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1. 发明专利

JP2014190452A Fluid control valve 有权
标题翻译：流体控制阀
公开(公告)号：JP2014190452A
公开(公告)日：2014-10-06
申请号：JP2013067266
申请日：2013-03-27
申请人： Horiba Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , HAYASHI SHIGEYUKI , KAWANAMI NORIYUKI
IPC分类号： F16K1/32 , F16K7/16 , G05D7/06
CPC分类号： F16K41/10 , F16K31/007 , Y10T137/7895
摘要： PROBLEM TO BE SOLVED: To provide a fluid control valve having a diaphragm structure which is low in resiliency, can enlarge a stroke by being largely deformed even if a large force is not applied from an actuator, and hardly generates a defect and a failure even if thinly formed, in order to enable large diameter and large output of the control valve.SOLUTION: In a fluid control valve V having a diaphragm structure 4 and an actuator 3 for pressing the diaphragm structure 4, the diaphragm structure 4 comprises: a cylindrical salient part 42 pressed by the actuator 3; a flange part 41 expanding from a base end of the salient part 42 to the outside with respect to the salient part 42; and a support part FI which is formed at an external periphery of the flange part 41, and attached to another member. The flange part 41 is formed into a membrane shape.
摘要翻译：要解决的问题：为了提供一种具有弹性低的隔膜结构的流体控制阀，即使没有从致动器施加大的力也能大幅度地变形，并且几乎不产生缺陷和故障甚至如果薄形成，则可以实现大直径和大的输出控制阀。解决方案：在具有隔膜结构4的流体控制阀V和用于按压隔膜结构4的致动器3中，隔膜结构4包括：圆柱形由致动器3按压的突出部42; 突出部分41相对于突出部分42从突出部分42的基端延伸到外侧; 以及形成在凸缘部41的外周并且附接到另一构件的支撑部FI。凸缘部41形成为膜状。

2. 发明专利

JP2014139472A Seal member, and manufacturing method of seal member 有权
标题翻译：密封件和密封件的制造方法
公开(公告)号：JP2014139472A
公开(公告)日：2014-07-31
申请号：JP2013230082
申请日：2013-11-06
申请人： Horiba Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , NAGASAWA MASAYUKI , HAYASHI SHIGEYUKI
IPC分类号： F16J15/08 , C23F1/02 , F16J15/00
CPC分类号： C23F1/02 , F16J15/0818 , F16J15/0887
摘要： PROBLEM TO BE SOLVED: To provide a seal member that can be easily manufactured and that can seal in high accuracy, and to provide a manufacturing method of the seal member.SOLUTION: A seal member 1 is made of metal and disposed so as to be interposed between a first face 100 and a second face 101 facing each other. The seal member 1 comprises a first protruding portion 2 that protrudes toward the first face 100, and a pair of second protruding portions 3a, 3b that protrude toward the second face 101. The first protruding portion 2 is disposed between the paired second protruding portions 3a, 3b, and tip end parts of the first protruding portion 2 and the second protruding portions 3a, 3b are flat faces parallel to one another.
摘要翻译：要解决的问题：提供可以容易地制造并且可以高精度地密封的密封构件，并且提供密封构件的制造方法。解决方案：密封构件1由金属制成并且设置成插入在彼此面对的第一面100和第二面101之间。密封构件1包括朝向第一面100突出的第一突出部2和朝向第二面101突出的一对第二突出部3a，3b。第一突出部2设置在成对的第二突出部3a之间 3b，第一突出部2和第二突出部3a，3b的前端部是彼此平行的平坦面。

3. 发明专利

JP2014132188A Fluid control valve and mass flow controller 有权
标题翻译：流体控制阀和流量控制器
公开(公告)号：JP2014132188A
公开(公告)日：2014-07-17
申请号：JP2013000749
申请日：2013-01-07
申请人： Horiba Ltd , 株式会社堀場エステック
发明人： HAYASHI SHIGEYUKI
IPC分类号： F16K1/42 , F16K31/02 , F16K37/00 , G05D7/06
CPC分类号： F16K1/42 , F16K31/007 , G05D7/0635 , Y10T137/7759
摘要： PROBLEM TO BE SOLVED: To provide a fluid control valve having a structure suitable for reducing the volume in the fluid control valve, and to provide a mass flow controller which uses the fluid control valve and enables a measurement flow rate value measured when the fluid control valve is fully closed to become zero in a short time.SOLUTION: A valve seat block 5 forms a fluid control valve V with a valve element member 6 and includes a valve internal flow passage 51 formed therein and a valve seat surface 58 which contacts with or separates from a seating surface 61 of the valve body member 6. A cutout 541 is formed at a part of a protrusion so as to communicate with a downstream side passage.
摘要翻译：要解决的问题：提供一种流体控制阀，其具有适于减小流体控制阀中的体积的结构，并提供使用流体控制阀的质量流量控制器，并且能够在流体控制时测量的测量流量值阀门完全关闭，在短时间内变为零。解决方案：阀座块5与阀元件6形成流体控制阀V，并包括形成在其中的阀内部流动通道51和与阀座表面58接触的阀座表面58 或者从阀体构件6的座面61分离。在突出部的一部分处形成切口541，以与下游侧通路连通。

4. 发明专利

JP2014128755A Fluid mixing element 有权
标题翻译：流体混合元件
公开(公告)号：JP2014128755A
公开(公告)日：2014-07-10
申请号：JP2012287129
申请日：2012-12-28
申请人： Horiba Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , HAYASHI SHIGEYUKI
IPC分类号： B01F5/00 , B01F3/02 , C23C16/455 , H01L21/205 , H01L21/31
CPC分类号： B01F5/0082 , B01F3/02 , B01F5/04 , B01F5/045 , B01F13/1016 , B01F2005/0088 , B01F2005/0091 , Y10T137/2224
摘要： PROBLEM TO BE SOLVED: To provide a fluid mixing element 10 in which a second fluid flowing through a sub-flow path can be mixed with a first fluid flowing through a main flow path, reliably and at a short piping length, while having a simple configuration.SOLUTION: A fluid mixing element is formed of a first internal flow path 3 with a starting end opened in the end face of one end part and with a terminal opened in an end face of the other end part 13, and a second internal flow path 4 with a starting end opened on the side circumference surface of an intermediate part and with the terminal opened in the end face of the other end part 13. The fluid mixing element is also configured as follow: the one end part is fitted to a main flow path A at the upstream side more than a connection portion between the main flow path A and a sub-flow path B; the other end part 13 is fitted to the main flow path A at the downstream side more than the connection portion; a terminal opening of the second internal flow path 4 is disposed to face the starting end opening of the sub-flow path, and the first fluid flowing through the main flow path A flows into the main flow path A at the downstream side more than this fluid mixing element 10 through the first internal flow path 3; and alternatively, the second fluid flowing through the sub-flow path B passes through the second internal flow path 4, and flows into the main flow path A at the downstream side more than this fluid mixing element 10.
摘要翻译：要解决的问题：提供一种流体混合元件10，其中流过副流路的第二流体可以与流过主流路的第一流体可靠地并且在短的管道长度上混合，同时具有简单的配置。流体混合元件由第一内部流路3形成，第一内部流路3的起始端在一端部的端面开口，端子在另一端部13的端面开口，第二内部流路4的起始端在中间部的侧面开口，端子在另一端部13的端面开口。该流体混合元件也构成如下：一端部嵌合于在主流路A和副流路B之间的连接部分的上游侧的主流路A; 另一端部13在连接部分的下游侧装配在主流路A上; 第二内部流路4的端子开口设置成面对副流路的起始端开口，流过主流路A的第一流体比下游侧流入主流路A更多流体混合元件10通过第一内部流动路径3; 或者，流过副流路B的第二流体通过第二内部流路4，并且比该流体混合元件10流入下游侧的主流路A。

5. 发明专利

JP2014052036A Valve element and fluid control valve 有权
标题翻译：阀元件和流体控制阀
公开(公告)号：JP2014052036A
公开(公告)日：2014-03-20
申请号：JP2012196980
申请日：2012-09-07
申请人： Horiba Ltd , 株式会社堀場エステック
发明人： HAYASHI SHIGEYUKI , YASUDA TADAHIRO , TASA KAZUYA
IPC分类号： F16K1/36 , F16K1/00
CPC分类号： F16K25/005 , F16K1/36 , F16K1/44
摘要： PROBLEM TO BE SOLVED: To improve sealability of a fluid control valve during blockage and maintain the durability over a long term so as to improve the stability.SOLUTION: A valve element constitutes one of a valve seat surface or a seating surface. The valve element includes: a recessed part 61 formed on an opposed surface opposing the valve seat surface; and a resin coating film 62 formed in the recessed part 61 and to be contacted with the valve seat surface.
摘要翻译：要解决的问题：提高堵塞期间流体控制阀的密封性，并长期保持耐久性，从而提高稳定性。解决方案：阀元件构成阀座表面或阀座表面之一。阀元件包括：形成在与阀座表面相对的相对表面上的凹部61; 以及形成在凹部61中并与阀座面接触的树脂涂膜62。

6. 发明专利

JP2013088944A Flow control device, flow measurement mechanism, and diagnosis device and diagnosis program used for flow control device including flow measurement mechanism 审中-公开
标题翻译：流量控制装置，流量测量机构以及用于流量控制装置的诊断装置和诊断程序，包括流量测量机制
公开(公告)号：JP2013088944A
公开(公告)日：2013-05-13
申请号：JP2011227398
申请日：2011-10-14
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , HAYASHI SHIGEYUKI , TAKAHASHI AKITO , SHIMIZU TETSUO
IPC分类号： G05D7/06
CPC分类号： G01F1/696 , G01F1/6965 , G01F5/00 , G05D7/0635 , Y10T137/776 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that can reduce the number of components such as sensors used for the flow control device and can accurately diagnose a fault such as jamming in a flow device and an abnormality caused in a measured flow value, and a diagnosis device and a diagnosis program used for the flow control device.SOLUTION: A flow control device 100 includes: a fluid resistance 4 provided on a flow channel ML; a pressure sensor 3 provided upstream or downstream of the fluid resistance; a stability state determination unit 5 for determining whether or not the state of fluid flowing in the flow channel ML is stable on the basis of a measured flow value or a measure pressure value measured by the pressure sensor; and an abnormality diagnosis unit 6 for diagnosing an abnormality in the measured flow value on the basis of the amount of change in the measured pressure value when the stability state determination unit 5 determines that the state of the fluid is stable.
摘要翻译：要解决的问题：提供一种流量控制装置，其可以减少用于流量控制装置的传感器等部件的数量，并且能够精确地诊断流量装置中的卡纸等故障和测量到的异常流量值，以及用于流量控制装置的诊断装置和诊断程序。解决方案：流量控制装置100包括：设置在流路ML上的流体阻力4; 设置在流体阻力的上游或下游的压力传感器3; 稳定状态判定单元5，用于基于由压力传感器测量的测量流量值或测量压力值来确定在流路ML中流动的流体的状态是否稳定; 以及异常诊断单元6，用于当稳定状态确定单元5确定流体的状态稳定时，基于测量的压力值的变化量来诊断测量的流量值的异常。版权所有（C）2013，JPO＆INPIT

7. 发明专利

JP2013050158A Fluid control valve 有权
标题翻译：流体控制阀
公开(公告)号：JP2013050158A
公开(公告)日：2013-03-14
申请号：JP2011188017
申请日：2011-08-30
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： HAYASHI SHIGEYUKI
IPC分类号： F16K1/34 , F16K1/00 , F16K31/02
CPC分类号： F16K31/007 , F16K1/44 , F16K1/50 , F16K47/00
摘要： PROBLEM TO BE SOLVED: To prevent contamination of a fluid passing a fluid control valve, and to prevent a tilt of a valve body in a moving direction and vibration of the valve body.SOLUTION: A fluid control valve comprises a valve body 6 that is arranged on an inner surface of a valve chest 52 through a predetermined space in the valve chest 52 and that is arranged on a valve seat 4 arranged in the valve chest 52 in a detachable manner, an actuator that biases the valve body 6 in a direction of opening the valve, a valve body return spring 8 that biases the valve body 6 in a direction of closing the valve, and a tilt restraining spring 9 that biases the valve body 6 in a direction of resolving a tilt of the valve body 6 to an open/close direction.
摘要翻译：要解决的问题：为了防止通过流体控制阀的流体的污染，并且防止阀体在移动方向上的倾斜和阀体的振动。解决方案：流体控制阀包括阀体6，其通过阀体52中的预定空间布置在阀体52的内表面上，并且布置在布置在阀体52中的阀座4上以可拆卸的方式，使阀体6沿打开阀的方向偏压的致动器，将阀体6沿关闭阀的方向偏压的阀体复位弹簧8和偏压阀阀体6沿着解除阀体6向开闭方向的倾斜的方向。版权所有（C）2013，JPO＆INPIT

8. 发明专利

JP2012237733A Diagnostic device and flow rate controller including the same 有权
标题翻译：诊断装置和流量控制器，包括它们
公开(公告)号：JP2012237733A
公开(公告)日：2012-12-06
申请号：JP2011178768
申请日：2011-08-18
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YAMAGUCHI YUJI , HIMI TOMOYUKI , HAYASHI SHIGEYUKI , YASUDA TADAHIRO
IPC分类号： G01F1/00
CPC分类号： G05D7/0635
摘要： PROBLEM TO BE SOLVED: To provide a diagnostic device capable of diagnosing where a failure has occurred in a thermal flow sensor, and a flow rate controller which includes the diagnostic device and allows self-diagnosis.SOLUTION: The diagnostic device includes a diagnostic unit 43 which compares a first measured flow rate value outputted from a thermal flow sensor 1 and a second measured flow rate value outputted from a flow rate measuring mechanism 2 with each other to diagnose abnormality of the thermal flow sensor 1. The diagnostic unit 43 is configured to diagnose which of a main flow passage ML and a sensor flow passage SL a blockage has occurred in, on the basis of the first measured flow rate value and the second measured flow rate value.
摘要翻译：要解决的问题：提供能够诊断热流传感器中发生故障的诊断装置，以及包括诊断装置并允许自诊断的流量控制器。解决方案：诊断装置包括诊断单元43，其将从热流量传感器1输出的第一测量流量值和从流量测量机构2输出的第二测量流量值彼此相比较以诊断异常热流量传感器1.诊断单元43被构造成基于第一测量流量值和第二测量流量值来诊断主流路ML和传感器流路SL中的哪一个发生堵塞。版权所有（C）2013，JPO＆INPIT

9. 发明专利

JP2013088946A Flow control device, and diagnosis device and diagnosis program used for flow control device 有权
标题翻译：流量控制装置和诊断装置以及用于流量控制装置的诊断程序
公开(公告)号：JP2013088946A
公开(公告)日：2013-05-13
申请号：JP2011227400
申请日：2011-10-14
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , HAYASHI SHIGEYUKI , TAKAHASHI AKITO , SHIMIZU TETSUO
IPC分类号： G05D7/06 , G05B23/02
CPC分类号： G01F1/6842 , G05D7/0635 , Y10T137/776
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that can diagnose an abnormality caused in a flow control valve with high reliability and allows prompt and proper maintenance or the like when the flow control valve has an abnormality, for example, and to provide a diagnosis device and a diagnosis program used for the flow control device.SOLUTION: A flow control device includes: a first measured-flow diagnosis unit 5 for diagnosing an abnormality in a first measured flow value on the basis of a second measured flow value or a measured pressure value; and a valve diagnosis unit 7 for diagnosing an abnormality in a flow control valve 2 when the first measured-flow diagnosis unit 5 determines that the first measured flow value is not abnormal.
摘要翻译：要解决的问题：提供一种流量控制装置，其能够以高可靠性诊断在流量控制阀中引起的异常，并且当流量控制阀具有异常时允许及时和适当的维护等，例如，以提供用于流量控制装置的诊断装置和诊断程序。流量控制装置包括：第一测量流诊断单元5，用于基于第二测量流量值或测量压力值来诊断第一测量流量值中的异常; 以及阀诊断单元7，用于当第一测量流诊断单元5确定第一测量流量值不是异常时诊断流量控制阀2的异常。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2013088945A Flow control device, flow measurement mechanism, and diagnosis device and diagnosis program used for flow control device including flow measurement mechanism 有权
标题翻译：流量控制装置，流量测量机构以及用于流量控制装置的诊断装置和诊断程序，包括流量测量机制
公开(公告)号：JP2013088945A
公开(公告)日：2013-05-13
申请号：JP2011227399
申请日：2011-10-14
申请人： Horiba Stec Co Ltd , 株式会社堀場エステック
发明人： YASUDA TADAHIRO , HAYASHI SHIGEYUKI , TAKAHASHI AKITO , SHIMIZU TETSUO
IPC分类号： G05D7/06 , G05B23/02
CPC分类号： G01F1/34 , G01F1/6842 , G01F25/0053 , G05D7/06 , G05D7/0635 , Y10T137/7759 , Y10T137/776 , Y10T137/7761
摘要： PROBLEM TO BE SOLVED: To provide a flow control device that can accurately diagnose a fault such as jamming in a flow device and an abnormality occurring in a measured flow value using a reduced number of device components, a flow measurement mechanism, and a diagnosis device and a diagnosis program used for the flow control device including the flow measurement mechanism.SOLUTION: A flow control device includes: a fluid resistance 4 provided on a flow channel ML; a pressure sensor 3 provided at one of upstream and downstream sides of the fluid resistance 4; a pressure calculation unit 6 for calculating a pressure at the side of the fluid resistance 4 on which the pressure sensor 3 is not provided; a flow calculation unit 7 for calculating a flow on the basis of a measured pressure value and the pressure value calculated by the pressure calculation unit 6; and an abnormality diagnosis unit 8 for diagnosing an abnormality in a measured flow value on the basis of the measured flow value and the calculated flow value.
摘要翻译：要解决的问题：提供一种流量控制装置，其能够使用减少数量的装置部件，流量测量机构和流量测量机构来精确地诊断流量装置中的堵塞和测量流量值中发生的异常的故障用于包括流量测量机构的流量控制装置的诊断装置和诊断程序。解决方案：流量控制装置包括：设置在流路ML上的流体阻力4; 设置在流体阻力4的上游侧和下游侧的压力传感器3; 用于计算未设置压力传感器3的流体阻力4侧的压力的压力计算单元6; 流量计算单元7，用于基于测量的压力值和由压力计算单元6计算的压力值来计算流量; 以及异常诊断单元8，用于基于所测量的流量值和计算的流量值来诊断测量流量值的异常。版权所有（C）2013，JPO＆INPIT

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