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1. 发明专利

JP2004086935A Device and method for original disk exposure 有权
公开(公告)号：JP2004086935A
公开(公告)日：2004-03-18
申请号：JP2002242454
申请日：2002-08-22
申请人： Jeol Ltd , Sony Corp , ソニー株式会社 , 日本電子株式会社
发明人： INAGAKI TAKAO , SUZUKI AKITOSHI , AKI YUICHI , KAWASE HIROSHI , YAMAMOTO MASANOBU , DATE NAOKI , NORIOKA SETSUO , KOIZUMI MITSURU , NIIKURA TAKAO , MUTO MASAO
IPC分类号： G03F7/20 , G11B7/26 , G11B9/10 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide an original disk exposure device and an original disk exposure method in which measurement is constantly conducted for the amount of illuminating current without interrupting exposure operation of electron beams that illuminate a base body and use is made of the electron beams whose illuminating current amount is controlled by the measurement value.
SOLUTION: The device is provided with an electron gun control section 38 which controls an electron gun 1, reflected electron detectors 8a and 8b which detect reflected electrons generated by illuminating a base body 9 with electron beams, an illuminating current amount monitoring section 40 which monitors the amount of illuminating current based on the amount of reflected electrons, a direct electron detector 10 in which electron beams by an electron beam illumination adjusting means are directly made incident and illuminating current amount is detected and an illuminating current amount detection control section 39 which controls the generation of electron beams by change information in a prescribed interval of the illuminating current amount based on at least the reflected electron amount and the illuminating current amount based on direct incident of electron beams so as to control the illuminating current amount of the exposure electron beams.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2009216740A Method and device for controlling blanking coil 审中-公开
标题翻译：用于控制卷芯线圈的方法和装置
公开(公告)号：JP2009216740A
公开(公告)日：2009-09-24
申请号：JP2008057183
申请日：2008-03-07
申请人： Jeol Ltd , 日本電子株式会社
发明人： MUTO MASAO
IPC分类号： G03F7/20 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a method and a device for controlling a blanking coil which decrease the blanking-off period and thereby decrease the total period of blanking-on/off.
SOLUTION: The device for controlling a blanking coil, to be used in a charge particle beam drawing device for drawing a pattern on a drawing medium with a charged particle beam, comprises: a pair of coils L1, L2 provided for blanking; a pair of drive circuits 10, 11 applying a current to the coils; D/A converters 1, 2 provided in input sections of the drive circuits; a control CPU 4 setting digital values on the D/A converts; a differential amplification circuit for extracting the difference current in the currents applied to the pair of coils L1, L2; and an A/D converter converting the output of the differential amplification circuit into a digital value, and sends the output of the A/D converter 3 to the control CPU 4.
COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：提供一种用于控制消隐线圈的方法和装置，其减少消隐期，从而减少消隐开/关的总周期。解决方案：用于控制用于在具有带电粒子束的绘图介质上绘制图案的电荷粒子束描绘装置中的消隐线圈的装置包括：一对线圈L1，L2，用于消隐; 一对驱动电路10,11向线圈施加电流; 设置在驱动电路的输入部分中的D / A转换器1,2; 在D / A转换器上设置数字值的控制CPU 4; 用于提取施加到所述一对线圈L1，L2的电流中的差动电流的差分放大电路; 以及将差分放大电路的输出转换为数字值的A / D转换器，将A / D转换器3的输出发送到控制CPU 4.版权所有（C）2009，JPO＆INPIT

3. 发明专利

JPH08195180A SLUICE VALVE CONTROL DEVICE FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPH08195180A
公开(公告)日：1996-07-30
申请号：JP412095
申请日：1995-01-13
申请人： JEOL LTD
发明人： YOSHIMOTO AKIHIRO , BANBA HIROYUKI , MUTO MASAO , ISHIBASHI TAMOTSU
IPC分类号： H01J37/18 , H01J37/26
摘要： PURPOSE: To improve operability by providing a control means for opening the second sluice valve before opening the first sluice valve and closing the first sluice valve before closing the second sluice valve. CONSTITUTION: When a camera section 6 is to be returned to the atmospheric pressure for the replacement of a film in the camera section 6, for example, the first sluice valve 2 is closed at step 1. The closure of the first sluice valve 2 is confirmed at step 2, then the second sluice valve 3 is closed at step 3. The closure of the second sluice valve 3 is confirmed at step 4, and the closing actions are completed. When the camera section 6 is to be evacuated, the second sluice valve 3 is opened at step 1. The opening of the second sluice valve 3 is confirmed at step 2, then the first sluice valve 2 is opened at step 3. The opening of the first sluice valve 3 is confirmed at step 4, and the opening actions are completed. The camera section 6 can be returned to the atmospheric pressure while electron beam emission is kept on.

4. 发明专利

JPH04149941A DRIVING DEVICE WITH DC MOTOR 失效
公开(公告)号：JPH04149941A
公开(公告)日：1992-05-22
申请号：JP27574890
申请日：1990-10-15
申请人： JEOL LTD
发明人： ISHIBASHI TAMOTSU , MUTO MASAO , MORI SEIICHIRO
IPC分类号： H01J37/20 , H02P7/29
摘要： PURPOSE:To invariably drive a driven body in response to an action quantity by controlling the pulse width of the drive signal to a DC motor based on the signal on the rotation angle so that the driven body is driven by the same distance for the unit action of a drive indicator. CONSTITUTION:When a drive indicator 17 is operated to indicate the shift of a stage 7, a gate circuit 11 is opened while pulses are fed from the indicator 17, and pulse signals from an oscillator 10 are fed to a drive pulse generating circuit 12. Signals indicating the rotation of a DC motor 14 from a rotary encoder 15 are fed to a pulse width control signal generating circuit 16. The circuit 16 counts the signals from the encoder 15 to form a signal indicating the rotation angle from the reference of a lever body. The circuit 16 specifies the address based on the signal, the pulse specified signal on the angle is read out, the width of the drive pulse generated by the circuit 12 is controlled, drive pulses with a different width are fed to the motor 14, and the stage 7 is moved by the quantity corresponding to the action quantity of the indicator 17.

5. 发明专利

JPH09283071A ELECTRON BEAM DEVICE 失效
公开(公告)号：JPH09283071A
公开(公告)日：1997-10-31
申请号：JP8930596
申请日：1996-04-11
申请人： JEOL LTD
发明人： YOSHIMOTO AKIHIRO , BANBA HIROYUKI , MUTO MASAO , ISHIBASHI TAMOTSU
IPC分类号： G01N23/225 , H01J37/244 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an electron beam device capable of accurately performing qualitative and quantitative analysis of an element while avoiding charge up of an X-ray detector. SOLUTION: In a converting circuit 18, a position signal M is left as stored, which assigns an X-ray detector position so as to approach a sample to a degree not receiving irradiation of a secondary electron generated from the sample by an X-ray detector 8 in accordance with increasing an energization amount of an objective lens. In the converting circuit 28, the X-ray detector position signal M, corresponding to voltage E in proportion to an energization current generated in a detecting resistor 15, is fed to a motor deriving circuit 12. In the motor driving circuit 12, a signal representing a present position of the X-ray detector 8 is fed from a position detector 11, a motor drive signal is fed to a motor 9 until the X-ray detector 8 is placed in a position corresponding to the X-ray detector position signal fed from the converting circuit 18.

6. 发明专利

JPH0696708A DRIVING DEVICE FOR DEFLECTOR IN ELECTRON MICROSCOPE AND THE LIKE 失效
公开(公告)号：JPH0696708A
公开(公告)日：1994-04-08
申请号：JP10690792
申请日：1992-04-24
申请人： JEOL LTD
发明人： MUTO MASAO
IPC分类号： H01J37/147
摘要： PURPOSE:To simultaneously switch a main deflector at the time of performing the switching of a shift operation and a tilt operation in the deflector of an electron microscope and the like for performing the switching of a shift operation and a tilt operation with a two-stage deflector. CONSTITUTION:This device is provided with a first switching means S1, S2 for attenuating an exciting current flowing through a first deflector D1 in accordance with a parameter set by a first interlocking data setting means 5, 6 and then adding it to the exciting current of a second deflector D2 to supply and a second switching means S3, S4 for attenuating the exciting current flowing through the second deflector D2 in accordance with a parameter set by a second interlocking data setting means 7, 8 and then adding it to the exciting current of the first deflector D1 to supply. Either one of the first switching means or the second switching means is selectively operated, thereby making it possible to reverse the interlocking relationship between the first deflector and the second deflector.

7. 发明专利

JPH05225938A ELECTRON MICROSCOPE 失效
公开(公告)号：JPH05225938A
公开(公告)日：1993-09-03
申请号：JP5687192
申请日：1992-02-07
申请人： JEOL LTD
发明人： MUTO MASAO
IPC分类号： H01J37/09 , H01J37/22 , H01J37/26
摘要： PURPOSE:To provide an electron microscope which is provided with a shutter device small and simple in structure and able to prevent the generation of vibration even when the shutter blade is driven. CONSTITUTION:A voltage is applied to a piezo-electric element 6 from a piezo-electric element driving circuit 8 in response to a control signal from a control circuit 9 to bend the piezo-electric element 6 so that a lever body 3 moves to the right by a very small quantity. The movement is magnified by rotation of the lever body 3 around a pin 4 and then transmitted to a shutter blade 5, which makes the action of closing an electron beam passing hole 2. When a reverse voltage is applied to the piezo-electric element 6, the element 6 is deformed in a reverse direction to open the electron beam passing hole 2 so that photographing is performed to provide an image of good quality since this device is small and vibration is not brought with the opening and closing operation of the shutter blade 5.

8. 发明专利

JPH11233056A SAMPLE TRANSFER DEVICE AND METHOD FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPH11233056A
公开(公告)日：1999-08-27
申请号：JP4454898
申请日：1998-02-10
申请人： JEOL LTD
发明人： MUTO MASAO
IPC分类号： H01J37/20
摘要： PROBLEM TO BE SOLVED: To operate a motor by the most suitable driving pulse for a position where a sample is transferred. SOLUTION: A drive command pulse is sent to a pulse generating circuit 26 from a controller 25. The pulse generating circuit 26 generates a driving pulse with the maximum pulse width based on the drive command pulse, and supply it to a motor driving circuit 27. When a torque for a position where a sample is transferred is big, the motor is not immediately operated by the driving pulse, and it starts operating after a considerable delay. An encoder 24 generates an encoder signal after a considerable delay from a rise of the driving pulse. The encoder signal is fed back to the pulse generating circuit 26, and a part of the driving pulse generated after a rise of the encoder signal is cancelled. The pulse generating circuit 26 is narrower than the driving pulse, however it generates a driving pulse with a big width capable of coping with transfer to a position requiring a big torque.

9. 发明专利

JPH08223949A MOTOR STARTER CIRCUIT 失效
公开(公告)号：JPH08223949A
公开(公告)日：1996-08-30
申请号：JP1898695
申请日：1995-02-07
申请人： JEOL LTD
发明人： MUTO MASAO , YOSHIMOTO AKIHIRO , BANBA HIROYUKI , NAKAGAWA YASUO , ISHIBASHI TAMOTSU
IPC分类号： H01J37/20 , H02P1/18
摘要： PURPOSE: To suppress time lag fluctuation due to mechanical backlash before actual start of the operation of an object to be driven when rotation of a motor is started. CONSTITUTION: The motor starter circuit comprises a polarity inversion detecting circuit 10 for storing two switches 1, 2 in respective drive directions and a switch being turned ON last and making a decision whether the switch coincides with a switch currently turned ON, a timer circuit 7 for delivering a signal upon elapse of a predetermined time after turn ON of any one switch and applying a normal drive voltage when coincidence of switches is detected, and motor drive voltage selection circuits 11-24 for applying a start voltage higher than the normal drive voltage until a signal is delivered from the timer circuit when coincidence of switch is not detected and applying the normal drive voltage until the switch currently turned ON is turned OFF after a signal is delivered from the timer circuit.

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