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    • 1. 发明专利
    • Film thickness measuring method and device
    • 薄膜厚度测量方法和装置
    • JP2003075126A
    • 2003-03-12
    • JP2001269339
    • 2001-09-05
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • KURODA MASAHIROSASAGAWA EISHIROUENO MOICHIMIYAZONO NAOYUKI
    • G01B11/06
    • PROBLEM TO BE SOLVED: To provide a film thickness measuring method and a device capable of measuring online accurately even if irregularities exist on the surface.
      SOLUTION: This film thickness measuring device 1 is characterized by having a first light source 2 for irradiating a film to be measured with light having a first wavelength, a first incident light photodetector 8 for measuring the intensity of incident light having the first wavelength, a first transmitted light photodetector 8 for measuring the intensity of transmitted light having the first wavelength, a first comparator for determining a first ratio which is the ratio between the intensity of incident light having the first wavelength and the intensity of transmitted light, a second light source 4 for irradiating light having a second wavelength different from the first wavelength, a second incident light photodetector 10 for measuring the intensity of incident light having the second wavelength, a second transmitted light photodetector 10 for measuring the intensity of transmitted light having the second wavelength, a second comparator for determining a second ratio which is the ratio between the intensity of incident light having the second wavelength and the intensity of transmitted light, and a film thickness calculator 12 for determining the film thickness based on the first ratio and the second ratio.
      COPYRIGHT: (C)2003,JPO
    • 要解决的问题:即使在表面上存在不规则性,也可以提供一种膜厚测量方法和能够精确地在线测量的装置。 解决方案:该膜厚测量装置1的特征在于具有用于用具有第一波长的光照射被测量的膜的第一光源2,用于测量具有第一波长的入射光的强度的第一入射光检测器8, 用于测量具有第一波长的透射光的强度的第一透射光检测器8,用于确定作为具有第一波长的入射光的强度与透射光强度之间的比率的第一比率的第一比较器,第二光源 4,用于照射具有与第一波长不同的第二波长的光;第二入射光检测器10,用于测量具有第二波长的入射光的强度;第二透射光检测器10,用于测量具有第二波长的透射光的强度; 用于确定作为r的第二比率的第二比较器 在具有第二波长的入射光的强度和透射光的强度之间的比率,以及用于基于第一比率和第二比率确定膜厚度的膜厚度计算器12。
    • 2. 发明专利
    • Solar cell module and manufacturing method thereof
    • 太阳能电池模块及其制造方法
    • JP2007005345A
    • 2007-01-11
    • JP2005180262
    • 2005-06-21
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • KOKAJI SOJISASAGAWA EISHIROKURODA MASAHIROUDA KAZUTAKATAKEUCHI YOSHIAKI
    • H01L31/04
    • Y02E10/548
    • PROBLEM TO BE SOLVED: To speed up laser machining, without increasing the output of laser and without power generating burrs in a thin-film solar cell containing the generation layer of a microcrystal-based silicon film. SOLUTION: A solar cell module comprises a substrate 1 and a plurality of power generation cells 5 connected in series. The power generation cells 5 comprise a surface electrode layer 2, a power generation layer 3 containing a microcrystal-based silicon film, and a back electrode layer 4. An isolation groove 8, extended from the surface of the back electrode layer 4 to the surface electrode layer 2, is provided between adjacent power generation cells 5. In the isolation groove 8, a plurality of elliptical patterns 89 are arranged on the surface electrode layer 2. The elliptical pattern 89 includes a deformed region 72 in which the surface of the surface electrode layer 2 has been deformed; and an annular region 71 surrounding the deformed region 72. The adjacent annular patterns 89 partially overlap. In at least 50% of the plurality of elliptical patterns 89, overlapping is provided so that the edge of one annular region 71 and one portion of the other deformed region 72 in those that are adjacent to each other overlap. COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:为了加快激光加工,不增加包含微晶硅系硅膜的发生层的薄膜太阳能电池中的激光器的输出和不产生毛刺。 解决方案:太阳能电池模块包括基板1和串联连接的多个发电电池5。 发电单元5包括表面电极层2,含有微晶硅膜的发电层3和背面电极层4.隔离槽8从背面电极层4的表面延伸到表面 电极层2设置在相邻的发电单元5之间。在隔离槽8中,多个椭圆形图案89布置在表面电极层2上。椭圆图案89包括变形区域72,其中表面的表面 电极层2已变形; 围绕变形区域72的环形区域71.相邻的环形图案89部分重叠。 在多个椭圆形图案89的至少50%中,重叠地设置成使得一个环形区域71的边缘和彼此相邻的另一个变形区域72中的另一个变形区域72的一部分重叠。 版权所有(C)2007,JPO&INPIT
    • 3. 发明专利
    • Laser igniting engine having laser beam transmission tube with built-in mirror
    • 具有内置镜子的激光束传输管的激光点火发动机
    • JP2006200419A
    • 2006-08-03
    • JP2005012136
    • 2005-01-19
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • ISHIDA HIROYUKIKURODA MASAHIRO
    • F02P23/04
    • PROBLEM TO BE SOLVED: To provide an engine capable of preventing the life of a target from being lowered by the one-point concentrated radiation of a laser beam by avoiding the concentrated radiation of the laser beam on one point of the target to prevent the occurrence of defective laser beam ignition due to the lowering of the life of the target and the defective burning resulting from the defective laser ignition and also capable of suppressing the occurrence of troubles such as an increase in wasteful man-hour due to the replacement of the target and the stoppage of the operation of the engine in the laser igniting engine having a laser beam transmission tube for transmitting the laser beam.
      SOLUTION: This laser beam ignition engine comprises a plurality of swingable mirrors for cylinders installed in the laser beam transmission tube for each cylinder and radiating a laser beam from a laser beam oscillator in the direction of a target for each cylinder, a mirror drive device swingably driving the mirrors for cylinders, and a controller for changing the reflective angle of the mirrors for cylinders through the mirror drive device based on an engine speed and a crank angle so that a laser beam radiated position on the target can be changed.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种能够通过避免激光束在目标的一个点上的集中辐射来防止目标的寿命被激光束的一点集中辐射降低的发动机 防止由于目标的寿命降低而引起的激光束点火不良和由于激光点火不良导致的有缺陷的燃烧,并且还能够抑制诸如由于更换引起的浪费工时增加等麻烦的发生 并且在具有用于透射激光束的激光束传输管的激光点火引擎中停止发动机的操作。 解决方案:该激光束点火发动机包括安装在用于每个气缸的激光束传输管中的气缸的多个可摆动反射镜,并且从每个气缸的目标方向照射来自激光束振荡器的激光束,反射镜 驱动装置可旋转地驱动气缸的反射镜;以及控制器,用于基于发动机转速和曲柄角度,通过反射镜驱动装置改变气缸反射镜的反射角度,从而可以改变目标上的激光束照射位置。 版权所有(C)2006,JPO&NCIPI
    • 4. 发明专利
    • Integrated solar cell
    • 集成太阳能电池
    • JP2005322707A
    • 2005-11-17
    • JP2004138121
    • 2004-05-07
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • YAMASHITA NOBUKIUDA KAZUTAKAKURODA MASAHIRO
    • H01L31/04H01L31/042
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide an integrated solar cell which can prevent side leak without increase in the isolation groove which results in increase in non-effective area of connecting part and increase in the laser process. SOLUTION: The integrated solar cell includes an insulated substrate and a plurality of power generating units. At least one power generating unit comprises a lower electrode provided on the insulated substrate, a plurality of photoelectric conversion cells laminated on the lower electrode, a transparent intermediate layer provided between two photoelectric conversion cells among a plurality of the photoelectric conversion cells, and an upper electrode provided on a plurality of photoelectric conversion cells. Moreover, the upper electrode is in the electrical contact with the lower electrode of the adjacent other power generation units. In addition, the specific resistance of the transparent intermediate layer is ranged up to 100 Ωcm from 1 Ωcm. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种集成的太阳能电池,其可以防止侧泄漏,而不会增加隔离槽,导致连接部件的无效面积的增加和激光加工的增加。 集成太阳能电池包括绝缘基板和多个发电单元。 至少一个发电单元包括设置在绝缘基板上的下电极,层叠在下电极上的多个光电转换单元,设置在多个光电转换单元之间的两个光电转换单元之间的透明中间层,以及上层 电极,设置在多个光电转换单元上。 此外,上部电极与相邻的其他发电单元的下部电极电接触。 另外,透明中间层的电阻比范围从1Ωcm到100Ωcm。 版权所有(C)2006,JPO&NCIPI
    • 6. 发明专利
    • Method of manufacturing solar cell module and solar cell module
    • 制造太阳能电池模块和太阳能电池模块的方法
    • JP2008066453A
    • 2008-03-21
    • JP2006241593
    • 2006-09-06
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • KOKAJI SOJIKURODA MASAHIROUDA KAZUTAKA
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell module, in which a transparent conductive layer and a back electrode layer will not be short-circuited at the end of power generating region, and a solar cell module. SOLUTION: The method includes a step of sequentially laminating the transparent conductive layer, a photoelectric conversion layer and the rear side electrode layer on the principal plane of a translucent substrate, a burr prevention groove forming step of forming a burr prevention groove by etching the photoelectric conversion layer and the rear side electrode layer by pulsating laser, and a peripheral rim isolation groove forming step of forming a peripheral rim isolation groove, in which the transparent conductive layer, the photoelectric conversion layer and the back electrode layer are removed by etching the outside of the burr preventing groove on the plane of the substrate by the pulsating laser. The peripheral rim isolation groove forming step comprises a step of scanning the laser in a way that the inside terminal of laser beam pattern in respective pulses is superposed on the burr preventing groove. COPYRIGHT: (C)2008,JPO&INPIT
    • 解决的问题:提供一种制造太阳能电池模块的方法,其中透明导电层和背面电极层在发电区域的末端不会短路,并且提供太阳能电池模块。 解决方案:该方法包括在透光性基板的主面上顺序地层叠透明导电层,光电转换层和背面侧电极层的工序,通过以下步骤形成防止毛刺的沟槽: 通过脉动激光蚀刻光电转换层和后侧电极层,以及周边边缘隔离槽形成步骤,形成周边边缘隔离槽,其中透明导电层,光电转换层和背电极层被除去 通过脉动激光蚀刻在基板的平面上的毛刺防止槽的外部。 外围边缘隔离槽形成步骤包括以下方式扫描激光的步骤:使各个脉冲中的激光束图案的内部端子重叠在防止毛刺的凹槽上。 版权所有(C)2008,JPO&INPIT
    • 7. 发明专利
    • Solar cell module and method of manufacturing same
    • 太阳能电池模块及其制造方法
    • JP2007184421A
    • 2007-07-19
    • JP2006001664
    • 2006-01-06
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • SASAGAWA EISHIROKOKAJI SOJIKURODA MASAHIROUDA KAZUTAKA
    • H01L31/04B23K26/00B23K26/073B23K101/36
    • Y02E10/545Y02E10/548
    • PROBLEM TO BE SOLVED: To provide a method of manufacturing a solar cell module excellent in the photoelectric conversion efficiency without deteriorating element characteristics. SOLUTION: The method includes: a step for forming a conductive transparent electrode film on a transparent substrate; a first division step for dividing it into two or more regions by forming grooves on the above conductive transparent electrode film; a step for forming a silicon-based thin film semiconductor layer film on the transparent substrate, a second division step for dividing it into two or more regions by forming grooves on the silicon-based thin film semiconductor layer film; a step for forming a metal electrode film on the transparent substrate; and a third division step for dividing it into two or more regions by forming grooves on the metal electrode film. At least one of the first, second and third division steps includes a laser beam irradiation step, and the laser beam irradiation step comprises a cutoff step for cutting off a portion acted as both ends in a direction which intersects perpendicularly with grooves, and an irradiation step for irradiating a film to be separated after being cut off. COPYRIGHT: (C)2007,JPO&INPIT
    • 解决的问题:提供一种制造光电转换效率优异且不劣化元件特性的太阳能电池模块的方法。 解决方案:该方法包括:在透明基板上形成导电透明电极膜的步骤; 第一分割步骤,通过在上述导电透明电极膜上形成沟槽将其分成两个或更多个区域; 在透明基板上形成硅基薄膜半导体层膜的步骤,通过在硅系薄膜半导体层膜上形成沟槽将其分割成两个以上的区域的第二分割工序; 在透明基板上形成金属电极膜的工序; 以及通过在金属电极膜上形成槽而将其分割成两个或更多个区域的第三分割步骤。 所述第一,第二和第三分割步骤中的至少一个包括激光束照射步骤,并且所述激光束照射步骤包括切断步骤,用于切断与凹槽垂直相交的方向上作为两端的部分,以及照射 在切断后照射要分离的膜的步骤。 版权所有(C)2007,JPO&INPIT
    • 8. 发明专利
    • Laser igniting engine with laser beam transmission tube and mirror assembling method
    • 具有激光光束传输管和镜面组装方法的激光点火发动机
    • JP2006200420A
    • 2006-08-03
    • JP2005012137
    • 2005-01-19
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • ISHIDA HIROYUKIKURODA MASAHIRO
    • F02P23/04
    • PROBLEM TO BE SOLVED: To provide a laser beam igniting engine having a laser beam transmission tube capable of preventing mirrors from being contaminated and the intensity of the laser beam from being lowered by the contamination by avoiding the entry of dirt and oil smoke into the laser beam transmission tube when the mirrors installed in the laser beam transmission tube are installed or removed in the laser beam igniting engine having the laser beam transmission tube for transmitting laser beam.
      SOLUTION: This laser beam igniting engine comprises a mirror mounting unit having a shutter for opening and closing the opening/closing window of a mirror case in which the mirrors reflecting the laser beam are stored and detachable from the laser beam transmission tube and a mirror mounting part having a laser beam inlet opening in the laser beam transmission tube and on which the mirror mounting unit is installed. When the mirror mounting unit is installed on the mirror mounting part, the shutter opens the opening/closing window so that the laser beam can be led to the mirrors through the laser beam inlet opening, and when the mirror mounting unit is dismounted, the shutter closes the opening/closing window to form the inside of the mirror case in a closed space.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种激光束点火发动机,其具有能够防止反射镜被污染的激光束传输管,并且通过避免灰尘和油烟的进入,激光束的强度被污染降低 当安装在激光束传输管中的反射镜在具有用于传输激光束的激光束传输管的激光束点火引擎中安装或移除时,进入激光束传输管。 解决方案:该激光束点火发动机包括一个反光镜安装单元,其具有用于打开和关闭反射镜壳体的打开/关闭窗口的快门,其中反射激光束的反射镜被存储并从激光束传输管中分离, 在激光束传输管中具有激光束入口的反射镜安装部分,并且其上安装有反射镜安装单元。 当镜子安装单元安装在镜子安装部分上时,快门打开打开/关闭窗口,使得激光束可以通过激光束入口打入镜子,当镜子安装单元被拆卸时,快门 关闭打开/关闭窗口以在封闭空间内形成镜盒的内部。 版权所有(C)2006,JPO&NCIPI
    • 9. 发明专利
    • Laser ignition type engine
    • 激光点火型发动机
    • JP2005291105A
    • 2005-10-20
    • JP2004108155
    • 2004-03-31
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • AKAGAWA HIROKAZUTAKAISHI TATSUOKURODA MASAHIROINANAGA NORIYASU
    • G02B26/12F02B5/00F02P23/04G02B26/10H01S3/00
    • PROBLEM TO BE SOLVED: To provide a laser ignition type engine capable of extending consumption time of a target by suppressing consumption of the target due to radiation of laser beam in a small size compact device applicable to a small engine for a power generation set, for a vehicle or the like. SOLUTION: In the laser ignition type engine constructed to ignite gas in a combustion chamber by plasma generated by radiating laser beam on the target installed in the combustion chamber, a laser beam dispersion mechanism provided with a reflection mirror including a reflection surface driven by a drive source and movable in a fixed range is provided in a hollow storage tube fixed to a cylinder head of each cylinder, the laser beam dispersion mechanism is constructed to make laser beam after reflecting in the reflection surface penetrate an inside of the storage tube and radiate on the target with dispersing in a predetermined range. COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种激光点火式发动机,其能够通过在适用于发电用小型发动机的小型紧凑型装置中抑制由于激光束的辐射引起的目标物的消耗而延长目标的消耗时间 设置,用于车辆等。 解决方案:在激光点火式发动机中,通过在安装在燃烧室中的靶上照射激光束而产生的等离子体燃烧室内的气体点燃的激光点火式发动机,具有反射镜驱动的反射镜的激光束分散机构 在固定在每个气缸的气缸盖上的空心存储管中设置有驱动源并且可固定范围可移动的激光束分散机构,用于使反射表面反射后的激光束穿过存储管的内部 并在分散在预定范围内的目标上辐射。 版权所有(C)2006,JPO&NCIPI
    • 10. 发明专利
    • Solar battery module, and method of manufacturing the same
    • 太阳能电池模块及其制造方法
    • JP2008124496A
    • 2008-05-29
    • JP2008005814
    • 2008-01-15
    • Mitsubishi Heavy Ind Ltd三菱重工業株式会社
    • OGAWA KAZUHIKOKURODA MASAHIROUDA KAZUTAKAHORIOKA RYUJIKOKAJI SOJI
    • H01L31/04
    • Y02E10/50
    • PROBLEM TO BE SOLVED: To provide a high-voltage solar battery module with a high voltage per sheet, regardless of size, and to provide its manufacturing method. SOLUTION: This solar battery module is provided with insulating groove sections 8a, 8b which are constituted by removing a first electrode layer, a photoelectric conversion layer, and a second electrode layer so as to cross the long side of a stripe-form cell. Further, the solar battery module is provided with a plurality of sub modules 1a, 1b, 1c, 1d that are divided so that a current value in each generation becomes essentially the same and so insulated by the insulating groove sections, a connection means 9 for connecting the plurality of sub modules in series, and positive/negative electrode terminals 10a, 10b for taking out generation output connecting the plurality of sub modules in series. COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:提供一种具有每片高电压的高压太阳能电池模块,而不管其尺寸,并提供其制造方法。 解决方案:该太阳能电池模块设置有绝缘槽部分8a,8b,其通过去除第一电极层,光电转换层和第二电极层而构成,以跨越条形形式的长边 细胞。 此外,太阳能电池模块设置有多个子模块1a,1b,1c,1d,其被划分为使得每一代中的电流值变得基本相同并且被绝缘槽部分绝缘,连接装置9用于 串联连接多个子模块,以及用于取出连续地连接多个子模块的发生输出的正/负极端子10a,10b。 版权所有(C)2008,JPO&INPIT