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1. 发明专利

JP2013199942A Cryopump and manufacturing method thereof 有权
标题翻译： CRYOPUMP及其制造方法
公开(公告)号：JP2013199942A
公开(公告)日：2013-10-03
申请号：JP2013143227
申请日：2013-07-09
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopump for discharging non-condensable gas such as hydrogen at a high speed and a method for manufacturing such a cryopump.SOLUTION: A cryopump 10 includes an array 14 of a plurality of cryosorption panels 50 enveloped by a cryopump internal open space 30 opened to a cryopump opening 31, and a radiation shield 16 for enveloping the cryopump internal open space 30. At least one of the plurality of the cryosorption panels 50 includes a panel end projecting to the cryopump internal open space 30 so as to be oriented to the radiation shield 16. The panel end has an area 82 where an adsorbent is lacking.
摘要翻译：要解决的问题：提供一种用于高速排出氢气等不可冷凝气体的低温泵以及制造这种低温泵的方法。解冻器：低温泵10包括多个冷冻吸收板50的阵列14，其包围有低温泵内部开放空间30打开到低温泵开口31，以及用于包封低温泵内部开放空间30的辐射屏蔽16.多个冷冻接收面板50中的至少一个包括突出到低温泵内部开放空间30的面板端被定向到辐射屏蔽16.面板端部具有缺少吸附剂的区域82。

2. 发明专利

JP2012219810A Cryopump and evacuation method 有权
标题翻译： CRYOPUMP和EVACUATION方法
公开(公告)号：JP2012219810A
公开(公告)日：2012-11-12
申请号：JP2011090347
申请日：2011-04-14
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
CPC分类号： F04B37/14 , F04B37/02
摘要： PROBLEM TO BE SOLVED: To provide a cryopump that contributes to reduction in power consumption, and an evacuation method using the cryopump.SOLUTION: A cryopump 10 includes: a refrigerator for cooling a cryopanel; and a CP controller 100 that can receive, from an ion implantation apparatus 1, a control signal representing an operation mode thereof and controls the refrigerator based on the control signal. The operation mode includes: a radiation mode in which a beam is radiated to a target; and an idle mode in which a beam is turned away from a target or continues the beam at a level lower than the radiation mode. The CP controller 100 controls the refrigerator such that the cryopanel is cooled to a cooling temperature for holding a gas molecule in the radiation mode and the idle mode, and allows the cooling temperature to be higher than that in the radiation mode during at least a portion of a period in the idle mode.
摘要翻译：要解决的问题：提供有助于降低功耗的低温泵和使用低温泵的排气方法。解决方案：低温泵10包括：用于冷却低温板的冰箱; 以及可以从离子注入装置1接收表示其操作模式的控制信号并根据控制信号控制冰箱的CP控制器100。操作模式包括：辐射模式，其中光束被辐射到目标; 以及空闲模式，其中光束远离目标或将光束延续在低于辐射模式的水平。 CP控制器100控制冰箱，使得冷冻板被冷却到用于将气体分子保持在辐射模式和空闲模式的冷却温度，并且在至少一部分期间允许冷却温度高于放射模式中的冷却温度在空闲模式下的一段时间。版权所有（C）2013，JPO＆INPIT

3. 发明专利

JP2012237263A Cryopump, and manufacturing method thereof 有权
标题翻译： CRYOPUMP及其制造方法
公开(公告)号：JP2012237263A
公开(公告)日：2012-12-06
申请号：JP2011107670
申请日：2011-05-12
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
CPC分类号： F04B37/08 , Y10T29/49236
摘要： PROBLEM TO BE SOLVED: To provide a cryopump for high speed exhaustion of a non-condensable gas such as hydrogen, and to provide a method for manufacturing such the cryopump.SOLUTION: The cryopump 10 includes an array 14 of a plurality of cryosorption panels 50 enveloped by a cryopump internal open space 30 opened to a cryopump opening 31, and a radiation shield 16 for enveloping the cryopump internal open space 30. At least one of the plurality of cryosorption panels 50 has its panel front surface divided into an adsorption area 76 for a non-condensable gas and a condensation area 82 for a condensable gas.
摘要翻译：要解决的问题：提供一种用于高速耗尽诸如氢的不可冷凝气体的低温泵，并提供制造这种低温泵的方法。解冻方案：低温泵10包括由低温泵内部开放空间30包围的多个低温吸收板50的阵列14，该低温泵内部开放空间30开放到低温泵开口31，以及用于包封低温泵内部开放空间30的辐射屏蔽层16.至少多个冷冻吸收板50中的一个具有其面板前表面，其分为用于不可冷凝气体的吸附区域76和用于可冷凝气体的冷凝区域82。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2011117464A Cryopump 审中-公开
标题翻译：低温泵
公开(公告)号：JP2011117464A
公开(公告)日：2011-06-16
申请号：JP2011066403
申请日：2011-03-24
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopump which efficiently and respectively exhausts plural kinds of gas at the same time, because the kinds of gas to be exhausted by the cryopump vary with uses and further, in most cases, the gas to be exhausted is mixed gas of plural kinds of gas. SOLUTION: The cryopump 10 includes a cryopump container 12, a refrigerator 14, a low-temperature panel 16, an intermediate panel 18, and a radiation shield 20. The cryopump container 12 has an inlet port for allowing to enter the gas to be exhausted. The radiation shield 20 has an opening at an end. The low-temperature panel 16 is arranged inside the radiation shield 20 and is cooled to a temperature lower than the radiation shield 20. The intermediate panel 18 is cooled to a temperature lower than the radiation shield 20 and higher than the low-temperature panel 16. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供一种同时有效地分别排出多种气体的低温泵，由于由低温泵排出的气体的种类随着用途而变化，并且在大多数情况下，气体被排出的是多种气体的混合气体。解决方案：低温泵10包括低温泵容器12，冰箱14，低温板16，中间板18和辐射防护罩20.低温泵容器12具有用于允许进入气体的入口要疲惫辐射屏蔽件20在一端具有开口。低温面板16布置在辐射屏蔽20的内部并被冷却到低于辐射屏蔽20的温度。中间面板18被冷却到比辐射屏蔽20低的温度并且高于低温面板16 版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2009215917A Cryopump and evacuation method 有权
标题翻译： CRYOPUMP和EVACUATION方法
公开(公告)号：JP2009215917A
公开(公告)日：2009-09-24
申请号：JP2008058394
申请日：2008-03-07
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a highly practical cryopump and an evacuation method capable of achieving both a high evacuation speed and a low cooling temperature. SOLUTION: The cryopump 10 is provided with a radiation shield 18, cryopanels 24 surrounded by the radiation shield 18 and cooled to a temperature lower than that of the radiation shield 18, and a baffle 23 thermally connected to the radiation shield 18 and arranged at a front stage of the cryopanel 24. A clearance between the inner face of the radiation shield 18 and the baffle 23 is set corresponding to the required evacuation speed of gas to be evacuated by the cryopanel 24, and the baffle 23 is arranged in a position offset from an opening 20 so that a cooling attainment temperature of the cryopanel 24 becomes lower than that when the baffle 23 is arranged in the opening 20. The gas to be evacuated by the cryopanel 24 is evacuated at the required evacuation speed. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够实现高排气速度和低冷却温度的高度实用的低温泵和排气方法。解决方案：低温泵10设置有辐射屏蔽18，由辐射屏蔽18围绕并被冷却到低于辐射屏蔽18的温度的低温波通道24，以及热连接到辐射屏蔽18的挡板23和布置在冷冻板24的前段。辐射屏蔽体18的内表面与挡板23之间的间隙被设定为对应于由冷冻板24排出的气体所需的抽空速度，并且挡板23设置在偏离开口20的位置，使得冷冻板24的冷却达到温度变得低于当挡板23布置在开口20中时的冷却达到温度。由冷冻板24排出的气体以所需的排气速度被抽真空。版权所有（C）2009，JPO＆INPIT

6. 发明专利

JP2013170568A Cryopump, method for regenerating cryopump, and device for controlling cryopump 有权
标题翻译： CRYOPUMP，再生CRYOPUMP的方法和用于控制CRYOPUMP的装置
公开(公告)号：JP2013170568A
公开(公告)日：2013-09-02
申请号：JP2012037239
申请日：2012-02-23
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08 , F04B37/16
CPC分类号： B01D8/00 , F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopump with a small number of temperature sensors arranged so as to be useful in shortening a temperature rise time.SOLUTION: A cryopump 10 includes: an one-step panel 20 cooled by an one-step stage 22 of a refrigerator 16; a two-step panel 18 cooled by a two-step stage 24 of the refrigerator 16; panel temperature sensors 94 and 96 provided in at least one side of the one-step panel 20 and the two-step panel 18; stage temperature sensors 90 and 92 provided on at least one side of the one-step stage 22 and the two-step stage 24; and a control section 100 for controlling evacuation based on the measured temperatures of the stage temperature sensors 90 and 92. The control section 100 controls the regeneration including a temperature rise step for the cryopanel and uses the measured temperatures of the panel temperature sensors 94 and 96 exclusively in the regeneration. The control section 100 completes the temperature rise step based on the measured temperatures of the panel temperature sensors 94 and 96.
摘要翻译：要解决的问题：提供具有少量温度传感器的低温泵，其布置成可以有助于缩短温度上升时间。解冻：低温泵10包括：由一步级22冷却的一步式面板20 的冰箱16; 由冰箱16的两级台24冷却的两级面板18; 设置在一步面板20和两步面板18的至少一侧的面板温度传感器94和96; 设置在一级级22和两级级24的至少一侧的级温度传感器90和92; 以及控制部分100，用于根据台架温度传感器90和92的测量温度来控制排气。控制部分100控制包括用于冷冻板的升温步骤的再生，并使用面板温度传感器94和96的测量温度专门在再生。控制部100基于面板温度传感器94,96的测定温度来完成升温步骤。

7. 发明专利

JP2009174470A Cryopump and vacuum-exhaust method 有权
标题翻译： CRYOPUMP和真空排气方法
公开(公告)号：JP2009174470A
公开(公告)日：2009-08-06
申请号：JP2008015419
申请日：2008-01-25
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To efficiently exhaust each of a plurality of kinds of mixture gases at the same time. SOLUTION: The cryopump 10 is configured by including a cryopump container 12, a refrigerator 14, a low temperature panel 16, an intermediate panel 18, and a radiation shield 20. The cryopump container 12 has an intake port into which gases to be exhausted advance. The radiation shield 20 has an opening at one end. The low temperature panel 16 is disposed inside the radiation shield 20 and is cooled to a temperature lower than that of the radiation shield 20. The intermediate panel 18 is cooled to a temperature lower than that of the radiation shield 20 and higher than that of the low temperature panel 16. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：同时有效地排出多种混合气体中的每一种。解决方案：低温泵10通过包括低温泵容器12，冰箱14，低温板16，中间板18和辐射屏蔽罩20构成。低温泵容器12具有进气口，气体被疲惫的提前。辐射屏蔽件20在一端具有开口。低温面板16设置在辐射屏蔽体20的内部并被冷却到比辐射屏蔽20的温度低的温度。中间面板18被冷却到比辐射屏蔽20低的温度，并且高于低温面板16.版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2009062892A Cryopanel 有权
标题翻译： CRYOPANEL
公开(公告)号：JP2009062892A
公开(公告)日：2009-03-26
申请号：JP2007231824
申请日：2007-09-06
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopanel improved in exhaust gas speed, and solidification and adsorption efficiency.
SOLUTION: A panel part 12 of the cryopanel 10 includes a plurality of panel pieces 12A. Each panel piece 12A is a plate shape member having a U-shape section and has an active layer formed on an inside surface of the U-shape. The panel piece 12A comprises a first plate part 12a positioned at the center of the U-shape, and a pair of second plate parts 12b positioned at both ends of the first plate part 12a. The first plate part 12a of one panel piece 12A is connected to the second plate part 12b of another panel piece 12A and the same are connected in a mosaic shape to extend from a heat transfer plate 11. Also, each panel piece 12A is arranged to orient the U-shape in one of directions of an upstream direction, a side outer direction, or a downstream direction of a gas channel.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种提高废气速度的凝固和吸附效率的低温板。解决方案：冷冻板10的面板部件12包括多个面板件12A。每个板件12A是具有U形截面的板形构件，并且在U形内表面上形成有效层。面板件12A包括位于U形中心的第一板部分12a和位于第一板部分12a的两端的一对第二板部分12b。一个面板件12A的第一板部分12a连接到另一个面板件12A的第二板部分12b，并且它们以马赛克形状连接以从传热板11延伸。而且，每个面板件12A被布置成在气体通道的上游方向，侧面外方向或下游方向的一个方向上取向U形。版权所有（C）2009，JPO＆INPIT

9. 发明专利

JP2009062891A Cryopanel 有权
标题翻译： CRYOPANEL
公开(公告)号：JP2009062891A
公开(公告)日：2009-03-26
申请号：JP2007231823
申请日：2007-09-06
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopanel improved in exhaust gas velocity, solidification and adsorption efficiency.
SOLUTION: The cryopanel 10 includes panel pieces 12A radially arranged around a heat transfer plate 11 in a plane view from an upper part opening 2A of a vacuum vessel 2. All of six panel pieces 12A have an identical shape, and a symmetry axis of each panel pieces 12A is radially arranged at a constant interval around the heat transfer plate 11. Namely, each panel piece 12A is radially arranged at a constant interval around the center axis of a cup shape shield 4 in the plane view from the upper part opening 2A of the vacuum vessel 2. Panel parts 12 including the twelve panel pieces 12A, are provided in three stages in a gas flow-in direction, and the thirty six panel pieces 12A are supported by a support member 11.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种提高废气速度，固化和吸附效率的低温板。解决方案：冷冻板10包括从真空容器2的上部开口2A的俯视图中径向布置在传热板11周围的面板件12.所有六个面板件12A具有相同的形状和对称性每个面板片12A的轴线在传热板11周围以恒定的间隔径向布置。也就是说，每个面板片12A在从上部的平面图中围绕杯形屏蔽件4的中心轴线以恒定的间隔径向布置真空容器2的部分开口2A。包括十二个面板件12A的面板部件12在气体流入方向上分三级设置，三十六个面板件12A由支撑部件11支撑。版权所有（C）2009，JPO＆INPIT

10. 发明专利

JP2009062890A Cryopanel 有权
标题翻译： CRYOPANEL
公开(公告)号：JP2009062890A
公开(公告)日：2009-03-26
申请号：JP2007231822
申请日：2007-09-06
申请人： Sumitomo Heavy Ind Ltd , 住友重機械工業株式会社
发明人： FUKUDA SUSUMU
IPC分类号： F04B37/08
摘要： PROBLEM TO BE SOLVED: To provide a cryopanel improved in exhaust gas velocity, solidification and adsorption efficiency.
SOLUTION: The cryopanel 10 includes a heat transmission plate 11 and a panel part 12. The heat transmission plate 11 includes an attachment plate 11B and a support member 11A comprising a plate shape body bent in a U-shape. Two hole parts 11a for screwing a second stage refrigeration stage 8B are formed at a top part of the support member 11A. The attachment plate 11B is a member for attaching the panel part 12 and is screwed on the support member 11A. The panel part 12 comprises four panel pieces 12A. Each panel piece 12A comprises an annular thin plate and the diameter of each is set to keep difference of the diameter constant. Each panel piece 12A is attached to the attachment plate 11B by soldering under a condition where the same is concentrically arranged. Active layers are formed on both surfaces of the panel parts 12.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种提高废气速度，固化和吸附效率的低温板。解决方案：冷冻板10包括传热板11和面板部12.传热板11包括安装板11B和包括弯曲成U形的板状体的支撑部件11A。在支撑构件11A的顶部形成有用于旋拧第二级制冷台8B的两个孔部11a。安装板11B是用于安装面板部件12的部件，并且被拧在支撑部件11A上。面板部件12包括四个面板件12A。每个板件12A包括环形薄板，并且每个板件的直径被设定为保持直径不变。每个板件12A通过在相同同心布置的条件下通过焊接而附接到附接板11B。活性层形成在面板部件12的两个表面上。版权所有：（C）2009，JPO＆INPIT

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