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1. 发明专利

JPH01104349A CRYOGENIC STAGE IN VACUUM VESSEL 失效
公开(公告)号：JPH01104349A
公开(公告)日：1989-04-21
申请号：JP25825087
申请日：1987-10-15
申请人： NIPPON TELEGRAPH & TELEPHONE
发明人： IKEDA KOSUKE , ISHII YOSHIICHI , YAMAZAKI SHIGETOMO , KURATA TSUGIO
IPC分类号： B01L9/00 , B01L99/00
摘要： PURPOSE:To make it possible to move a sample table widely and accurately, by separately providing a stage part on which samples are placed and a refrigerating part, connecting both by thin wire bundles having high flexibility and thermal conductivity, and further cooling a heat-shielding plate by another refrigerating tank. CONSTITUTION:By the action of a pump 9, a refrigerant in an external refrigerant tank 5 is transferred through a first refrigerant tank 7 to a second refrigerant tank 8, whereby a sample table 4 is cooled through the medium of bundles 10 of thin wires. Since the first refrigerant tank 7 is independent of the second refrigerant tank 8 for a heat-shielding plate 12, the cooling ability of each is greatly improved. Further, the sample table 4 and the first refrigerant tank 7 are provided separately, both being connected with each other by the thin wire bundles 10 for heat conduction between the two, and the thin wire bundles 10 are positioned around the sample table 4 such that they are symmetrical about a point of symmetry. Because of this, the movement of the sample table 4 is not limited and uniform accuracy of movement can be maintained. Furthermore, the vibration of the sample table 4 is greatly reduced.

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