 4b. Part of the thick portion 4a forms a bonding region for bonding a semiconductor device. The thin portion 4b is provided outside the bonding region and formed thinner than the bonding region. The thin portion 4b is formed to a thickness of ≤0.05 mm within a range of at least 1.2 mm from an outer periphery of the conductive layer 4. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种技术,使得具有氮化铝和铜层压的多层基板在绝缘层中没有裂纹,而不管多少次加热和冷却的热负载重复放置。 解决方案:多层基板2具有氮化铝的绝缘层6和形成在绝缘层6上的铜的导电层4.导电层4具有厚的部分4a和薄的部分4b。 厚部分4a的一部分形成用于接合半导体器件的接合区域。 薄部4b设置在接合区域的外侧,并且形成为比接合区域薄。 在距离导电层4的外周至少1.2mm的范围内,薄部4b形成为≤0.05mm的厚度。(C)2010,JPO&INPIT