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    • 7. 发明专利
    • METHOD FOR JOINTING ANODE
    • JPH0664979A
    • 1994-03-08
    • JP22150192
    • 1992-08-20
    • ISHIZUKA GLASS
    • YAMAMOTO SATORUYAMAUCHI TAKESHI
    • C04B37/02H01L21/02H01L21/316H01L27/12
    • PURPOSE:To provide a method so designed that anode is brought into contact with one side of an electrical insulating material and a specified cathode is brought into contact with the opposite side followed by injecting direct current into the resulting circuit, thereby easily making the rate of jointing constant and preventing the temperature fall of the insulating material through avoiding accidental shortcircuiting. CONSTITUTION:An anode jointing system is composed of (A) an electrical insulating material 1 such as a glass, (B) anode 2 such as a silicon wafer, (C) cathode 3 inert to the alkali salt used, consisting of a porous plate (e.g. a cloth) having such heat resistance as to be higher than the jointing temperature, (D) a liquid electrode feed port 4, and (E) a heater 5. Then, the electrical insulating material 1 is heated to 300-400 deg.C with a relevant heater 9, and when it is heated to a level higher than the melting point of the alkali salt, the alkali salt is heated and melted through the heater 5 and then fed via the feed port 4 onto the surface of the porous plate serving as the cathode 3. A voltage is then applied from a direct current source 8 on both the anode 2 and cathode 3 and the anode is jointed to the insulating material while the porous plate is impregnated with the liquid electrode, thus accomplishing the objective anode jointing.