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    • 3. 发明专利
    • FILM FORMATION
    • JPH1088330A
    • 1998-04-07
    • JP24532496
    • 1996-09-17
    • TOSHIBA CORP
    • KUDO YUKIYAMAZAKI MUTSUKIYOSHINO HISASHI
    • C23C14/28
    • PROBLEM TO BE SOLVED: To provide a film formation method capable of forming thin films having desired compsns. stably over a long period of time without degrading the utilization efficiently of a target and without using an aperture. SOLUTION: This film formation method consists in executing sputtering by irradiating a target 16 consisting of >=2 kinds of elements which are arranged to face a substrate 27 and vary in vapor pressures or m. p. while moving this target. In such case, a laser beam 24 having a first region having the fluence above the threshold value to evaporate all the elements of the target on the irradiation surface and a second region having the fluence below the threshold value is used. A stage of executing the sputtering by irradiating the target with this laser beam, then moving the target and irradiating the target with the laser beam in such a manner that the first region having the fluence above the threshold value overlaps on the region where the element of the higher vapor pressure or lower m. p. among the irradiation surfaces in the stage described above is repeated.
    • 6. 发明专利
    • SUPERCONDUCTING COIL
    • JPH02260614A
    • 1990-10-23
    • JP8194989
    • 1989-03-31
    • TOSHIBA CORP
    • YOSHINO HISASHIYAMAZAKI MUTSUKI
    • H01F6/06H01B12/04
    • PURPOSE:To maintain high critical current density, and to improve various kinds of characteristics of a superconducting coil by a method wherein the forming position of an oxide superconducting layer is made to eccentric toward the inside of the radial direction of the winding body within the cross section in radial direction of a superconducting wire material. CONSTITUTION:A superconducting oxide layer 3 is buried in a silver tape-like substrate 2 along the longitudinal direction on a super-conducting wire material 1, said superconducting layer 3 is formed eccentrically from the center of the rectangular cross section of the substrate 2. A superconducting coil is constituted by winding the eccentric superconducting layer 3 around a winding jig 4 in such a manner that the layer 3 is positioned inside the jig. As the core constituted as above has the superconducting layer 3 of the wire material 1 wound thereon so that the layer 3 will be positioned inside the radial direction of the wound body, compressive stress is mainly added to the superconducting layer 3, and the generation of cracks caused by tensile stress can be suppressed. As a result, the amount of distortion can be reduced, and the lowering of the critical current density when a coil is formed can also be prevented.
    • 8. 发明专利
    • PRODUCTION OF OXIDE SUPERCONDUCTOR
    • JPH01157453A
    • 1989-06-20
    • JP31436487
    • 1987-12-11
    • TOSHIBA CORP
    • NOMURA SHIYUNJIYOSHINO HISASHIANDO TAKESHI
    • C30B11/02C01G1/00C04B35/00C04B35/45C30B29/22H01B13/00H01L39/24
    • PURPOSE:To produce an oxide superconductor having high orientation of C face of a single crystal and crystals by molding a powder of the oxide superconductor to a specified shape and sintering at a specified temp. CONSTITUTION:After crystallizing a powder mixture of constituting elements such as Y, Ba, Cu, etc., by precalcining at 800-980 deg.C, an oxide superconductor expressed by the formula and having an oxygen deficient perovskite structure (wherein Ln is at least one kind of element selected from rare earth elements; M is at least one king of element selected from alkaline earth elements; deltais a number of deficient oxygen atom) is obtd. by heat-treating the crystallized product at 300-700 deg.C, if necessary, in O2-contg. atmosphere. Obtd. oxide superconductor is pulverized to powder having 0.2-20mum mean particle size. Then, BaCuO2 powder is added to the above described powder in accordance with demand so as to satisfy the conditions defined by formula II (wherein x is 0.01-0.3), and the mixture is molded to a product having a desired shape. If necessary, at least one kind of seed crystal selected from SrTiO3, compds. expressed by formula III (M is Al, Ge, Fe), compds. expressed by formula IV, MgO, and ZrO2, is buried in the molded body and sintered at 950-1050 deg.C for 10-100hr. Thus, the crystal growth of the oxide superconductor is caused.
    • 10. 发明专利
    • MANUFACTURE OF SUPERCONDUCTOR WIRE MATERIAL
    • JPH01154409A
    • 1989-06-16
    • JP31289187
    • 1987-12-10
    • TOSHIBA CORP
    • ANDO TAKESHIYOSHINO HISASHI
    • B28B1/00C01G1/00C04B35/45H01B12/04H01B13/00
    • PURPOSE:To improve the superconductive property and the density by carrying out a hot wiredrawing process in the temperature condition at 500 deg.C to 900 deg.C. CONSTITUTION:The powder or the sinter of an oxide superconductor is filled in a metal tube, and a hot wiredrawing process in the temperature condition at 500 deg.C to 900 deg.C is applied to the metal tube as it is or after a heat treatment is once applied. As the superconductor, is available a perovskite structure of oxide superconductor including a rare earth element which is used in a high practical effect and realizes a superconductive condition. An oxide with a perovskite structure in a broad sense such as a defective perovskite type with an oxygen defection such as LnBa2Cu3O7-delta system (delta shows the oxygen detection normally less than 1, Ln is at least one or more selected from rare earth elements such as Y, La, and Sc; and Ba can be replaced by Ca or the like partially), a layer-form perovskite type such as Sr-La-Cu-O system, or the like can be given as an example. In this case, the rare earth elements are in the broad difinition including Sc, Y, and La system. In such a composition, the superconductive property and the density can be improved.