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    • 4. 发明专利
    • Spin mos field effect transistor
    • 旋转MOS场效应晶体管
    • JP2011142326A
    • 2011-07-21
    • JP2011012371
    • 2011-01-24
    • Toshiba Corp株式会社東芝
    • ISHIKAWA MIZUESAITO YOSHIAKISUGIYAMA HIDEYUKIIGUCHI TOMOAKI
    • H01L29/66G11B5/39H01F10/16H01F10/26H01F10/32H01L21/8246H01L27/105H01L29/82H01L43/08H01L43/10
    • PROBLEM TO BE SOLVED: To provide a spin MOS field effect transistor including a magnetic body forming an antiferromagnetic coupling with a full Heusler alloy of high spin polarizability, and using a magnetoresistive effect element with a high TMR ratio. SOLUTION: The spin MOS field effect transistor includes, at least one of a source and a drain, a structure including a full Heusler alloy layer 13 formed on a semiconductor substrate 10, a ferromagnetic layer 14 formed on the full Heusler alloy layer 13 and having a face-centered cubic lattice structure, a nonmagnetic layer 15 formed on the ferromagnetic layer 14, and a ferromagnetic layer 16 formed on the nonmagnetic layer 15. The antiferromagnetic coupling is formed between the ferromagnetic layer 14 and ferromagnetic layer 16 formed with the nonmagnetic layer 15 interposed. COPYRIGHT: (C)2011,JPO&INPIT
    • 要解决的问题:提供一种自旋MOS场效应晶体管,其包括使用具有高自旋极化率的完整Heusler合金形成反铁磁耦合的磁体,并使用具有高TMR比的磁阻效应元件。 解决方案:自旋MOS场效应晶体管包括源极和漏极中的至少一个,包括形成在半导体衬底10上的完整的Heusler合金层13的结构,形成在整个Heusler合金层上的铁磁层14 13并且具有面心立方晶格结构,形成在铁磁层14上的非磁性层15和形成在非磁性层15上的铁磁层16.反铁磁耦合形成在铁磁层14和形成有铁磁层16的铁磁层16之间 插入非磁性层15。 版权所有(C)2011,JPO&INPIT
    • 5. 发明专利
    • Magneto-resistance effect element and magnetic memory
    • 磁阻效应元件和磁记忆
    • JP2010093280A
    • 2010-04-22
    • JP2009275799
    • 2009-12-03
    • Toshiba Corp株式会社東芝
    • IGUCHI TOMOAKISAITO YOSHIAKISUGIYAMA HIDEYUKI
    • H01L43/10H01F10/16H01F10/32H01L21/8246H01L27/105H01L29/82H01L43/08
    • PROBLEM TO BE SOLVED: To provide a magneto-resistance effect element and magnetic memory which reduces current required for spin transfer writing. SOLUTION: The magneto-resistance effect element includes a first fixed magnetization layer 4 with a fixed magnetization direction; a free magnetization layer 6 with a variable magnetization direction; a tunnel barrier layer 5 formed between the first fixed magnetization layer and a free magnetization layer; a second fixed magnetization layer 8 which is formed on the tunnel barrier layer opposite to the free magnetization layer and has its magnetization fixed; and a non-magnetic layer 7 formed between the free magnetization layer and the second fixed magnetization layer. Passing current between the first fixed magnetization layer and the second fixed magnetization layer provides the free magnetization layer with a variable magnetization direction. If the second fixed magnetization layer contains Co, a metal containing at least one element selected from Mn, V, and Rh is used for the non-magnetic layer. If the second fixed magnetization layer contains Fe, a metal containing at least one element selected from Ir and Rh is used for the non-magnetic layer. If the second fixed magnetization layer contains Ni, a metal containing Mn is used for the non-magnetic layer. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供降低自旋转移写入所需电流的磁阻效应元件和磁存储器。 解决方案:磁阻效应元件包括具有固定磁化方向的第一固定磁化层4; 具有可变磁化方向的自由磁化层6; 形成在第一固定磁化层和自由磁化层之间的隧道势垒层5; 第二固定磁化层8,其形成在与自由磁化层相对的隧道势垒层上,并且其磁化固定; 以及形成在自由磁化层和第二固定磁化层之间的非磁性层7。 在第一固定磁化层和第二固定磁化层之间的通电提供具有可变磁化方向的自由磁化层。 如果第二固定磁化层含有Co,则在非磁性层中使用含有选自Mn,V,Rh中的至少一种元素的金属。 如果第二固定磁化层含有Fe,则非磁性层使用含有至少一种选自Ir和Rh的元素的金属。 如果第二固定磁化层含有Ni,则含有Mn的金属用于非磁性层。 版权所有(C)2010,JPO&INPIT
    • 8. 发明专利
    • Spin fet, magnetoresistance effect element, and spin memory
    • 旋转FET,磁阻效应元件和旋转存储器
    • JP2008243992A
    • 2008-10-09
    • JP2007079966
    • 2007-03-26
    • Toshiba Corp株式会社東芝
    • SAITO YOSHIAKISUGIYAMA HIDEYUKIIGUCHI TOMOAKI
    • H01L29/82H01L21/8238H01L21/8246H01L27/092H01L27/105H01L29/78H01L43/08
    • G01R33/093B82Y10/00B82Y25/00G11C11/16H01L27/228H01L29/66984H01L29/7881H01L43/08
    • PROBLEM TO BE SOLVED: To adhieve the low power consumption and high reliability of a spin FET/spin memory. SOLUTION: A spin FET according to the embodiment comprises a first ferromagnetic film 12 which is arranged on a first source/drain region 11a-1 and the magnetization direction of which is fixed in an upper direction or a lower direction which is a vertical direction relative to a film surface, a second ferromagnetic film 13 which is arranged on a second source/drain region 11a-2 and the magnetization direction of which changes upwardly or downwardly, an antiferromagnetic ferroelectric film 15 arranged on the second ferromagnetic film 13, and tunnel barrier films 20 and 21 arranged on at least one of portions between the first source/drain region 11a-1 and the first ferromagnetic film 12 and a portion between the second source/drain region 11a-2 and the second ferromagnetic film 13. The resistance of the antiferromagnetic ferroelectric film 15 is larger than the on resistance when the first and second source/drain regions 11a-1 and 11a-2 communicate with each other via a channel region 11c. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提高自旋FET /自旋存储器的低功耗和高可靠性。 解决方案:根据实施例的自旋FET包括:第一铁磁膜12,其布置在第一源极/漏极区域11a-1上,其第一铁磁膜12的磁化方向固定在上方向或下方, 布置在第二源极/漏极区域11a-2上并且其磁化方向向上或向下变化的第二铁磁膜13,布置在第二铁磁膜13上的反铁磁性铁电体膜15, 以及布置在第一源/漏区域11a-1和第一铁磁膜12之间的部分和第二源/漏区域11a-2和第二铁磁膜13之间的部分中的至少一个上的隧道势垒膜20和21。 当第一和第二源极/漏极区域11a-1和11a-2经由沟道区域相互连通时,反铁磁性铁电体膜15的电阻大于导通电阻 在11c。 版权所有(C)2009,JPO&INPIT