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    • 1. 发明专利
    • Spin dryer
    • 旋转干燥机
    • JP2005183892A
    • 2005-07-07
    • JP2003436650
    • 2003-12-17
    • Oomiya Kogyo Kk大宮工業株式会社
    • MIYAJI KENJIKITAMURA AKIRA
    • F26B5/08H01L21/304
    • PROBLEM TO BE SOLVED: To dispense with conventional gas pressure feed means or gas suction means provided on the outside of a drying chamber 22. SOLUTION: A spin dryer comprises a rotation support 8 being rotated on the circumference of a specific rotation central axis 7 and supporting an object w to be subjected to a drying treatment in the vicinity of the specific rotation central axis 7 and a drying chamber 22 with which the rotation support 8 is covered in a sealing manner. An an air suctioning aperture 28 is formed in a first portion of the chamber wall of the drying chamber 22. An air ejecting aperture 29 is formed in a second portion. By an wind making action by rotation of the rotation support 8, air is suctioned from the air suctioning aperture 28 and air is ejected from the air ejecting aperture 29. COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:省略设置在干燥室22的外部的常规气体压力进料装置或气体吸入装置。解决方案:旋转干燥器包括旋转支撑件8,旋转支撑件8在圆周上旋转 在比旋转中心轴7附近支撑待特定旋转中心轴7附近的干燥处理对象物W,以及以密封方式覆盖旋转支撑件8的干燥室22。 在干燥室22的室壁的第一部分中形成有吸气孔28.空气喷射孔29形成在第二部分中。 通过旋转支承件8的旋转引起的制风动作,从空气抽吸孔28吸入空气,空气从空气喷射孔29排出。(C)2005,JPO&NCIPI