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JP2011071521A Semiconductor device with embedded word line 有权
标题翻译：具有嵌入式字线的半导体器件
公开(公告)号：JP2011071521A
公开(公告)日：2011-04-07
申请号：JP2010214134
申请日：2010-09-24
申请人： Samsung Electronics Co Ltd , 三星電子株式会社Samsung Electronics Co.,Ltd.
发明人： KIM HUI JUNG , OH YONG-CHUL , CHUNG HYUN WOO , KIM HYUN GI , KIM KANG UK
IPC分类号： H01L21/8242 , H01L27/108
CPC分类号： H01L27/10891 , H01L27/0207 , H01L27/10817 , H01L27/10885 , H01L29/4236
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor device with an embedded word line which gives high reliability, and at the same time provides a structure profitable to high integration. SOLUTION: The semiconductor device has: an element isolation film defining an active region in a substrate; a plurality of embedded word lines having an upper surface with lower level than that of the active region, surrounded by the active region, and extending to a first direction parallel to the main surface of the substrate; a gate-insulating film formed in between the embedded word line and the active region; and a plurality of embedded bit lines having the upper surface with the lower level than that of a plurality of the word lines, set in parallel to the main surface of the substrate inside it, and extending to a second direction different from the first direction. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：为了提供具有高可靠性的嵌入式字线的半导体器件，并且同时提供了可以高度集成的结构。解决方案：半导体器件具有：在衬底中限定有源区的元件隔离膜; 多个嵌入字线，其具有比有源区低的上表面，被有源区包围，并延伸到平行于衬底主表面的第一方向; 形成在所述嵌入字线和所述有源区之间的栅极绝缘膜; 以及多个嵌入位线，其具有比多个字线的上表面的下表面的平面高度平行于其内部的基板的主表面，并且延伸到与第一方向不同的第二方向。版权所有（C）2011，JPO＆INPIT

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