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1. 发明专利

JP2004356245A Optical device for ultraviolet rays 审中-公开
标题翻译：用于超紫外线的光学装置
公开(公告)号：JP2004356245A
公开(公告)日：2004-12-16
申请号：JP2003150071
申请日：2003-05-28
申请人： Topcon Corp , Toshiba Corp , 株式会社トプコン , 株式会社東芝
发明人： SATO TAKASHI , TAYA MAKOTO , MATSUKI KAZUTO
IPC分类号： G03F7/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To expose the whole optical system of lens group into stable atmosphere to ultraviolet rays, and avoid deterioration in transmission of light by light of high ultraviolet region and generation of ozone.
SOLUTION: This optical device for ultraviolet rays is provided with the lens group which consists of a plurality of lenses in which light of ultraviolet region is made to penetrate and cast on a predetermined surface, and the optical system. The optical system is provided with a path which supplies atmosphere to an exterior refraction surface of the outermost lens of the lens group through gaps of the lens group, and a path which supplies atmosphere to the refraction surface of the outermost lens without passage of the gaps of the lens group.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：将透镜组的整个光学系统暴露于稳定的大气中进行紫外线照射，并避免紫外线区域的光和臭氧的产生导致的光的透过性降低。解决方案：该紫外线用光学装置设置有透镜组，该透镜组由多个透镜构成，其中紫外线区域的光被穿透并投射在预定表面上，并且该光学系统。该光学系统设置有通过透镜组的间隙向透镜组的最外侧透镜的外部折射面供给气体的路径，以及将气氛提供给最外侧透镜的折射面而不通过间隙的路径的镜头组。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JPH1183753A OPTICAL SUBSTRATE INSPECTING DEVICE 失效
公开(公告)号：JPH1183753A
公开(公告)日：1999-03-26
申请号：JP7457598
申请日：1998-03-23
申请人： TOSHIBA CORP , TOPCON CORP
发明人： TOJO TORU , SANADA YASUSHI , TABATA MITSUO , YAMASHITA KYOJI , NAGAI HIDEO , KOBAYASHI NOBORU , YOSHINO TOSHIKAZU , TAYA MAKOTO , MIWA TAMAMI
IPC分类号： G01B11/30 , G01N21/84 , G01N21/88 , G01N21/94 , G01N21/956 , G03F1/84 , G03F7/20 , H01L21/027 , H01L21/66 , G03F1/08
摘要： PROBLEM TO BE SOLVED: To improve optical resolution characteristics without inviting increase in inspection time and to enable adaptation to defect inspection on the circuit patterns of future 1G-bit DRAM. SOLUTION: This inspecting device inspects defects in patterns formed on a substrate to be inspected and foreign matter adhered to the substrate. This inspecting device is provided with a laser light source 401 to generate light beams to irradiate the substrate with light, a multi beam generator 101 to generate multi light beams by dividing one piece of light beams from the laser light source 401 into a plurality of pieces, scanner mirrors 105 and 106 to scan divided multi light beams on the substrate, an optical system which acts so that multi tight beams may be each individually brought into a focus on the substrate and guides reflected light from the substrate by the irradiation of multi light beams, multi pinholes 111 to control each light beam by arranging apertures at intervals matched with the intervals of multi light beams from the substrate guided from an optical system, and a group of detectors 112 to each detect changes in the light amount of each light beam from the multi pinholes 111.

3. 发明专利

JPH1097053A INSPECTION DEVICE FOR PATTERN DEFECT 失效
公开(公告)号：JPH1097053A
公开(公告)日：1998-04-14
申请号：JP25004696
申请日：1996-09-20
申请人： TOSHIBA CORP , TOPCON CORP
发明人： TOJO TORU , TABATA MITSUO , SANADA YASUSHI , YOSHINO TOSHIKAZU , TAYA MAKOTO
IPC分类号： G01N21/88 , G01N21/956 , G03F1/84 , H01L21/66 , G03F1/08
摘要： PROBLEM TO BE SOLVED: To detect defects in a pattern with high sensitivity by constituting the device in such a manner that one light source is used, a transmission optical system and a reflection optical system can be switched, transmitted light and reflected light can be emitted at one time, and these light beams can be accepted by one sensor. SOLUTION: In this device, one light source is used and a transmission optical system 50 and a reflection optical system 60 can be switched. Transmitted light and reflected light can be emitted at one time and these light beams can be accepted in one imaging sensor 90. In this device, shutter functions 52, 62 to cut the transmitted light beam 51 and reflected light beam 61 can independently cut the respective beams 51, 61. By operating the shutter functions 52, 62, simultaneous irradiation of transmitted light and reflected light is possible. Therefore, the mask image can be observed by one imaging sensor 90 with the transmitted light, reflected light or both of transmitted/reflected light at one time.

4. 发明专利

JPH0887102A EVALUATING DEVICE FOR PATTERN AND EVALUATING METHOD FOR PATTERN 失效
公开(公告)号：JPH0887102A
公开(公告)日：1996-04-02
申请号：JP22187194
申请日：1994-09-16
申请人： TOSHIBA CORP , TOPCON CORP
发明人： TOJO TORU , TABATA MITSUO , AKENO MASANOBU , WATANABE TOSHIYUKI , WATANABE TOMOHIDE , YAMANAKA EIJI , ITO TSUTOMU , TAYA MAKOTO
IPC分类号： G01N21/956 , G03F1/84 , H01L21/027 , G03F1/08
摘要： PURPOSE: To provide a device and a method to evaluate a pattern with high sensitivity in a wide range even when a mask with a pellicle is used. CONSTITUTION: The device is equipped with a condensing means 4 to condense light from a light source 3 on a sample having a pattern, an objective lens 5 placed in the poststage of the sample to transmit the light which is transmitted through the sample, an aperture member placed in the poststage of the objective lens 5 to reduce the diameter of the light beam transmitted through the objective lens 5, a light-receiving element 6 placed in the poststage of the aperture member to receive the light reduced by the aperture member, and a judging means to evaluate the pattern received by the light-accepting element 6 according to the information corresponding to the pattern. In the aperture member, the numerical aperture can be changed according to whether a pellicle is used or not for the sample.

5. 发明专利

JPH0227205A FRINGE SCAN INTERFEROMETER 失效
公开(公告)号：JPH0227205A
公开(公告)日：1990-01-30
申请号：JP17849988
申请日：1988-07-18
申请人： TOPCON CORP
发明人： KOBAYASHI HACHIRO , GENMA TAKASHI , TAYA MAKOTO
IPC分类号： G01B11/24 , G01B9/02
摘要： PURPOSE:To achieve a prevention of a secular change in accuracy while facilitating an assembly adjustment by performing scanning while a reference lens is being supported with a shaft extending parallel in a direction of an optical axis within a plane containing the optical axis thereof. CONSTITUTION:A reference lens section 200 receives light from a laser light source 101 emitting interferable light and reflects a part thereof on a reference surface 108 thereof while making the rest thereof irradiate a lens T to be inspected. The reference lens 200 is moved in a direction of an optical axis thereof by a moving means FS. Light reflected from a reference lens 107 is put together with the light reflected on the reference surface 108 to form an interference fringe. The interference lens 107 supported by two support shafts which are within a plane containing an optical axis thereof while being extending parallel on both sides of the lens centered on the center of gravity thereof. A scanning is performed in the reference lens 107 for a fringe scanning by transmission of a displacement caused by an extension and reduction of the moving means FS comprising a piezo-electric element mounted at an end of the support shafts to the reference lens carried with the support shafts.

6. 发明专利

JP2001277086A LENS CIRCUMFERENTIAL RIM MACHINING DEVICE 失效
公开(公告)号：JP2001277086A
公开(公告)日：2001-10-09
申请号：JP2000099084
申请日：2000-03-31
申请人： TOPCON CORP
发明人： KOBAYASHI AKIO , TAKAHASHI HIROMI , KOIZUMI HIROSHI , ABE KAZUO , TAYA MAKOTO , NAKANISHI MICHIKO , SAITO SUSUMU
IPC分类号： B24B9/14 , B24B47/22
摘要： PROBLEM TO BE SOLVED: To provide a lens circumferential rim machining device excluding sandwiching and detachment work of a reference ball. SOLUTION: This lens circumferential rim machining device has lens rotating shafts 16 and 17 for sandwiching a lens L to be machined, a carriage 15 turnable around a pivot, and a grinding wheel rotating shaft 9 provided with a grinding wheel 5 for grinding the lens L to be machined. The reference ball 70 having a predetermined radius is attached to the lens rotating shaft 17.

7. 发明专利

JPH0222527A ALIGNMENT METHOD FOR ADJUSTING DEVICE FOR OBJECT LENS OF INTERFEROMETER 失效
公开(公告)号：JPH0222527A
公开(公告)日：1990-01-25
申请号：JP17244688
申请日：1988-07-11
申请人： TOPCON CORP
发明人： TAYA MAKOTO , OTOMO FUMIO , GENMA TAKASHI
IPC分类号： G01M11/00 , G01B9/021 , G01M11/02
摘要： PURPOSE:To facilitate the alignment of the lens to be inspected by providing a laser beam source, a collimator lens, and a reference lens part. CONSTITUTION:The light from the laser beam source 101 has its optical path changed by a mirror 102 and is converted by a condenser lens 103. Further, the luminous flux emitted from a pinhole 104a as a secondary light source is collimated into parallel luminous flux by a collimator lens part 106. The reference lens part 200 is arranged behind the lens part 106. Then, the parallel luminous flux which is transmitted through the lens part 200 is converged on a point P temporarily and diverged again to strike on the concave surface of the lens T to be inspected. Further, the object light reflected by the lens T and reference light reflected by a reference surface 107 are incident on a beam splitter 110 which has its half-mirror surface slanted to the optical axis between a pinhole reticle plate 104 and the lens 106. Then this light is reflected by the half-mirror surface to strike on a 1st hologram 400 for the lens T, thereby forming its image on a filter 113.

8. 发明专利

JPH0219812A OPTICAL ELEMENT HOLDER 失效
公开(公告)号：JPH0219812A
公开(公告)日：1990-01-23
申请号：JP16938188
申请日：1988-07-07
申请人： TOPCON CORP
发明人： TAYA MAKOTO , KOBAYASHI HACHIRO
IPC分类号： G02B7/02
摘要： PURPOSE:To surely and stably hold a lens with plural lens frames without producing distortion in the lens by constituting an optical element-segment cell assembling body by sticking the plural lens frames having segment-like forms, namely, segment cells to the output periphery of the optical element and fixing the assembling body to a lens barrel. CONSTITUTION:Three pieces of segment-like segment cells 2 are arranged on the outer periphery of a lens 1 at equal angular intervals. Each the of segment cells 2 has a groove, namely, a pocket 4 and the pockets 4 forms a space 6 for housing adhesives for sticking the segment cell 2 to the lens 1 when the segment cell 2 is fitted to the lens 1. Therefore, the distortion which is produced when the lens 1 is directly fixed to a lens barrel 7 by means of a junk ring 8 does not occur in the lens 2 and the lens 1 can be held with a more accurate positional relation as compared to the case where layers of the adhesives are formed between the segment cells 2 and lens 1.

9. 发明专利

JP2001277087A LENS CIRCUMFERENTIAL RIM MACHINING DEVICE 失效
公开(公告)号：JP2001277087A
公开(公告)日：2001-10-09
申请号：JP2000098548
申请日：2000-03-31
申请人： TOPCON CORP
发明人： TAKAHASHI HIROMI , KOIZUMI HIROSHI , ABE KAZUO , TAYA MAKOTO , SAITO SUSUMU , KOBAYASHI AKIO , NAKANISHI MICHIKO
IPC分类号： B24B9/14
摘要： PROBLEM TO BE SOLVED: To provide a lens circumferential rim machining device having a space-saving and low-costing observing means of a distance between lens rotating shafts and a grinding wheel and constantly monitoring that the distance between the lens rotating shafts and the grinding wheel is accurately controlled. SOLUTION: This device has a carriage 15 turnable around a support shaft (a pivot) 12 and provided with the lens rotating shafts 16 and 17 for sandwiching a lens L to be machined, the grinding wheel 5 for grinding the lens L to be machined, an arithmetic control circuit (an arithmetic means) 100 determining the distance between the lens rotating shafts 16 and 17 and the grinding wheel 5 on the basis of a lens shape to be machined, and a carriage elevating means 36 vertically moving the carriage 15 so that the distance between the lens rotating shaft 16 and 17 and the grinding wheel 5 become the determined distance. It is provided with the arithmetic control circuit (a converting means) 100 converting the determined distance between the lens rotating shaft 16 and 17 and the grinding wheel 15 into a pivot angle of the carriage 15 and a rotary encoder 75 detecting the pivot angle of the carriage 15. It constantly monitors by this rotary encoder 75 that the distance between the lens rotating shafts 16 and 17 and the grinding wheel 5 is controlled.

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