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1. 发明专利

JP2005098986A Device and method for measuring mass 有权
标题翻译：用于测量质量的装置和方法
公开(公告)号：JP2005098986A
公开(公告)日：2005-04-14
申请号：JP2004199214
申请日：2004-07-06
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OSUGI YUKIHISA , OKADA NAOTSUYO , ISHIKAWA SEIJI
IPC分类号： G01N5/02 , G01G3/16 , G01N27/00 , G01N29/02 , G01N29/024
CPC分类号： G01N29/022 , G01G3/16 , G01N29/024 , G01N2291/0256 , G01N2291/0426 , G01N2291/0427
摘要： PROBLEM TO BE SOLVED: To provide a device and a method for measuring mass, such as odor molecules or the like. SOLUTION: The device 1 for measuring mass is provided with a vibrator 2; driving means 3A, 3B, 3C and 3D for exciting the fundamental vibrations in the vibrator 2; detection means 4A, 4B for detecting the displacement of vibration in the vibrator 2; and an adsorption film 5 capable of adsorbing a substance for detection. The mass is measured, based on the difference between the detected value of the vibration displacement obtained from the detecting means 4A, 4B, when the measurement is not carried out and the detected value of the vibration displacement obtained from the detecting means 4A, 4B, when the measurement is carried out. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供用于测量质量的装置和方法，例如气味分子等。
解决方案：用于测量质量的装置1设置有振动器2; 用于激励振动器2中的基本振动的驱动装置3A，3B，3C和3D; 用于检测振动器2中的振动位移的检测装置4A，4B; 以及能够吸附用于检测的物质的吸附膜5。基于从检测装置4A，4B获得的振动位移的检测值与不进行测量的检测值和从检测装置4A，4B获得的振动位移的检测值之间的差异来测量质量，当进行测量时。版权所有（C）2005，JPO＆NCIPI

2. 发明专利

JP2003315047A Electrical connection structure for vibrator and vibrating gyroscope 审中-公开
标题翻译：振动与振动陀螺仪电气连接结构
公开(公告)号：JP2003315047A
公开(公告)日：2003-11-06
申请号：JP2002123457
申请日：2002-04-25
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , ISHIKAWA SEIJI , KIKUCHI TAKAYUKI
IPC分类号： G01P9/04 , G01C19/56 , H01L41/09
摘要： PROBLEM TO BE SOLVED: To reduce a zero-point temperature drift of a vibrator caused by a resonance of an electrical connection structure in the connection structure provided with the vibrator, an electrode terminal, and a bonding wire used to connect the vibrator to the electrode terminal.
SOLUTION: The electrical connection structure 40 is provided with the vibrator 5, the electrode terminal 60, and the bonding wire 50 used to connect the vibrator 5 to the electrode terminal 60. The bonding wire 50 is provided with a first terminal 52 connected to the main face 5a of the vibrator 5, a second terminal 54 connected to the electrode terminal 60, and a curved part 56 formed between the first terminal 52 and the second terminal 54. A ratio D1/D2 of a height D1 of the curved part 56 with respect to a straight line B passing the first terminal 52 and the second terminal 54 to a height D2 of the curved part 56 with respect to the main face 5a of the vibrator 5 is 3.0 or more.
COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：为了减少由设置有振动器的连接结构中的电连接结构的共振引起的振动器的零点温度漂移，用于连接振动器的电极端子和接合线到电极端子。解决方案：电连接结构40设置有用于将振动器5连接到电极端子60的振动器5，电极端子60和接合线50.接合线50设置有第一端子52 连接到振动器5的主面5a，连接到电极端子60的第二端子54，以及形成在第一端子52和第二端子54之间的弯曲部分56。弯曲部56相对于通过第一端子52和第二端子54的直线B相对于振动器5的主面5a的弯曲部56的高度D2为3.0以上。版权所有（C）2004，JPO

3. 发明专利

JP2006275968A Drive element 有权
标题翻译：驱动元件
公开(公告)号：JP2006275968A
公开(公告)日：2006-10-12
申请号：JP2005099489
申请日：2005-03-30
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , KIKUCHI TAKAYUKI , GOJI SHOSAKU
IPC分类号： G01N5/02 , H01L41/08 , H01L41/18 , H01L41/187
摘要： PROBLEM TO BE SOLVED: To prevent a functional film from being peeled from an electrode film in a drive element equipped with a substrate capable of being driven by applying voltage, the electrode film, and the functional film comprising palladium or palladium alloy.
SOLUTION: The drive element 1 includes the substrate 2 capable of being driven by applying the voltage, the electrode films 3A and 3B formed on the substrate in order to apply the voltage to the substrate 2 and comprising metal other than palladium and palladium alloy, and the functional film 5 formed on the substrate 2 in such a manner of not being overlapped with the electrode films 3A and 3B in a plane view and comprising palladium or palladium alloy.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了防止功能膜从配备有能够通过施加电压驱动的基板的驱动元件中的电极膜剥离，电极膜和包含钯或钯合金的功能膜。解决方案：驱动元件1包括能够通过施加电压驱动的基板2，形成在基板上的电极膜3A和3B，以将电压施加到基板2并且包括除钯和钯之外的金属合金以及以与平面图不重合电极膜3A和3B的方式形成在基板2上的功能膜5，并且包括钯或钯合金。版权所有（C）2007，JPO＆INPIT

4. 发明专利

JP2006131951A Film thickness measuring method, film thickness measuring structure, and film thickness measuring element 审中-公开
标题翻译：薄膜厚度测量方法，薄膜厚度测量结构和薄膜厚度测量元件
公开(公告)号：JP2006131951A
公开(公告)日：2006-05-25
申请号：JP2004321905
申请日：2004-11-05
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OSUGI YUKIHISA , KIKUCHI TAKAYUKI , OKADA NAOTSUYO
IPC分类号： C23C16/52
摘要： PROBLEM TO BE SOLVED: To easily adjust the temperature of a film thickness measuring element to the wafer temperature, and to easily change the film thickness measuring element, when measuring the film thickness of a film deposited on a wafer by the film thickness measuring element.
SOLUTION: A wafer W and a film thickness measuring element 1(11) are installed on a susceptor 9, a film is deposited on the wafer and the film thickness measuring element 1(11), and the film thickness of the film deposited on the film thickness measuring element is measured. Preferably, the film thickness measuring element comprises a leg part, a vibration part, an electrode to excite the basic vibration on the vibration part, and an element terminal part to electrically connect the electrode to the outside.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：为了容易地将膜厚测量元件的温度调节到晶片温度，并且为了容易地改变膜厚测量元件，当通过膜厚度测量沉积在晶片上的膜的膜厚度时测量元件。解决方案：将晶片W和膜厚测量元件1（11）安装在基座9上，将膜沉积在晶片和膜厚测量元件1（11）上，并且膜的膜厚度测量沉积在膜厚度测量元件上。优选地，膜厚测量元件包括腿部，振动部分，用于激发振动部分上的基本振动的电极以及将电极电连接到外部的元件端子部分。版权所有（C）2006，JPO＆NCIPI

5. 发明专利

JP2005308452A Mass detection element 有权
标题翻译：质量检测元件
公开(公告)号：JP2005308452A
公开(公告)日：2005-11-04
申请号：JP2004123049
申请日：2004-04-19
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , KIKUCHI TAKAYUKI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide constitution capable of reducing crystal impedance (vibration loss: R) while holding a predetermined Q value in a mass detection element operated in a state that at least an acting electrode is brought into contact with a solution.
SOLUTION: The mass detection element 1 is equipped with a vibration plate 2 made of a prezoelectric material having the surface 2a and the back 2b, the first electrode 3A provided on the surface 2a of the vibration plate 2 and the second electrode 3B provided on the back 2b of the vibration plate 2 and constituted so as to detect the sample component in a sample solution in a state that at least the first electrode 3A is brought into contact with the sample solution. The ratio (a/b) of the width (a) of the first electrode 3A to the width (b) of the vibration plate 2 is 0.64-0.96.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供能够在至少在作用电极与溶液接触的状态下操作的质量检测元件中保持预定Q值的同时降低晶体阻抗（振动损失：R）的构造。解决方案：质量检测元件1装备有由具有表面2a和背面2b的预制电极材料制成的振动板2，设置在振动板2的表面2a上的第一电极3A和第二电极3B 设置在振动板2的背面2b上，并且构成为在至少第一电极3A与样品溶液接触的状态下检测样品溶液中的样品成分。第一电极3A的宽度（a）与振动板2的宽度（b）的比（a / b）为0.64-0.96。版权所有（C）2006，JPO＆NCIPI

6. 发明专利

JP2007010397A Substance-detecting element 有权
标题翻译：物质检测元件
公开(公告)号：JP2007010397A
公开(公告)日：2007-01-18
申请号：JP2005189398
申请日：2005-06-29
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , KIKUCHI TAKAYUKI
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To reduce fluctuations in a measured value for each element, while enhancing the reproducibility in the element constituted by integrating a vibrator with a support substrate and detecting a target substance in a liquid.
SOLUTION: This substance detecting element 1 is equipped with the flat plate-shaped vibrator 2, the detection film 3A provided on the first main surface side 2a of the flat plate-shaped vibrator 2 and brought into contact with the liquid to allow the liquid to interact with the target substance, the support substrate 8 for supporting the flat plate-shaped vibrator 2 and a joining means 7 for joining the flat plate-shaped vibrator 2 and the support substrate 8. A hermetic space 9 that is to be isolated from the liquid is formed in between the other second main surface 2b of the flat plate-shaped vibrator 2 and the support substrate 8. The target substance is detected, on the basis of a change in the vibration state of the flat plate-shaped vibrator 2 based on the interaction of the target substance with the detection film 3A.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了减少每个元件的测量值的波动，同时提高通过将振动器与支撑基板集成并且检测液体中的目标物质构成的元件的再现性。解决方案：该物质检测元件1配备有平板振动器2，设置在平板振动器2的第一主表面侧2a上并与液体接触的检测膜3A，以允许与目标物质相互作用的液体，用于支撑平板振动器2的支撑基板8和用于连接平板振动器2和支撑基板8的接合装置7.将要形成的密封空间9 在平板振动器2的另一个第二主表面2b和支撑基板8之间形成液体隔离物。基于平板状振动器2的振动状态的变化，检测目标物质基于目标物质与检测膜3A的相互作用的振动器2。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2006153859A Hydrogen sensor and ammonia sensor 有权
标题翻译：氢传感器和氨气传感器
公开(公告)号：JP2006153859A
公开(公告)日：2006-06-15
申请号：JP2005311433
申请日：2005-10-26
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： KIKUCHI TAKAYUKI , SAKAI OSAMU , OKADA NAOTSUYO
IPC分类号： G01N5/02
摘要： PROBLEM TO BE SOLVED: To provide a structure capable of improving sensitivity of a hydrogen sensor, using a piezoelectric vibrator.
SOLUTION: The hydrogen sensor 1 is equipped with a vibrator 2; drive means 3A, 3B for exciting the vibrator 2 so as to generate its fundamental vibration; a detecting means 4A for measuring physical quantities, along with the vibration of the vibrator; and an adsorption film 5 having a capacity of adsorbing hydrogen. The drive means 3A, 3B and the detecting means 4A are separated from each other, and hydrogen concentration is measured, based on the measured values of the physical quantities.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种使用压电振动器能够提高氢传感器的灵敏度的结构。解决方案：氢传感器1配备有振动器2; 用于激励振动器2以产生其基本振动的驱动装置3A，3B; 用于测量物理量的检测装置4A以及振动器的振动; 以及具有吸附氢的能力的吸附膜5。驱动装置3A，3B和检测装置4A彼此分离，并且基于物理量的测量值来测量氢浓度。版权所有（C）2006，JPO＆NCIPI

8. 发明专利

JP2007010361A Voltage drive element 有权
标题翻译：电压驱动元件
公开(公告)号：JP2007010361A
公开(公告)日：2007-01-18
申请号：JP2005188660
申请日：2005-06-28
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , KIKUCHI TAKAYUKI
IPC分类号： G01N5/02 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/23
摘要： PROBLEM TO BE SOLVED: To provide a structure constituted so as to be capable of simplifying a film forming process, in an element having the same number of films in a voltage drive element that has films interacting with a target substance. SOLUTION: The voltage drive element 1 is equipped with a substrate 2, capable of being driven by the application of voltage, electrode films 3A-3F provided on the substrate 2 to apply voltage to the substrate 2 and films 5B-5F provided on the electrode films. The exposed parts, uncoated with the films among the electrode films, interact with the target substance. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：为了提供构造成能够简化成膜过程的结构，在具有与靶物质相互作用的电压驱动元件中具有相同数量的膜的元件中。解决方案：电压驱动元件1配备有能够通过施加电压驱动的基板2，设置在基板2上的电极膜3A-3F向基板2施加电压，并且提供薄膜5B-5F 在电极膜上。与电极膜之间未涂覆的暴露部分与目标物质相互作用。版权所有（C）2007，JPO＆INPIT

9. 发明专利

JP2005140660A Vibrator support construction and manufacturing method for vibrator support construction 有权
标题翻译：振动台支撑构造及振动台支撑构造的制造方法
公开(公告)号：JP2005140660A
公开(公告)日：2005-06-02
申请号：JP2003378088
申请日：2003-11-07
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： OKADA NAOTSUYO , TANI MAKOTO
IPC分类号： G01C19/56 , G01C19/5628 , H01L41/08 , H01L41/18 , H01L41/22 , H01L41/23 , H01L41/313 , G01P9/04
摘要： PROBLEM TO BE SOLVED: To make it difficult for a vibrator supporting condition to vary even if a vibrator is miniaturized. SOLUTION: Support construction 18 is provided with a vibrator 1, a supporting member 4 for supporting the vibrator 1, and an adhesive layer 5A for adhering the vibrator 1 to the supporting member 4. The supporting member 4 is fixed to a container. The contact surface 1a with the adhesive layer 5A of the vibrator 1 is approximately flat, and the contact area AB with the container of the supporting member 4 is wider than the area AJ of the contact surface with the adhesive layer 5A of the supporting member 4. COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：即使振动器小型化，使振动器支撑条件变得困难。解决方案：支撑结构18设置有振动器1，用于支撑振动器1的支撑构件4和用于将振动器1粘附到支撑构件4的粘合层5A。支撑构件4固定到容器。具有振动器1的粘合层5A的接触表面1a大致平坦，并且与支撑构件4的容器的接触面积AB比与支撑构件4的粘合层5A的接触面的面积AJ更宽（C）2005，JPO＆NCIPI

10. 发明专利

JPH11273905A Current-limiting device constituted of connecting plural ptc element plates in parallel 失效
标题翻译：连续堆叠的PTC元件板并联的当前限制性设备
公开(公告)号：JPH11273905A
公开(公告)日：1999-10-08
申请号：JP7784598
申请日：1998-03-25
申请人： Ngk Insulators Ltd , 日本碍子株式会社
发明人： KATSUKAWA HIROYUKI , YOKOI SEIGO , MIZUNO YUKIO , OKADA NAOTSUYO
IPC分类号： H01C7/02 , H02H9/02 , H05B3/14
摘要： PROBLEM TO BE SOLVED: To obtain a current limiting device constituted of connecting in parallel a plurality of positive temperature coefficient(PTC) elements which are made to sufficiently exhibit current limiting effects by making the PTC elements so as to reach their resistance transition temperatures at the same.
SOLUTION: A PTC element assembly 10 is obtained by integrally molding PTC element plates 11-19 by using a high-insulating materials S. Each PTC element plates 11-19 of the assembly 10 is selected from among PTC elements having the same electrical resistivity at a room temperature, and the resistance transition temperatures of the plates 11-19 are made equal to each other by making the lengths (thickness) as well as cross sections of the plates 11-19 in the conducting direction equal to each other.
COPYRIGHT: (C)1999,JPO
摘要翻译：要解决的问题：为了获得限流装置，其通过使PTC元件达到其电阻转变温度而并联连接多个正温度系数（PTC）元件，这些正温度系数（PTC）元件充分发挥限流效应，相同。解决方案：通过使用高绝缘材料S将PTC元件板11-19整体成型来获得PTC元件组件10.组件10的每个PTC元件板11-19选自具有相同电阻率的PTC元件通过使板11-19的长度（厚度）以及导板方向的横截面彼此相等，使板11-19的电阻转变温度彼此相等。

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