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1. 发明专利

JPS59214225A Projection exposure apparatus 失效
标题翻译：投影曝光装置
公开(公告)号：JPS59214225A
公开(公告)日：1984-12-04
申请号：JP8770483
申请日：1983-05-20
申请人： Hitachi Ltd
发明人： IWASAKI HIROSHI
IPC分类号： G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： H01L21/30
摘要： PURPOSE:To facilitate attaching and detaching of a lens to form a U-shape cavity which has an opening in a column to which the lens is attached. CONSTITUTION:A lens 51 is attached to a mirror cylinder 56 by a lens flange 520. The mirror cylinder 56 is inserted into a mirror cylinder holder 57 and fixed to the holder 57 by ring nuts 550. The lens attaching part composed like this is fixed to a column 8 by a holder receptacle ring 58. A U-shape cavity 83 which has an opening is formed in the column 8. The lens attaching part can be attached and detached to the direction of an arrow from the opening side of this cavity.
摘要翻译：目的：为了便于连接和拆卸透镜以形成U形凹腔，该U形凹腔在透镜附着的柱上具有开口。构成：透镜51通过透镜凸缘520附接到镜筒56.镜筒56插入镜筒保持器57中，并通过环形螺母550固定到保持器57.安装在其上的透镜安装部固定通过保持器容器环58连接到柱8.在柱8中形成有具有开口的U形腔83.透镜安装部可以从该腔的开口侧沿箭头方向被安装和拆卸。

2. 发明专利

JPS5851440B2 JPS5851440B2 - 失效
公开(公告)号：JPS5851440B2
公开(公告)日：1983-11-16
申请号：JP11055977
申请日：1977-09-16
申请人： Hitachi Ltd
发明人： IWASAKI HIROSHI , SASE AKIRA
IPC分类号： G01D11/24 , B65D43/02 , H05K5/02

3. 发明专利

JPS5444561A DRAWINGGOUT AND LOCKING MECHANISM OF INSTRUMENT CASING 失效
公开(公告)号：JPS5444561A
公开(公告)日：1979-04-09
申请号：JP11055977
申请日：1977-09-16
申请人： HITACHI LTD
发明人： IWASAKI HIROSHI , SASE AKIRA
IPC分类号： G01D11/24 , B65D43/02 , H05K5/02
摘要： PURPOSE:To enable the casing to be surely locked and to be readily drawn out and inspected by providing a stop pin on the bottom plate of the case and providing a stopping part and a rotatable plate form handle to the chassis. CONSTITUTION:The casing is constituted by a case 1 and a chassis 2 removably contained therein. A stop pin 16 is provided to the bottom plate of the case 1 and a plate form handle 4 having a stopping part 23 engaging therewith is mounted to the chassis 2, in parallel with the bottom face of the chassis 2. Here, said plate form handle 2 is made rotatable to the corner on the front side of the handle 4 by the rotating axis 15 provided on the front side of the chassis. When the chassis 2 is contained, the stopping part 23 of the handle 4 engages to the stop pin 16 to lock the chassis 2. To draw out the chassis, the handle 4 is turned by the bent part in the forward part of the handle 4 to release the engagement, after which th chassis is drawn out. Thereby, sure locking and easy drawing out may be performed with the relatively simple mechanism.

4. 发明专利

JPS51146258A INDICATING METER 失效
公开(公告)号：JPS51146258A
公开(公告)日：1976-12-15
申请号：JP6964475
申请日：1975-06-11
申请人： HITACHI LTD
发明人： HATSUTORI TOUSAKU , YOKOYAMA HITOSHI , HAKUSEKO ICHITAMI , IWASAKI HIROSHI
IPC分类号： G01D7/00 , G01D7/02 , G01D13/02
摘要： PURPOSE:Indicating meter in which a rear face color of a plurality of meters mounted on the panel may be displayed with information discrimation, a color of each group of meters or adjoining group of meters may be varied through a transparent display window and thereby a function of display plate may also be provided.

5. 发明专利

JPH08335379A CLAMPING MECHANISM OF MAGNETIC DISK 失效
公开(公告)号：JPH08335379A
公开(公告)日：1996-12-17
申请号：JP14207395
申请日：1995-06-08
申请人： HITACHI LTD
发明人： NOTO SHUNZO , SHIMOZAKA HIDEAKI , KAMATA MINORU , EGUCHI UTAYOSHI , KAWAGUCHI DAISUKE , SAKATA TOMOAKI , IWASAKI HIROSHI , KUZE TSUTOMU
IPC分类号： G11B23/00 , G11B17/038
摘要： PURPOSE: To obtain the clamping mechanism of a magnetic disk capable of assembling in the normal temperature, imparting the uniform fastening force thereto and also easily releasing it. CONSTITUTION: The magnetic disks 4, 6, 8 are laminated to a hub 2 through spacers 5, 7, and circular inside and outside rings, the fitting surfaces of which are inclined by angle θ, are inserted from the upper side of this hub 2 to tighten the magnetic disks. The magnetic disks are clamped by setting the relation between the angle θ of the fitting surfaces and the coefficient of friction μof both of the surfaces as [θ μ]. Also, the clamp is easily released by pushing for expanding plural notches or differences in level, which are provided on the upper surfaces of the inside ring and outside ring.

6. 发明专利

JPS59186320A Reticle transfer apparatus 失效
标题翻译：反转传送装置
公开(公告)号：JPS59186320A
公开(公告)日：1984-10-23
申请号：JP5928083
申请日：1983-04-06
申请人： Hitachi Ltd
发明人： ANDOU KOUICHI , ISHIDA YOSHIHIRO , IWASAKI HIROSHI
IPC分类号： H01L21/677 , B65G1/00 , B65G1/02 , B65G1/04 , B65G1/07 , G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F1/66 , G03F7/70741 , H01L21/30
摘要： PURPOSE:To avoid adhesion of dust to a reticle by a method wherein the reticle is contained in a case and kept almost closed up until it is transferred to the prescribed position. CONSTITUTION:A reticle is contained in a reticle case 20 which can be opened and closed. A plurality of the reticle cases 20 are piled in magazines 19, 20. A travelling body 14, which can travel vertically, is provided in front of the magazines. An optional case 20 in the magazine is drawn out by folks 25, 26 provided to the travelling body 14. When the travelling body 14 reaches the position of a case opening and closing mechanism 10 provided to the prescribed position, the case 20 is opened by the rotation of fan-shape members 15a-15d. The reticle in the case 20 is drawn out by a folk 23. With this constitution, adhesion of dust to the reticle is avoided.
摘要翻译：目的：为了避免灰尘附着在掩模版上，其中将掩模版包含在壳体中并保持几乎封闭，直到其转移到规定位置为止。构成：将掩模版包含在能够打开和关闭的标线箱20中。将多个标线箱20堆放在杂志19,20中。可以在杂志前面设置可垂直行进的行进体14。弹匣中的可选择的壳体20由设置在行进体14上的人25,26拉出。当行进体14到达设置在规定位置的壳体开闭机构10的位置时，壳体20被打开扇形部件15a-15d的旋转。壳体20中的掩模版由民间23拉出。通过这种结构，避免了灰尘附着在掩模版上。

7. 发明专利

JPS631028A REDUCTION PROJECTION ALIGNER 失效
公开(公告)号：JPS631028A
公开(公告)日：1988-01-06
申请号：JP14306386
申请日：1986-06-20
申请人： HITACHI LTD
发明人： KANEKO NORIO , KOKUBO SHIGERU , IWASAKI HIROSHI
IPC分类号： H01L21/30 , G03F7/20 , H01L21/027
摘要： PURPOSE:To improve the working efficiency and the adjustment precision by separating the column for fixing a reticle and a reducing lens into two portions, separating the chuck of the reticle from the column, and making the relative positions of the separate portions adjustable. CONSTITUTION:A reducing lens 8 and a reticle chuck 6 are fixed to a column 9, the column 9 is boardlike and fixed to a surface plate 2 with legs 10. Fixing of a wafer 3 and an X-Y stage 4 to the surface plate 2 is same as the conventional type one. The parallelism between the reticle surface and the flange surface of the lens can be adjusted by inserting a metal film 11 into the fixing plane of the chuck 6 and the column 9. Also by inserting a film 12 between the column 9 and the legs 10, the reticle 5 and the lens 8 can simultaneously be slanted and adjusted in relation to the wafer 3. Therefore, since the trapezoidal image distortion inherent in the lens and the image surface containing a slope can be adjusted and corrected independently by different means, the working efficiency and the adjustment precision are improved.

8. 发明专利

JPS5129948A 失效
公开(公告)号：JPS5129948A
公开(公告)日：1976-03-13
申请号：JP10205274
申请日：1974-09-06
申请人： HITACHI LTD
发明人： IWASAKI HIROSHI , SHINOHARA KATSUHIKO , SUEHIRO TETSUO
IPC分类号： G01D7/00 , G01D7/02 , G05B1/00 , G05B1/01

9. 发明专利

JPS5129947A 失效
公开(公告)号：JPS5129947A
公开(公告)日：1976-03-13
申请号：JP10205174
申请日：1974-09-06
申请人： HITACHI LTD
发明人： IWASAKI HIROSHI , SHINOHARA KATSUHIKO , SUEHIRO TETSUO
IPC分类号： G01D7/00 , G01D7/02 , G05B1/00 , G05B1/01

10. 发明专利

JPS6097618A RETICLE HOUSING CASE 失效
公开(公告)号：JPS6097618A
公开(公告)日：1985-05-31
申请号：JP20466183
申请日：1983-11-02
申请人： HITACHI LTD
发明人： ANDOU KOUICHI , KURIMOTO KOUZOU , IWASAKI HIROSHI
IPC分类号： H01L21/673 , G03F7/20 , H01L21/02
摘要： PURPOSE:To prevent dust adhesion and damage by holding a reticle in sealed state for transportation in a case which has a metal pawl to prevent the movement of the housed reticle and consists of top and bottom lids which can be opened or closed. CONSTITUTION:A reticle case is a lunch box type, a top lid 1 and a bottom lid 2 can be separated and a reticle is housed in the case under nearly sealed conditions. The reticle 10 is placed on a pin 8 on the bottom lid 2 and housed in the case. On a magazine on which the case is loaded, a cut 9 of code is provided to indicate a housing address to prevent erroneous housing. On the bottom lid 2 of the case, grooves 15, 16 are provided. The groove 15 makes the loading of the case on the magazine easy and the groove 16 prevents the movement of the case from the magazine to the external direction. In order to prevent the movement of the reticle 10 on the pin 8, many holders 11 are provided on the left, the right and the front. A pawl 13 is also provided to prevent the movement of the reticle toward inside.

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