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    • 9. 发明专利
    • ELECTRON EMITTING ELEMENT AND MANUFACTURE OF IT
    • JPH02306519A
    • 1990-12-19
    • JP12694589
    • 1989-05-19
    • MATSUSHITA ELECTRIC IND CO LTD
    • KANEKO AKIRASUGANO SUSUMUTOMII KAORU
    • H01J9/02H01J1/30H01J1/304
    • PURPOSE:To enhance the charged voltage between a negative electrode material for an electron emitting element and an electrode for electron drawout by deciding the foremost shape of the negative electrode material solely depending upon the film thickness, minimizing it for easier concentration of the electric field, and thereby providing spatial gaps and an insulative layer between the negative electrode material and the electrode for electron drawout. CONSTITUTION:An insulative substance layer 2 consisting of Al2O3, SiO2, Si3N4, etc., is furnished on one side of an electric insulative base board 1, and a negative electrode material 3 consisting of W, Mo, Ta, TiC, DiC, ZrC, etc., is provided in the center of this insulative substance layer 2, wherein one of them is protruded a certain amount from the recess formed in the insulative substance layer 2 in such a way that the protruded surface will be flush with the base board 1. An electron drawout electrode 4 consisting of W, Mo, Ta, etc., is provided on the recessed side of this insulative substance layer 2 of base board 1. To prepare an array of electron emitting elements, a conductive layer 5 insulated electrically from the negative electrode material 3 is provided according to necessity on that side of the base board 1 which is situated oppositely to the electron drawout electrode 4, and the foremost shape of the insulative material 3 is determined only depending upon the film thickness.
    • 10. 发明专利
    • ELECTRON EMISSION ELEMENT
    • JPH02126532A
    • 1990-05-15
    • JP27870788
    • 1988-11-04
    • MATSUSHITA ELECTRIC IND CO LTD
    • KANEKO AKIRATOMII KAORU
    • H01J1/312H01J1/30
    • PURPOSE:To obtain a good electron emission element having no ununiformity in characteristics of each of the element by making the surface of a thin first insulator layer and a second insulator layer into a same plane without a difference in level and a metal layer formed thereon into a film without recessed and projecting parts. CONSTITUTION:An electron emission element is constituted such that a part of a conductive layer 11 is convexly formed, and a thin insulating layer 12 is formed on the convex part of the conductive layer 11, and an insulator layer 13 with such a thickness that can make the same plane with the surface of the thin insulator layer 12 is formed on the conductive layer 11 excluding the convex part. Moreover, a thin metal layer 14 is formed on the insulators 12 and 13 of the above 2 parts. It is possible, therefore, to form the thin insulator layer 12 and the thin metal layer 14 from which an electron is emitted as an uniform film without recessed and projecting parts. Thereby, it is possible to form a good electron emission element free from a crack, unstability and deterioration in the characteristics of the element at a part without a difference in level.