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    • 7. 发明专利
    • APPARATUS, PROGRAM, AND METHOD FOR DECONVOLUTION ANALYSIS
    • JP2006343244A
    • 2006-12-21
    • JP2005170148
    • 2005-06-09
    • TOSHIBA CORP
    • TOMITA MITSUHIROTANAKA HIROTAKEYOSHIKI MASAHIKO
    • G01N27/62G01N23/227
    • PROBLEM TO BE SOLVED: To analyze even an ultra-thin membrane, present in the outermost surface of a sample and a distribution of impurities having a steep inclination, with correct depth direction distribution. SOLUTION: Correction is performed on the basis of changes in sputtering yields, in the depth direction at the initial stage of sputtering (S4), and the depth axis of the corrected depth direction distribution is extended (S5). The depth direction distribution, of which the depth axis is extended is constituted of 2 n pieces of data points, and data interpolation is performed on the distances between data at regular intervals (S6). Distribution data on the resolution function of the depth direction is prepared through the use of parameters of the resolution function of the depth direction extracted in S3, in addition to the distances between data points of the data-interpolated depth direction distribution and the number of the pieces of data (S7). Deconvolution is performed, on the basis of the created distribution data on the resolution function of the depth direction and the depth direction distribution determined by interpolation (S8). The extended depth axis of deconvoluted data is returned to an actual depth axis (S9). COPYRIGHT: (C)2007,JPO&INPIT
    • 8. 发明专利
    • Monitoring system and measured data video device applicable to the same
    • 监控系统和适用于该系统的测量数据视频设备
    • JP2006197480A
    • 2006-07-27
    • JP2005009159
    • 2005-01-17
    • For-A Co LtdToshiba Corp株式会社朋栄株式会社東芝
    • ITO YASUYUKITOMITA MITSUHIRO
    • H04N7/18
    • PROBLEM TO BE SOLVED: To make usability satisfactory by making a transmission line to a monitoring station single.
      SOLUTION: This monitoring system for acquiring video data obtained from a telecamera 11 and measured data obtained from measuring instruments 13-1 to 13-N and transmitting the video data and the measured data to the monitoring station 2 through the transmission line 101 comprises a measured data video device 3 for making the measured data a video signal to combine the video signal with a video signal obtained from the telecamera 11 and transmits data combined by the measured data video device to the monitoring station 2 through the transmission line 101.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:通过将监控站的传输线单独地使可用性令人满意。 解决方案:用于获取从电视摄影机11获得的视频数据的监视系统和从测量仪器13-1至13-N获得的测量数据,并通过传输线101将视频数据和测量数据发送到监控站2 包括测量数据视频设备3,用于使测量数据成为视频信号,以将视频信号与从电视摄影机构11获得的视频信号相结合,并通过传输线101将由测量数据视频设备组合的数据发送到监控站2。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • Soldering material
    • 焊接材料
    • JP2003033894A
    • 2003-02-04
    • JP2002141344
    • 2002-05-16
    • Toshiba Corp株式会社東芝
    • TADAUCHI KIMIHIROTEJIMA KOICHIKOMATSU IZURUTOMITA MITSUHIRO
    • B23K35/14B23K35/26B23K35/40
    • PROBLEM TO BE SOLVED: To provide a soldering material which does not contain lead, exerts excellent wettability for a joining member and has versatility and easiness for handling, and the manufacturing method thereof.
      SOLUTION: The first metal material is coated by the thin layer second metal material to obtain a coated body, and the coated body is drawn and molded into a linear shape by rolling to obtain a linear soldering material. Moreover, a granular soldering material is obtained by cutting the linear molded body in the direction crossing the axis of the drawn-molded linear molded body and granulating it. The soldering materials 4 have the first metal layer 6 and the second metal layer 5 which have different compositions, the first metal layer is formed into a shape having an axial property drawn in the uniaxial direction, and the first metal layer is coated with the second metal layer so as to surround the axis of the first metal layer. The first metal layer contains zinc, and the second metal layer does not contain zinc but contains tin.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:为了提供不含铅的焊接材料,对接合部件具有优异的润湿性,并且具有通用性和易于处理的制造方法及其制造方法。 解决方案:第一金属材料被薄层第二金属材料涂覆以获得涂层体,并且通过轧制将涂覆体拉伸并模制成线形,以获得线性焊接材料。 此外,通过沿与拉伸成型的线性成型体的轴线交叉的方向切割线状成型体,并对其进行粒化,得到颗粒状的焊接材料。 焊接材料4具有第一金属层6和第二金属层5,第一金属层6和第二金属层5具有不同的组成,第一金属层形成为具有在单轴方向上拉伸的轴向特性的形状,并且第一金属层被涂覆有第二金属层 金属层以围绕第一金属层的轴线。 第一金属层含有锌,第二金属层不含锌,但含有锡。
    • 10. 发明专利
    • Measuring method of impurity in semiconductor wafer and measuring program of impurity in semiconductor wafer
    • 半导体波导中的测量方法和SEMICONDUCTOR WAFER中的测量程序
    • JP2002372525A
    • 2002-12-26
    • JP2001181790
    • 2001-06-15
    • Toshiba Corp株式会社東芝
    • TOMITA MITSUHIROSUZUKI MASAMICHITATEBE TETSUYAKOZUKA SHOJI
    • G01N1/28G01N23/203G01N23/225G01N27/62G01N31/00G01N33/00H01L21/66
    • G01N23/225G01N23/203Y10T436/24
    • PROBLEM TO BE SOLVED: To provide a measuring method of impurities in a semiconductor wafer capable of determining by which technique the true or the most probably true depth direction concentration distribution is acquired, from among a plurality of techniques for acquiring the depth direction concentration distributions. SOLUTION: This method is characterized by having a process for acquiring the reference surface concentration by measuring the surface concentration of the impurities in the semiconductor wafer by a chemical analysis method, a nuclear reaction method, or a Rutherford back scattering spectroscopy, and measuring the depth direction concentration distribution of the impurities in the semiconductor wafer by the plurality of techniques, a process 4 for converting the multiple depth direction concentration distributions into surface concentrations, respectively, and a process for selecting the most similar value to the reference surface concentration from among the converted surface concentrations, and determining the depth direction concentration distribution imparting the selected surface concentration as the accurate depth direction concentration distribution.
    • 要解决的问题:从用于获取深度方向浓度分布的多种技术中,提供能够确定由哪种技术获得真实或最可能的真深度方向浓度分布的半导体晶片中的杂质的测量方法。 解决方案:该方法的特征在于具有通过化学分析法,核反应法或卢瑟福背散射光谱法测量半导体晶片中的杂质的表面浓度来获取参考表面浓度的方法,并测量深度 通过多种技术在半导体晶片中的杂质的方向浓度分布,分别将多个深度方向浓度分布转换成表面浓度的方法4和从参考表面浓度中选择最相似的值的方法 转化表面浓度,并确定赋予所选择的表面浓度作为精确的深度方向浓度分布的深度方向浓度分布。