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1. 发明专利

JPH04202776A LOADING DEVICE 失效
公开(公告)号：JPH04202776A
公开(公告)日：1992-07-23
申请号：JP33669190
申请日：1990-11-30
申请人： TOKUDA SEISAKUSHO , SONY CORP
发明人： KONOSHIMA EIJI , KATO NAOKI , KINOKIRI KYOJI , IKEDA JIRO
IPC分类号： C23C14/56 , B65H5/14 , B65H7/16 , C23C14/50 , H01L21/677 , H01L21/68
摘要： PURPOSE:To reduce the load on a driving mechanism and to smoothly rotate and reciprocate a loading device by winding a pipeline on a rotating shaft, then connecting the pipeline to an external device and absorbing the shock produced when a suction head is reversed. CONSTITUTION:The vacuum chucks 41 and 41' for a substrate 2 are provided on both sides of a suction head 42 in plural stages. The head is vertically moved by an air cylinder 442, and the substrate 2 is loaded into a film forming chamber 5 and simultaneously delivered to a substrate conveyor from the chamber 5. A couple of pipelines 45 and 45' are wound on a rotating shaft 43 and then connected to external devices 46 and 46', and the momentum of the rotating shaft 43 is absorbed by the circumferential direction of the pipelines 45 and 45' to reduce the load on a driving mechanism 44. A couple of shock absorbers 47 and 47' are integrated with the moving part of the air cylinder 442 with the shaft 43 in between to absorb the shock produced when the head 42 is reversed.

2. 发明专利

JPH04202775A DEVICE FOR LOADING SUBSTRATE 失效
公开(公告)号：JPH04202775A
公开(公告)日：1992-07-23
申请号：JP33669090
申请日：1990-11-30
申请人： TOKUDA SEISAKUSHO , SONY CORP
发明人： KATO NAOKI , KONOSHIMA EIJI , KINOKIRI KYOJI , IKEDA JIRO
IPC分类号： B65H7/16 , B65G47/91 , B65H5/14 , C23C14/50 , C23C14/56 , G11B7/26 , H01L21/677
摘要： PURPOSE:To reduce the load on a driving mechanism and to surely, safely and efficiently convey a substrate by reciprocating a suction head vertically and rotationally and absorbing the resultant shock by a shock absorber. CONSTITUTION:Vacuum chucks 41 and 41' for a substrate 2 are provided on both sides of a suction head 42 in two lines. The head is vertically moved by an air cylinder 442, and the substrate 2 is loaded in a film forming chamber 5 or delivered to a substrate conveyor from the chuck 5. A couple of pipelines 45 and 45' are wound on a rotating shaft 43 and then connected to external devices 46 and 46', and the momentum of the shaft 43 is absorbed by the circumferential direction of the pipelines 45 and 45' to reduce the load on a driving mechanism 44. A couple of shock absorbers 47 and 47' are integrated with the moving part of the air cylinder 442 with the shaft 43 in between, and the shock produced when the suction head 42 is reversed is absorbed.

3. 发明专利

JPH0432565A METHOD FOR FIXING TARGET OF SPUTTERING DEVICE 失效
公开(公告)号：JPH0432565A
公开(公告)日：1992-02-04
申请号：JP13902290
申请日：1990-05-29
申请人： TOKUDA SEISAKUSHO , SONY CORP
发明人： KATO NAOKI , KINOKIRI KYOJI , IKEDA JIRO
IPC分类号： C23C14/34
摘要： PURPOSE:To allow the simple and easy attachment and detachment of a target by screwing and fixing nearly the central part and outer peripheral flange part of the target to a backing plate from a film forming chamber side and sealing the central screw part with a sealing member which is the same material as the material of the target. CONSTITUTION:The target 24 faces the inside of the film forming chamber 21 and is fixed to the backing plate 25. The central part thereof is screwed and fixed by a screw 25a, such as bolt, and the outer peripheral flange part by plural relatively small screws 25b, respectively from the target 24 side. The head part of the above-mentioned screw 25a is deeply positioned and mounted in the central recess 24a of the target 24 and a recessed part 24a is sealed to cover the screw 25a by the sealing member 29 which is the same material as the material of the target 24. The screw is thus so constituted as to be flush with the surface of the target 24 and to be free from ruggedness. Abnormal discharge and the contamination of the film forming chamber 21 are prevented in this way and the easy exchange of the target 24 from the film forming chamber 21 side is executed.

4. 发明专利

JPH04129916A CONVEYING DEVICE 失效
公开(公告)号：JPH04129916A
公开(公告)日：1992-04-30
申请号：JP25099390
申请日：1990-09-20
申请人： TOKUDA SEISAKUSHO
发明人： KONOSHIMA EIJI , KATO NAOKI , UTSUNOMIYA NOBUAKI
IPC分类号： B65G25/00 , B25J9/00 , B65G47/80 , B65G47/86 , C23C14/00 , C23C14/56 , G11B7/26 , H01L21/677 , H01L21/68
摘要： PURPOSE:To simplify structure and make it compact by providing a pair of rotary bodies disposed to oppose each other and make reciprocal rotary movements in the directions opposite to each other, and receiving trays fixed to respective rotary shafts of the rotary bodies at different heights. CONSTITUTION:If a drive source 52 causes rotation in the direction of the arrow X, a gear 51 is rotated in the direction of the arrow X, and rotary bodies 53, 53' engaging with the gear 51 together with receiving trays 54, 54' make rotary movements in directions opposite to each other. As a result, the receiving trays 54, 54' while being kept parallel to each other move to part from each other until there is no overlapping area. Since the gear 51 is reciprocated in the direction of the arrow X and in the opposite direction to cause the receiving trays 54, 54' make only arcuate rotary movement around the rotary shafts of the rotary bodies 53, 53', the reciprocal movement, locus due to the rotary movement becomes short, the area occupied by the movement is considerably reduced, and the device is made compact.

5. 发明专利

JPH04129915A CONVEYING DEVICE 失效
公开(公告)号：JPH04129915A
公开(公告)日：1992-04-30
申请号：JP25099190
申请日：1990-09-20
申请人： TOKUDA SEISAKUSHO
发明人： KONOSHIMA EIJI , KATO NAOKI , UTSUNOMIYA NOBUAKI
IPC分类号： B65G25/00 , B25J9/00 , B65G47/80 , B65G47/86 , C23C14/00 , C23C14/56 , G11B7/26 , H01L21/677 , H01L21/68
摘要： PURPOSE:To simplify structure and make it compact by providing a drive source for driving a support arm to drive a first and a second rotary bodies for rotation around a disk so that a receiving tray is reciprocated. CONSTITUTION:A support arm 55 is secured at its central part to a drive source 56 of a motor. When the arm 55 receives a rotary drive force, first rotary bodies 52, 52' in contact with the outer circumferential surface of a disk 51, and second rotary bodies 53, 53' respectively in contact with the outer circumferential surfaces of the first rotary bodies 52, 52' rotate in the directions of the arrows X, with each of the rotary bodies pivoted on the support arm. As a result, receiving trays 54, 54' respectively secured to the shafts 53a, 53a' make relative movement in the directions opposite to each other on both sides of the disk 51 to convey base boards 2. Since the receiving trays 54, 54' are attached to paired second rotary bodies 53, 53' at different heights, they can make relative opposing movements when the rotary direction of the drive source 56 is reversed in the next sequence without colliding with each other.

6. 发明专利

JPH0311100B2 失效
公开(公告)号：JPH0311100B2
公开(公告)日：1991-02-15
申请号：JP14206485
申请日：1985-06-28
申请人： TOSHIBA KK , TOKUDA SEISAKUSHO KK
发明人： OKETA TATSUO , KATO NAOKI
IPC分类号： H01L21/68 , H01L21/22 , H01L21/67

7. 发明专利

JPH0463277A PIPING DEVICE FOR REPEATED ROTATING MECHANISM 失效
公开(公告)号：JPH0463277A
公开(公告)日：1992-02-28
申请号：JP17552890
申请日：1990-07-03
申请人： TOKUDA SEISAKUSHO
发明人： KONOSHIMA EIJI , KATO NAOKI
IPC分类号： C23C14/56 , C23C14/50
摘要： PURPOSE:To reduce the size of the device and to enhance its safety by winding a piping which is fixed at one end to a repeated rotating a mechanism and is connected to the other end to an external mechanism around the revolving shaft of the repeated rotating mechanism. CONSTITUTION:A substrate 2 attracted by an attracting pad 21 is attracted to a vacuum chuck 41 by the external apparatus 49 and is supplied by the revolution X2 of the revolving shaft 43 of the repeated rotating mechanism 4 and the vertical movement Y2 of an air cylinder 45 into a film forming chamber 5 so as to carry out the film formation. The vacuum chuck 41 is connected from a take-out port 47' mounted in the diametral direction of the revolving shaft 43 to a synthetic resin piping 48' via a head 42 and a suction and discharge cavity 46 in the head revolving shaft 43. This piping 48' is wound plural times relatively gently so as to exist along the outer side face of the revolving shaft 43 and thereafter, the other end part is connected to the external apparatus 49 consisting of a branch piping 49a, etc. The constitution of the piping 48' part is greatly miniaturized.

8. 发明专利

JPS622615A POSITIONING DEVICE FOR WAFER BOAT 失效
公开(公告)号：JPS622615A
公开(公告)日：1987-01-08
申请号：JP14206485
申请日：1985-06-28
申请人： TOSHIBA CORP , TOKUDA SEISAKUSHO
发明人： OKETA TATSUO , KATO NAOKI
IPC分类号： H01L21/68 , H01L21/22 , H01L21/67
摘要： PURPOSE:To enable a wafer boat to be exactly positioned at the fixed place of a receiving tray, by arranging pushers on both sides of the wafer boat and mounting a spring which absorbs shock caused by the pressing strength of the pushers. CONSTITUTION:In order to position a wafer boat 2, the boat 2 is placed on a saucer 3 by an elevator and thereafter both driving means 33 and 34 on both sides of the wafer boat are simultaneously operated to press the wafer boat from right and left sides with the first pusher 31 and second pusher 32. Because the pressing strength of the first pusher 31 is balanced with that of the second pusher 32, the wafer boat is exactly positioned at the central part of the receiving tray 3. Then, a coil spring 38, mounted on the side of the first pusher 31, has an action of absorbing shock caused by the pressing strength of the second pusher 32, and therefore the pressing strength can be balanced without sophisticated control.

9. 发明专利

JP2004070998A Automobile audio system 审中-公开
公开(公告)号：JP2004070998A
公开(公告)日：2004-03-04
申请号：JP2002225665
申请日：2002-08-02
申请人： Sony Corp , ソニー株式会社
发明人： KATO NAOKI
IPC分类号： G11B20/10 , G11B27/02 , G11B27/034
摘要： PROBLEM TO BE SOLVED: To eliminate duplicate storing of audio data having the same contents when the contents of a plurality of disks are stored in a large capacity memory. SOLUTION: A disk changer 26 is provided in an automobile audio device. When an instruction is given to copy the disks 28 within the disk changer 26 in a disk unit or an audio data unit onto a large capacity memory such as an HD36 within an HDD34 for example, discrimination is made to determine the presence of the sameness by collating the extension information of every audio data (music), for which copying is instructed, with the extension information of audio data which are already stored in the memories 34 and 36. When it is decided that sameness exists according to the decision result, copying of the audio data to the memories 34 and 36 is stopped or a request is made to determine whether the copying is to be conducted or not while displaying the fact that there is the sameness. COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2004066872A On-vehicle electronic device 审中-公开
公开(公告)号：JP2004066872A
公开(公告)日：2004-03-04
申请号：JP2002225666
申请日：2002-08-02
申请人： Sony Corp , ソニー株式会社
发明人： KATO NAOKI
IPC分类号： B60R16/033 , B60R16/02
摘要： PROBLEM TO BE SOLVED: To prevent an on-vehicle battery from becoming dead due to emission of turning off of power supply, even if a car audio device is mounted on a vehicle having no ACC position. SOLUTION: When it is set that there is no ACC position, set time for determining sleep condition detection timing set in advance is counted when mode becomes OFF mode. Voltage A of the on-vehicle battery 30 when starting counting time and voltage B of the on-vehicle battery 30 when the set time elapses are detected. The operation for determining whether the ratio B/A drops below a reference ratio set in advance or not is repeated until the result of determination that the ratio drops below the reference ratio is obtained. When the ratio drops below the reference ratio, mode is set to low consumption electric power mode (sleep mode). COPYRIGHT: (C)2004,JPO

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