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1. 发明专利

JP2006243495A Optical waveguide and its manufacturing method 审中-公开
标题翻译：光波及其制造方法
公开(公告)号：JP2006243495A
公开(公告)日：2006-09-14
申请号：JP2005060746
申请日：2005-03-04
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , Nttエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： HIROTA YOSHINOBU , TAMURA MUNEHISA , WATANABE HIROSHI , INOUE YASUYUKI , MASUDA TAKAMITSU , ITOU MIKITAKA , OTE YASUYOSHI , SATO TERUAKI
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide that has no gap in the upper clad layer, and also to provide a method for forming the waveguide. SOLUTION: A lower clad layer is formed on a substrate, a core film is formed on the lower clad layer. A resist is applied onto the core film and, by rotating a spin coater at high speed, the resist with a uniform thickness is formed. A resist pattern is formed by performing exposure and development using a mask for the resist. Etching is performed for the resist pattern and the core film, so that a core is formed from the core film. Then, a clad is embedded to form an upper clad layer. The mask is a gray mask or a shadow mask. The cross sectional shape of the resist pattern before the core forming step is thick in the resist center part and thin in the edge part. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供在上包层中没有间隙的光波导，并且还提供用于形成波导的方法。解决方案：在基板上形成下包层，在下包层上形成芯膜。将抗蚀剂施加到芯膜上，并且通过高速旋转旋涂机，形成均匀厚度的抗蚀剂。通过使用用于抗蚀剂的掩模进行曝光和显影来形成抗蚀剂图案。对抗蚀剂图案和芯膜进行蚀刻，从而由芯膜形成芯。然后，将包层嵌入以形成上包层。面具是一个灰色的面具或一个荫罩。芯形成步骤之前的抗蚀剂图案的横截面形状在抗蚀剂中心部分较厚并且在边缘部分中较薄。版权所有（C）2006，JPO＆NCIPI

2. 发明专利

JP2009145603A Optical circuit and its adjusting method 有权
标题翻译：光电路及其调整方法
公开(公告)号：JP2009145603A
公开(公告)日：2009-07-02
申请号：JP2007322538
申请日：2007-12-13
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , Nttエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： KAMITOKU MASAKI , KITO TSUTOMU , KAMEI ARATA , GO TAKASHI , SATO TERUAKI , JINNAI HIROMITSU
IPC分类号： G02B6/122 , G02B6/12
摘要： PROBLEM TO BE SOLVED: To adjust an optical characteristic (refractive index) in a plurality of places in an optical circuit. SOLUTION: According to one embodiment of this invention, a refractive index of a waveguide can be adjusted in a plurality of places in an optical circuit. First, the waveguide is irradiated with ultraviolet rays at a first place (step 302), and an optical circuit is heat-treated at a first temperature (step 304). Next, the waveguide is irradiated with ultraviolet rays at a second place (step 306), and the optical circuit is heat-treated at a second temperature lower than the first (step 308). Thus, the ultraviolet irradiation and the heat treatment are performed at respective places of the optical circuit, wherein the heating temperature of the heat treatment is successively lowered, so that the characteristics in the preceding trimmed places are not affected by the succeeding heat treatment. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：调整光电路中的多个位置的光学特性（折射率）。解决方案：根据本发明的一个实施例，可以在光电路中的多个位置调节波导的折射率。首先，首先用紫外线照射波导（步骤302），在第一温度对光电路进行热处理（步骤304）。接下来，在第二位置用紫外线照射波导（步骤306），并且在低于第一温度的第二温度下对光电路进行热处理（步骤308）。因此，在光路的各处进行紫外线照射和热处理，其中热处理的加热温度连续降低，使得先前修剪的位置的特性不受后续热处理的影响。版权所有（C）2009，JPO＆INPIT

3. 发明专利

JP2006030734A Optical waveguide and manufacturing method thereof 审中-公开
标题翻译：光波导及其制造方法
公开(公告)号：JP2006030734A
公开(公告)日：2006-02-02
申请号：JP2004211213
申请日：2004-07-20
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , エヌティティエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： SHIBATA TOMOHIRO , KOMINATO TOSHIMI , HIBINO YOSHINORI , OMORI YASUJI , NIITSU TOMOHARU , SATO TERUAKI
IPC分类号： G02B6/122 , G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide capable of reducing a coupling loss between the optical waveguide and an optical fiber and minimizing a variation of coupling rate of a directional coupler in the surface of substrate, and to provide a manufacturing method of the optical waveguide. SOLUTION: The optical waveguide is manufactured by forming an underclad 12 on a substrate 11, forming a core layer on the underclad 12, forming an upper part core 13a of rectangular cross-section and a lower part core 13b made of flat plate part of prescribed thickness D by making an etching depth of the core layer less than the thickness of the core 13 when forming the core 13 from the core layer by means of photolithography and etching and forming an overclad 14 which embeds the core 13 by sintering soot deposited by flame hydrolysis method. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种能够降低光波导和光纤之间的耦合损耗并使基板表面中的定向耦合器的耦合速率的变化最小化的光波导，并且提供一种制造方法的光波导。解决方案：光波导通过在基板11上形成下包层12而制成，在下包层12上形成芯层，形成矩形横截面的上芯芯13a和由平板形成的下芯芯13b 当通过光刻和蚀刻从芯层形成芯13时，通过使芯层的蚀刻深度小于芯部13的厚度，形成规定厚度D的一部分，并形成通过烧结烟灰将芯13嵌入的外包层14 通过火焰水解法沉积。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2005331797A Method for manufacturing optical waveguide 有权
标题翻译：制造光波导的方法
公开(公告)号：JP2005331797A
公开(公告)日：2005-12-02
申请号：JP2004151360
申请日：2004-05-21
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , エヌティティエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： SUZUKI MASAYA , WATANABE HIROSHI , KOMINATO TOSHIMI , HIBINO YOSHINORI , SUGITA AKIO , MASUDA TAKAMITSU , SATO TERUAKI
IPC分类号： G02B6/13
摘要： PROBLEM TO BE SOLVED: To provide an optical waveguide manufacturing method capable of matching optical characteristics in TE and TM polarizations, by suppressing mismatch of the stresses in the horizontal and in the vertical directions caused by the difference of a thermal expansion coefficient in an upper and a lower clad layer. SOLUTION: The method includes a process in which a core 3b, having a softening temperature of Tci, is formed on the lower clad layer 2 having a softening temperature of Ti, and a part or all of the core 3b is embedded in the lower clad layer 2, by thermally processing the core 3b so that the temperature T satisfies Ti COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种能够通过抑制由于热膨胀系数的差异导致的水平和垂直方向上的应力的失配，从而能够在TE和TM偏振中匹配光学特性的光波导制造方法上包层和下包层。解决方案：该方法包括其中具有软化温度为Tci的芯3b形成在软化温度为Ti的下包层2上，并且将芯3b的一部分或全部嵌入通过热处理芯3b使得温度T满足Ti

5. 发明专利

JP2004029139A Optical directional coupler 有权
公开(公告)号：JP2004029139A
公开(公告)日：2004-01-29
申请号：JP2002181636
申请日：2002-06-21
申请人： Nippon Telegr & Teleph Corp , Ntt Electornics Corp , エヌティティエレクトロニクス株式会社 , 日本電信電話株式会社
发明人： TAKAGI AKIHIRO , SATO TERUAKI , TAKAMI HIROAKI , OMORI YASUJI , SHIBATA TOMOHIRO , HIBINO YOSHINORI
IPC分类号： G02B6/122
摘要： PROBLEM TO BE SOLVED: To provide an optical directional coupler constituted of two optical waveguides consisting of a core part which is made of optical waveguide material and through which light is propagated and a clad part whose refractive index around the core part is smaller than that of the core part on a plane base plate, and making a coupling part to have a fixed coupling rate without depending on a manufacture condition. SOLUTION: The optical directional coupler has a support part crossing with the optical waveguide of the coupling part in order to prevent the tilt of the core part in the coupling part. Then, it has a support part to dam clad material flowing in from the outside in the case of making the clad part. COPYRIGHT: (C)2004,JPO

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