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    • 10. 发明专利
    • SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
    • JPS62266852A
    • 1987-11-19
    • JP11201486
    • 1986-05-14
    • MITSUBISHI ELECTRIC CORP
    • IIDA TAKAHIKO
    • H01L23/28H01L23/29H01L23/31
    • PURPOSE:To improve the reliability of an IC chip, by providing an adhesion improving material of a molding resin between the back surface of a die pad for fixing the IC chip and the molding resin, thereby closely adhering the surfaces between both parts. CONSTITUTION:A precoat material 6 is deposited and formed on the entire rear of a die pad 2. Both an IC chip 1 and an inner lead 4 are molded with a resin 5. The precoat material 6 is formed as a thin film having adequate hardness by the following way: after a wire bonding process, the rear of the die pad 2 of a lead frame 3 is washed and cleaned; then polyimide is thinly applied and cured as required; and the hardness is increased to about 100 Rockwell. Thermal stress and strain due to the difference between the linear expansion coefficients of the material of the die pad 2 and the molding resin 5 are absorbed. The rear of the die pad 2 and the molding resin 5 are perfectly adhered closely. Therefore moisture in air does not intrude, and the yield of cracks in the molding resin 5 can be positively prevented.