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1. 发明专利

JPS6097618A RETICLE HOUSING CASE 失效
公开(公告)号：JPS6097618A
公开(公告)日：1985-05-31
申请号：JP20466183
申请日：1983-11-02
申请人： HITACHI LTD
发明人： ANDOU KOUICHI , KURIMOTO KOUZOU , IWASAKI HIROSHI
IPC分类号： H01L21/673 , G03F7/20 , H01L21/02
摘要： PURPOSE:To prevent dust adhesion and damage by holding a reticle in sealed state for transportation in a case which has a metal pawl to prevent the movement of the housed reticle and consists of top and bottom lids which can be opened or closed. CONSTITUTION:A reticle case is a lunch box type, a top lid 1 and a bottom lid 2 can be separated and a reticle is housed in the case under nearly sealed conditions. The reticle 10 is placed on a pin 8 on the bottom lid 2 and housed in the case. On a magazine on which the case is loaded, a cut 9 of code is provided to indicate a housing address to prevent erroneous housing. On the bottom lid 2 of the case, grooves 15, 16 are provided. The groove 15 makes the loading of the case on the magazine easy and the groove 16 prevents the movement of the case from the magazine to the external direction. In order to prevent the movement of the reticle 10 on the pin 8, many holders 11 are provided on the left, the right and the front. A pawl 13 is also provided to prevent the movement of the reticle toward inside.

2. 发明专利

JPS5917248A Inspection system for foreign matter 失效
标题翻译：外国检验系统
公开(公告)号：JPS5917248A
公开(公告)日：1984-01-28
申请号：JP12580082
申请日：1982-07-21
申请人： Hitachi Ltd
发明人： ANDOU KOUICHI
IPC分类号： G01N21/88 , G01N21/94 , G01N21/956 , G03F1/84 , H01L21/027 , H01L21/66 , H01L21/30
CPC分类号： G03F1/84
摘要： PURPOSE:To detect the dust of a reticle automatically charged to a main body automatically by synchronously scanning a laser and a detecting section so that the laser is irradiated vertically and only scattered light from the foreign matter can be detected. CONSTITUTION:A detection system is made wait at the position of (1), a reflecting mirror is brought to the state in which it is turned to the left at 7 deg. at a point of time when laser irradiating beams scan a reticle surface 1, and scattered light 4 from the foreign matter 3 is detected by a detector 6 through a lens 7 through the reflecting mirror 8 when laser irradiating beams are made to scan. When the detection system reaches (2), the system is stopped at the center of the reticle surface 1, and laser irradiation is also stopped temporarily. The reflecting mirror is turned to the right at 14 deg. at (3) while the detection system retreats up to the position of (4), laser irradiation and the scan of the detection system are started from the position of (4), the foreign matters 13, 14 are detected and the system is moved up to the position of (5), and the detection system is stopped while the system is returned to the position of (7), the initial state of (1), and stopped as the reflecting mirror 8 is turned to the left at 14 deg.. Accordingly, the foreign matters of the reticle surface 1 can bilaterally be inspected simultaneously in the same manner as mentioned above about the scanning of the left half of the reticle surface 1.
摘要翻译：目的：通过同步扫描激光和检测部分来自动检测自动充电到主体的标线片的灰尘，使激光垂直照射，只能检测出来自异物的散射光。构成：在（1）的位置使检测系统等待，反射镜处于向左转动7度的状态。在激光照射光束扫描标线片表面1的时刻，当激光照射光束进行扫描时，检测器6通过透镜7通过反射镜8检测来自异物3的散射光4。当检测系统达到（2）时，系统停在标线片表面1的中心，激光照射也暂时停止。反射镜在14度向右转。在（3），当检测系统退回到（4）的位置时，从（4）的位置开始激光照射和检测系统的扫描，检测异物13,14，并且系统被移动直到（5）的位置，并且当系统返回到（7）的位置（1）的初始状态时，检测系统停止，并且当反射镜8向左转到14时停止因此，与上述关于掩模版面1的左半部分的扫描相同的方式，可以同时检查标线片表面1的异物。

3. 发明专利

JPS59186320A Reticle transfer apparatus 失效
标题翻译：反转传送装置
公开(公告)号：JPS59186320A
公开(公告)日：1984-10-23
申请号：JP5928083
申请日：1983-04-06
申请人： Hitachi Ltd
发明人： ANDOU KOUICHI , ISHIDA YOSHIHIRO , IWASAKI HIROSHI
IPC分类号： H01L21/677 , B65G1/00 , B65G1/02 , B65G1/04 , B65G1/07 , G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F1/66 , G03F7/70741 , H01L21/30
摘要： PURPOSE:To avoid adhesion of dust to a reticle by a method wherein the reticle is contained in a case and kept almost closed up until it is transferred to the prescribed position. CONSTITUTION:A reticle is contained in a reticle case 20 which can be opened and closed. A plurality of the reticle cases 20 are piled in magazines 19, 20. A travelling body 14, which can travel vertically, is provided in front of the magazines. An optional case 20 in the magazine is drawn out by folks 25, 26 provided to the travelling body 14. When the travelling body 14 reaches the position of a case opening and closing mechanism 10 provided to the prescribed position, the case 20 is opened by the rotation of fan-shape members 15a-15d. The reticle in the case 20 is drawn out by a folk 23. With this constitution, adhesion of dust to the reticle is avoided.
摘要翻译：目的：为了避免灰尘附着在掩模版上，其中将掩模版包含在壳体中并保持几乎封闭，直到其转移到规定位置为止。构成：将掩模版包含在能够打开和关闭的标线箱20中。将多个标线箱20堆放在杂志19,20中。可以在杂志前面设置可垂直行进的行进体14。弹匣中的可选择的壳体20由设置在行进体14上的人25,26拉出。当行进体14到达设置在规定位置的壳体开闭机构10的位置时，壳体20被打开扇形部件15a-15d的旋转。壳体20中的掩模版由民间23拉出。通过这种结构，避免了灰尘附着在掩模版上。

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