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    • 1. 发明专利
    • Solid-state image pickup device
    • 固态图像拾取器件
    • JPS6161455A
    • 1986-03-29
    • JP18266184
    • 1984-09-03
    • Hitachi Device Eng Co LtdHitachi Ltd
    • SUZUKI TOSHIKIHIKIBA MASAYUKIUEHARA MASAOYONEOKA TAKUMAKI MASAHIRO
    • H01L27/146H04N5/335H04N5/355H04N5/374
    • H01L27/14643
    • PURPOSE:To obtain a solid-state image pickup device with little random noise by a method wherein a portion under a diffused layer contacting with a vertical signal line is constructed by a four-layer structure composed of n -p -p -p well deposit layers. CONSTITUTION:A p layer 12 is provided between an n diffused layer 4 and a p layer 6. Regarding this p 12, it can be said that when an impurity, e.g. phosphorus, opposite to the one of the p layer 6 is diffused into this layer, an n type impurity is put into a p type impurity layer and consequently the density of the p layer 6 is reduced equivalently. Assuming that the impurity density of the p layer 6 is Np , the capacity Cv of a vertical signal line 11 is reduced by the reduction of the density of the p layer 6, since Cvproportional (Np ) . By this constitution, random noise can be lessened, and thus an image having a high S/N ratio and a very high quality can be obtained.
    • 目的:通过下述方法获得具有小随机噪声的固态图像拾取装置,其中与垂直信号线接触的扩散层下面的部分由n + p - p <+> - p < - >孔沉积层。 构成:在n +扩散层4和p +层6之间提供p +层12.关于该p - 12,可以说当杂质例如。 与p +层6相反的磷被扩散到该层中,n型杂质被放入p型杂质层中,因此p + 6层的密度等效降低。 假设p +层6的杂质浓度为Np +,则由于Cv分数(N p <0),垂直信号线11的密度降低,所以垂直信号线11的电容Cv降低, +>)<1/2>。 通过这种结构,可以减小随机噪声,因此可以获得具有高S / N比和高质量的图像。
    • 9. 发明专利
    • GAS DUST-CATCHING SYSTEM
    • JPH09243533A
    • 1997-09-19
    • JP5171296
    • 1996-03-08
    • HITACHI LTDHITACHI DEVICE ENG
    • MAKI MASAHIRONAKANO TOSHIOSAKAI SHOZOMAYAMA KOICHIISHIWARI SHUICHI
    • G01N1/22G01N1/24G01N30/04
    • PROBLEM TO BE SOLVED: To produce a stable catching liquid of a high concentration by feedback controlling conditions of each process based on a catching liquid-producing speed measured at an exit of a condenser. SOLUTION: Gas dust components in a gas sucked through a suction opening 5 are mixed with pure water vapor supplied from a pure water vapor feed system 2 and taken into a condensed liquid while cooled and condensed at a condenser 8. The mixture is sent down to a collecting tank 11 and stored. A catching liquid level detector 11a for monitoring a catching liquid-producing speed is set in the collecting tank 11 and a position of a liquid level of the collecting tank 11 is detected. The producing speed is operated with a ratio of a volume of the collecting tank 11 up to the detector 11a and a time since the collecting tank 11 is empty until the liquid level is detected by the detector 11a. When the monitored producing speed is smaller (larger) than a required value, a pure water feed pump 16 is feedback controlled to increase (decrease) the feed amount of pure water. Accordingly, since the feed amount of pure water vapor is corrected, a continuously stable catching liquid of a high concentration is produced.