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    • 1. 发明专利
    • POSITION DETECTING CIRCUIT
    • JPH02112706A
    • 1990-04-25
    • JP26552788
    • 1988-10-21
    • ANDO ELECTRICSUMITOMO ELECTRIC INDUSTRIES
    • TAKEI SHOICHIYANO TETSUOHATTORI YASUJISUZUKI SHUZO
    • G01B11/00
    • PURPOSE:To simplify the constitution of an optical system by knowing a distance between a beam waist position and an object to be measured from a rise or fall time of a detected signal, and knowing a position relation before and behind the object to be measured from a scattered light of the object to be measured. CONSTITUTION:When an object 6 to be measured is separated from a beam waist position, the beam diameter which intersects the object 6 to be measured becomes large, therefore, a rise of a signal outputted from a photodetector 5 is varied as a broken line from a full line. When the beam is varied by a distance without varying a distribution state in accordance with an expression I, for instance, like an interval extending from 10 to 90%, it is known by a calculation that an interval corresponding to some prescribed ratio of power is proportional to a beam diameter W. As shown clearly in the expression I, when a distance X is fixed, the beam diameter W is fixed respective of a distance in the scanning direction. Accordingly, the distance X in the optical axis direction is known from the time (t) irrespective of the position in the scanning direction of the object 6 to be measured. In such a way, the constitution of an optical system is simplified.
    • 2. 发明专利
    • OPTICAL DIMENSION MEASURING DEVICE
    • JPH0231102A
    • 1990-02-01
    • JP18202688
    • 1988-07-21
    • ANDO ELECTRICSUMITOMO ELECTRIC INDUSTRIES
    • TAKEI SHOICHIYANO TETSUOHATTORI YASUJISUZUKI SHUZO
    • G01B11/02
    • PURPOSE:To obtain a measured result stable over a long period of time by obtaining a measured value, wherein the variation of a circumferential condition is corrected, by subtracting the deviation data of a reference master from that of an object to be measured. CONSTITUTION:A reference 8 to be used has material quality and a wire diameter almost same to those of an object 5 to be measured and is arranged between lenses 3, 4. In this case, the object 5 to be measured and the master 8 are arranged in parallel so as not to become shadows each other. Deviation is caused by the thermal expansion or contraction of the object 5 to be measured or master 8 according to circumstances but, for the most part, by the mechanical distortion, expansion and contraction of the first measuring systems 3-7 and the second measuring systems 11-14 or the output variation of a light source 1, the intensity of beam and the variation of the center of gravity. Therefore, by subtracting the deviation of the master 8 from the measured result of the object 5 to be measured, the correct measured value of the object 5 to be measured can be calculated.
    • 3. 发明专利
    • MEASURING INSTRUMENT FOR OUTSIDE DIAMETER
    • JPH0228504A
    • 1990-01-30
    • JP17814688
    • 1988-07-19
    • SUMITOMO ELECTRIC INDUSTRIESANDO ELECTRIC
    • HATTORI YASUJISUZUKI SHUZOTAKEI SHOICHIYANO TETSUO
    • G01B11/08
    • PURPOSE:To improve a stability for a measuring value by using a single polarizing laser with a stabilized frequency as a light source. CONSTITUTION:The single polarizing laser with the stabilized frequency, e.g., a frequency stabilized He-Ne laser for the single polarizing oscillation is used as the light source 18. Luminous fluxes of the laser 18 oscillated by a power source 16 for the laser are transmitted to a rotary mirror 3 through a mirror 6. This rotary mirror 3 is provided on a driving system 2 and driven by a driver 1, thereby the luminous fluxes are deflected in an internal of 11-11A and made to be the parallel luminous fluxes 12-12A through a lens 13. These parallel luminous fluxes 12-12A are orthogonally crossed with an axis direction of a columnar object 7 to be inspected, by which interrupted in the time interval proportional to the outside diameter, then transmitted to a detector 9 through a condensing lens 8 and an aperture 17. A photoelectric conversion is made for an output signal of this detector 9, and the signal is transmitted to a signal processing circuit 14 through an amplifier 10. In this circuit 14, an edge is detected by the beam which is interrupted with the object 7 to be inspected, and the outside diameter of the object 7 is obtained by means of counting a clock pulse for the edge interval.
    • 5. 发明专利
    • DIMENSION MEASURING INSTRUMENT USING LIGHT
    • JPH03267704A
    • 1991-11-28
    • JP6563190
    • 1990-03-16
    • ANDO ELECTRIC
    • TAKEI SHOICHIYANO TETSUO
    • G01B11/02
    • PURPOSE:To easily position a body to be measured and to obtain a measurement result with good reproducibility by adjusting the position of a beam waist to the position of the body to be measured at all times. CONSTITUTION:When the body 6 to be measured is irradiated with parallel scanning light and its formed shadow is detected by a photodetecting element 5 to measure the dimension, a beam diameter conversion lens 31 set on a uniaxial driving mechanism 30 is moved first by a pulse motor 29 by a constant quantity in a predetermined direction and the outputs of a counter circuit 24 before and after the movement are compared with each other to detect the beam waist position on the body 6 to be measured. Then the motor 29 is rotated to shift the beam waist position by a constant quantity every time the parallel scanning light makes a scan, thereby setting the beam waist position nearby the body 6 to be measured. Consequently, the excellent reproducibility can be obtained without accurately positioning the body to be measured.
    • 6. 发明专利
    • OPTICAL DIMENSION MEASURING DEVICE FOR MEASURING SHORT AND LONG DIMENSIONS
    • JPH05231827A
    • 1993-09-07
    • JP6909492
    • 1992-02-18
    • ANDO ELECTRIC
    • YANO TETSUOTAKEI SHOICHI
    • G01B11/02G01B11/08
    • PURPOSE:To measure dimensions of an object to be measured without increasing the size of a lens by driving a scanner with AC when measuring an object to be measured with short dimensions and then driving the scanner with DC when measuring an object to be measured with long dimensions. CONSTITUTION:When measuring an object 10 to be measured with short dimensions, the output of an AC voltage generation circuit 1A is supplied to a galvano-type scanner 3 and a shape which is generated when the object 10 to be measured obstructs a parallel scanning beam 13 is detected by a light receiver 5 to measure the length of the object to be measured 10. When measuring the object 10 to be measured of long dimensions. the output of a DC voltage generation circuit 1B is supplied to the galvano-type scanner 3, the object 10 to be measured is moved in a direction which crosses the parallel scanning beam 13 with a drive mechanism 6. and a linear scale 7 reads the positions of starting and ending edges where the object 10 to be measured obstructs one optical beam 14, thus measuring the length of the object 10 to be measured.
    • 8. 发明专利
    • DIMENSION MEASURING INSTRUMENT BY LIGHT
    • JPS626104A
    • 1987-01-13
    • JP5134585
    • 1985-03-14
    • ANDO ELECTRIC
    • TAKEI SHOICHISUZUKI HIDEOYANO TETSUO
    • G01B11/02
    • PURPOSE:To erase a measuring error by dividing into two an output of a photodetector, which has been condensed, when an object to be measured exists in an optical path of parallel scanning rays, and when said object does not exist, and comparing a value which has been added by sample holding, and the output of the photodetector. CONSTITUTION:Parallel scanning rays 1 are condensed by a lens 3, and an output of a photodetector 4 is divided into two by ad dividing device 11. In this state, an output V of the time when an object to be measured 2 does not exist s divided into two and V/2 is sample-held 12 by a signal 17. Also, an output V0 of the time when the object to be measured 2 exists is divided into two and V0/2 is sample-held 13 by a signal 18. By adding both sample values, V1=(V-V0) is derived. Next, the output V of the photodetector 4 is compared with the output V1 by a comparator 15, and a voltage VC corresponding to V/2 is derived by an expression. In this way, an output to a dimension 10 which has eliminated an error caused by a shadow is obtained, and a measuring error caused by the shadow can be eliminated.