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1. 发明专利

JPH05332284A VACUUM PUMP 失效
公开(公告)号：JPH05332284A
公开(公告)日：1993-12-14
申请号：JP14439792
申请日：1992-06-04
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , YAMADA HITOSHI
IPC分类号： F04D19/04
摘要： PURPOSE:To achieve compactness and low cost of a vacuum pump, and also increase reliability of it. CONSTITUTION:In a vacuum pump which is provided with a cascade in which multiple rotary disks 1A and static disks 2A are arranged alternately and drive mechanisms 4 and 10, and in which the rotary disks 1A are connected to a rotating shaft 3 with the drive mechanism 4, at least one stage of the rotary disks 1A is formed separately from the other rotary disks 1A, and the static disks 2A of integral construction are arranged on the drive mechanism side near the separately formed rotary disk 1A. Because the static disks 2A are of integral construction, counterflow of gas from the drive mechanism side to the side opposite to the mechanism is eliminated. Therefore, a feed capacity of the vacuum pump [exhaust velocity S: volumetric flow per unit of time (1/s)] is increased to obtain large exhaust velocity, and the necessity to increase the diameter and number of stages of the disks of the vacuum pump is eliminated to achieve compactness and low cost of the vacuum pump.

2. 发明专利

JPH0539798A CERAMIC VACUUM PUMP 失效
公开(公告)号：JPH0539798A
公开(公告)日：1993-02-19
申请号：JP19319491
申请日：1991-08-01
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , HATA SATOSHI
IPC分类号： F04D19/04 , F04D25/04
摘要： PURPOSE:To obtain high exhaust performances by constructing a screw groove vacuum pump with an upper flow side and a down flow side pump step, and arranging a thrust gas bearing close to the exhaust side of the down flow side pump step. CONSTITUTION:An upper flow side and a down flow side pump step constructing a screw groove vacuum pump are provided with impellers 21a,23a of a centrifugal compression pump and stationary side disks 21b,23b, and impellers 22a,24a of a Siegbahn compression pump and stationary side disks 22b,24b respectively. And a ceramic rotor 2 is supported with a thrust gas bearing 12a and an upper radial gas bearing 9 and a lower radial gas bearing 11. Thereby compression in radial direction can be carried out with respective Siegbahn compression pumps in multiple steps, hence even when screw groove gaps are large, a high compression ratio can be obtained to enlarge the exhaust speed. In addition, by arranging the thrust gas bearing supporting the rotor of the screw groove vacuum pump close to the exhaust side of the down flow side pump step, thermal deformation and centrifugal deformation of the thrust gas bearing can be reduced to obtain high exhaust performances.

3. 发明专利

JPS6441698A MULTICHANNEL TYPE VACUUM PUMP 失效
公开(公告)号：JPS6441698A
公开(公告)日：1989-02-13
申请号：JP19646487
申请日：1987-08-07
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , HIKITA KAZUO , OSAWA HARUSHIGE , OTANI YUJI , HATA SATOSHI
IPC分类号： F04D19/04
摘要： PURPOSE:To make a large pumping speed achievably by constituting each vacuum pump unit, composing a pump bearing the above caption suitable for a nuclear fusion device or the like, from a turbo-molecular pump and a rotary pump, and devising a piping structure for pipelines arranged to these pumps. CONSTITUTION:A pump bearing the above caption is made up of installing plural vacuum pump units 26 parallely in an outer casing provided with a suction port at the upper part. In this case, each vacuum pump unit 26 is constituted of a turbo-molecular pump 1 housed in an upper inner casing 19 and a rotary pump 2 housed in a lower inner casing 20. And, driving gas is fed to gas turbines 5, 10 of these pumps 1 and 2 from pipelines 5a, 5b, and supporting air is fed to pneumatic bearings 4, 6, 7 and 9, 11, 12 of these pumps 1 and 2 from pipelines 8a, 8b. In addition, exhaust of the molecular pump 1 is led into a suction port of the rotary pump 2 from pipelines 21, 22, and pipe arrangement takes place so as to cause exhaust of the rotary pump 2 to be exhausted to an external pipe line from a pipeline 23.

4. 发明专利

JPH03233193A VACUUM PUMP AND OPERATING METHOD THEREFOR 失效
公开(公告)号：JPH03233193A
公开(公告)日：1991-10-17
申请号：JP2512290
申请日：1990-02-06
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： MURAKAMI YOSHIO , ABE TETSUYA , HATA SATOSHI
IPC分类号： F04D19/04
摘要： PURPOSE:To realize an optimum pump operation in each pump compression step and enhance durability by providing a plurality of gas introducing ports for introducing plural kinds of gas into the pump compression steps inside a housing, in the housing downstream of a suction port. CONSTITUTION:In the middle portion 2a and upper portion 2b of a housing 2, there are provided a plurality of gas introducing ports B, C, D for introducing plural kinds of gas different from gas sucked from a suction port A, into a middle pump step of the housing 2. The gas introducing ports B, C, D are disposed respectively for each pump compression step to vary the characteristic, mass and flow rate of gas introduced independently of the gas flow condition, thereby controlling a gas outlet characteristic in an optimum manner. Therefore, an optimum pump operation can be realized in each pump compression step, and durability can be enhanced.

5. 发明专利

JPH01262399A MULTICHANNEL TYPE VACUUM PUMP 失效
公开(公告)号：JPH01262399A
公开(公告)日：1989-10-19
申请号：JP8739588
申请日：1988-04-11
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD , MITSUBISHI ATOMIC POWER IND
发明人： ABE TETSUYA , MURAKAMI YOSHIO , HIKITA KAZUO , OSAWA HARUSHIGE , OTANI YUJI , HATA SATOSHI , MATSUOKA FUSATO , IOKI KIMIHIRO
IPC分类号： F04D19/04 , F04D29/52
摘要： PURPOSE:To increase a pumping speed as well as to make improvements in safety at the time of admixture of foreign substances by constituting a vacuum pump in setting up plural pieces of a vacuum pump unit made up of housing a turbo-molecular pump and a rotary pump in an inner casing parallely in an outer casing. CONSTITUTION:A turbo-molecular pump 1 and a rotary pump 2 are housed in an inner casing 19, constituting a vacuum pump unit 26. Plural pieces of this unit 26 are parallely set up in an outer casing 27, thereby constituting a vacuum pump bearing the above caption which is suitable for a nuclear fusion device. Driving gas is fed to each gas turbine 10 of the turbo-molecular pump 1 and the rotary pump 2 from pipelines 5a, 5b, while rotor bearing gas is fed to pneumatic bearings 4, 6, 7 and 9, 11, 12 of these pumps 1, 2 from pipelines 8a, 8b. In addition, exhaust of the pump 1 is led into a suction port of the pump 2 by an air-feed circuit 21, while exhausts out of these pumps 1, 2 and the gas turbine 10 or the like are exhausted out of exhaust pipe lines 23, 24.

6. 发明专利

JPH06150879A GAS COMPONENT ANALYZING APPARATUS 失效
公开(公告)号：JPH06150879A
公开(公告)日：1994-05-31
申请号：JP30380092
申请日：1992-11-13
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , HIROKI SEIJI , MURAKAMI YOSHIO , SHIRAISHI NARIYUKI , OSAWA HARUSHIGE , HATA SATOSHI
IPC分类号： G01N27/62 , H01J49/04 , H01J49/26
摘要： PURPOSE:To determine and analyze an object gas to be inspected at high precision, carry out sampling gas components at every local site within a short time, carry out measuring and recording continuously by online, make the whole apparatus compact and light, and make it portable. CONSTITUTION:Gas components which are contained in a gas and are not inspection objects are selectively discharged by an extraction apparatus to lower and remove the gas components, not inspection objects, and then the remaining inspection object gas is sent to a mass spectrometer 11, wherein the extraction apparatus is composed by reciprocally arranging a low compressive type turbo-molecular pump 2, a highly compressive type turbo-molecular pump 4 in regular direction which has a gas suction and discharge connection pipe 11 with low conductance in the outside in this order and putting a low compressive type turbo-molecular pump in reverse direction as a turbo-molecular pump 5 at the terminal part. At that time, the production amount of ions with similar molecular weight, which are interference factors on analysis, are lowered and the inspection object gas is determined highly precisely at the level as low as, for example, 1ppm by a mass spectrometer 1.

7. 发明专利

JPH0647238A GAS SEPARATOR 失效
公开(公告)号：JPH0647238A
公开(公告)日：1994-02-22
申请号：JP20135692
申请日：1992-07-28
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： MURAKAMI YOSHIO , ABE TETSUYA , HIROKI SEIJI , HATA SATOSHI , OSAWA HARUSHIGE
IPC分类号： B01D53/24 , B01D59/20 , F04D19/04
摘要： PURPOSE:To perform continuous separation in addition to improve separation capacity and to attain the miniaturization of equipment, making cost low and improvement of safety at the same time. CONSTITUTION:A turbo molecular pump 4 whose axial blades are rotatably installed between the gas inlet side and the gas outlet side and are turned at high speed to evacuate in combined with plate thread groove type vacuum pumps 1-3 having rotating plates and stationary plates combined in a multistage manner for evacuation by using the viscosity of gas when the rotating plates are turned or cylindrical thread groove type vacuum pumps having rotating cylinders and stationary cylinders combined in a single stage or multistage manner for evacuation by using the viscosity of gas when the rotating cylinders are turned. A gas separation unit is formed and mixed gas contg. plural gases differing in molecular weight and viscosity is introduced into the gas separation unit from a gas inlet AB9 to separate the gases between a high vacuum pressure region and a low vacuum pressure region by a difference between the gases in property.

8. 发明专利

JPH04276197A MULTITURBO TYPE VACUUM PUMP 失效
公开(公告)号：JPH04276197A
公开(公告)日：1992-10-01
申请号：JP3854491
申请日：1991-03-05
申请人： JAPAN ATOMIC ENERGY RES INST , MITSUBISHI HEAVY IND LTD
发明人： ABE TETSUYA , MURAKAMI YOSHIO , ARAI TAKASHI , OSAWA HARUSHIGE , HATA SATOSHI
IPC分类号： F04D17/16 , F04D19/04 , F04D25/16
摘要： PURPOSE:To improve discharge efficiency by increasing the discharge capacity and compression ratio of a turbo molecular pump and reducing dimension. CONSTITUTION:A plurality of turbo type rotary bodies are built in multishaft form inside a casing 4 having a suction port and a discharge port, and the need of piping is obviated, and the discharge efficiency is improved, and the reduction of dimension is permitted. One edge of the turbo type rotary body is formed to turbo molecular pump (main turbo rotary body 6), and a plurality of turbo type rotary bodies (subturbo rotary body 11) are arranged in circumferential form under the lowermost stage blade, and the installation space is reduced, and the compression ratio is increased. Further, each of the turbo type rotary body consists of a viscous vacuum pump which is formed by combining rotary discs having each groove in the spiral direction, in plural stages, and discharge with high compression ratio is carried out continuously.

9. 发明专利

JPH08338394A MOLECULAR PUMP 失效
公开(公告)号：JPH08338394A
公开(公告)日：1996-12-24
申请号：JP17027895
申请日：1995-06-13
申请人： JAPAN ATOMIC ENERGY RES INST , OSAKA SHINKU KIKI SEISAKUSHO
发明人： HIROKI SEIJI , ABE TETSUYA , MURAKAMI YOSHIO , NAKAMURA JUNICHI , IGUCHI MASASHI
IPC分类号： F04D19/04 , H02K7/09
摘要： PURPOSE: To obtain a molecular pump which can exhaust a gas with a small molecular weight and a small viscosity coefficient such as a hydrogen isotope efficiently in a nuclear fusion reactor, and can bear to a high energy and a high dose of radial rays generated from the nuclear fusion reactor. CONSTITUTION: While all the coverage members of coils 2a, 3a, 4a, 5a, and 6a around a shaft B, and the wires of wirings, are made of ceramics, the material of a rotor C is made of a titannium alloy, and furthermore, a heater G and a cooling water jacket E are provided at the inner side and the outer side of a stator D, so as to make the temperature of the stator D regulatable.

10. 发明专利

JPH08270599A THREAD GROOVE VACUUM PUMP 失效
公开(公告)号：JPH08270599A
公开(公告)日：1996-10-15
申请号：JP9966695
申请日：1995-03-31
申请人： JAPAN ATOMIC ENERGY RES INST , OSAKA SHINKU KIKI SEISAKUSHO
发明人： HIROKI SEIJI , ABE TETSUYA , MURAKAMI YOSHIO , NAKAMURA JUNICHI , IGUCHI MASASHI
IPC分类号： F04D19/04
摘要： PURPOSE: To keep the gap between a rotor and a stator always constant by forming a part of the whole of the periphery of the rotor in the shape of one or two cones, and setting the position of intersecting point of the extensions of the generating lines at the conical periphery to the specified position from the reference point of the center axis. CONSTITUTION: In a thread groove pump where a rotor 2 rotates within a stator 3, a part or the whole of the periphery of the rotor 2 is made in the shape of one or two cones, and also the cone 2a is made so that the position of the intersecting point of the extensions of the generating lines at the conical periphery may be -β.Ys from the reference point position at the bottom of lower bearing on the center line of the shaft 4 of the rotor 2. But, β is expressed by the expression of (αs /αr )f-1, and αs is the coefficient of thermal expansion, and αr is the coefficient of thermal expansion of rotor material. Further, f is expressed by the expression of ΔTs/ΔTr, and ΔTs is the temperature rise from normal temperature of the shaft 4, and ΔTr is the temperature rise from normal temperature of the rotor 2, and Ys is the position of Y coordinate of the coupling point between the shaft 4 and the rotor 2.

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