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1. 发明专利

JPS61123146A Lead frame stopper apparatus 失效
标题翻译：引线框架装置
公开(公告)号：JPS61123146A
公开(公告)日：1986-06-11
申请号：JP24478984
申请日：1984-11-20
申请人： Toshiba Mach Co Ltd
发明人： SUGIYAMA HISATAKA , TSUKAHARA YUTAKA , KUWAKO HIROMU
IPC分类号： H01L21/50
CPC分类号： H01L21/50
摘要： PURPOSE:To use in common both long and short frames with the same apparatus by inserting a stopper into the gap of abutting portions of short frames while they are stopped for positioning and executing the positioning in both sides of stopper. CONSTITUTION:A short fame 21 is placed on a round belt 22 and is transferred in the direction of arrow mark. In this case, a rod 15 of cylinder 14 is located at the lower limit, a stopper 20 attached to the arm 17 is moved lower side the frame 21, the frame 21 is transferred, and it is stopped with a stopper pin 23. The rod 15 is then moved upward, lifting the arm 17 and causing the stopper 20 to extrude from the upper surface of frame 21. Next, the frame 21a is transferred in the direction of arrow mark and the stopper 20 is held between the frames 21 and 21a. After the stop for positioning, the frames 21, 21a are carried by the transfer apparatus in the next process. In case a long frame is used, it is used under the condition that the stopper 20 is not operated.
摘要翻译：目的：通过在相同装置的同时使用相同装置的通常情况下，通过在短框架的邻接部分的间隙中插入止动件来停止定位并执行止动器两侧的定位。构成：将一个简短的名气21放置在圆形皮带22上，并沿箭头方向转移。在这种情况下，气缸14的杆15位于下限位置，附接到臂17的止动件20在框架21的下侧移动，框架21被转移，并且通过止动销23停止。杆15然后向上移动，抬起臂17并使止动器20从框架21的上表面挤出。接下来，框架21a沿箭头标记的方向被转移，并且止动件20保持在框架21和 21a。在定位停止之后，帧21,21a由下一个处理中的传送装置承载。在使用长框架的情况下，在止动件20不被操作的条件下使用。

2. 发明专利

JPS6183011A Tablet resin preheating and supplying device in transfer mold 失效
标题翻译：转印模具中的片材树脂预加工和提供装置
公开(公告)号：JPS6183011A
公开(公告)日：1986-04-26
申请号：JP4633884
申请日：1984-03-09
申请人： Toshiba Mach Co Ltd
发明人： KUWAKO HIROMU , TAKAHASHI TAKAO , TSUKAHARA YUTAKA , SUGIYAMA HISATAKA
IPC分类号： B29C45/02 , B29C45/46 , B29C45/53 , B29C45/72
CPC分类号： B29C45/462
摘要： PURPOSE:To prevent generation of curing reaction due to local heating by a method wherein the tablet resin of an amount, necessary for one molding cycle or more, is heated sequentially to supply the tablet resin into a mold in each cycle after preheating uniformly. CONSTITUTION:One piece of tablet resin is thrown into a preheating device by a feeder through receiving ports 11 in respective rows one by one at predetermined times. The tablet resin, thrown into the device, is guided by guides 21 and is piled sequentially. The tablet are heated by the convection of heating air so that the tablet in lower side is heated to the highest temperature and the same in the upper side is heated to a lower temperature. The tablet at the lowermost stage is transferred to the mold by the effect of a cylinder 26 in every pouring cycle of supplying the tablet resin by a pushing the second tablet resin from the lowest stage from the lateral direction thereof while the temperature thereof is controlled using a temperature adjusting meter so as to obtain a constant temperature.
摘要翻译：目的：为了防止由局部加热引起的固化反应的产生，其中一次成型循环或更多次所需的量的片剂树脂被顺序加热，以便在均匀预热后的每个循环中将片剂树脂供应到模具中。构成：将一片片剂树脂通过进料器通过预定时间逐个接收各行中的端口11而投入预热装置。投入到装置中的片剂树脂由引导件21引导并依次堆叠。片剂通过加热空气的对流而被加热，使得下侧的片剂被加热到最高温度，并且上侧的片剂被加热到较低的温度。在最下层的片剂通过圆筒26在每一个供给片剂树脂的浇注循环中被转移到模具中，该浇注循环通过从其横向方向从最下层推动第二片剂树脂，同时使用温度调节仪，以获得恒温。

3. 发明专利

JPS58225274A Vertical type dynamic bellows 失效
标题翻译：垂直型动态贝壳
公开(公告)号：JPS58225274A
公开(公告)日：1983-12-27
申请号：JP10633282
申请日：1982-06-21
申请人： Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： F16J15/52
CPC分类号： F16J15/52
摘要： PURPOSE:To equalize the elongations of the upper and lower parts of the bellows substantially by a method wherein the upper flange of the uppermost bellows and an intermediate flange connecting a plurality of bellows are engaged with an upper plate through a wire and a pulley. CONSTITUTION:When a screw shaft 11 is rotated, the upper flange 8 of the upper bellows 3 moves upwardly or downwardly. The intermediate flanges 1, 2, connecting the upper and lower bellows 3, 4, are engaged with the upper plate 6 through the pulley 10 and the wire 9, therefore, the flanges 1, 2 move by the half of the moving amount of the upper flange 8. The ratio of the deflecting amounts of the upper bellows 3 and the lower bellows 4, which are predetermined initially, is kept constant at all times and, therefore, the elongations of the upper and lower bellows 3, 4 may be equalized substantially.
摘要翻译：目的：为了均衡波纹管的上部和下部的伸长率，基本上通过一种方法，其中最上面的波纹管的上凸缘和连接多个波纹管的中间凸缘通过导线和滑轮与上板接合。构成：当螺杆轴11旋转时，上波纹管3的上凸缘8向上或向下移动。连接上下波纹管3,4的中间凸缘1,2通过皮带轮10和导线9与上板6接合，因此凸缘1,2移动移动量的一半上凸缘8.上波纹管3和初始预定的下波纹管4的偏转量的比率始终保持恒定，因此上波纹管3,4和下波纹管4的伸长率可以相等实质上

4. 发明专利

JPS59195597A Lifting apparatus of single crystal semiconductor 失效
标题翻译：单晶半导体提升装置
公开(公告)号：JPS59195597A
公开(公告)日：1984-11-06
申请号：JP6598683
申请日：1983-04-14
申请人： Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： C30B15/30
CPC分类号： C30B15/30
摘要： PURPOSE:To reduce considerably the length of expansion of a chamber without increasing the length of a shaft and the height of the apparatus excessively by combining the rotation and lift of the shaft against a lifting member and the lift of the lifting member itself, in a shaft-system lifting machine which is provided with an expandable chamber for taking out a crystal. CONSTITUTION:A shaft 5b is interconnected with a lifting machine 12, which is guided with a guide shaft 6b, so that the shaft may be able to rotated and lift, through a seal 13, fixed to a rotating part 14, and supported by a guide shaft 16, which is moved up and down by means of a lifting part 15, through an arm 17. First, a seed crystal 8 is fixed to the lower end of the shaft 5b, and the crystal 8 is brought into contact with a molten liquid 9 of a semiconductor by lowering the member 12 and lowering simultaneously the shaft 5b against the member 12. Thus a single crystal is grown while revolving by means of the driving part 14. As the crystal is grown, the member 12 is raised slowly to lift the shaft 5b. When a single crystal 10 having a specified length is formed, the revolution of the shaft 5b and the lifting of the member 12 is stopped, and the shaft 5b is raised against the member 12 by lifting a shaft 16 through the driving part 15. When the crystal 10 is raised into a crystal discharging chamber 4b across an interrupting valve 3, the ascension of the shaft 5b is stopped and the valve 3 is closed.
摘要翻译：目的：通过将轴的旋转和提升结合提升构件和升降构件本身的升程组合，可以大幅度减小腔室的膨胀长度，同时不会增加轴的长度和设备的高度，轴系提升机，其具有用于取出晶体的可扩展室。构成：轴5b与起重机12相互连接，起重机12由导向轴6b引导，使得轴能够通过密封件13旋转和提升，该密封件固定到旋转部分14上，并由引导轴16通过臂17借助于提升部分15而上下移动。首先，将晶种8固定到轴5b的下端，并且使晶体8与一个通过降低构件12并同时将轴5b降低到构件12上来使半导体的熔融液体9同时降低。因此，通过驱动部分14旋转，生长单晶。随着晶体生长，构件12缓慢升高以提升轴5b。当形成具有特定长度的单晶10时，轴5b的旋转和构件12的提升停止，并且通过将驱动部15提升轴16将轴5b升高抵靠构件12。晶体10通过断流阀3升高到晶体排放室4b中，轴5b的升高停止，阀3关闭。

5. 发明专利

JPS59156992A Recharging device for semiconductor-crystal pulling-up machine 失效
标题翻译：用于半导体水晶拉丝机的充电装置
公开(公告)号：JPS59156992A
公开(公告)日：1984-09-06
申请号：JP2739683
申请日：1983-02-21
申请人： Toshiba Ceramics Co Ltd , Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , KAWANABE ASAJI , HASEBE HITOSHI , MATSUDA MASATO
IPC分类号： C30B15/02 , H01L21/208
CPC分类号： C30B15/02
摘要： PURPOSE:To prevent contamination of impurities by scratches and generation of a bridge and to carry out surely the supply of starting materials by forming the inner surface of a cylindrical body through which semiconductor starting materials are charged to a crucible by opening the bottom plate, with a specified ceramic sintered body. CONSTITUTION:When a stopper 27 of a recharging device is abutted to a stopper receiver 33, and a suspender 23 is further lowered, the lowering of an outer cylinder 4 and a cylindrical body 1 is hindered by the stopper receiver 33. Since only a wire 19 is lowered, a bottom plate 17 is pressed and opened by the own-weight of lump semiconductor starting materials 28 contained thereon, and said materials 28 are charged into a crucible. At this time, when comparatively large amount of said materials 28 are contained in piles in the cylindrical body 1, a bridge A is apt to generate. Since the inner surface of the cylindrical body 1 in this recharging device is formed by a material such as a ceramic sintered body consisting mainly of Si3N4 or Si3N4 to which Y2O3, CeO3 or the like is added as a sintering assistant or a complex ceramic sintered body such as Si3N4 and Al2O3, the hardness at high temp. is high enough and the starting materials 28 fall surely without generation of the bridge A.
摘要翻译：目的：为了防止杂质受到划伤和产生桥梁的污染，并通过将半导体起始材料通过打开底板而将半导体起始材料装入坩埚的圆筒形体的内表面，确定地提供起始材料，规定的陶瓷烧结体。构成：当再充电装置的止动件27抵靠止动器接收器33并且悬挂器23进一步下降时，外筒4和圆筒体1的下降被止动器接收器33阻碍。由于只有线如图19所示，底板17被包含在其上的自身重量的半导体原料28按压并打开，并且将所述材料28装入坩埚中。此时，当在筒体1中堆积较多的所述材料28时，容易产生桥A. 由于该再充电装置中的圆筒体1的内表面由主要由添加有Y 2 O 3，CeO 3等的Si 3 N 4或Si 3 N 4构成的陶瓷烧结体，作为烧结助剂或复合陶瓷烧结体如Si3N4和Al2O3，高温下的硬度。足够高，起始材料28肯定下降而不产生桥A.

6. 发明专利

JPS61136237A Frame set confirming device 失效
标题翻译：框架确认装置
公开(公告)号：JPS61136237A
公开(公告)日：1986-06-24
申请号：JP25854184
申请日：1984-12-07
申请人： Toshiba Mach Co Ltd
发明人： SUGIYAMA HISATAKA , TSUKAHARA YUTAKA , KUWAKO HIROMU
IPC分类号： H01L21/50 , H01L21/56
CPC分类号： H01L21/56 , H01L2924/0002 , H01L2924/00
摘要： PURPOSE:To detect any set miss accurately without fail while correcting the same by a method wherein a frame surface is depressed by a depressing pin energized by a compression spring while a dog for frame set confirming sensor is provided on the upper end of depressing pin. CONSTITUTION:When alignment pins 14 protruded from a metallic mold 11 are not engaged with alignment pin holes made in a frame 12 making the frame 12 making the frame 12 completely mount on the alignment pins 14, a depressing pin 17 is lifted upward against a compression spring making an end of dog 20 shield an optical axis of sensor 21 to detect a set miss. On the other hand when the alignment pins 14 engage with the alignment pin holes, the depressing pin 17 may depress the frame 12 to set it to flat (correct) position.
摘要翻译：目的：通过在压脚弹簧的上端设有用于框架确认传感器的狗被压缩弹簧激励的框架表面被按压的方法来校正相同的方法来准确地检测任何设定的未命中。构成：当从金属模具11突出的对准销钉14不与框架12中制成的对准销孔接合时，使得框架12使框架12完全安装在对准销14上，使压紧销17向上提升而不受压缩弹簧使狗的一端20遮挡传感器21的光轴，以检测设定的错位。另一方面，当对准销14与对准销孔接合时，按压销17可以按压框架12以使其平坦（正确）。

7. 发明专利

JPS59217693A Apparatus for pulling semiconductor single crystal 失效
标题翻译：用于拉伸半导体单晶的装置
公开(公告)号：JPS59217693A
公开(公告)日：1984-12-07
申请号：JP9138483
申请日：1983-05-24
申请人： Toshiba Ceramics Co Ltd , Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , HASEBE HITOSHI , MATSUDA MASATO
IPC分类号： C30B15/00 , C30B15/10 , H01L21/208 , H01L21/02
CPC分类号： C30B15/10
摘要： PURPOSE:To suppress the fluctuation of the atmosphere in the furnace chamber caused by the operation of a valve, in an apparatus for pulling a semiconductor crystal grown under reduced pressure, by attaching a pair of switchable inlets of inert gas at the top of the pulling chamber and under the shut-off valve, respectively. CONSTITUTION:The inert gas inlet 11 is attached to the top of the pulling chamber 5, and the other inlet 12 is attached to the connecting path 3 under the shut-off valve 4. Either the inlet 11 or 12 is selected with the selector valve 13. The inside of the pulling apparatus is maintained to a reduced pressure by evacuating through the exhaust port 16 attached to the bottom of the furnace chamber 1. Maintaining the evacuated state, (i) the shut-off valve 4 is opened (as shown by dotted line), the inlet 12 is closed, the inlet 11 is opened, and the single crystal 9 is grown from the molten liquid 18 in the crucible 2 by conventional process; and when a required amount of the single crystal 9 is formed, (2) the crystal is pulled up completely in the pulling chamber 5, the valve 4 and the inlet 11 are closed, the inlet 12 is opened, the door 10 is opened, and the single crystal is taken out of the pulling chamber 5.
摘要翻译：目的：为了抑制由于阀的操作引起的炉室中的气氛的波动，在用于拉动在减压下生长的半导体晶体的装置中，通过在拉动的顶部附接一对可转换的惰性气体入口分别在关闭阀和关闭阀之下。构成：惰性气体入口11附接到拉动室5的顶部，另一个入口12连接到截止阀4下方的连接路径3上。入口11或12是用选择阀选择的通过排出附着在炉室1底部的排气口16将牵引装置的内部保持在减压状态。维持抽空状态，（i）截止阀4打开（如图所示）通过虚线），入口12关闭，入口11打开，单晶9通过常规方法从坩埚2中的熔融液体18生长; 并且当形成所需量的单晶9时，（2）在拉动室5中完全拉出晶体，关闭阀4和入口11，打开入口12，打开门10，并且将单晶从拉出室5中取出。

8. 发明专利

JPS59195596A Filter for lifting machine of silicon single crystal 失效
标题翻译：硅单晶提升机过滤器
公开(公告)号：JPS59195596A
公开(公告)日：1984-11-06
申请号：JP6804983
申请日：1983-04-18
申请人： Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： C30B15/00 , C30B29/06
CPC分类号： C30B15/00
摘要： PURPOSE:To collect silicon oxide without clogging by sucking a gas, generated in a lifting machine, through a hermetic vessel wherein a partition plate having a clearance over the oil which is stored in the lower part is provided, in the reduced-pressure type Si single crystal lifting machine. CONSTITUTION:An introducing pipe 12 which is connected with an Si single crystal lifting machine, and a discharge pipe 13 which is connected with a vacuum pump, are provided at both ends of the upper surface of a hermetic vessel 11 which is round- or square-shaped. An oil 14, having a low vapor pressure, is filled in the lower half part of the vessel 11, and >=1 partition plate 16 are provided in the upper space, leaving a clearance 15 between the lower end and the surface of the oil 14. A lid 17 is provided at the side of the vessel 11 for replacing the oil 14. The Si oxide, generated in the Si single crystal lifting machine, is sucked by a vacuum pump, and introduced into the vessel 11 along with the gas. At this time, the Si oxide, due to its high temp., is adsorbed into the low temp. oil 14 by the contact therewith. The stream of the Si oxide, which is left unadsorbed, is agitated by the plate 16, brought into contact with the oil 14, and adsorbed.
摘要翻译：目的：通过在提升机中产生的气体，通过在密闭容器中吸收气体来收集氧化硅而不堵塞，其中设置有存储在下部的油上的间隙的隔板，在减压型Si 单晶起重机。构成：与Si单晶提升机连接的导入管12和与真空泵连接的排出管13设置在圆形或正方形的密封容器11的上表面的两端 -成形。具有低蒸汽压力的油14被填充在容器11的下半部分中，并且> = 1分隔板16设置在上部空间中，在油的下端和表面之间留下间隙15 在容器11的侧面设置有用于更换油14的盖17.在Si单晶提升机中产生的Si氧化物被真空泵吸入，并与气体一起引入容器11 。此时，Si氧化物由于其高温吸附在低温下。油14与其接触。未吸附的Si氧化物流被板16搅拌，与油14接触并被吸附。

9. 发明专利

JPS5935087A Device for pulling semiconductor single crystal 失效
标题翻译：用于拉伸半导体单晶的器件
公开(公告)号：JPS5935087A
公开(公告)日：1984-02-25
申请号：JP14445382
申请日：1982-08-20
申请人： Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： C30B15/00 , C30B15/30 , H01L21/208
CPC分类号： C30B15/30
摘要： PURPOSE:To provide the titled device capable of pulling a semiconductor single crystal having excellent quality, by attaching the wind-up mechanism of the vertically movable single crystal pulling rod to an extendable chamber for the take- out of the crystal, thereby reducing the length of the pulling rod and increasing the rate of rotation. CONSTITUTION:The device for pulling a semiconductor single crystal is composed of a furnace 1 and a crystal take-out chamber 4 which is composed of a lower chamber 4a, an upper chamber 4b having the shape of bellows, and a shut- off valve 5 attached to the boundary of said chambers. The seed crystal 10 held to the tip of the pulling rod 8 consisting of a string is immersed in the molten silicon 11 contained in the crucible 2 attached to the supporting rod 3, and the pulling rod 8 is wound up with the wind-up mechanism 7 under rotation while rotating the crucible 2. The silicon single crystal 12 is pulled up by this process. The wind-up mechanism 7 attached to the upper chamber 4b is lifted while extending the upper chamber 4b under the guide with the guide shaft 6, the shut- off valve 5 is closed, the upper chamber 4b is separated from the valve and contracted, and the silicon single crystal 12 is taken out of the device.
摘要翻译：目的：为了提供能够拉出具有优良品质的半导体单晶的标题装置，通过将可垂直移动的单晶拉杆的卷绕机构附接到用于取出晶体的可延伸室，从而减小长度的拉杆并提高旋转速度。构成：用于拉制半导体单晶的装置由炉1和晶体取出室4组成，该室1由下室4a，具有波纹管形状的上室4b和截止阀5 附着在所述室的边界。保持在由串构成的拉杆8的前端的晶种10浸渍在容纳在安装在支撑杆3上的坩埚2内的熔融硅11中，拉杆8与卷绕机构在旋转坩埚2的同时旋转。通过该处理将硅单晶12拉起。安装在上部室4b上的卷起机构7在引导轴6向下延伸上部腔4b的同时被提升，截止阀5关闭，上部腔室4b与阀门分离并收缩，并将硅单晶12从器件中取出。

10. 发明专利

JPS5923168A Vertical dynamic bellows 失效
标题翻译：垂直动态贝壳
公开(公告)号：JPS5923168A
公开(公告)日：1984-02-06
申请号：JP13428682
申请日：1982-07-30
申请人： Toshiba Mach Co Ltd
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： F16J15/52
CPC分类号： F16J15/52
摘要： PURPOSE:To extend the life of the bellows by coupling one or multiple supports fitted to the upper flange on the bellows and the middle of the bellows with an upper plate or the upper and lower plates and further other support. CONSTITUTION:The bellows 1 is divided into an upper portion and a lower portion equally in length by a support 2. An upper flange 8 is screwed to a screw shaft 7, and a wire 9 is wound around a pulley 10 then fixed to an upper plate 6. The wire 9 is adjusted so that the upper and lower bellows 3, 4 are made equal in length. When the screw shaft 7 is rotated, the upper flange 8 is moved up and down. At this time, the support 2 is coupled with a wire 9 and moved by half the movement of the upper flange 8, thereby the ratio between deflections of the upper bellows and the lower bellows 4 is invariably constant and their extensions become almost equal. Accordingly, both bellows divided by the support are almost equal in length when they are initially set and also after the movement, thus their extensions are almost equal invarially and the life can be extended.
摘要翻译：目的：通过将一个或多个支撑件安装在波纹管上的上法兰和波纹管的中部，通过将上部板或上部和下部板以及其他支撑件联接在一起来延长波纹管的使用寿命。构成：波纹管1通过支撑件2分成长度相等的上部和下部。上凸缘8被螺纹连接到螺纹轴7上，并且线9缠绕在滑轮10上，然后固定到上部电线9被调整为使得上波纹管3,4和下波纹管3,4的长度相等。当螺杆轴7旋转时，上凸缘8上下移动。此时，支撑件2与线9耦合并且被上凸缘8的移动移动一半，因此上波纹管和下波纹管4的偏转之间的比率总是恒定的并且它们的延伸几乎相等。因此，由支架分开的两个波纹管在初始设定时以及在运动之后的长度几乎相等，因此它们的延伸几乎相等，寿命可以延长。

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