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    • 2. 发明专利
    • Etchant, and method of manufacturing semiconductor element
    • 蚀刻和制造半导体元件的方法
    • JP2009272544A
    • 2009-11-19
    • JP2008123539
    • 2008-05-09
    • Institute Of National Colleges Of Technology JapanToyota Central R&D Labs Inc株式会社豊田中央研究所独立行政法人国立高等専門学校機構
    • ITO TADASHIFUKANO TATSUOMOTOHIRO TOMOMIKATAGIRI HIRONORI
    • H01L21/306H01L31/04
    • Y02E10/541
    • PROBLEM TO BE SOLVED: To provide: an etchant which is usable to etch a semiconductor element which has an oxide layer and a sulfide layer of base metals on an upper-surface side and a metal layer containing high-fusion-point metal on a substrate side, and etches layers together without losing the metal layer; and a method of manufacturing the semiconductor element using the etchant. SOLUTION: The etchant is usable to etch the semiconductor element which has the oxide layer and sulfide layer of base metals on the upper-surface side and the metal layer containing the high-fusion-point metal on the substrate side, and contains second acid having higher oxidation power than phosphorus acid and a peel inhibitor for inhibiting an organic coating from peeling, the rest being a diluent. The method of manufacturing the semiconductor element includes an etching process of etching the semiconductor element which has the oxide layer and sulfide layer of base metals on the upper-surface side and the metal layer containing the high-fusion-point metal on the substrate side by using such the etchant. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供:可用于蚀刻在上表面侧具有氧化物层和贱金属的硫化物层的半导体元件和含有高熔点金属的金属层的蚀刻剂 在基板一侧上蚀刻层而不损失金属层; 以及使用蚀刻剂制造半导体元件的方法。 解决方案:蚀刻剂可用于蚀刻具有上表面侧的氧化物层和贱金属的硫化物层和在基板侧上含有高熔点金属的金属层的半导体元件,并且包含 具有比磷酸更高的氧化力的第二种酸和用于抑制有机涂层剥离的剥离抑制剂,其余为稀释剂。 半导体元件的制造方法包括:蚀刻具有上表面侧的氧化物层和贱金属的硫化物层的半导体元件和在基板侧含有高熔点金属的金属层的蚀刻工序, 使用这种蚀刻剂。 版权所有(C)2010,JPO&INPIT
    • 3. 发明专利
    • Photovoltaic device
    • 光电器件
    • JP2009059915A
    • 2009-03-19
    • JP2007226277
    • 2007-08-31
    • Toyota Central R&D Labs IncToyota Motor Corpトヨタ自動車株式会社株式会社豊田中央研究所
    • TAKEDA YASUHIKOITO TADASHIMOTOHIRO TOMOMINAGASHIMA TOMOMICHI
    • H01L31/04
    • H01L31/035272H01L31/0352H01L31/06
    • PROBLEM TO BE SOLVED: To provide a hot-carrier photovoltaic device adapted to effectively increase conversion efficiency even if residence time of carriers in a light-absorbing layer is short. SOLUTION: The photovoltaic device includes: a light-absorbing layer 2 for absorbing light and generate electrons and positive holes; an electron transfer layer 3 adjoining one side of the light-absorbing layer 2; a hole transfer layer 4 adjoining the other side of the light-absorbing layer 2; a negative electrode 5 provided on the electron transfer layer 3; and a positive electrode 6 provided on the hole transfer layer 4. The electron transfer layer 3 has a conduction band 3a which has an energy band width narrower than that of the conduction band 2c of the light-absorbing layer 2 and passes electrons at a given energy level E e selectively. The hole transfer layer 4 has a valence electron band 4a which has an energy band width narrower than that of the valence electron band 2d of the light-absorbing layer 2 and passes positive holes at a given energy level E h selectively. The light-absorbing layer 2 contains p-type impurities or n-type impurities. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种即使在载体在光吸收层中的停留时间短的情况下也适用于有效地提高转换效率的热载体光电装置。 解决方案:光伏器件包括:用于吸收光并产生电子和正空穴的光吸收层2; 邻接光吸收层2的一侧的电子转移层3; 邻接光吸收层2的另一侧的空穴转移层4; 设置在电子转移层3上的负极5; 以及设置在空穴转移层4上的正电极6.电子转移层3具有导带3a,该导带具有比光吸收层2的导带2c的能带宽窄的能带宽,并且在给定的 能级E e 。 空穴转移层4具有价电子带4a,其能带宽比光吸收层2的价电子带2d的能带宽窄,并以给定能级E h 有选择地。 光吸收层2含有p型杂质或n型杂质。 版权所有(C)2009,JPO&INPIT
    • 5. 发明专利
    • Quantum dot array and manufacturing method thereof
    • 量子阵列及其制造方法
    • JP2008130898A
    • 2008-06-05
    • JP2006315562
    • 2006-11-22
    • Toyota Central R&D Labs IncToyota Motor Corpトヨタ自動車株式会社株式会社豊田中央研究所
    • NAGASHIMA TOMOMICHITAKEDA YASUHIKOITO TADASHIMOTOHIRO TOMOMI
    • H01L29/06C23C14/24H01L21/203
    • PROBLEM TO BE SOLVED: To obtain a quantum dot array in which quantum dots in a relatively small size are uniformly distributed without being short-circuited with each other. SOLUTION: A manufacturing method of a quantum dot array includes the steps of: providing a plurality of pole-shaped parts (4) each including a quantum dot (6) vertically held between barrier layers (8a, 8) on a substrate (2), forming a base part for forming the plurality of pole-shaped parts (4) on the substrate (2) by vapor-depositing a first material obliquely while rotating the substrate (2) in order to form a quantum dot array (100); and then vapor-depositing the materials of the barrier layers and the materials of the quantum dots sequentially obliquely while stopping rotating the substrate, thereby forming the quantum dots vertically held between the barrier layers on the base part. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:为了获得量子点阵列,其中相对小尺寸的量子点彼此均匀地分布而不相互短路。 解决方案:量子点阵列的制造方法包括以下步骤:提供多个极性部分(4),每个极性部分包括垂直保持在衬底上的阻挡层(8a,8)之间的量子点(6) (2),通过在旋转基板(2)的同时使第一材料倾斜地气相沉积,形成用于在基板(2)上形成多个极形部分(4)的基部,以形成量子点阵列 100); 然后在停止旋转衬底的同时顺序地倾斜地气相沉积阻挡层的材料和量子点的材料,从而形成垂直保持在基底上的阻挡层之间的量子点。 版权所有(C)2008,JPO&INPIT
    • 6. 发明专利
    • Resonant tunnel diode
    • 谐振隧道二极管
    • JP2010171408A
    • 2010-08-05
    • JP2009290896
    • 2009-12-22
    • Toyota Central R&D Labs Inc株式会社豊田中央研究所
    • IKUNO TAKASHIITO TADASHITAKEDA YASUHIKO
    • H01L29/88
    • PROBLEM TO BE SOLVED: To provide a new resonant tunnel diode having conventionally unknown characteristics. SOLUTION: This resonant tunnel diode includes: a silicon material structure in which a first SiO 2 layer having a thickness of 2-6 nm, an intermediate layer having a thickness of 1-10 nm and having Si micro-crystals with a crystal orientation aligned to a predetermined orientation and embedded like a dot into the SiO 2 thin film and a second SiO 2 layer having a thickness of 2-6 nm are laminated on a degenerating semiconductor substrate in this order; and a pair of electrodes pasted on both sides of the silicon material structure. According to this resonant tunnel diode, peculiar characteristics configured such that negative resistance is observed even at a normal temperature, that means the function as a resonant tunnel diode even at a normal temperature can be obtained. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供具有传统上未知特性的新型谐振隧道二极管。 解决方案:该谐振隧道二极管包括:硅材料结构,其中具有2-6nm厚度的第一SiO 2 SB层,中间层的厚度为1-10nm;以及 具有晶体取向与预定取向成对并且像点一样嵌入到SiO 2 薄膜中的Si微晶体和厚度为2μm的第二SiO 2 层 -6nm层叠在退化半导体衬底上; 以及粘贴在硅材料结构两侧的一对电极。 根据该谐振隧道二极管,即使在正常温度下也观察到负电阻即可构成即使在常温下也作为谐振隧道二极管的功能的特殊特性。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Method for manufacturing mim tunnel diode
    • 制造MIM隧道二极管的方法
    • JP2012151346A
    • 2012-08-09
    • JP2011009850
    • 2011-01-20
    • Toyoda Gosei Co LtdToyota Central R&D Labs Inc株式会社豊田中央研究所豊田合成株式会社
    • ITO TADASHIYAMADA NOBORUUENO YUKIHISA
    • H01L29/88H01L21/329
    • PROBLEM TO BE SOLVED: To provide a manufacturing method of an MIM tunnel diode in which an extremely thin and uniform insulation layer can be formed on a first metal layer easily by plasma oxidation.SOLUTION: A method for manufacturing an MIM tunnel diode in which a first metal layer 14 composed of nickel, an insulation layer 16 composed of nickel oxide having a thickness of 1 to 10 nm, and a second metal layer 18 are laminated in this order on an insulating substrate 12 includes an insulation layer forming step for forming an insulation layer by oxidizing the first metal layer by plasma oxidation method. When the first metal layer is oxidized by plasma oxidation method in the insulation layer forming step, a parallel-plate plasma generating device is used, and the oxygen pressure p(Pa), the self-bias voltage V(V) and the processing time t(min) of the parallel-plate plasma generating device are set to satisfy the following conditions; 6.8≤p≤12.0, 290≤V≤400, 3≤t≤6.
    • 要解决的问题:提供一种MIM隧道二极管的制造方法,其中可以通过等离子体氧化容易地在第一金属层上形成极薄且均匀的绝缘层。 解决方案:一种制造MIM隧道二极管的方法,其中将由镍组成的第一金属层14,由氧化镍构成的绝缘层16和第二金属层18层压在 绝缘基板12上的顺序包括通过用等离子体氧化法氧化第一金属层来形成绝缘层的绝缘层形成步骤。 当在绝缘层形成工序中第一金属层被等离子体氧化法氧化时,使用平行平板等离子体生成装置,氧压p(Pa),自偏压V DC ≤400,3≤t≤6。 版权所有(C)2012,JPO&INPIT
    • 9. 发明专利
    • Photoelectric conversion element
    • 光电转换元件
    • JP2011091339A
    • 2011-05-06
    • JP2009245782
    • 2009-10-26
    • Toyota Central R&D Labs Inc株式会社豊田中央研究所
    • TAKEDA YASUHIKOIKUNO TAKASHIITO TADASHISUZUKI RYO
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a photoelectric conversion element having a large effect for suppressing dissipation of the energy of an excited carrier to a phonon and also having sufficiently large carrier mobility. SOLUTION: The photoelectric conversion element includes the following constitution: (a) the photoelectric conversion element includes a light absorption layer having a quantum dot array structure, a first energy selective contact and an electron extraction electrode which are formed on an electron extraction end side of the light absorption layer, and a hole extraction electrode formed on a hole extraction end side of the light absorption layer; (b) an effective mass m e of a quantum dot material is equal to or less than 0.1; (c) an effective mass ratio m e /m h of an electron to a hole of the quantum dot material is equal to or less than 0.3; (d) ε g (bulk)+ε e1 +ε h1 of the quantum dot material is in the range of 0.5≤ε g (bulk)+ε e1 +ε h1 ≤1.5 eV; (e) a barrier potential V e of an electron is in the range of 1.0+ε e1 ≤V e ≤5.0 eV; (f) a barrier potential V h of a hole is in the range of -0.1≤V h ≤0.5 eV; and (g) the thickness d of a barrier layer is in the range of 1≤d≤5 nm. COPYRIGHT: (C)2011,JPO&INPIT
    • 解决的问题:提供一种光电转换元件,其具有大的效果,用于抑制激发的载流子对声子的能量的耗散,并且还具有足够大的载流子迁移率。 光电转换元件包括以下结构:(a)光电转换元件包括在电子提取物上形成的具有量子点阵列结构的光吸收层,第一能量选择接触和电子提取电极 以及形成在光吸收层的空穴提取端侧的空穴引出电极, (b)量子点材料的有效质量 e 等于或小于0.1; (c)量子点材料的空穴的电子的有效质量比m / h 等于或小于0.3; 量子点材料的(d)量子点材料的ε(SB)+ε h1 在0.5≤ε e1 h1 ≤1.5eV; (e)电子的势垒电位V e 在1.0 +ε≤1.0的范围内,≤5.0eV; (f)孔的势垒电位V h 在-0.1≤V≤HS≤0.5eV的范围内; 和(g)阻挡层的厚度d在1≤d≤5nm的范围内。 版权所有(C)2011,JPO&INPIT
    • 10. 发明专利
    • Photoelectric element and sulfide system compound semiconductor
    • 光电元件和硫化物系统化合物半导体
    • JP2009026891A
    • 2009-02-05
    • JP2007187379
    • 2007-07-18
    • Institute Of National Colleges Of Technology JapanToyota Central R&D Labs Inc株式会社豊田中央研究所独立行政法人国立高等専門学校機構
    • FUKANO TATSUOITO TADASHIMOTOHIRO TOMOMIKATAGIRI HIRONORI
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a sulfide system compound semiconductor, having less fluctuations for conversion efficiency, and to provide a photoelectric element that uses the same compound semiconductor as a light-absorbing layer. SOLUTION: The photoelectric element includes a sulfide system compound semiconductor that contains Cu, Zn, Sn, and S and that does not contain a substance having Na and O and that uses this sulfide system compound semiconductor as a light-absorbing layer. In the photoelectric element that has the light-absorbing layer formed of the sulfide system compound semiconductor containing Cu, Zn, Sn, and S, members other than the light-absorbing layer forming the photoelectric element is formed of a material that does not contain Na. In the photoelectric element that is constituted of the light-absorbing layer formed of the sulfide system compound semiconductor that contains Cu, Zn, Sn, and S, at least one member, other than the light-absorbing layer forming the photoelectric element is formed of the material that contains Na and a diffusion-blocking layer for blocking the diffusion of Na to the light-absorbing layer from the material that contains Na is additionally provided. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种具有较小的转换效率波动的硫化物系化合物半导体,并提供使用与光吸收层相同的化合物半导体的光电元件。 光电元件包括​​含有Cu,Zn,Sn和S的硫化物系化合物半导体,其不含有Na和O的物质,并且使用该硫化物系化合物半导体作为光吸收层。 在具有由含有Cu,Zn,Sn和S的硫化物系化合物半导体形成的光吸收层的光电元件中,形成光电元件的光吸收层以外的部件由不含Na的材料形成 。 在由包含Cu,Zn,Sn和S的硫化物系化合物半导体形成的光吸收层构成的光电元件中,除形成光电元件的光吸收层以外的至少一个构件由 另外提供含有Na和用于阻挡Na向含有Na的材料向Na吸光层扩散的扩散阻挡层的材料。 版权所有(C)2009,JPO&INPIT