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    • 1. 发明专利
    • Probe array and manufacturing method thereof
    • 探针阵列及其制造方法
    • JP2010014648A
    • 2010-01-21
    • JP2008176717
    • 2008-07-07
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • G01N21/64G01N33/53G01N33/543G01N33/566G01N37/00
    • G01N21/6452Y10T156/10
    • PROBLEM TO BE SOLVED: To provide a probe array with a detection result obtained of a wide dynamic range without adjusting excitation light by changing its intensity in fluorescence observation. SOLUTION: This probe array comprises a combination of a probe holding substrate 2 and a seat member 3. The holding substrate 2 includes first and second principal planes 4 and 5 extending in parallel to each other, and holds probe molecules 7 on a plurality of probe holding parts 6 thereof. The seat member 3 includes a reference plane 8 disposed in parallel to a fluorescence receiving surface while comprising a seat surface 10 supporting the holding substrate 2, the seat surface 10 extending in a direction not paralleling the reference plane 8. The holding parts 6 each have a plurality of surfaces making angles different from each other with the receiving surface, that is, a bottom surface and a plurality of rising wall surfaces rising from the bottom surface. Therefore, the plurality of surfaces can be made different from each other in sensitivity. As a result, a wide dynamic range can be materialized. COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供具有宽动态范围的检测结果的探针阵列,而不通过改变荧光观察的强度来调节激发光。 解决方案:该探针阵列包括探针保持基板2和座椅构件3的组合。保持基板2包括彼此平行延伸的第一和第二主平面4和5,并将探针分子7保持在 多个探针保持部6。 座椅构件3包括与荧光接收表面平行布置的参考平面8,同时包括支撑保持基板2的座面10,座面10在不与参考平面8并联的方向上延伸。保持部6各自具有 多个表面与接收表面彼此不同的表面,即底面和从底面升起的多个上升壁表面。 因此,可以使多个表面的灵敏度彼此不同。 因此,可以实现广泛的动态范围。 版权所有(C)2010,JPO&INPIT
    • 2. 发明专利
    • Band pass filter and communication apparatus
    • 带通滤波器和通信装置
    • JP2003309450A
    • 2003-10-31
    • JP2002114935
    • 2002-04-17
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • H01P1/18H03H7/01H03H9/64H04B1/3822H04B1/40
    • H03H7/01H03H9/64
    • PROBLEM TO BE SOLVED: To provide a band pass filter capable of suppressing the effect of a reflected wave at an input terminal and an output terminal, providing excellent impedance matching at the input terminal and the output terminal, and an excellent signal transmission efficiency in a pass band. SOLUTION: A communication apparatus is provided with the band pass filter 100 comprising first and second band pass filters 1, 2 whose pass band characteristics are almost the same, which are connected in parallel and at least to either of which phase shifters 3 to 6 for shifting the phase to cancel at least one reflection wave are connected, and the reflection waves produced from the band pass filters 1, 2 are cancelled with each other in an input terminal pair 9 and an output terminal pair 10. COPYRIGHT: (C)2004,JPO
    • 要解决的问题:提供能够抑制输入端子和输出端子处的反射波的影响的带通滤波器,在输入端子和输出端子处提供优异的阻抗匹配,并且优良的信号传输 通带中的效率。 解决方案:通信设备设置有带通滤波器100,带通滤波器100包括通带特性几乎相同的第一和第二带通滤波器1,2,它们并联连接,并且至少与两个移相器3 连接至少一个反射波的相位移动到6,从带通滤波器1,2产生的反射波在输入端子对9和输出端子对10中彼此抵消。 版权所有(C)2004,JPO
    • 3. 发明专利
    • Acoustic surface wave device
    • 声音表面波装置
    • JP2005102328A
    • 2005-04-14
    • JP2004364999
    • 2004-12-16
    • Murata Mfg Co Ltd株式会社村田製作所
    • TAKAMINE YUICHISHIBAHARA TERUHISA
    • H01L41/09H01L41/18H03H9/145H03H9/25H03H9/72
    • PROBLEM TO BE SOLVED: To provide a high balancing 5IDT longitudinal joined resonator type acoustic surface wave device having balanced unbalance transducer function.
      SOLUTION: The longitudinal joined resonator type acoustic surface wave filter device having the IDT type balanced unbalance transducer function has a first and second segmented electrodes 110, 111 which are formed by splitting of a centrally-placed inter-digital transducer in acoustic surface wave propagation direction. The first and second segmented electrodes 110, 111 are connected to first and second balanced terminals 108, 109. One inter-digital transducer out of two inter-digital transducers placed at both sides of the centrally-placed inter-digital transducer is inversed to the other inter-digital transducer. The two inter-digital transducers on both sides of the centrally-placed inter-digital transducer are connected to a unbalance signal terminal 107. Each tight pitch electrode digit is provided for the gap side end of one inter-digital transducer and the gap side end of another inter-digital transducer being adjacent to each other in surface wave propagation direction.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:提供具有平衡不平衡换能器功能的高平衡5IDT纵向接合谐振器型声表面波装置。 解决方案:具有IDT型平衡不平衡换能器功能的纵向接合谐振器型声表面波滤波器装置具有第一和第二分段电极110,111,它们通过在声表面中分离中间放置的数字间换能器而形成 波传播方向。 第一和第二分段电极110,111连接到第一和第二平衡端子108,109。放置在中间放置的数字间换能器的两侧的两个数字间换能器中的一个数字间换能器被倒置到 其他数字间传感器。 中心位置的数字间换能器两侧的两个数字间换能器连接到不平衡信号端子107.每个紧密间距电极数字被设置用于一个数字间换能器的间隙侧端,而间隙侧端 在表面波传播方向上彼此相邻的另一个数字互感器。 版权所有(C)2005,JPO&NCIPI
    • 5. 发明专利
    • Method of manufacturing electronic component
    • 制造电子元件的方法
    • JP2002367873A
    • 2002-12-20
    • JP2001177256
    • 2001-06-12
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • G01P9/04G01C19/56H01L21/02H01L29/84
    • PROBLEM TO BE SOLVED: To reduce the cost of an electronic component.
      SOLUTION: The upper surface of a substrate 20 is processed to form recessed parts 2a and after that, a semiconductor substrate 21 is bonded to the upper surface of the substrate 20. At this time, a part of the upper surface of substrate 20 is kept exposed. Recessed parts (marks for positioning) 33 for positioning are previously formed in the exposed parts of the upper surface of this substrate 20. After that, a type Patten 22 is formed on the upper surface of the substrate 21 to set processing object positions on the substrate 21 based on processing positions (the formation positions of the recessed parts 2) on the substrate 20. At this time, the arrangement of the pattern 22 is made from the side of the upper surface of the substrate 21 utilizing the recessed parts 33. When arranging this pattern 22, a special device, i.e., a double-side mask aligner, can be eliminated. As a result, an increase in the cost of equipment can be suppressed. Hereby, a reduction in the cost of the electronic component can be promoted.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:降低电子部件的成本。 解决方案:对基板20的上表面进行加工以形成凹部2a,然后将半导体基板21接合到基板20的上表面。此时,保持基板20的上表面的一部分 裸露。 预先在该基板20的上表面的露出部分中形成用于定位的嵌入部分(用于定位的标记)33。此后,在基板21的上表面上形成有类似的Patten 22,以便在基板21的上表面上设置加工对象位置 基板21基于基板20上的处理位置(凹部2的形成位置)。此时,图案22的布置利用凹部33从基板21的上表面侧构成。 当布置该图案22时,可以消除特殊装置,即双面掩模对准器。 结果,可以抑制设备成本的增加。 因此,可以促进电子部件的成本的降低。
    • 6. 发明专利
    • Variable capacitance element
    • 可变电容元件
    • JP2012178379A
    • 2012-09-13
    • JP2011039165
    • 2011-02-25
    • Murata Mfg Co Ltd株式会社村田製作所
    • UMEDA KEIICHISHIBAHARA TERUHISA
    • H01G5/16
    • PROBLEM TO BE SOLVED: To prevent a variable capacitance element from malfunction due to sticking.SOLUTION: The variable capacitance element 1 includes a support plate 2, a movable beam 3, lower capacitor electrodes 4A, 4B, lower drive electrodes 5A, 5B, an upper capacitor electrode 6, upper drive electrodes 7a, 7B, and a dielectric film 8. The movable beam 3 is opposed to the support plate 2 through a gap space in a bending direction vertical to a longitudinal direction. The dielectric film 8 is formed so as to be exposed to the gap space between the support plate 2 and the movable beam 3. Driving voltage is applied to the lower drive electrodes 5A, 5B and the upper drive electrodes 7A, 7B. An RF signal is applied to the lower capacitor electrodes 4A, 4B and the upper capacitor electrode 6. Stoppers 12 are formed to reduce a contact area between the upper capacitor electrode 6 and the dielectric film 8 in the vicinity of displacement start position of the movable beam 3.
    • 要解决的问题:防止可变电容元件由于粘附而发生故障。 解决方案:可变电容元件1包括支撑板2,可动光束3,下电容器电极4A,4B,下驱动电极5A,5B,上电容器电极6,上驱动电极7a,7B和 电介质膜8.可移动光束3通过垂直于纵向方向的弯曲方向上的间隙空间与支撑板2相对。 电介质膜8形成为暴露于支撑板2和可动光束3之间的间隙。驱动电压施加到下驱动电极5A,5B和上驱动电极7A,7B。 RF信号施加到下电容器电极4A,4B和上电容器电极6.形成止动器12,以在可移动的电容器电极6的位移开始位置附近减小上电容器电极6和电介质膜8之间的接触面积 3.版权所有(C)2012,JPO&INPIT
    • 7. 发明专利
    • Balanced acoustic wave filter device
    • 平衡声波滤波器
    • JP2006237727A
    • 2006-09-07
    • JP2005045875
    • 2005-02-22
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • H03H9/64H01L41/09H01L41/18H03H9/145
    • PROBLEM TO BE SOLVED: To obtain an acoustic wave filter device with a balance-unbalance conversion function in which a ratio is made larger between impedance of an unbalanced terminal and that of a balanced terminal.
      SOLUTION: In the acoustic wave filter device, transversely coupled resonator type first/second surface acoustic wave filters 6, 7 are formed on a piezoelectric substrate. The surface acoustic wave filter 6 has first-third IDTs 11-13 arranged in the propagation direction of a surface acoustic wave. The surface acoustic wave filter 7 has fourth-sixth IDTs 14-16 arranged in the propagation direction of the surface acoustic wave. The second/fifth IDTs 12, 15 are respectively connected to the unbalanced terminal 3. The first/third IDTs 11, 13 are electrically and serially connected, and also, they are connected to the first balanced terminal 4. The fourth/sixth IDTs 14, 16 are electrically and serially connected, and also, they are connected to the second balanced terminal 5.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:获得具有平衡不平衡转换功能的声波滤波器装置,其中不平衡端子的阻抗和平衡端子的阻抗之间的比例增大。 解决方案:在声波滤波器装置中,横向耦合谐振器型第一/第二声表面波滤波器6,7形成在压电基片上。 表面声波滤波器6具有沿表面声波的传播方向排列的第一至第三IDT11-13。 表面声波滤波器7具有布置在声表面波的传播方向上的第四至第六IDT14-16。 第二/第五IDT 12,15分别连接到不平衡端子3.第一/第三IDT11,13电连接并且串联连接,并且它们连接到第一平衡端子4.第四/第六IDT 14 ,16电气和串联连接,并且它们连接到第二平衡端子5.版权所有(C)2006,JPO和NCIPI
    • 8. 发明专利
    • Substrate for probe array, probe array, and manufacturing method thereof
    • 探针阵列基底,探针阵列及其制造方法
    • JP2010014647A
    • 2010-01-21
    • JP2008176716
    • 2008-07-07
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • G01N33/543C12M1/00C12N15/09G01N33/53G01N37/00
    • PROBLEM TO BE SOLVED: To provide a substrate for a probe array of a high degree of integration, suitable for forming a probe array that holds a sufficient quantity of probe molecules, less liable to cause such a trouble that adjacent liquid drops of probe solutions come into contact with each other, and further, simply and surely detecting such a trouble if it happens.
      SOLUTION: A projection 103 that shows hydrophilicity is provided on each of a plurality of arranged probe holding parts 102 while hydrophobic domains 104 are formed so as to severally surround the holding parts 102. Further, in order to check whether or not the probe solutions are mixed together among the plurality of holding parts 102, a domain 106 for checking that shows hydrophilicity is formed so that it is positioned across a hydrophobic domain 104 for each of the holding parts 102 and between adjoining ones of the plurality of holding parts 102.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:为了提供适合于形成保持足够量的探针分子的探针阵列的高集成度的探针阵列的基板,不太容易引起相邻液滴的问题 探头解决方案相互接触,进一步,简单而可靠地检测到这样的麻烦,如果发生。 解决方案:在多个布置的探针保持部件102中的每一个上设置有显示亲水性的突起103,同时形成疏水区域104以分别围绕保持部件102.另外,为了检查是否 探针溶液在多个保持部件102之间混合在一起,形成用于检查显示亲水性的区域106,使得其被布置成横跨用于每个保持部件102的疏水区域104以及多个保持部件中的相邻的保持部件 (C)2010,JPO&INPIT
    • 9. 发明专利
    • Balanced acoustic wave filter device
    • 平衡声波滤波器
    • JP2006246145A
    • 2006-09-14
    • JP2005060468
    • 2005-03-04
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • H03H9/64H03H9/145H03H9/25
    • PROBLEM TO BE SOLVED: To provide an acoustic wave filter device which has a balance-unbalance conversion function, and increases the ratio of the impedance of its unbalance terminal and the impedance of its balance terminals.
      SOLUTION: This device is an acoustic wave filter device 1 wherein a first to a fourth filter element 11-14 of transversely coupled resonator type surface acoustic wave filter elements are connected to an unbalance terminal 3, the first and the third elements 11, 13 are connected in series, the third element 13 is connected to a first balance terminal 4, the second and the third elements 12, 14 are connected in series, and one end of the fourth element 14 is connected to a second balance terminal 5.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种具有平衡不平衡转换功能的声波滤波器装置,并且增加其不平衡端子的阻抗与其平衡端子的阻抗的比率。 解决方案:该装置是声波滤波器装置1,其中横向耦合的谐振器型表面声波滤波器元件的第一至第四滤波器元件11-14连接到不平衡端子3,第一和第三元件11 ,13串联连接,第三元件13连接到第一平衡端子4,第二元件12和第三元件12,14串联连接,第四元件14的一端连接到第二平衡端子5 (C)2006年,JPO&NCIPI
    • 10. 发明专利
    • Balanced acoustic wave filter
    • 平衡声波滤波器
    • JP2006229487A
    • 2006-08-31
    • JP2005039629
    • 2005-02-16
    • Murata Mfg Co Ltd株式会社村田製作所
    • SHIBAHARA TERUHISA
    • H03H9/145H01L41/09H01L41/18H03H9/64
    • PROBLEM TO BE SOLVED: To provide an acoustic wave filter with a balance-unbalance conversion function wherein a ratio of the impedance of an unbalanced terminal to the impedance of a balanced terminal is selected greater. SOLUTION: The acoustic wave filter is configured such that first and second surface acoustic wave filter sections 6, 7 of a longitudinally coupled resonator type are formed on a piezoelectric substrate 2, the surface acoustic wave filter sections 6, 7 respectively include first to third IDTs 11 to 13 and fourth to sixth IDTs 14 to 16 arranged in a propagation direction of a surface acoustic wave, the first and third IDTs 11, 13, and the fourth and sixth IDTs 14, 16 are connected to the unbalanced terminal 3, and the second and fifth IDTs 12, 15 are respectively connected to the first and second balanced terminals 4, 5, the second and fifth IDTs 12, 15 have first and second split IDT parts 12a, 12b, 15a, 15a provided splittingly in the propagation direction of the surface acoustic wave, and the first and second split IDT parts 12a, 12b, 15a, 15a are connected in series. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种具有平衡不平衡转换功能的声波滤波器,其中不平衡端子的阻抗与平衡端子的阻抗的比率被选择得更大。 解决方案:声波滤波器被配置为使得在压电基板2上形成纵向耦合谐振器型的第一和第二声表面波滤波器部分6,7,声表面波滤波器部分6,7分别包括 到布置在声表面波的传播方向上的第三IDT 11至13和第四至第六IDT 14至16,第一和第三IDT 11,13以及第四和第六IDT 14,16连接到不平衡端3 并且第二和第五IDT 12,15分别连接到第一和第二平衡端子4,5,第二和第五IDT12,15具有分开设置的第一和第二分离IDT部分12a,12b,15a,15a 表面声波的传播方向以及第一和第二分割IDT部分12a,12b,15a,15a串联连接。 版权所有(C)2006,JPO&NCIPI