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1. 发明专利

JP2010052134A Microminiature moving device and method of making the same 有权
标题翻译：微型移动装置及其制造方法
公开(公告)号：JP2010052134A
公开(公告)日：2010-03-11
申请号：JP2009239001
申请日：2009-10-16
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： MORI KEIICHI , KATO YOSHICHIKA , YOSHIDA MEGUMI , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a microminiature moving device for preventing problems such as inactivation of a moving device caused by sandwiching a foreign matter, and generation of an electrical short circuit. SOLUTION: In the microminiature moving device, structures (fixed comb-like electrodes 51, 52, and the like) made of a single-crystal silicon layer 63 are fixed on a single-crystal silicon substrate 61 via an insulating layer 62, and the structures hold movable bodies (movable rod 46 and the like) made of the single-crystal silicon layer displaced in parallel with the surface of the substrate. Recess portions 64 are formed in all regions wherein the structures do not exist on the upper surface of the single-crystal silicon substrate, the movable bodies with no insulating layer are arranged above the recess portions, sufficient spaces are secured to prevent the foreign matter from being sandwiched, and each of the structures has an overhanging portion which overhangs above the recess portion. The peripheral portion of the insulating layer which fixes the structure to the single-crystal substrate and is arranged under the overhanging portion is not exposed above the recess portion, and the micro space is formed between the single-crystal silicon substrate and the single-crystal silicon layer to prevent the generation of the electrical short circuit. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种微型移动装置，用于防止由于夹杂异物而导致的移动装置的失活等问题，以及电气短路的产生。解决方案：在微型移动装置中，由单晶硅层63制成的结构（固定梳状电极51,52等）经由绝缘层62固定在单晶硅基板61上，并且结构保持由与基板的表面平行移位的单晶硅层制成的可移动体（可动杆46等）。在单晶硅基板的上表面上不存在结构的所有区域中形成有凹部64，不具有绝缘层的可动体配置在凹部的上方，充分的空间被固定，以防止异物并且每个结构具有突出部分，该突出部分突出在凹部上方。将该结构固定在单晶基板上并配置在突出部下方的绝缘层的周边部分不露出在凹部的上方，微空间形成在单晶硅基板与单晶硅层防止电气短路的产生。版权所有（C）2010，JPO＆INPIT

2. 发明专利

JP2007316628A Optical switch 有权
标题翻译：光开关
公开(公告)号：JP2007316628A
公开(公告)日：2007-12-06
申请号：JP2007116390
申请日：2007-04-26
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , HAMADA YOSHIHIKO , MORI KEIICHI , IMAKI OSAMU , KONDO KENJI
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide an optical switch which can obtain excellent and uniform polarization plane dependence of two exiting light beams and which can be easily configured by MEMS. SOLUTION: In the optical switch, optical coupling between an input port (optical fiber 61) and a first and a second output port (optical fibers 62, 63) is switched by driving of a mirror by an actuator. The first and second output ports are disposed on the opposite sides across the input port so as to form acute angles with respect to the input port. The input port and the first output port are optically coupled to each other via a first mirror surface 35a, and the input port and the second output port are optically coupled to each other via a second mirror surface 36a. The incident angles of an incident light beam 71 with respect to the mirror surfaces 35a, 36a are equalized, and optical path lengths between the input port and the first and second output ports are equalized. The actuator inserts and withdraws the second mirror surface 36a on a position at the front of the first mirror surface 35a. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：提供一种可以获得两个出射光束的极化平面依赖性并且可以容易地由MEMS构造的光开关。解决方案：在光学开关中，通过致动器驱动反射镜来切换输入端口（光纤61）与第一和第二输出端口（光纤62,63）之间的光耦合。第一和第二输出端口设置在输入端口的相对侧上，以便相对于输入端口形成锐角。输入端口和第一输出端口经由第一镜面35a彼此光学耦合，并且输入端口和第二输出端口经由第二镜面36a彼此光学耦合。入射光束71相对于镜面35a，36a的入射角度被均衡，输入端口与第一和第二输出端口之间的光程长度相等。致动器在第一反射镜表面35a的前部的位置处插入和撤回第二镜面36a。版权所有（C）2008，JPO＆INPIT

3. 发明专利

JP2006035374A Micromachine device 审中-公开
标题翻译： MICROMACHINE DEVICE
公开(公告)号：JP2006035374A
公开(公告)日：2006-02-09
申请号：JP2004219039
申请日：2004-07-27
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： HAMADA YOSHIHIKO , KATO YOSHICHIKA , KONDO KENJI , MORI KEIICHI , IMAKI OSAMU , YOSHIDA MEGUMI
IPC分类号： B81B7/02 , G01N27/04 , G01W1/11 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a micromachine device constituted compactly at a low cost and provided with a dew condensation sensor for preventing short circuit and malfunction caused by dew condensation. SOLUTION: The micromachine device formed with structures A, B constituting the device by etching a device layer 63 arranged on a substrate 61 through an insulating layer 62, is provided with the dew condensation sensor for detecting dew condensation by the change of an insulation resistance value between a pair of sensor structures C1, C2 arranged with a micro clearance g. The pair of sensor structures C1, C2 are formed of the device layer 63. There is therefore no need to separately prepare and fit the dew condensation sensor, and the dew condensation sensor can be formed in the same process as the respective structures A, B. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种以低成本紧凑地构成的微机械装置，并且设置有用于防止由结露导致的短路和故障的结露传感器。解决方案：通过蚀刻通过绝缘层62布置在基板61上的器件层63而构成器件的由结构A，B形成的微机械器件设置有用于通过改变的结露来检测结露的结露传感器一对以微小间隙g排列的一对传感器结构C1，C2之间的绝缘电阻值。一对传感器结构C1，C2由装置层63形成。因此，不需要单独地制备并装配结露传感器，并且结露传感器可以以与各个结构A，B相同的过程形成（C）2006年，JPO＆NCIPI

4. 发明专利

JP2005107180A Microoptical device and method of manufacturing same 审中-公开
标题翻译：微波器件及其制造方法
公开(公告)号：JP2005107180A
公开(公告)日：2005-04-21
申请号：JP2003340797
申请日：2003-09-30
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , YOSHIDA MEGUMI , MORI KEIICHI , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU
IPC分类号： B81B3/00 , B81C1/00 , G02B6/35 , G02B26/08
CPC分类号： G02B6/3584 , B81B3/0083 , B81B2201/045 , B81C1/00182 , G02B6/122 , G02B6/136 , G02B6/3514 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/3596 , G02B26/0841
摘要： PROBLEM TO BE SOLVED: To provide a microoptical device having a structure in which a mirror face has a fine and complicated shape, irregularities of the flat mirror face are in the level of 10 nm or smaller, and the wet etching time is made short, and to provide a method of manufacturing the same. SOLUTION: A masking material layer 44 is formed on a substrate 31 which is composed of a silicon substrate 42 and a single crystal silicon device layer 43 interposing an intermediate layer 41 of silicon dioxide (Fig. A), the masking material layer 44 is patterned, a mask 45 is formed having a pattern which is the same as the flat figure of an object optical device. In this case, the face to become a mirror face is the (100) plane of a silicon crystal. The device layer 43 is vertically etched by using the mask 45 as a mask with a dry etching of reactive ion until the intermediate layer 41 is exposed (Fig.C). Thereafter, the side wall face of a mirror 4 is made to be a flat crystal face (100) by performing an anisotropic wet etching in the crystal orientation in a KOH solution for approximately 10 minutes. Then, only the intermediate layer 41 under the movable part of the optical device is removed by selectively wet-etching the intermediate layer 41 (Fig.D). COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：为了提供具有镜面具有细小且复杂形状的结构的微光学装置，平面镜面的凹凸处于10nm以下的水平，湿蚀刻时间为缩短，并提供制造方法。解决方案：掩模材料层44形成在由硅衬底42和插入二氧化硅的中间层41（图A）的单晶硅器件层43）组成的衬底31上，掩模材料层 44被图案化，形成具有与对象光学装置的平面图相同的图案的掩模45。在这种情况下，成为镜面的面是硅晶体的（100）面。通过使用掩模45作为掩模，用反应离子的干蚀刻直到中间层41暴露（图C）来垂直蚀刻器件层43。此后，通过在KOH溶液中进行约10分钟的晶体取向的各向异性湿蚀刻，使反射镜4的侧壁面成为平坦的晶面（100）。然后，通过选择性地湿法蚀刻中间层41（图D），仅去除光学器件可移动部分下面的中间层41。版权所有（C）2005，JPO＆NCIPI

5. 发明专利

JP2007025720A Method of manufacturing micro optical device 审中-公开
标题翻译：制造微光器件的方法
公开(公告)号：JP2007025720A
公开(公告)日：2007-02-01
申请号：JP2006282409
申请日：2006-10-17
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , YOSHIDA MEGUMI , MORI KEIICHI , KONDO KENJI , HAMADA YOSHIHIKO , IMAKI OSAMU
IPC分类号： G02B26/08 , B81C1/00
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a device having a complicated structure and a movable mirror in a short time.
SOLUTION: A mask material layer 44 is formed on a substrate 31 composed of a silicon substrate 42 and a monocrystalline silicon device layer 43 interposing an internal layer 41 of silicon dioxide therebetween (Fig. A), and a mask 45 having the same pattern of the flat shape of a target optical device is formed by patterning the mask material layer 44. In this case, a face to be a mirror face is made to be the (100) face of silicon crystal. The device layer 43 is vertically etched by using the mask 45 as an etching mask until the internal layer 41 is exposed by a reactive ion dry etching method (Fig. C). Thereafter, anisotropic wet etching is performed to the crystal orientation with a KOH solution for approximately 10 minutes to obtain a flat crystal face (100) on the side wall face of a mirror 4. Next, the internal layer 41 is selectively wet-etched to remove only the internal layer 41 under the movable part of the optical device.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种在短时间内制造具有复杂结构的装置和可移动反射镜的方法。解决方案：掩模材料层44形成在由硅衬底42和介于其间的二氧化硅内层41的单晶硅器件层43（图A）组成的衬底31上，掩模45具有通过对掩模材料层44进行图案化来形成目标光学器件的平面形状的相同图案。在这种情况下，使作为镜面的面成为硅晶体的（100）面。通过使用掩模45作为蚀刻掩模来垂直蚀刻器件层43，直到通过反应离子干蚀刻法（图C）暴露内层41为止。此后，用KOH溶液对晶体取向进行各向异性湿蚀刻约10分钟，以在反射镜4的侧壁面上获得平坦晶面（100）。接下来，内层41被选择性地湿蚀刻仅移除光学装置可移动部分下方的内层41。版权所有（C）2007，JPO＆INPIT

6. 发明专利

JP2004150993A Capacitance type triaxial acceleration sensor 审中-公开
标题翻译：电容式三相加速传感器
公开(公告)号：JP2004150993A
公开(公告)日：2004-05-27
申请号：JP2002317785
申请日：2002-10-31
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： HAMADA YOSHIHIKO
IPC分类号： G01P15/125 , G01P15/18 , H01L29/84
CPC分类号： G01P2015/084
摘要： PROBLEM TO BE SOLVED: To provide a capacitance type triaxial acceleration sensor having satisfactory temperature characteristics. SOLUTION: The capacitance type triaxial acceleration sensor is provided with a fixed electrode seating 30 in which an electrode cavity 29 is formed at its center part, and a fixed electrode frame 23 is formed in its circumferential edge part. A Z electrode 39 is formed at a center part of the electrode cavity 29 by film deposition. A-Y electrode 36 and a +Y electrode 35 are formed symmetrically to the Z electrode 39 by film deposition, and a -X electrode 38 and a +X electrode 37 are formed symmetrically to the Z electrode 39 by film deposition. The triaxial acceleration sensor is provided with a movable electrode 20 in which a thin film 22 is formed in a semiconductor raw material substrate, a movable electrode frame 230 is formed in its circumferential edge part, and a weight base 25 is formed in its center part. The upper surface of the fixed electrode frame 23 and the lower surface of the movable electrode frame 230 are integrated as a joint part 200. The joint part 200 is asymmetrical at least either in the direction of an X-axis or in the direction of a Y-axis. COPYRIGHT: (C)2004,JPO
摘要翻译：要解决的问题：提供具有令人满意的温度特性的电容式三轴加速度传感器。解决方案：电容式三轴加速度传感器设置有固定电极座30，其中在其中心部分形成有电极腔29，在其周缘部形成固定电极框23。 Z电极39通过膜沉积形成在电极腔29的中心部分。 A-Y电极36和+ Y电极35通过成膜对称地形成在Z电极39上，通过膜沉积与Z电极39对称地形成-X电极38和+ X电极37。三轴加速度传感器设置有在半导体原料基板中形成有薄膜22的可动电极20，在其周缘部形成有可动电极框架230，在其中央部形成有重量基座25 。固定电极框架23的上表面和可动电极框架230的下表面被一体化为接合部分200.接合部分200在X轴方向或者在方向上至少不对称 Y轴。版权所有（C）2004，JPO

7. 发明专利

JP2009031409A Optical device 有权
标题翻译：光学装置
公开(公告)号：JP2009031409A
公开(公告)日：2009-02-12
申请号：JP2007193291
申请日：2007-07-25
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： IMAKI OSAMU , KATO YOSHICHIKA , MORI KEIICHI , KONDO KENJI , HAMADA YOSHIHIKO
IPC分类号： G02B26/08 , B81B3/00 , G02B6/26 , G02B6/42
摘要： PROBLEM TO BE SOLVED: To eliminate return loss of an optical device due to recombination of stray light. SOLUTION: The optical device is provided in which the ends of first and second optical fibers (optical waveguide means) 74 and 75 are arranged on a substrate 71 so that their optical axes are in parallel to the face of the substrate, the end parts of the optical fibers 74 and 75 are optically coupled with each other via the propagation light which propagates in a free space (recessed part 76) at least partially surrounded by side walls perpendicular to the face of the substrate. The end part of the optical fiber 74 and the end part of the optical fiber 75 are positioned at different heights in the vertical direction to the face of the substrate, and tilt end faces are formed on the ends of the optical fibers 74 and 75, respectively, so that the optical axis of the emitting light from one of the optical fibers to the free space is vertically deflected toward the position of the optical axis of the other optical fiber. COPYRIGHT: (C)2009,JPO&INPIT
摘要翻译：要解决的问题：消除由于杂散光的复合导致的光学器件的回波损耗。解决方案：提供光学装置，其中第一和第二光纤（光波导装置）74和75的端部布置在基板71上，使得它们的光轴平行于基板的表面，光纤74和75的端部通过在至少部分地被垂直于衬底的表面的侧壁包围的自由空间（凹部76）中传播的传播光彼此光学耦合。光纤74的端部和光纤75的端部位于与基板的面相反的垂直方向上的不同高度处，并且在光纤74和75的端部上形成倾斜端面，使得从一根光纤到自由空间的发射光的光轴向另一光纤的光轴的位置垂直偏转。版权所有（C）2009，JPO＆INPIT

8. 发明专利

JP2008096655A Optical fiber, marker groove forming apparatus, its method and optical fiber device 有权
标题翻译：光纤，标记光栅形成装置，其方法和光纤装置
公开(公告)号：JP2008096655A
公开(公告)日：2008-04-24
申请号：JP2006277719
申请日：2006-10-11
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： IMAKI OSAMU , HAMADA YOSHIHIKO , KATO YOSHICHIKA , MORI KEIICHI , KONDO KENJI
IPC分类号： G02B6/02 , G02B6/26
CPC分类号： G02B6/3652 , G02B6/3636 , G02B6/3692 , Y10T225/321
摘要： PROBLEM TO BE SOLVED: To facilitate positioning in the axial direction of an optical fiber without abutting a member on the leading edge face of an optical fiber or without visually recognizing a slight refractive index difference between different kinds of optical waveguide members. SOLUTION: The marker groove of an optical fiber is formed by a marker groove forming apparatus 1 in which at least a fiber guide 13 and optical fiber pressurizing springs (the springs) 11, 12 are provided on a substrate 10, wherein the springs 11, 12 are formed on one side wall face 13a inside the fiber guide 13. The springs 11, 12 are composed of: edges 11a, 12a that are pressed against the side of an optical fiber 20 housed in the fiber guide 13; and leaf springs 11b, 12b that press the edges 11a, 12a to the side of the optical fiber 20, with the side wall face 13a inside the fiber guide 13 used as fulcrums 11c, 12c. The springs 11, 12 are configured to press the optical fiber 20 against the side wall face 13b inside the fiber guide, wherein the respective edges 11a, 12a are formed with a prescribed space apart. COPYRIGHT: (C)2008,JPO&INPIT
摘要翻译：要解决的问题：为了便于光纤的轴向定位，而不会使光纤的前缘面上的部件抵接，或者不能在视觉上识别不同种类的光波导部件之间的轻微的折射率差异。解决方案：光纤的标记槽由标记槽形成装置1形成，其中至少一个光纤引导件13和光纤加压弹簧（弹簧）11,12设置在基板10上，其中，弹簧11,12形成在纤维引导件13内的一个侧壁面13a上。弹簧11,12由沿着容纳在光纤引导件13中的光纤20的一侧按压的边缘11a，12a构成。以及将纤维引导件13内的侧壁面13a用作支点11c，12c的将边缘11a，12a压向光纤20侧的板簧11b，12b。弹簧11,12被构造成将光纤20压靠在光纤引导件内的侧壁面13b上，其中相应的边缘11a，12a分开形成规定间隔。版权所有（C）2008，JPO＆INPIT

9. 发明专利

JP2007114230A Light switch 审中-公开
标题翻译：灯开关
公开(公告)号：JP2007114230A
公开(公告)日：2007-05-10
申请号：JP2005302344
申请日：2005-10-17
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： KATO YOSHICHIKA , MORI KEIICHI , KONDO KENJI , IMAKI OSAMU , HAMADA YOSHIHIKO
IPC分类号： G02B26/08 , B81B3/00
CPC分类号： G02B6/352 , G02B6/3514 , G02B6/355 , G02B6/357 , G02B6/358 , G02B26/0841
摘要： PROBLEM TO BE SOLVED: To propose the structure of a compact MEMS light switch of one-input/two-output type in which the optical path length of two switching optical paths and other optical conditions are homogenized and optically homogenized emitting light beams are output. SOLUTION: The end parts of three optical waveguide means are supported in parallel to one another on a substrate, the end part of a central optical waveguide means is used as one input port of the light switch, the end parts of the two optical waveguides neighboring on both sides are used as a first and a second output ports, the emitting light from the input port is switched, reflected and deflected to either of the first output port side and the second output port side with a first movable mirror and a second movable mirror which alternatively inserted at the positions which are located at the same distance from the end face of the input port of the optical path, the light beams from the first movable mirror and the second movable mirror are reflected and deflected with a first fixed mirror and a second fixed mirror, made parallel to the emitting light beam from the input port and reversed in direction, and respectively combined to the first and the second output ports. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提出一种双输入/双输出类型的紧凑型MEMS光开关的结构，其中两个开关光路的光路长度和其他光学条件被均匀化并且光学均匀化发射光束被输出。
解决方案：三个光波导装置的端部在基板上彼此平行地支撑，中心光波导装置的端部用作光开关的一个输入端口，两个端部的两个两侧相邻的光波导用作第一和第二输出端口，来自输入端口的发射光被第一可移动反射镜切换，反射和偏转到第一输出端口侧和第二输出端口侧中的任一个，可选地插入在距光路的输入端口的端面相同距离的位置处的第二可移动镜，来自第一可移动镜和第二可移动镜的光束被第一固定反射镜和第二固定反射镜，其平行于来自输入端口的发射光束并在方向上反向，并分别组合到第一和第二输出端口。版权所有（C）2007，JPO＆INPIT

10. 发明专利

JP2004151116A Semiconductor acceleration sensor and its manufacturing method 审中-公开
公开(公告)号：JP2004151116A
公开(公告)日：2004-05-27
申请号：JP2003423230
申请日：2003-12-19
申请人： Japan Aviation Electronics Industry Ltd , 日本航空電子工業株式会社
发明人： HAMADA YOSHIHIKO , TOMIOKA AKIHIRO
IPC分类号： G01P15/125 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor and its manufacturing method for improving acceleration detection sensitivity without reducing accuracy in acceleration detection or stability in detection accuracy.
SOLUTION: The semiconductor acceleration sensor comprises a package base part 100; a seating 110 made of glass; a silicon substrate 101; a weight body 104a; a plurality of leads 100a; and a plurality of bonding wires 103. The number 100a indicates a region in which the seating 110 is spread from the silicon substrate 101 to the outside, and an electrode pad is formed in its upper surface. Since it is possible to perform the process of connecting the electrode pad to the leads 100a by the bonding wires 103 in the seating 110 prior to the process of fixing the weight body 104a to the silicon substrate 101, it is possible to adopt a shape for the weight body 104a overhanging from the seating 110 to the outside and extended approximately a mounting surface (upper surface) of the package base part 100 . Here, it is possible to increase the mass of the weight body 104a more than that of a conventional one and improve the sensitivity of the acceleration sensor as a result.
COPYRIGHT: (C)2004,JPO

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