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1. 发明专利

JP2003269924A DEVICE AND METHOD FOR MONITORING FILM THICKNESS 审中-公开
公开(公告)号：JP2003269924A
公开(公告)日：2003-09-25
申请号：JP2002075524
申请日：2002-03-19
申请人： NIPPON TELEGRAPH & TELEPHONE , NTT FANET SYSTEMS CORP , NTT AFTY CORP
发明人： JIN YOSHITO , SHIMADA MASARU , OCHIAI KATSUYUKI , TAZAWA SATOSHI , MATSUO SEITARO , ONO TOSHIRO
IPC分类号： G01B11/06 , C23C14/54 , C23C16/52 , G02B5/28
摘要： PROBLEM TO BE SOLVED: To realize a device and a method for monitoring film thickness that can precisely control the optical film thickness of a multi-layered film using λ 0 as a design wavelength to integer times of λ 0/4 . SOLUTION: The film thickness monitoring device and method are constituted while being characterized in that light from a light source 5 gets incident into a substrate 3 through an optical fiber 6, transmitted light from the substrate 3 is input into a spectroscope 10 through an optical fiber 9, a dispersed-spectral data of an output from the spectroscope 10 is input into a computing element 11, and whether the film thickness of the dielectric film is proper as a film thickness of a dielectric film of a constitutive element for the multi-layered film using the wavelength λ 0 as the design wavelength or not, using a difference F (feature quantity difference) between two integration values provided by integrating dispersed-spectral values in a low-frequency side wavenumber area and a high-frequency side wavenumber area symmetric around a wavenumber κ 0 corresponding to the λ 0 respectively in the respective wavenumber areas, in a process for film-forming the dielectric film by spattering from an ECR spattering source 4 on the substrate 3 inside a film forming chamber 2. COPYRIGHT: (C)2003,JPO

2. 发明专利

JPH09277141A METHOD OF PROCESS SCHEDULING 失效
公开(公告)号：JPH09277141A
公开(公告)日：1997-10-28
申请号：JP8931496
申请日：1996-04-11
申请人： NIPPON TELEGRAPH & TELEPHONE , N T T FUANETSUTO SYST KK
发明人： TAZAWA SATOSHI , YOSHIZAWA MASAHIRO
IPC分类号： B23Q41/08 , B65G61/00 , G05B13/02 , G05B19/418 , G06Q50/00 , G06Q50/04 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To prepare a schedule observing delivery by preventing delay in advance without degrading line operating efficiency as much as possible. SOLUTION: By making a lot which may be delayed immediately have priority in advance, considering it as a delayed lot with a delay discrimination value TD and scheduling a lot which may be delayed a little later so as to be processed in the shortest waiting time as a warning lot, using an advance discrimination value TF, it is possible to prevent delay in advance.

3. 发明专利

JPH06236385A SCHEDULER FOR PRODUCTION PROCESS 失效
公开(公告)号：JPH06236385A
公开(公告)日：1994-08-23
申请号：JP1993793
申请日：1993-02-08
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAKEDA TADAO , TAZAWA SATOSHI
IPC分类号： G05B19/418 , G06Q10/00 , G06Q10/06 , G06Q10/10 , G06Q50/00 , G06Q50/04 , G06F15/21
摘要： PURPOSE:To prepare a production schedule with improved production efficiency at a high speed by simultaneously processing plural lots using the same device under the same processing conditions over a part or all of the parts of produc tion processes. CONSTITUTION:In a schedule information management part 2, schedule information is prepared from information and schedule conditions inputted at a schedule condition input part 1 and is transferred to a scheduling part 4, the production schedule prepared at the scheduling part 4 is received and the production schedule is transferred to a production schedule output part 8 and a production schedule display part 9. A scheduling starting part 3 transmits the start of scheduling to the scheduling part 4 by the instruction of an operator operating a production process scheduler. In this case, the plural lots are simultaneously processed under the same processing conditions by using the same device over a part or all of the parts of the production processes.

4. 发明专利

JPH0239375A LSI FORM SIMULATING METHOD 失效
公开(公告)号：JPH0239375A
公开(公告)日：1990-02-08
申请号：JP18985388
申请日：1988-07-29
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAZAWA SATOSHI , MATSUO SEITARO , SAITO KAZUYUKI , YOSHII AKIRA
IPC分类号： H01L21/20 , G06F17/50 , H01L21/00 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To perform the simulation of the change of an LSI cross section form with high accuracy by performing the same process at all points without recognizing the peculiar points in an LSI form simulating method. CONSTITUTION:In an LSI form simulating method where a worked form is estimated from the initial surface form of an element cross section, an initial surface is approximated by a gathering of points and a peculiar point is treated in a state where the tilt angles formed by the peculiar point and a straight line formed between the points set at both sides of the peculiar point are available. In other words, the tilt angle formed by the surfaces of both side of the peculiar point is equally divided into (n) pieces and treated as (n) points. Then each point on a worked surface is moved slightly and a gathering of moved points is calculated. Thus it is possible to perform the same process at all points with no consciousness of a peculiar point with high accuracy unlike a conventional simulating method where no consideration is given to the peculiar point at all.

5. 发明专利

JPS5826441A ION IMPLANTING DEVICE 失效
公开(公告)号：JPS5826441A
公开(公告)日：1983-02-16
申请号：JP12416981
申请日：1981-08-10
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： YOSHIZAWA MASAHIRO , MIYAKE MASAYASU , HARADA MICHIYUKI , TAZAWA SATOSHI
IPC分类号： H01J37/317 , H01J37/02 , H01L21/265
摘要： PURPOSE:To prevent generation of trouble due to dielectric breakdown of an insulating substances by neutralizing the electric charge accumulated in ion implantation and preventing the rise of the potential by using secondary electrons which are generated through ion-beam radiation during the manufacturing process of semiconductor integrated circuits. CONSTITUTION:Ion beam is irradiated from left into a Faraday box composed of the substrate supporting body 1 for supporting a substrate 2 and a cylindrical structure 3. In the Faraday box, an electrode 7 is installed on the peripheral part of the substrate 2. The electrode 7 is fixed with the electrode support 8 made from insulating materials, and can be biased to negative by a power source 9. Although much secondary electrons more than the number of incident ions are formed, the secondary electrons are returned to the substrate when the electrode 7 is biased to negative, and thus the electrification of the substrate is prevented markedly effectively, and neutralization of the electric charges accumulated is enabled effectively. When the amount of ion beams increases, also the amount of secondary electrons increases, so the device can be used in a simple way.

6. 发明专利

JPH09285947A METHOD FOR DESIGNING PRODUCTION LINE 失效
公开(公告)号：JPH09285947A
公开(公告)日：1997-11-04
申请号：JP9655696
申请日：1996-04-18
申请人： NIPPON TELEGRAPH & TELEPHONE , N T T FUANETSUTO SYST KK
发明人： TAZAWA SATOSHI , WADA YASUSHI , YOSHIZAWA MASAHIRO , SAITO KAZUYUKI
IPC分类号： B23Q41/04 , B65G61/00 , G05B15/02 , G05B19/418 , G06Q50/00 , G06Q50/04 , G07C3/00 , G06F17/60
摘要： PROBLEM TO BE SOLVED: To reduce production costs by optimizing the number of devices and the number of workers even in a production line in which one worker operates a plurality of devices. SOLUTION: A processing capacity parameter is defined for each device variety, in which a device for integrating and processing an (n) number of lots is set as (n) and a device for processing by dividing one lot into (m) batches is set as 1/m. A value obtained by dividing the actual reaching rate of objects to each device group with a processing capacity parameter is set as a reaching rate to its device group (step 106), and the number of necessary devices is calculated for each variety (step 108). Workers are grouped according to the levels skills. The sum total of reaching rates to all the devices operated by each group of workers is set as a reaching rate to the group (step 103) and the number of necessary workers in the group is calculated (step 105).

7. 发明专利

JPH0786283A METHOD FOR FINDING CAPACITY BETWEEN ELECTRODE AT CROSS SECTION OF SEMICONDUCTOR DEVICE 失效
公开(公告)号：JPH0786283A
公开(公告)日：1995-03-31
申请号：JP24976293
申请日：1993-09-13
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： TAZAWA SATOSHI , NAKAJIMA BAN , OCHIAI KATSUYUKI
IPC分类号： H01L21/3205 , G06F17/00 , G06F17/50 , G06F19/00 , G06Q50/00 , G06Q50/04 , H01L21/00 , H01L21/768 , H01L23/52 , H01L23/522
摘要： PURPOSE:To plot cross-sectional structures of a semiconductor device composed of pixels precisely without using a complicated operation or without taking much time for this, and to find the capacities between electrodes simply using cross meshes on the basis of the plotting. CONSTITUTION:A cross-sectional form of a semiconductor device is plotted and displayed using pixels, and on this a crossed mesh with mesh lines arranged between the pixels is defined (Step S1). Following this, all electrodes existing on a picture plane are individually defined by the processing of specifying an aggregation of pixels having pixel values of conductors adjoining continuously on the display picture plane as one electrode (Step S2). And mutual capacities among these electrodes are calculated.

8. 发明专利

JPH05181720A DATA BASE MANAGEMENT SYSTEM 失效
公开(公告)号：JPH05181720A
公开(公告)日：1993-07-23
申请号：JP35833891
申请日：1991-12-27
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： OKUBO TSUNEO , SAITO KAZUYUKI , WADA YASUSHI , TAZAWA SATOSHI , YOSHIZAWA MASAHIRO
IPC分类号： G06F12/00
摘要： PURPOSE:To attain the management of data of different point of view such as device data and lot data, the divided management of much data, the extractive management of important data, and the shortening of the turnaround time for a retrieving time. CONSTITUTION:This system is characterized by including a data transfer condition specifying file 21 storing at least one of plural conditions, i.e., a condition for reading out data from a data base, a condition for arithmetically processing read data and a condition for writing an arithmetically processed result in the data base and a data transfer control processing part 15 for transferring data from transferring data bases 22, 23 to a transferred data base 24 based on the file 21 and having functions capable of rearranging data and shortening a data retrieving time.

9. 发明专利

JPH05143611A PRODUCTION CONTROLLING DEVICE AND METHOD THEREFOR 失效
公开(公告)号：JPH05143611A
公开(公告)日：1993-06-11
申请号：JP30746191
申请日：1991-11-22
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： WADA YASUSHI , OKUBO TSUNEO , TAZAWA SATOSHI , YOSHIZAWA MASAHIRO
IPC分类号： B65G61/00 , G05B19/418 , G06F15/00 , G06F21/00 , G06Q50/00 , G06Q50/04 , G09C1/00 , H04L9/00 , H04L9/08 , H04L9/10 , H04L9/12
摘要： PURPOSE:To detect a virus mixed with information and to make it difficult for a malicious third party by ciphering information propagated on a network. CONSTITUTION:A person in charge of operation of a computer integrated production system in a master computer installation place 9 remote from a slave computer installation place 8 starts a master computer control part 4-1 and uses a line connector to connect an encoder 201 and a decoder 3-2 and connect an encoder 2-2 and a decoder 3-1 by lines. Thereafter, a message (command) for which a slave computer control part 1-1 can receive is transmitted to the part 1-1 from the master computer control part 4-1. Information of a key information storage device 5 is used to encode the transmitted command by encoder 202 and the encoded information is sent to a line 10.

10. 发明专利

JPH04248733A PROTOCOL CONVERSION METHOD 失效
公开(公告)号：JPH04248733A
公开(公告)日：1992-09-04
申请号：JP1356391
申请日：1991-02-04
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： WADA YASUSHI , OKUBO TSUNEO , TAZAWA SATOSHI , YOSHIZAWA MASAHIRO
IPC分类号： G05B15/02 , H04L29/06
摘要： PURPOSE:To build up an efficient manufacture line by setting a virtual machine model working under a communication protocol and a virtual machine model working under a different communication protocol and providing a communication line between the models. CONSTITUTION:A protocol conversion system 4 is provided in an equipment 2 and makes communication with an equipment 1 via a communication line 3, and also with a sub-system in the equipment 2 via a communication line 7. A virtual equipment system 5 receives a message based on a protocol A of the equipment 1 via the communication line 3 and converts it into a protocol B and sends the result to the sub-system in the equipment 2 via the communication line 7. On the other hand, a virtual equipment system 6 receives a message based on a protocol B of the equipment 2 via the communication line 7 and converts it into the protocol A and sends the result to the equipment 1 via the communication line 3.

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