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    • 8. 发明专利
    • PRODUCTION OF ALUMINUM MATERIAL FOR VACUUM
    • JPS60152666A
    • 1985-08-10
    • JP1063084
    • 1984-01-23
    • SHOWA ALUMINIUM CO LTD
    • KATOU YUTAKATSUKAMOTO KENJIISOYAMA EIZOU
    • C23C8/12C23F4/00
    • PURPOSE:To release adsorbed gases from an Al surface and to prevent the decrease in the degree of vacuum in the stage of producing an Al member to be used in a high vacuum part by subjecting the surface facing the vacuum part to surface working such as cutting in a gaseous atmosphere contg. oxygen without bringing the same into contact with the atmosphere contg. moisture. CONSTITUTION:The surface facing a vacuum part of an Al member as a material facing the vacuum member of a high vacuum device is cut or ground to expose the fresh surface in a gaseous atmosphere contg. 0.5-30vol% O2 and consisting of the balance Ar, He or gaseous N inert with Al or a vacuum contg. a slight amt. of O2 in the stage of producing said member. The exposed surface of Al contacts with O2 without contacting with the atm. air contg. moisture and is therefore oxidized by which an Al2O3 film is formed on the surface. Since no hydrated oxide is formed on the surface of the Al, moisture, gaseous hydrocarbon and gases such as CO2, CO, etc. which decrease the degree of vacuum are not generated in vacuum. The high degree of vacuum is thus maintained.
    • 9. 发明专利
    • PRODUCTION OF ALUMINUM MATERIAL FOR VACUUM
    • JPS60128259A
    • 1985-07-09
    • JP23808283
    • 1983-12-16
    • SHOWA ALUMINIUM CO LTD
    • KATOU YUTAKATSUKAMOTO KENJIISOYAMA EIZOU
    • C23C8/02C23C8/10C23C8/12C23C14/56
    • PURPOSE:To form an oxide film on the surface and to produce a formed Al material usable in a high vacuum by cleaning the surface of the formed Al material with an alkali or acid to remove the hydrated oxide then heating the material in an inert gaseous atmosphere contg. oxygen. CONSTITUTION:An Al or Al alloy shape material formed by extrusion forming rolling, press forming, etc. is preliminarily dipped in a treating soln. for suppressing formation of a hydrated oxide film contg. 0.000001-0.0005% acid such as chromic acid, silicic acid, etc. or the salt thereof. The material is then subjected to alkali cleaning using caustic soda or pickling using sulfuric acid in a vacuum vessel by which the working fluid sticking thereto is removed from said material and the hydrated oxide film on the surface is removed therefrom. While the evacuation is continued, the material is dried at 70-90 deg.C and in succession, the material is heated for 0.5-6hr at 200-300 deg.C in an inert gaseous atmosphere of Ar, He, etc. contg. 1-10vol% oxygen. The dense oxide film is formed on the surface and the formed Al material which does not release gas even in a high vacuum is obtd.