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1. 发明专利

JPS6415333A SEPARATING AND RECOVERING DEVICE FOR METAL 失效
公开(公告)号：JPS6415333A
公开(公告)日：1989-01-19
申请号：JP16914387
申请日：1987-07-07
申请人： JAPAN ATOMIC ENERGY RES INST , ISHIKAWAJIMA HARIMA HEAVY IND
发明人： SHIBA YOSHIYUKI , ARISAWA TAKASHI , SHIBATA TAKEYORI , DOI TAKESHI , KADOI HIDEO
IPC分类号： C22B9/02
摘要： PURPOSE:To recover separated, evaporated metal by liquid carrier metal and continuously take it out by letting liquid carrier metal flow uniformly from the high level side to the low level side on the liquid carrier metal holding part under an inclined evaporated metal recovering plate. CONSTITUTION:A metal 29 to be evaporated in an evaporation crucible 2 is heated and evaporated by irradiating electron rays from an electron gun 3 in a vacuum container 1. After passing a focusing device 4, a laser beam 5 of a specific frequency is projected on this evaporated metal and metal to be separated is ionized selectively. Then, electrolytic metal is adsorbed by a recovering plate 7, separated and recovered. Neutral evaporating metal is brought into contact with the lower surface of a neutral metal recovering plate 8 which is inclined by a prescribed angle. The lower surface of this recovering plate 8 is covered with stretched wire, etc., as a liquid carrier metal holding structure and liquid carrier metal is poured uniformly from the high level side to the low level side in a storing tank 16. Said neutral evaporated metal is recovered by this carrier metal, flows and is taken out outside the vacuum container 1 through a recovering through 19, a recovering tank 20, a duct 21 and separated recovered by a neutral metal separating and refining device 22 from the carrier metal.

2. 发明专利

JPH02107725A EVAPORATING METHOD 失效
公开(公告)号：JPH02107725A
公开(公告)日：1990-04-19
申请号：JP25934888
申请日：1988-10-17
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , OGURA KOICHI , ARISAWA TAKASHI
IPC分类号： C22B9/02 , C23C14/24 , C23C14/30
摘要： PURPOSE:To inhibit heat conduction by convection and to reduce the cost of energy required to evaporate a molten metal by electron beam or arc image spot heating by adding single crystal particles of a specified high m.p. metal to the molten metal. CONSTITUTION:A water-cooled copper crucible 1 is filled with molten U 2 and single crystal particles 3 of W which does not melt at the evaporation temp. of U and has a higher density than molten U are put in the molten U 2. The particle size of the particles 3 is >=30mum. The evaporating part 5 of the surface of the molten U 2 is heated with an electron beam 4 to evaporate U atoms from the part 5. Since convection from the part 5 to the crucible 1 is inhibited by the particles 3, heat conduction is suppressed and heat input necessary for evaporation is reduced. The particles 3 in the molten U 2 have very high corrosion resistance and maintain the size. Macrocrystalline polycrystal particles of W may be used in place of the single crystal particles 3 of W.

3. 发明专利

JPH01190977A NATURAL CIRCULATION SYSTEM CRYOPUMP 失效
公开(公告)号：JPH01190977A
公开(公告)日：1989-08-01
申请号：JP1072588
申请日：1988-01-22
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： ONO YOICHI , SHIBANUMA KIYOSHI , SHIBATA TAKEYORI
IPC分类号： F04B37/08 , F25D3/10
摘要： PURPOSE:To ensure good natural circulation of liquid helium by coating a supply pipe with a heat shield brought into thermal contact with a gas vent pipe or a cryopanel. CONSTITUTION:A supply pipe 5 is coated in the adjacent part to a gas vent pipe 6 with a heat shield 11A formed by aluminum or the like brought into thermal contact with the gas vent pipe 6. This supply pipe 5 is coated in a part in the vicinity of a cryopanel 1A with a heat shield 11B formed by aluminum or the like brought into thermal contact with the cryopanel 1A. Thus because the heat shields 11A, 11B are cooled to a temperature of liquid helium, the supply pipe 5 enables its intrusion heat to be decreased as small as neglectable. Accordingly, even in a cryopump applying a measure of reducing the intrusion heat to the cryopanels 1A-1C, good natural circulation of the liquid helium can be ensured.

4. 发明专利

JPH01293124A ISOTOPE SEPARATION DEVICE 失效
公开(公告)号：JPH01293124A
公开(公告)日：1989-11-27
申请号：JP12353488
申请日：1988-05-20
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , MUKODA HIDETOSHI
IPC分类号： G21G1/00 , B01D59/34
摘要： PURPOSE:To allow to project an electron beam to the surface of metallic material without undergoing irregular disturbance by forming the magnetic shield which shields the electron beam from the deflecting magnetic field with a high temp. superconductive body. CONSTITUTION:A magnetic shield 11 shielding the magnetic field in the vicinity of beam orbit is provided at the beam projecting opening of an electron gun 3 in order to introduce the electron beam 4 in a straight line as far as the vicinity of a crucible 2. The magnetic shield 11 is formed of a high temp. superconductive body. Consequently, the magnetic field surrounding the magnetic shield 11 can not put the inside of the magnetic shield 11 into effect due to the Meissner effect of high temp. superconductive body with the result that the inside of the shield has uniform magnetic field distribution. As a result, the electron beam 4 left from the magnetic shield is preferably introduced to the surface of a metallic raw material 1 by the deflecting magnetic field.

5. 发明专利

JPS62278452A GAS CHROMATOGRAPH 失效
公开(公告)号：JPS62278452A
公开(公告)日：1987-12-03
申请号：JP12189986
申请日：1986-05-27
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , TANASE MASAKAZU
IPC分类号： G01N30/54 , B01D15/08 , B01D59/26
摘要： PURPOSE:To achieve a higher resolution, by employing a closed type liquefied gas container for immersing a column to vary the temperature thereof with the control of the pressure of a liquefied gas. CONSTITUTION:A container 5 for a liquefied gas 4 such as liquefied nitrogen shall be of a closed type with a lid 7 and a pressure of an evaporated gas 8 in the liquefied gas 4 is detected with a manometer to adjust the opening of a release value 10 so that the pressure will allows a set temperature of a column 2 to reach the boiling point of the liquefied gas 4. A thermometer 11 such as thermocouple is provided at a lower part of the liquefied gas 4 to keep the temperature of the liquefied gas 4 from falling below the boiling point thereof and a heater 12 placed at a lower part of the liquefied gas 4 is electrically energized to raise the temperature up to the boiling point with the evaporation of the liquefied gas 4. To lower the pressure of the liquefied gas 4 and the evaporated gas 8 below the atm., the evaporated gas 8 from the release valve 10 is discharged with a vacuum discharge pump.

6. 发明专利

JPS62200696A NEUTRAL PARTICLE INCIDENCE DEVICE 失效
公开(公告)号：JPS62200696A
公开(公告)日：1987-09-04
申请号：JP4086686
申请日：1986-02-26
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , HORIIKE HIROSHI , OBARA YOSHIHIRO , OKUMURA YOSHIKAZU , TANAKA SHIGERU
IPC分类号： H05H1/22

7. 发明专利

JP2001262320A SURFACE HEATING AND EVAPORATING METHOD 失效
公开(公告)号：JP2001262320A
公开(公告)日：2001-09-26
申请号：JP2000082236
申请日：2000-03-23
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： OBA HIRONORI , SHIBATA TAKEYORI
IPC分类号： C23C14/24
摘要： PROBLEM TO BE SOLVED: To provide a method for stably and efficiently evaporating atoms in the evaporation of metals or the like by liquid surface heating such as electron beam heating and evaporating. SOLUTION: The bundle of high melting point metals is immersed into a liquid evaporation material, the edge parts of the bundle of high melting point metals are heated, and the liquid evaporation material is evaporated while being fed to the edge parts of the flux of high melting point metals by capillarity through the gaps of the flux of high melting point metals.

8. 发明专利

JPH01242777A METHOD FOR INSPECTING ALUMINUM COATING FILM ON CRYOPANEL 失效
公开(公告)号：JPH01242777A
公开(公告)日：1989-09-27
申请号：JP6955788
申请日：1988-03-25
申请人： HITACHI LTD , JAPAN ATOMIC ENERGY RES INST
发明人： OISHI SEITARO , MAEDA HIROSHI , SHIBATA TAKEYORI
IPC分类号： C23C14/34 , C23C14/54
摘要： PURPOSE:To increase the efficiency of inspection of Al coating films on cryopanels and the yield of products by arranging several cryopanels, a dummy panel and panel chips every time sputtering is carried out. CONSTITUTION:When the surfaces of cryopanels 1 are coated with Al by cathode sputtering, the cryopanels 1, a dummy panel 2 having the same size and shape as the cryopanels 1 and plural panel chips 3 arranged around one of the cryopanels 1 are put in a sputtering device 4A, 4B and sputtering is carried out. After the end of sputtering, the dummy panel 2 and the panel chips 3 are inspected to judge whether the thickness and quality of formed Al coating films are satisfactory or not. Thus, the efficiency of inspection of Al coating films and the yield of products can be increased.

9. 发明专利

JPS63247689A MAGNETICALLY SHIELDED PROBE 失效
公开(公告)号：JPS63247689A
公开(公告)日：1988-10-14
申请号：JP8100187
申请日：1987-04-03
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , TANAKA SHIGERU , MIZUHASHI KIYOSHI , SHIBANUMA KIYOSHI
IPC分类号： G01L21/32 , G01L21/30 , G12B17/02

10. 发明专利

JPS62255848A MEASURING METHOD FOR VAPOR DENSITY DISTRIBUTION 失效
公开(公告)号：JPS62255848A
公开(公告)日：1987-11-07
申请号：JP9852186
申请日：1986-04-28
申请人： JAPAN ATOMIC ENERGY RES INST
发明人： SHIBATA TAKEYORI , SUZUKI YOUJI
IPC分类号： G01N21/62 , G01N9/00
摘要： PURPOSE:To easily measure a distribution of a vapor density by exciting the vapor in a vacuum container with a light beam, an electron beam, an ion beam, etc., to cause it to emit a light beam, and observing the emitted light at each plate by a TV camera. CONSTITUTION:The whole light emitting part is made to form an image on a two-dimensional multi-channel photodetector 11 of a TV camera 9 by a lens 10 of the TV camera 9 through a large window 8. The quantity of light which enters into each channel is proportional to a density of each part of the light emitting part. Also, the quantity of light which enters into each channel is a video signal of the TV camera 9, and by fetching directly this signal from a TV camera controller 12, a vapor density can be derived. Moreover, by storing the video signal in a digital video memory 14 and processing it by a computer 15, a vapor density distribution can be obtained. Also, when a filter 16 for making only a light beam emitted from vapor pass through is placed on the way from an optical path, stray light can be prevented, and the vapor density distribution can be derived more exactly.

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