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    • 3. 发明专利
    • DECABORANE GAS FEEDING SYSTEM
    • JPH08980A
    • 1996-01-09
    • JP13698894
    • 1994-06-20
    • JAPAN ATOMIC ENERGY RES INST
    • HIRATSUKA HAJIMEARAI TAKASHINISHIDOU MASAHIRO
    • B01J4/00H01L21/22
    • PURPOSE:To provide a decaborane gas feeding system which can be safely treated by a system wherein decaborane being solid and easily handleable at ordinary temp. is used as a raw material and decaborane gas can be obtd. by heating decaborane and a specified gas flow rate is stably fed by means of a gas flow rate control valve and decaborane gas which is turned out to be unnecessary to be fed is detoxicated and removed. CONSTITUTION:Decaborane (B10H14) which is solid and easily handleable at ordinary temp. is filled in a container 42 as a raw material and decaborane gas is obtd. by heating decaborane in an oven and a specified gas flow rate is stably bed by means of gas flow rate control valves 10, 21-24, 30 and 31 and decaborane gas which is turned out to be unnecessary is detoxicated and removed. In addition, when an emergency arises, generation of decaborane vapor pressure is suppressed and stopped by cooling the heating part and it is recrystallized into decaborane being solid and easily handleable by cooling. As a result, a decaborane gas feeding system which can be safely treated can be obtd.
    • 8. 发明专利
    • VACUUM VESSEL FOR NUCLEAR FUSION
    • JPH01270695A
    • 1989-10-27
    • JP9813788
    • 1988-04-22
    • HITACHI LTDJAPAN ATOMIC ENERGY RES INST
    • OWADA KOROYAMAMOTO MASAHIROARAI TAKASHIKODAMA KOZOAKINO NOBORUSUZUKI MICHIO
    • G21B1/11G21B1/00G21B1/17H05H1/12
    • PURPOSE:To protect an optical system equipments 2 from a molten metal powder of the first wall and to enable a cleaning work without removing instrumentation, by providing a cylinder to prevent flowing-in of an impurity into a lower port, making it protrude into a vacuum vessel from the upper end of the lower port. CONSTITUTION:The first wall 7 is fixed to an inner surface of a vacuum vessel 2 to protect the vessel 2 and also is subdivided into small parts to absorb a thermal stress derived from a radiation heating of a plasma 1. Therefore, a metal powder 8 of the first wall 7 melted by the plasma 1 reaches an opening of the lower port 4 via the inner surface of the vessel 2, from gaps in the first wall 7. In this occasion, in case that a cylinder 6 is fixed to the inner surface of the lower port 4, the metal powder of the first wall, dropping down along the inner surface of the vessel 2, is stopped by the cylinder 6 and does not fall into the lower port 4. Moreover, covering an upper end of the cylinder 6 with a lid when the inner surface of the vessel 2 is washed down makes it possible to wash the inner surface of the vessel 2 without removing an instrumentation from the lower port 4, and to prevent damage of the instrumentation by dropping dusts into the inside of the port during a rinsing work of a cleaner liquid.