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    • 7. 发明专利
    • Standard calibrated leak
    • 标准校准泄漏
    • JP2006189425A
    • 2006-07-20
    • JP2005353744
    • 2005-12-07
    • Kofukin Seimitsu Kogyo (Shenzhen) YugenkoshiQinghua Univツィンファ ユニバーシティ鴻富錦精密工業(深▲セン▼)有限公司
    • TANG JIELIU LIANGRYU HOKO SHOFUKUDU BING-CHUKAKU SAIRINCHIN HIKINFAN FENG-YAN
    • G01M3/02
    • G01M3/007
    • PROBLEM TO BE SOLVED: To provide a standard calibrated leak capable of solving the problems of a conventional art wherein the leak amount of the standard calibrated leak must be measured via other device and the measuring range of the leak amount is narrow.
      SOLUTION: The standard calibrated leak comprises a thin film that cannot pass measuring gas, and a permeation hole of the predetermined number of divisions formed in the thin film. The permeation hole has a predetermined aperture, and its aperture is within a nano range. The standard calibrated leak previously determines the dimension and the number of divisions, and the aperture is within the nano range. Therefore, the leak amount is calculated, based on the theory of vacuum science technology, namely the leak amount can be determined without using the other device, and a micro leak amount can be measured.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供能够解决传统技术的问题的标准校准泄漏,其中标准校准泄漏的泄漏量必须通过其他装置测量,并且泄漏量的测量范围窄。 解决方案:标准校准的泄漏包括不能通过测量气体的薄膜,以及在薄膜中形成预定数量的分区的渗透孔。 渗透孔具有预定的孔径,其孔径在纳米范围内。 标准校准泄漏事先决定了尺寸和分割数,孔径在纳米范围内。 因此,基于真空科学技术的理论计算泄漏量,即可以在不使用其他装置的情况下确定泄漏量,并且可以测量微量泄漏量。 版权所有(C)2006,JPO&NCIPI
    • 8. 发明专利
    • Ion generating device
    • 离子发生装置
    • JP2007123270A
    • 2007-05-17
    • JP2006287986
    • 2006-10-23
    • Kofukin Seimitsu Kogyo (Shenzhen) YugenkoshiQinghua Univツィンファ ユニバーシティ鴻富錦精密工業(深▲セン▼)有限公司
    • QIAN LIQI JINGTANG JIELIU LIANGKO SHOFUKUCHIN HIKINFAN FENG-YAN
    • H01J27/06H01J37/08
    • H01J27/04
    • PROBLEM TO BE SOLVED: To solve the problem that when a hot cathode is used as an electron emission source, the emission of electrons is unstable and the hot cathode is worn out to suffer a reduction in its service life, and to reduce the cost for an ion gun and also solve the problem that an ion gun in which a hot cathode is used as an electron emission source is complicated in configuration.
      SOLUTION: An ion generating device 10 of the present invention includes a container 11, a cathode device 16 and an anode device 14. The container comprises a first end portion 115 having an electron entry port 15, a second end portion 113 located opposite to the first end portion and having an electron emission port 13, and a main body located between the first and second end portions and having a gas intake port 17. The cathode device is disposed opposite to the electron entry port and includes a conducting base and at least one emitter. An anode electrode is placed inside the container and formed in an annular or cylindrical shape.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题为了解决当热阴极被用作电子发射源时,电子的发射是不稳定的,并且热阴极被磨损以使其使用寿命缩短并且减少 离子枪的成本也解决了使用热阴极作为电子发射源的离子枪的结构复杂的问题。 解决方案:本发明的离子产生装置10包括容器11,阴极装置16和阳极装置14.该容器包括具有电子入口15的第一端部115,以及第二端部113 与第一端部相对并具有电子发射端口13,以及位于第一和第二端部之间并具有气体进入口17的主体。阴极装置与电子入口相对设置,并且包括导电基座 和至少一个发射器。 将阳极放置在容器内部并形成为环形或圆柱形。 版权所有(C)2007,JPO&INPIT