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    • 6. 发明专利
    • SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
    • JPH04154147A
    • 1992-05-27
    • JP28050790
    • 1990-10-17
    • NIPPON DENSO CO
    • FUJII TETSUO
    • H01L21/762H01L21/76H01L21/763H01L21/8249H01L27/06H01L29/786
    • PURPOSE:To enable thermal expansion of an insulation film to be relaxed and electrical characteristics of a semiconductor element to be stabilized by providing a thermal expansion relaxation film between an electrical shield layer surrounding the insulation film and the insulation film which is formed at a lower layer of a region where a semiconductor element is formed which is surrounded by the insulation film. CONSTITUTION:An SiO2 film 7 is formed on an Si substrate 6 and a poly-Si film 5 is formed on it. A poly-Si layer 10 is formed in a specified part of the film 5 and an Si3N4 film 4 as a thermal expansion relaxation film is formed in other parts. An SiO2 film 3 is formed on the film 4 and an N epitaxial layer 2 as an element-forming layer and an N type Si substrate 1 are deposited on it in sequence. A bipolar transistor 14 is formed in each 501 region. Since the film 5 and the layer 10 cover a side surface part and a lower surface part of each SOI region. potential can be given to the layer 10 through an Al$ electrode 13, and thus the film 5 and the layer 10 are enabled to function as an electrical shield layer.
    • 7. 发明专利
    • SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
    • JPH03215970A
    • 1991-09-20
    • JP1158490
    • 1990-01-19
    • NIPPON DENSO CO
    • FUJII TETSUO
    • H01L29/73H01L21/02H01L21/331H01L21/76H01L21/762H01L21/8249H01L27/06H01L27/12H01L29/732
    • PURPOSE:To enable various elements to be accurately integrated in various thicknesses by a method wherein semiconductor elements correspondent to the thickness of a first and a second semiconductor element are provided onto the first and the second semiconductor layers isolated from each other by an insulating film and different in thickness, the surfaces of the first and the second semiconductor layer are made smooth, and they are arranged on the same plane. CONSTITUTION:First semiconductor layers 12 and 14 which serve as a P channel MOS transistor forming region and an NPN bipolar transistor forming region respectively and a second semiconductor layer 13 which serves as an N channel MOS transistor forming region are insulated and isolated from each other silicon oxide films 3 and 9 on a silicon substrate 11, and the surfaces of the layers 12, 13, and 14 are made smooth and level with each other to constitute the same plane. As mentioned above, semiconductor elements correspondent to the thicknesses t1 and t2 of the semiconductor layers 12-14 are formed on the semiconductor layers 12-14 different from each other in thickness and isolated and isolated from each other through the silicon oxide films 3 and 9. By this setup, various elements can accurately be integrated in various thicknesses.
    • 8. 发明专利
    • LIGHT AMPLIFYING INTEGRATED CIRCUIT
    • JPH03101275A
    • 1991-04-26
    • JP23882989
    • 1989-09-14
    • NIPPON DENSO CO
    • GOTO YOSHITAKAFUJII TETSUO
    • H01L31/14
    • PURPOSE:To enhance conversion efficiency and enable production to be performed easily by forming a light-emitting element and a photodetector on a semiconductor substrate and by forming a semiconductor by direct junction. CONSTITUTION:An insulating film 2 is formed on a silicon substrate 1, the insulating film 2 and a semiconductor substrate 3 are joined by direct junction, an insulating film 36 is further formed on the semiconductor substrate 3, the insulation film 36 and a semiconductor substrate 4 are directly joined by direct junction, a photodetector element is formed on the semiconductor substrate 3, a light-emitting element is formed on the semiconductor substrate 4, or inversely a light-emitting element is formed on the semiconductor substrate 3, a photodetector is formed on the semiconductor substrate 4, and a transistor 6 which amplifies electrical signal converted by the photodetector and a transistor 6 which drives the light-emitting element are formed on the silicon substrate 1, the semiconductor substrate 3, or the semiconductor substrate 4. Thus, use of the semiconductor substrate achieves an improved crystallinity of semiconductor and enhances light/electron conversion efficiency of light-emitting element or photodetector which are formed on that semiconductor.
    • 10. 发明专利
    • SEMICONDUCTOR TYPE ACCELERATION SENSOR AND ITS MANUFACTURE
    • JPH0349267A
    • 1991-03-04
    • JP18433189
    • 1989-07-17
    • NIPPON DENSO CO
    • FUJII TETSUOAZEYANAGI SUSUMUGOTO YOSHITAKA
    • G01P15/12G01P15/02G01P15/08H01L29/84
    • PURPOSE:To stop displacement of a beam section securely when an excessive acceleration is applied by arranging a stopper pratically on a movement line of a center of gravity to allow the stopper to stop displacement acting on movement of the center of gravity of a beam weight section. CONSTITUTION:An accelerating sector has a cantilever shape and a beam weight section 2 performs displacement upward or downward the figure when acceleration is applied thereto. However, a piezo resistance element 6 which is formed at a base of a beam thin section receives a stress correspponding to the displacement and a resistance value varies due to the stress. That is, acceleration which the beam weight section 2 has received can be detected by variation of resistance values of the piezo resistance element 6. An upper stopper 1 and a lower stopper 4 are arranged on an extension line of displacement of a center-of- gravity C of the beam weight section 2. When an excessive acceleration is applied, the beam weight section 2 can stops displacement caused by the acceleration at an area near the enter of gravity. Accordingly, it is possible to prevent development of rupture at the thin section of the beam.