专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JPS5895691A PREVENTING APPARATUS FOR TRANSVERSE VIBRATION OF PULLING UP SHAFT IN PULLING UP MACHINE OF SEMICONDUCTOR 失效
公开(公告)号：JPS5895691A
公开(公告)日：1983-06-07
申请号：JP19474281
申请日：1981-12-03
申请人： TOSHIBA MACHINE CO LTD , TOSHIBA CERAMICS CO
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , HONMA KAZUMOTO , HASEBE HITOSHI , EBARA TOORU
IPC分类号： C30B15/30 , H01L21/02 , H01L21/208
摘要： PURPOSE:To prevent the transverse vibration of a pulling up shaft effectively in a pulling up machine of a semiconductor by the Czochralski method using the pulling up shaft, by means of a guide moving synchronously with the pulling up shaft. CONSTITUTION:The other and inner cylinders 25 and 26 movable along a guide shaft 36 up and down are located at the lower end position, and a guide 29 previously engaged with a pulling up shaft 19, e.g. a flexible wire, is held by arms 27 and 28. A seed 22 is then brought into contact with a raw material melt in a crucible 11 and pulled up by rotating the pulling up shaft 19 with a hoisting apparatus 14 to grow a single crystal ingot 13. In the process, the outer and inner cylinders 25 and 26 are pulled up while connectedly driven by the above- mentioned operations, to make the distance between a seed chuck 23, and the guide 29 always constant. Thus, the transverse vibration of the pulling up shaft 19 is effectively prevented, and the number of revolutions of the pulling up shaft 19 can be set at the desired value to grow the aimed single crystal of good quality.

2. 发明专利

JPS59121182A BLOWING INERT GAS IN PULLING MACHINE 失效
公开(公告)号：JPS59121182A
公开(公告)日：1984-07-13
申请号：JP22769782
申请日：1982-12-28
申请人： TOSHIBA MACHINE CO LTD , TOSHIBA CERAMICS CO
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , KAWANABE ASAJI , HASEBE HITOSHI
IPC分类号： C30B15/00
摘要： PURPOSE:To enable improved pulling of single crystal, by blowing an inert gas into a chamber of a pulling machine of single crystal using a pulling shaft of a flexible material in such a way that the inert gas is introduced to a position apart from the pulling shaft in order to prevent the direct contact of the gas with the pulling shaft. CONSTITUTION:The baffle plate 11 is put between the feed opening 10 for blowing an inert gas into the pulling chamber 7 of a pulling machine of single crystal and the pulling shaft 5 of a flexible material. When an inert gas is blown from the feed opening 10, the inert gas strikes the baffle plate 11, separates into the left and right sides of the pulling shaft 5, passes through a position apart from the pulling shaft 5 and is introduced to the upper part of the pulling chamber 7. Consequently, the vibration of the pulling shaft 5 caused by the blowing of the inert gas, shaking of ingot of single crystal depending upon it is suppressed, so that improved pulling is made possible.

3. 发明专利

JPS5895692A PULLING UP APPARATUS OF PULLING UP MACHINE FOR SEMICONDUCTOR CRYSTAL 失效
公开(公告)号：JPS5895692A
公开(公告)日：1983-06-07
申请号：JP19474381
申请日：1981-12-03
申请人： TOSHIBA MACHINE CO LTD , TOSHIBA CERAMICS CO
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , YAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , HONMA KAZUMOTO , HASEBE HITOSHI , EBARA TOORU
IPC分类号： C30B15/30 , H01L21/208
摘要： PURPOSE:To prevent the transverse vibration of a pulling up shaft effectively in a pulling up machine for a semiconductor by the Czochralski method using the pulling up shaft consisting of a flexible material, by means of a specific moving bed. CONSTITUTION:A shaft 28 having a pulling up wire 1 attached therto and a seed 29 mounted to the bottom thereof is attached to a rotating shaft 27 rotatably mounted to a moving bed 21 through bearings 26, and the moving bed 21 is movable vertically along guide shafts 20 through guide rollers 22. A balancing weight 25 is attached to the moving bed 21 through a rope 24 and a pulley 23. The wire 1 is pullled up by a hoisting apparatus 12 while rotated, and a single crystal ingot 2 is grown from a raw material melt in a crucible 11. In the process, the moving bed 21 is guided by the guide shafts 20 to prevent the vibration of the respective members ranging from the wire 1 to the single crystal ingot 2 with certainty.

4. 发明专利

JPS58110487A PREVENTING DEVICE FOR TRANSVERSE MOVEMENT OF PULLING SHAFT IN PULLING MACHINE FOR SEMICONDUCTOR 失效
公开(公告)号：JPS58110487A
公开(公告)日：1983-07-01
申请号：JP20583381
申请日：1981-12-19
申请人： TOSHIBA MACHINE CO LTD , TOSHIBA CERAMICS CO
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGIYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO , HONMA KAZUMOTO , KAWANABE ASAJI , HASEBE HITOSHI
IPC分类号： C30B15/30 , H01L21/208
摘要： PURPOSE:To stably rotate a pulling shaft and to carry out satisfactory pulling by providing guides which enclose the shaft in a rotatable state and can be attached to and detached from the shaft and a guide releasing means to separate the guides. CONSTITUTION:At the beginning of pulling, a gude opening and shutting plate 30 is set at the lowest position. At this time, narrow parts 31, 32, 33 are positioned among guides 26a, 26b, 27a, 27b, 28a, 28b. The guides are shut by means of springs 29, and by pressing the guides against the narrow part of the plate 30 by the spring force, the guides are held at positions which are symmetrical with respect to a pulling shaft 19. The shut guides are slightly opened by hand against the springs 29, and rings 42 are put in the recessed parts 43 and grasped. A seed 22 is then brought into contact with a melt 12 in a crucible 11, and by rotating a frame 15 by a motor 17, the pulling shaft 19 is rotated to grow a single crystal ingot 13. The transverse movement of the shaft 19 is prevented by the guides through the rings 42.

5. 发明专利

JPH033638B2 失效
公开(公告)号：JPH033638B2
公开(公告)日：1991-01-21
申请号：JP17488083
申请日：1983-09-21
申请人： TOSHIBA MACHINE CO LTD
发明人： TAKAHASHI TAKAO , HAYASHI SHINGO , SUGYAMA HISATAKA , TADA YOSHIAKI , OOISHI TOSHIO
IPC分类号： C30B15/30 , H01L21/208

6. 发明专利

JPS60211B2 失效
公开(公告)号：JPS60211B2
公开(公告)日：1985-01-07
申请号：JP13655275
申请日：1975-11-13
申请人： TOSHIBA MACHINE CO LTD
发明人： TAKAHASHI TAKAO , OOISHI TOSHIO
IPC分类号： B29C39/10 , B29B7/00 , B29C39/00 , B29C39/26 , B29C39/42 , B29K101/10 , B29L31/34

7. 发明专利

JPS54137703A LIQUID RATIO VARIABLE CONSTANT CAPACITY DISCHARGE SYSTEM 失效
公开(公告)号：JPS54137703A
公开(公告)日：1979-10-25
申请号：JP4574778
申请日：1978-04-18
申请人： TOSHIBA MACHINE CO LTD
发明人： TAKAHASHI TAKAO , OOISHI TOSHIO
IPC分类号： F04B9/12 , F04B13/00 , F04B13/02
摘要： PURPOSE:To make constantly optional miscible ratio adjustable by only necessary amount in the mixing material at high efficiency in such a way that fluidic material may be measured at optional ratio by easier operation giving facility for discharging it at constant amount. CONSTITUTION:Crude material reservoirs 3, 4 are respectively connected through supply pipes 1, 2 to discharge devices 5, 6 which constitute a plunger pump. The discharge devices 5, 6 are equipped respectively with needle valves 7a-10a at intake ports 7, 8 and discharge ports 9, 10, and its hollow part has plungers 11, 12 respectively connected to one lever 14. One end of said lever 14, namely the upper end of the plunger 11 is connected to a pneumatic cylinder 13, and its free end is supported by a movable fulcrum 15. When this fulcrum 15 is changed its position. because just strokes of the plunger 12 are changed, this makes it possible to control discharging proportion of the two discharge devices 5, 6. Besides,strokes of the plunger 11 are adjusted by an adjustable screw 16.

8. 发明专利

JPS5445865A MIXING DEVICE 失效
公开(公告)号：JPS5445865A
公开(公告)日：1979-04-11
申请号：JP11128377
申请日：1977-09-16
申请人： TOSHIBA MACHINE CO LTD
发明人： TAKAHASHI TAKAO , OOISHI TOSHIO
IPC分类号： B01F15/04 , B29B7/76 , G05D11/03
摘要： PURPOSE:To effectively measure and mix and discharge material liquids by using plunger pump, not reaching pressure change caused by the operation of the pump for the downstream, and regulating the back pressure in a mixing device so as to secure quantitative discharge amount of the liquids. CONSTITUTION:A piping unit 17 controls the operating air volume of an air cylinder 5 to alter the discharge material liquids from a plunger pump 4 so as to most efficiently mix the liquids via a mixer 18. The liquids 1a, 2d are pneumatically fed from stock tanks 1, 2, respectively to the pump 4. This mixing device is constructed to colse changeover valves 12, 13 at this time to always operate constant pressure in the pump 4 without effecting the pressure of the liquids in the pump 4 to the downstream of the pump 4. In order to maintain the pressure in the mixer 18 constant, an openable valve 22 operates to close slightly earlier than the valves 12, 13 immediately before starting suction of the pump 4 and to open slightly later than the valves 12, 13 when starting discharging of the pump 4.

9. 发明专利

JPS5131766A 失效
公开(公告)号：JPS5131766A
公开(公告)日：1976-03-18
申请号：JP10521574
申请日：1974-09-12
申请人： TOSHIBA MACHINE CO LTD
发明人： OOISHI TOSHIO
IPC分类号： H01B19/00 , B29C31/00 , B29C41/00 , B29C41/14 , B29C41/34 , B29C41/38 , H01B17/00

10. 发明专利

JPH0244689B2 失效
公开(公告)号：JPH0244689B2
公开(公告)日：1990-10-04
申请号：JP27852684
申请日：1984-12-27
申请人： TOSHIBA MACHINE CO LTD
发明人： OOISHI TOSHIO , TSUKAHARA YUTAKA , SUGYAMA HISATAKA , TAKAHASHI TAKAO , KUWAKO HIROMU
IPC分类号： B22D17/26 , B29C33/20 , B29C33/24 , B29C43/32 , B29C43/36 , B29C45/67 , B30B1/32

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式