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    • 3. 发明专利
    • Apparatus for applying patterning film and vacuum deposition apparatus
    • 用于涂布图案和真空沉积装置的装置
    • JP2008121038A
    • 2008-05-29
    • JP2006303762
    • 2006-11-09
    • Matsushita Electric Ind Co Ltd松下電器産業株式会社
    • NAKATANI SHUHEIOKAMOTO TADASHIMORIYAMA JUNSUEMITSU TOSHIYUKI
    • C23C14/04C23C14/24H01G4/015H01G4/18H01G13/00
    • PROBLEM TO BE SOLVED: To manufacture a plate for forming an oil film by using a rigid material and to constitute the whole of an apparatus for applying patterning films with a rigid material so as to enhance the durability and to continuously form various oil masking patterns stably.
      SOLUTION: The apparatus for applying patterning films is equipped with: an inner pipe 2 having an opening part 6 for passing oil vaporized for forming a patterning film in the inner pipe 2; an outer pipe frame 10 which is provided to cover the outer periphery of the inner pipe 2 and in which opening parts 7 are provided; and rigid nozzle plates 4 which are provided so as to be each superposed with respective opening parts 7 of the outer pipe frame 10 and each have a through-hole group 9 comprising a plurality of through-holes 5 for spraying vaporized oil. The shape or alignment pattern of the through-holes 5 constituting the through-hole group 9 is made different in each rigid nozzle plate 4.
      COPYRIGHT: (C)2008,JPO&INPIT
    • 要解决的问题:通过使用刚性材料制造用于形成油膜的板,并且构成用刚性材料施加图案形成膜的装置的整体,以提高耐久性并连续地形成各种油 屏蔽图案稳定。 解决方案:用于施加图案形成膜的装置装备有内管2,内管2具有用于使在内管2中形成图案化膜的油蒸发的油的开口部6; 外管框架10,其设置成覆盖内管2的外周,并且设置有开口部7; 和刚性喷嘴板4,其设置成与外管框架10的相应开口部分7重叠,并且每个具有通孔组9,该通孔组9包括用于喷射汽化油的多个通孔5。 构成通孔组9的通孔5的形状或对准图形在每个刚性喷嘴板4中形成不同。(C)版权所有(C)2008,JPO&INPIT