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    • 3. 发明专利
    • ION GENERATOR
    • JPS6453200A
    • 1989-03-01
    • JP20985287
    • 1987-08-24
    • JAPAN ATOMIC ENERGY RES INSTTOSHIBA CORP
    • TAKEUCHI HIROSHISUGIYAMA TAKASHI
    • H01J27/02G01N23/225G21G4/04H01J37/08H01J49/10
    • PURPOSE:To reduce the size of a generator by fixing an ion source vessel to the generator in such a manner that the particle flow hole thereof aligns to the particle orbit and providing a spiral or cylindrical ion forming member to the inside of the ion source vessel in such a manner that the axial center thereof aligns to the particle orbit. CONSTITUTION:The supply of gas is stopped and the particles entering a vacuum vessel 1 are released from a particle outlet 14 through the flow hole 2b of the ion source vessel 2, the axial center part of filaments 4 and a vessel flow hole 2c when ions are not generated. The gas is supplied from a gas cylinder 11 into the vessel 2 and the filaments 4 are energized, simultaneously with which an electron drawing out power supply 8 and an ion drawing out power supply 9 are operated in the stage of generating the ions. The thermions (e) released from the filaments 4 in such a manner are accelerated by the power supply 8, by which the gas is electrolytically dissociated and the ions (i) are generated. The ions are released by the power supply 9 to the outside. The size of the generator is reduced and the safety thereof is improved if the generator is constituted in such a manner.
    • 9. 发明专利
    • CHANNEL TYPE SECONDARY ELECTRON MULTIPLYING DEVICE
    • JPS63205043A
    • 1988-08-24
    • JP3706287
    • 1987-02-20
    • JAPAN ATOMIC ENERGY RES INSTTOSHIBA CORP
    • TAKEUCHI HIROSHIHAYASHI KAZUO
    • H01J43/24H01J43/30
    • PURPOSE:To suppress discharge growth in an inner surface of a secondary electron multiplying device by providing a power source current detecting means for detecting an output current of a high voltage power source which accelerates secondary electrons, and a power source voltage controlling means for controlling an output voltage of the high voltage power source. CONSTITUTION:An output voltage of a high voltage power source 11 is raised by a power source voltage controlling means 15 based on a time constant set-up in advance. Next, an output current of a high voltage power source 11 is monitored by a power source current detecting means 13 so that whether creeping discharge is growing or not is determined by a rise in the output current. Accordingly, in a transient process where the output voltage of the high voltage power source 11 is gradually applied based on the time constant, raising the output voltage of the high voltage power source 11 is stopped when the output current is in excess of its prescribed value, and raising the voltage is again started when the creeping discharge disappears to make the output current the prescribed value or less, and these operations are repeated. Hence, the applied voltage can be made to attain to the prescribed level without destroying the device.