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1. 发明专利

JPH06150879A GAS COMPONENT ANALYZING APPARATUS 失效
公开(公告)号：JPH06150879A
公开(公告)日：1994-05-31
申请号：JP30380092
申请日：1992-11-13
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , HIROKI SEIJI , MURAKAMI YOSHIO , SHIRAISHI NARIYUKI , OSAWA HARUSHIGE , HATA SATOSHI
IPC分类号： G01N27/62 , H01J49/04 , H01J49/26
摘要： PURPOSE:To determine and analyze an object gas to be inspected at high precision, carry out sampling gas components at every local site within a short time, carry out measuring and recording continuously by online, make the whole apparatus compact and light, and make it portable. CONSTITUTION:Gas components which are contained in a gas and are not inspection objects are selectively discharged by an extraction apparatus to lower and remove the gas components, not inspection objects, and then the remaining inspection object gas is sent to a mass spectrometer 11, wherein the extraction apparatus is composed by reciprocally arranging a low compressive type turbo-molecular pump 2, a highly compressive type turbo-molecular pump 4 in regular direction which has a gas suction and discharge connection pipe 11 with low conductance in the outside in this order and putting a low compressive type turbo-molecular pump in reverse direction as a turbo-molecular pump 5 at the terminal part. At that time, the production amount of ions with similar molecular weight, which are interference factors on analysis, are lowered and the inspection object gas is determined highly precisely at the level as low as, for example, 1ppm by a mass spectrometer 1.

2. 发明专利

JPH0647238A GAS SEPARATOR 失效
公开(公告)号：JPH0647238A
公开(公告)日：1994-02-22
申请号：JP20135692
申请日：1992-07-28
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： MURAKAMI YOSHIO , ABE TETSUYA , HIROKI SEIJI , HATA SATOSHI , OSAWA HARUSHIGE
IPC分类号： B01D53/24 , B01D59/20 , F04D19/04
摘要： PURPOSE:To perform continuous separation in addition to improve separation capacity and to attain the miniaturization of equipment, making cost low and improvement of safety at the same time. CONSTITUTION:A turbo molecular pump 4 whose axial blades are rotatably installed between the gas inlet side and the gas outlet side and are turned at high speed to evacuate in combined with plate thread groove type vacuum pumps 1-3 having rotating plates and stationary plates combined in a multistage manner for evacuation by using the viscosity of gas when the rotating plates are turned or cylindrical thread groove type vacuum pumps having rotating cylinders and stationary cylinders combined in a single stage or multistage manner for evacuation by using the viscosity of gas when the rotating cylinders are turned. A gas separation unit is formed and mixed gas contg. plural gases differing in molecular weight and viscosity is introduced into the gas separation unit from a gas inlet AB9 to separate the gases between a high vacuum pressure region and a low vacuum pressure region by a difference between the gases in property.

3. 发明专利

JPH04276197A MULTITURBO TYPE VACUUM PUMP 失效
公开(公告)号：JPH04276197A
公开(公告)日：1992-10-01
申请号：JP3854491
申请日：1991-03-05
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , ARAI TAKASHI , OSAWA HARUSHIGE , HATA SATOSHI
IPC分类号： F04D17/16 , F04D19/04 , F04D25/16
摘要： PURPOSE:To improve discharge efficiency by increasing the discharge capacity and compression ratio of a turbo molecular pump and reducing dimension. CONSTITUTION:A plurality of turbo type rotary bodies are built in multishaft form inside a casing 4 having a suction port and a discharge port, and the need of piping is obviated, and the discharge efficiency is improved, and the reduction of dimension is permitted. One edge of the turbo type rotary body is formed to turbo molecular pump (main turbo rotary body 6), and a plurality of turbo type rotary bodies (subturbo rotary body 11) are arranged in circumferential form under the lowermost stage blade, and the installation space is reduced, and the compression ratio is increased. Further, each of the turbo type rotary body consists of a viscous vacuum pump which is formed by combining rotary discs having each groove in the spiral direction, in plural stages, and discharge with high compression ratio is carried out continuously.

4. 发明专利

JP2000009868A WATER LEAKAGE DETECTION DEVICE OF FUSION REACTOR 失效
公开(公告)号：JP2000009868A
公开(公告)日：2000-01-14
申请号：JP18221498
申请日：1998-06-29
申请人： MITSUBISHI HEAVY IND LTD , JAPAN ATOMIC ENERGY RES INST
发明人： SHIMIZU HIROSHI , KURIBAYASHI SHIZUMA , SHIMIZU KATSUSUKE , UMAGOE TOSHIMITSU , ABE TETSUYA , HIROKI SEIJI
IPC分类号： G21B1/05 , G21B1/00
摘要： PROBLEM TO BE SOLVED: To make even a small amount of water leakage surely detectable. SOLUTION: By dissolving a probe gas into water and detecting the probe gas, a small amount of water leakage is detected. In this case, the water leakage detection device is provided with means (a cooling water inlet ring header 3 and a cooling water outlet ring header 4) for injecting and discharging the cooling water into and out of a vacuum container 1, the probe gas injection unit 3 with a probe gas exhausting function for injecting the probe gas into the cooling water, a probe gas sampling unit for sampling the above probe gas, and a probe gas partial pressure meter 9 for measuring the partial pressure of the above probe gas.

5. 发明专利

JPH0539798A CERAMIC VACUUM PUMP 失效
公开(公告)号：JPH0539798A
公开(公告)日：1993-02-19
申请号：JP19319491
申请日：1991-08-01
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , HATA SATOSHI
IPC分类号： F04D19/04 , F04D25/04
摘要： PURPOSE:To obtain high exhaust performances by constructing a screw groove vacuum pump with an upper flow side and a down flow side pump step, and arranging a thrust gas bearing close to the exhaust side of the down flow side pump step. CONSTITUTION:An upper flow side and a down flow side pump step constructing a screw groove vacuum pump are provided with impellers 21a,23a of a centrifugal compression pump and stationary side disks 21b,23b, and impellers 22a,24a of a Siegbahn compression pump and stationary side disks 22b,24b respectively. And a ceramic rotor 2 is supported with a thrust gas bearing 12a and an upper radial gas bearing 9 and a lower radial gas bearing 11. Thereby compression in radial direction can be carried out with respective Siegbahn compression pumps in multiple steps, hence even when screw groove gaps are large, a high compression ratio can be obtained to enlarge the exhaust speed. In addition, by arranging the thrust gas bearing supporting the rotor of the screw groove vacuum pump close to the exhaust side of the down flow side pump step, thermal deformation and centrifugal deformation of the thrust gas bearing can be reduced to obtain high exhaust performances.

6. 发明专利

JPS6441698A MULTICHANNEL TYPE VACUUM PUMP 失效
公开(公告)号：JPS6441698A
公开(公告)日：1989-02-13
申请号：JP19646487
申请日：1987-08-07
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , HIKITA KAZUO , OSAWA HARUSHIGE , OTANI YUJI , HATA SATOSHI
IPC分类号： F04D19/04
摘要： PURPOSE:To make a large pumping speed achievably by constituting each vacuum pump unit, composing a pump bearing the above caption suitable for a nuclear fusion device or the like, from a turbo-molecular pump and a rotary pump, and devising a piping structure for pipelines arranged to these pumps. CONSTITUTION:A pump bearing the above caption is made up of installing plural vacuum pump units 26 parallely in an outer casing provided with a suction port at the upper part. In this case, each vacuum pump unit 26 is constituted of a turbo-molecular pump 1 housed in an upper inner casing 19 and a rotary pump 2 housed in a lower inner casing 20. And, driving gas is fed to gas turbines 5, 10 of these pumps 1 and 2 from pipelines 5a, 5b, and supporting air is fed to pneumatic bearings 4, 6, 7 and 9, 11, 12 of these pumps 1 and 2 from pipelines 8a, 8b. In addition, exhaust of the molecular pump 1 is led into a suction port of the rotary pump 2 from pipelines 21, 22, and pipe arrangement takes place so as to cause exhaust of the rotary pump 2 to be exhausted to an external pipe line from a pipeline 23.

7. 发明专利

JP2002048250A PRESSURE-COMPENSATED MICRO FLOW CONTROL VALVE 失效
公开(公告)号：JP2002048250A
公开(公告)日：2002-02-15
申请号：JP2000231550
申请日：2000-07-31
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： HIROKI SEIJI , ABE TETSUYA , TANZAWA SADAMITSU , NAKAYA JIYUNNOSUKE , SHIMIZU KATSUSUKE
IPC分类号： G01M3/04 , F16K1/08 , F16K1/52 , F16K31/44 , F16K31/50 , F16K51/00 , G01M3/20 , G05D7/01
摘要： PROBLEM TO BE SOLVED: To provide a pressure compensated flow valve for solving the nonconformity that the correct time from mixing with a probe gas to detection cannot be grasped due to stagnation inside the valve, in the case of using prior art of a leakage valve with regard to the pressure compensated micro flow valve of CVD device or the like for form of thin membrane, especially, in the development of technical skill of detection for leakage by means of probe gas method. SOLUTION: There is provided with the region of opening and closing mechanism which comprises a valve body 7 in fluid communication with a flow passage within a duct and a port of leakage 92 and axially disposing a valve duct 3 which enables the upper end to project into the flow duct within the duct; a valve housing 8, fixed above the valve body and a capable of raising and lowering a valve rod 6 in the bore in the axial direction; a needle 2 inserted into a hole suspending from lower end of the valve rod and forming clearance, capable of flowing a small amount of water between the valve duct and the needle; a valve seat 4 on upper end of the valve duct; and packing; and which is provided with the region of the flow control by closely making the flow passage within the duct in closing position or by opening the flow passage within the duct.

8. 发明专利

JP2000227487A NUCLEAR FUSION DEVICE 失效
公开(公告)号：JP2000227487A
公开(公告)日：2000-08-15
申请号：JP2660399
申请日：1999-02-03
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , HIROKI SEIJI , TOYODA MASAHIKO , INOUE MASAHIKO
IPC分类号： G21B1/11 , F16J12/00 , G21B1/00 , G21B1/17
摘要： PROBLEM TO BE SOLVED: To prevent a damage caused by an electromagnetic force at the time of operation, by improving a shock resistant performance of electric insulating members arranged on a port part of a nuclear fusion device or a nuclear fusion test device. SOLUTION: In this nuclear fusion device having a vacuum vessel 20, a port member 30 arranged in a line on an opening 21 of the vacuum vessel 20, and electric insulating members interposed between the port member 30 and the vacuum vessel 20, the electric insulating members, namely, a sleeve 45, a washer 49, an inside pipe 51 and an outside pipe 53, are formed from base material made of stainless steel and coating insulating material made of alumina welded on the surface thereof.

9. 发明专利

JPH10184969A GAS SUPPLYING VALVE 失效
公开(公告)号：JPH10184969A
公开(公告)日：1998-07-14
申请号：JP34370896
申请日：1996-12-24
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , ODA YASUTSUGU
IPC分类号： F16K1/00 , F16K31/02
摘要： PROBLEM TO BE SOLVED: To perform high-speed releasing with good sealing performance even in the high-magnetic field environment. SOLUTION: A gas supplying valve 20 is provided with a valve seat 31 provided in a valve casing 21, a valve element 33 so provided as to face the valve seat 31 and for selectively forming a gas passage in collaboration with the valve seat 31, a coil spring 35 interposed in the valve element 33 and for pressing the valve element 33 to the valve seat 31, a piezo element-type operating rod 39 having the end provided close to the valve element 33 and for separating the valve element 33 from the valve seat 31, and a load chancellor 45 interposed between the operating rod 39 and the valve casing 21.

10. 发明专利

JPH05332284A VACUUM PUMP 失效
公开(公告)号：JPH05332284A
公开(公告)日：1993-12-14
申请号：JP14439792
申请日：1992-06-04
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , YAMADA HITOSHI
IPC分类号： F04D19/04
摘要： PURPOSE:To achieve compactness and low cost of a vacuum pump, and also increase reliability of it. CONSTITUTION:In a vacuum pump which is provided with a cascade in which multiple rotary disks 1A and static disks 2A are arranged alternately and drive mechanisms 4 and 10, and in which the rotary disks 1A are connected to a rotating shaft 3 with the drive mechanism 4, at least one stage of the rotary disks 1A is formed separately from the other rotary disks 1A, and the static disks 2A of integral construction are arranged on the drive mechanism side near the separately formed rotary disk 1A. Because the static disks 2A are of integral construction, counterflow of gas from the drive mechanism side to the side opposite to the mechanism is eliminated. Therefore, a feed capacity of the vacuum pump [exhaust velocity S: volumetric flow per unit of time (1/s)] is increased to obtain large exhaust velocity, and the necessity to increase the diameter and number of stages of the disks of the vacuum pump is eliminated to achieve compactness and low cost of the vacuum pump.

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