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    • 4. 发明专利
    • FORMATION OF FILM
    • JPS60215764A
    • 1985-10-29
    • JP6924984
    • 1984-04-09
    • NIPPON STEEL CORP
    • ITOU TOORUKOMATA HIROYASU
    • C23C8/02C23C8/08C23C16/30
    • PURPOSE:To form a film having superior heat resistance, corrosion resistance and wear resistance by reacting an alloy contg. a specified amount of one or more among Cr, Ti, Nb, Ta and W with a reactive gas in the gas by a reaction exciting means to form a film contg. a compound of said element. CONSTITUTION:An alloy contg. 0.1-40% one or more among Cr, Ti, Nb, Ta and W is reacted with a reactive gas in the gas by a reaction exciting means such as heating to form a film contg. a compound of said element on the surface of the alloy. The base of the alloy is Fe, Ni, Co or the like. CCl4, CH4 or the like is used as the reactive gas when carbide is formed as the compound, N2, NH3 or the like is used when nitride is formed, N2, H2 and a very small amount of H2O, O2 or the like are used when oxide is formed, and BCl3 or the like is used when boride is formed. The desired deposited film is efficiently obtd. on the surface of the alloy.