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1. 发明专利

JP2011040240A Charged particle beam device, and image display method 有权
标题翻译：充电颗粒光束装置和图像显示方法
公开(公告)号：JP2011040240A
公开(公告)日：2011-02-24
申请号：JP2009185396
申请日：2009-08-10
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： HIRATO TATSUYA , KOMURO HIROYUKI , KAWAMATA SHIGERU
IPC分类号： H01J37/147 , H01J37/153 , H01J37/22
CPC分类号： H01J37/28 , A61B6/022 , G02B27/2207 , G02B27/2214 , H01J37/1478 , H01J37/153 , H01J2237/2611
摘要： PROBLEM TO BE SOLVED: To provide a parallax image display means and an operation screen capable of providing an acquisition means for acquiring not only right and left parallax images from above but also from an oblique direction, and capable of changing over three-dimensional observation methods in a charged particle beam device. SOLUTION: The charged particle beam device, provided with charged particle sources, an objective lens focusing primary charge particle beams released from the charged particle sources, a scanning deflector scanning the primary charged particle beams on a sample, and a detector for detecting signal particles generated from the sample by scanning of the primary charged particle beams, for obtaining a sample image with the use of the signal particles of the detector, is further provided with a deflector for deflecting an irradiation angle of the primary charged particle beams toward the sample, a first as well as a second power source independent from each other for flowing currents to the deflector, and a switch for changing over voltages to be impressed from the two power sources at a one-line unit or a one-frame unit of scanning of the primary charged particle beams. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种视差图像显示装置和操作画面，其能够提供用于从上方而且从倾斜方向获取左右视差图像的获取装置，带电粒子束装置中的三维观察方法。解决方案：带有带电粒子源的带电粒子束装置，聚焦从带电粒子源释放的主要电荷粒子束的物镜，扫描样品上的初级带电粒子束的扫描偏转器和用于检测的检测器通过扫描主带电粒子束从样品产生的信号粒子，为了使用检测器的信号粒子获得样本图像，还设置有偏转器，用于将初级带电粒子束的照射角度偏向样品，彼此独立的第一和第二电源，用于将流动流向偏转器;以及开关，用于以单线单位或一帧单位从两个电源转换要施加的电压扫描初级带电粒子束。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JP2007194072A Control device and control method for electron gun used for scanning electron microscope or the like 有权
标题翻译：用于扫描电子显微镜或类似物的电子枪的控制装置和控制方法
公开(公告)号：JP2007194072A
公开(公告)日：2007-08-02
申请号：JP2006011127
申请日：2006-01-19
申请人： Hitachi High-Technologies Corp , 株式会社日立ハイテクノロジーズ
发明人： KAWAMATA SHIGERU , KOMURO HIROYUKI
IPC分类号： H01J37/248
摘要： PROBLEM TO BE SOLVED: To provide a device and a method capable of optimally setting bias voltage of an electron gun without requiring complicated operation.
SOLUTION: On the method of controlling emission current from a filament of the electron gun provided with a plurality of resistors arranged between the filament and a Wehnelt electrode having resistance values different from each other, a setting, for dividing a range of acceleration voltage into the same number of areas as that of the resistors, is accepted, and the resistors are switched so that one having a resistance value corresponding to the size of the area of acceleration voltage can be used to the area of the acceleration voltage.
COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够最佳地设置电子枪的偏置电压而不需要复杂操作的装置和方法。解决方案：在电子枪的灯丝控制发射电流的方法中，该电子枪具有布置在灯丝和具有彼此不同的电阻值的Wehnelt电极之间的多个电阻器，用于分割加速度范围的设定电压进入与电阻器相同数量的区域，被接受，并且电阻器被切换，使得具有对应于加速电压区域的尺寸的电阻值的电阻可以用于加速电压的区域。版权所有（C）2007，JPO＆INPIT

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