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JP2013036861A X-ray stress measurement device 有权
标题翻译： X射线应力测量装置
公开(公告)号：JP2013036861A
公开(公告)日：2013-02-21
申请号：JP2011173472
申请日：2011-08-08
申请人： Rigaku Corp , 株式会社リガク
发明人： YASUKAWA SHOICHI , IWATA TOMOYUKI
IPC分类号： G01N23/20
CPC分类号： G01N23/207 , G01L1/25 , G01N2223/3303 , G01N2223/408 , G01N2223/607
摘要： PROBLEM TO BE SOLVED: To provide an X-ray stress measurement device that allows a user to easily, intuitively and accurately know material characteristic information on each portion of a sample.SOLUTION: An X-ray stress measurement device includes: a camera 7 for taking an optical image of a sample S; a display 17 for displaying the optical image; an input device 18 where a point on a screen of the display 17 can be input; an X-ray source 11 for generating X-rays; a table 4 for moving the sample S; an X-ray detector 12 for detecting X-rays R2 having passed through the sample S; a measurement program for determining a measuring point of the sample S on the basis of the point specified by the input device 18 and performing measurement at the determined measuring point of the sample S; a stress calculation program for calculating stress at the measuring point of the sample S on the basis of a signal output from the X-ray detector 12; and an image formation program 22 for displaying the optical image and measuring point of the sample S, an absolute value of the stress, and a stress direction on the same screen of the display 17.
摘要翻译：要解决的问题：提供一种X射线应力测量装置，其允许用户容易地，直观地和准确地知道样品的每个部分上的材料特性信息。解决方案：X射线应力测量装置包括：摄像机7，用于拍摄样品S的光学图像; 用于显示光学图像的显示器17; 可以输入显示器17的画面上的点的输入装置18; 用于产生X射线的X射线源11; 用于移动样品S的工作台4; 用于检测通过样品S的X射线R2的X射线检测器12; 用于根据由输入装置18指定的点确定样本S的测量点并在确定的样本S的测量点进行测量的测量程序; 应力计算程序，用于根据从X射线检测器12输出的信号计算样本S的测量点处的应力; 以及图像形成程序22，用于在显示器17的同一屏幕上显示样品S的光学图像和测量点，应力的绝对值和应力方向。（C）2013，JPO和INPIT

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