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1. 发明专利

JP2001250502A DETECTOR FOR ELECTRON SPECTROMETER 失效
公开(公告)号：JP2001250502A
公开(公告)日：2001-09-14
申请号：JP2000061338
申请日：2000-03-07
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J49/06 , H01J49/44
摘要： PROBLEM TO BE SOLVED: To provide a detector for an electron spectrometer, having a concentric semispherical analyzer and a CEM used for energy analysis of an electron where electrons to be analyzed are made incident in the central part of the CEM to improve the detection efficiency. SOLUTION: The detector for an electron spectrometer is provided with the concentric semispherical analyzer used for energy analysis of the electron generated from a sample, and the CEM 7 for detecting the electron analyzed the energy thereof. A lens electrode 5 for forming an electrostatic lens is disposed between the analyzer and the CEM, then an electrostatic lens is formed between the analyzer and the CEM, electrons analyzed are made incident at the center part of the CEM, whose detection sensitivity is satisfactory and the detection efficiency is improved.

2. 发明专利

JPH06124680A MASS SPECTROMETER FOR SECONDARY NEUTRAL PARTICLE 失效
公开(公告)号：JPH06124680A
公开(公告)日：1994-05-06
申请号：JP29923892
申请日：1992-10-12
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/252 , G01N37/00 , G01Q30/02 , G01Q60/10 , H01J37/28 , H01J49/40
摘要： PURPOSE:To provide a mass spectrometer for secondary neutral particles capa ble of the element analysis of a very fine region. CONSTITUTION:A sample 2 is placed on a stage 1 and at the same time the tip of probe 3 is arranged near the surface of the sample. Further to this STM constitution, an excitation optical system 5, a mass spectrometry system 6, a pulse power supply 7 and a timing control circuit 8 are provided. An optical path is provided so that a laser beam 13 from a laser beam source 9 passes through the region adjacent to the tip of the probe. The mass spectrometry system 6 fundamentally is a time of flight type mass spectrometer. A voltage Va required for taking in particles ionized by the laser beam 13 into the mass spectrometry system to perform analysis is applied between an ion extraction lens 14 and STM and also between the less 14 and a sample. The pulse power supply 7 generates a pulse voltage signal and supplies it to the probe 3, thereby ionizing the atoms by a laser beam 11, which are expelled from the surface of the sample and reaching the above-mentioned region, and then introducing them into a mass spectrometer to perform mass spectrometry.

3. 发明专利

JPH05135736A SECONDARY ION MASS SPECTROMETER 失效
公开(公告)号：JPH05135736A
公开(公告)日：1993-06-01
申请号：JP30051691
申请日：1991-11-15
申请人： JEOL LTD
发明人： YAMADA TAKAHISA , YAMAMOTO YOICHI
IPC分类号： G01N23/225 , H01J49/26
摘要： PURPOSE:To concurrently analyze the secondary ion mass and observe the surface shape without interrupting the analysis of the secondary ion mass. CONSTITUTION:A secondary ion mass spectrometer shocks the surface of a sample S with primary ions 2, extracts the emitted positive secondary ions with an extracting electrode 4 arranged near the surface of the sample S for a mass analysis, and analyzes the elements incorporated on the surface of the sample S. The extracting electrode 4 is arranged slantly against the sample face, and a conducting plate 10 is arranged in a region having a wider interval between the extracting electrode 4 and the sample S and apart from the path extracting the positive secondary ions. A potential higher on the positive side than the potential of the extracting electrode 4 is applied to the conducting plate 10, and a secondary electron detector 12 is arranged at the position where the secondary electrons emitted in the weaker electric field among the secondary electrons emitted from the sample S are captured.

4. 发明专利

JP2001110350A CHARGED PARTICLE BEAM APPARATUS 失效
公开(公告)号：JP2001110350A
公开(公告)日：2001-04-20
申请号：JP28231599
申请日：1999-10-04
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/244 , H01J37/252 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus that can suppress deterioration of fluorescent surface of a secondary electron detector. SOLUTION: A control means 26 controls a bias supply 25 so that the bias voltage becomes 100 (V) because a probe current of 1 (μA) is indicated. As a result, the potential V2 of a second electrode 20 becomes -100 (V). Among the secondary electrons that pass through a first electrode 19, those with energy ES>100 eV pass through the second electrode 20. The number of the secondary electrons that pass through the second electrode 20 is sufficient to obtain the secondary electron image, and the damage received by the fluorescent face 4 is small even though such number of secondary electrons are incident thereon. Accordingly, the fluorescent face scarcely deteriorates.

5. 发明专利

JPH0943173A AUGER ELECTRON SPECTROSCOPE 失效
公开(公告)号：JPH0943173A
公开(公告)日：1997-02-14
申请号：JP19312295
申请日：1995-07-28
申请人： JEOL LTD
发明人： HOSOKAWA FUMIO , ANDO YOSHIYUKI , YAMADA TAKAHISA
IPC分类号： G01N23/225 , H01J37/22 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To accurately detect and correct the deviation of an analyzed position due to the drift of a sample and the temperature stability of an illumination system. SOLUTION: When an Auger electron analysis is started, a secondary electron image collector 10 collects a standard secondary electron image, and stores it in a Fourier transform standard image memory 17. After the Auger electron analysis is started, the analysis is interrupted, the collector 10 collects comparison secondary electron image, stores it in a Fourier transform comparison image memory 18, detects the deviation of the analyzed position by the cross- correlation with standard secondary electron image by an inverse Fourier transforming unit 20 and a deviation detector 21, and corrects the analyzed position. The deviation of the analyzed position can be accurately detected and corrected. The Auger electron analysis is interrupted in a short time repeatedly for an each predetermined time during the Auger analysis, and the correction of the analyzed position can be executed.

6. 发明专利

JP2000223040A ION BEAM DEVICE 失效
公开(公告)号：JP2000223040A
公开(公告)日：2000-08-11
申请号：JP2334299
申请日：1999-02-01
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J27/20 , G01N1/28 , G01N1/32 , H01J37/08
摘要： PROBLEM TO BE SOLVED: To minimize the sputtering by ions of a filament and to provide an ion beam device capable of extending filament life. SOLUTION: In this ion beam device, cations generated in an ionization chamber 5 with energy of at most several eV do not pass through an ion suppressing electrode 12 by an electric field E2 formed between the ionization chamber 5 and the ion suppressing electrode 12 controlled at a potential of some ten V to the ionization chamber 5. Therefore, the cations do not impinge against a filament 4 so that filament life can be extended relatively longer than that of a conventional one.

7. 发明专利

JPH10302690A FIELD EMISSION TYPE ELECTRON GUN 失效
公开(公告)号：JPH10302690A
公开(公告)日：1998-11-13
申请号：JP10418097
申请日：1997-04-22
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/073
摘要： PROBLEM TO BE SOLVED: To prevent the influence on measurement by the environmental temperature change even in a long-time measurement by providing a filament current regulating means for controlling the power source of an emitter heating filament according to the output signal of a temperature detecting means provided near an electron gun chamber containing an electron gun. SOLUTION: An electron gun within an ultra-high vacuum electron gun chamber 1 comprises an emitter 2, a filament 3 connected to a filament power source 4, a suppresser 5 connected to a suppresser voltage power source 6, and a leading electrode 7 connected to a leading electrode power source 8. Each power source is electrically provided on an acceleration voltage power source 9. When the temperature of the electron gun chamber 1 is changed, the current from the filament power source 4 to the filament 3 is regulated by a filament current regulating means 15 which is operated on the basis of the output signal of a temperature detecting means 14 in the vicinity thereof and connected to an electron gun control device 10 together with each power source. Thus, the electron irradiated from the electron gun to a sample 13 by a lens 11 is held at a specified value.

8. 发明专利

JPH05314946A ION DETECTION DEVICE 失效
公开(公告)号：JPH05314946A
公开(公告)日：1993-11-26
申请号：JP14223492
申请日：1992-05-07
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： G01N27/62 , H01J43/02 , H01J43/04
摘要： PURPOSE:To enable an ion detector composed of a combination of a CD and electronic booster to detect negative ion with a good efficiency. CONSTITUTION:A CD 4 is arranged onto a passage of ion I to be detected, and to the CD 4 a high voltage power source 5a and a power source 5c are connected switchably through a switch S. An electronic booster 1 of which incident face has earth potential is provided in the normal line of the CD 4. In detecting positive ion I negative high voltage of about 5KV is applied from the high voltage power supply 5a to the CD 4 to make ion impinge on the CD 4 to emit secondary electron E. Then, the secondary electron is accelerated by the voltage between the CD 4 and an electron booster and applied onto the electronic booster. In detecting negative ion I relatively low negative voltage of about 500V is impressed to the CD4 form the power source 5c to make negative ion impinge on the CD 4. In the case of minus ion detection, by the application of low electric potential to the CD 4, secondary electron is discharged from the CD 4 and applied to the electronic booster 1 as the similar way in the case of positive ion detection.

9. 发明专利

JPH04277460A SUPERPOSED FIELD DEVICE 失效
公开(公告)号：JPH04277460A
公开(公告)日：1992-10-02
申请号：JP6258191
申请日：1991-03-04
申请人： JEOL LTD
发明人： YAMADA TAKAHISA , NAITO NORIHIRO
IPC分类号： G01N27/62 , H01J49/32 , H01J49/48
摘要： PURPOSE:To offer a device, in which the magnetic flux density is enlarged by minimizing they spacing of magnetic pole pieces and with which the mass number to be analyzed on the double convergence condition is increased. CONSTITUTION:No.1 magnetic pole pieces 2a1, 2b1 are furnished between yokes 1a, 1b so as to pinch a pair of non-magnetic members 3a, 3b located oppositely, and are welded with the inside kept at a vacuum. No.2 magnetic pole pieces 2a2, 2b2 are pinched by insulative rings 5a, 5b, ones 7a, 7b, ones 9a, 9b, and ones 10a, 10b to be insulated from the surrounding, and are secured to the top and bottom of electrodes 4a, 4b by screws 8a, 8b and ones 11a, 11b. The distance between the magnetic pole pieces can be shortened by impressing an appropriate potential to the magnetic pole pieces so that they work also as a correction electrode.

10. 发明专利

JP2000188076A ELECTRON BEAM DEVICE 失效
公开(公告)号：JP2000188076A
公开(公告)日：2000-07-04
申请号：JP36281498
申请日：1998-12-21
申请人： JEOL LTD
发明人： YAMADA TAKAHISA
IPC分类号： H01J37/04 , H01J37/06 , H01J37/248 , H01J37/252
摘要： PROBLEM TO BE SOLVED: To provide an electron beam device capable of maintaining a constant angle current density of an emitter. SOLUTION: Control means 16 indicated to correct an angle current density controls an optical system so that an optical condition of an electron beam device becomes a predetermined one for measuring the angle current density. The control means 16 controls driving means 15 so as to make a Faraday cup 11 in a position on an electron beam optical axis, electron taken out from the emitter 1 is detected by the Faraday cup 11, and angle current density calculating means 17 obtains an angle current density ρ1. The control means 16 obtains a difference between a predetermined angle current density and the obtained angle current density ρ1, and then obtains a filament current correction amount ΔI for making the difference between the predetermined angle current density and the obtained angle current density ρ1 zero from the difference and a value Δρ/ΔIf stored in a table 18. Then, the control means 16 controls a filament heating power supply 3 so that a filament current is corrected by ΔI.

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