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1. 发明专利

JP2001182978A CLEAN ROOM FACILITY 失效
公开(公告)号：JP2001182978A
公开(公告)日：2001-07-06
申请号：JP37032199
申请日：1999-12-27
申请人： HITACHI PLANT ENG & CONSTR CO , HITACHI LTD
发明人： MINAMI TERUO , KATO KOJI , HIRATA JUNTA , SUZUKI MICHIO , KOBAYASHI YOSHIAKI
IPC分类号： H01L21/02 , F24F7/06
摘要： PROBLEM TO BE SOLVED: To provide a clean room facility in which intrusion of dust from a clean room into a mini-environment is prevented and thereby diffusion of dust into the apparatus room is prevented surely. SOLUTION: A clean air outlet 23 is made in a barrier wall where the load port 20 of a mini-environment 16 is provided so that clean air in the mini- environment is blown from the air outlet toward the upper surface 20a of the enclosure of the load port.

2. 发明专利

JP2002022227A CLEAN ROOM EQUIPMENT 失效
公开(公告)号：JP2002022227A
公开(公告)日：2002-01-23
申请号：JP2000201972
申请日：2000-07-04
申请人： HITACHI PLANT ENG & CONSTR CO , HITACHI LTD
发明人： KATO KOJI , KAMIYA MATSUO , MINAMI TERUO , HIRATA JUNTA , SUZUKI KEIJI , KOBAYASHI YOSHIAKI
IPC分类号： F24F7/06
摘要： PROBLEM TO BE SOLVED: To provide a clean room capable of air conditioning in which cleanliness of a clean room is securely kept intactly. SOLUTION: A clean room 20 is divided therein to a bay 28 to which clean air is supplied, a preliminary chamber 36 which is kept at higher cleanliness than the bay 28, and a maintenance area 40 which is kept at lower cleanliness than the bay 28. Pressures in the respective regions are made higher in the order of higher cleanlinesses. An air exhaust outlet 110 is provided in the preliminary chamber 36, and air direction control means 100 is provided at the air exhaust outlet 110 to exhaust it to the maintenance area 40.

3. 发明专利

JP2000082731A CLEAN ROOM FACILITY 失效
公开(公告)号：JP2000082731A
公开(公告)日：2000-03-21
申请号：JP25147398
申请日：1998-09-04
申请人： HITACHI PLANT ENG & CONSTR CO , HITACHI LTD
发明人： MINAMI TERUO , KATO KOJI , HIRATA JUNTA , SUZUKI MICHIO , KOBAYASHI YOSHIAKI
IPC分类号： H01L21/677 , F24F7/06 , H01L21/02 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To take out a wafer from a sealed container without being contaminated and to receive and deliver the wafer by forming an intermediate chamber for receiving and delivering the wafer in a clean room and an apparatus chamber provided in the room along the inlet of the apparatus chamber, and setting to high cleanliness in the intermediate chamber. SOLUTION: The air in a clean room 20 is cleaned by an FFU 24 and supplied into an intermediate chamber 22, and its indoor is maintained approximately at degree 1 cleanliness. A wafer W is conveyed to a loading port 28 via a self-running truck 37 in the state that the wafer W is contained in a sealed container 36, transferred, its cover 36a is opened, the wafer W therein is taken out by a transfer unit 27, received by a manufacturing apparatus in an apparatus chamber 21, and delivered to a cleaning unit or the like. In this case, since the wafer W is transferred from the container 36 of high cleanliness to the chamber 22 of high cleanliness, the wafer W is not contaminated. Accordingly, the clean room may be in 103 degree cleanliness.

4. 发明专利

JP2001044256A SEMICONDUCTOR CONTAINER OPEN/CLOSE DEVICE 失效
公开(公告)号：JP2001044256A
公开(公告)日：2001-02-16
申请号：JP21172499
申请日：1999-07-27
申请人： HITACHI LTD , HITACHI PLANT ENG & CONSTR CO
发明人： KOBAYASHI YOSHIAKI , KOBAYASHI HIDE , TOKUNAGA KENJI , KATO KOJI , MINAMI TERUO
IPC分类号： B65G1/00 , H01L21/673 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To prevent foreign matters from entering a container by setting a speed difference pressure ratio obtained by dividing the maximum speed when the semiconductor container is opened by the differential pressure between the pressure inside a semiconductor-manufacturing device and that of the outer field to a specific value or less. SOLUTION: A semiconductor container 200 is composed of a container body 210 and a lid 220, and four latch grooves 211 are provided at the container body 210 and a flange 212 is provided around the container body 210. Then, a latch 222 is accommodated in the lid 220 with a cam mechanism, and an opener open/close mechanism is operated horizontally toward the side of the manufacturing device for allowing the lid 220 of the container 200 to depart from the container body 210. In this case, the ratio of the maximum speed (m/s) of the opener open/close mechanism when the container 200 is opened to a differential pressure (Pa) between pressure in the device and that in the outer field is set to 0.006 (m/s.Pa) or less.

5. 发明专利

JP2000357641A CLEAN ROOM FACILITIES 失效
公开(公告)号：JP2000357641A
公开(公告)日：2000-12-26
申请号：JP16743499
申请日：1999-06-14
申请人： HITACHI PLANT ENG & CONSTR CO , HITACHI LTD
发明人： MINAMI TERUO , KATO KOJI , HIRATA JUNTA , SUZUKI MICHIO , KOBAYASHI YOSHIAKI , TOKUNAGA KENJI
IPC分类号： H01L21/02 , F24F7/06 , F24F9/00
摘要： PROBLEM TO BE SOLVED: To prevent contamination of the inside of an intermediate chamber and hermetically closed cabinet. SOLUTION: A driving chamber 40 of load port 28 is provided in the side of a clean room 20 of the internal chamber 22. Within the driving chamber 40, an air curtain generator 56 and an exhaust device 58, thereby an air curtain is always formed at a communicating port 44 with the air curtain generator 56, and the air in the driving chamber 40 is exhausted to the space 34 under the floor so that the internal pressure of the driving chamber 40 and intermediate chamber 22 becomes almost equal. Moreover, within a cover 40 of the load port 28, an air shower device 54 is provided, and the air is injected to the door moving upward.

6. 发明专利

JPH11334810A CARRYING DEVICE AND MANUFACTURE OF THE SAME 失效
公开(公告)号：JPH11334810A
公开(公告)日：1999-12-07
申请号：JP7908899
申请日：1999-03-24
申请人： HITACHI LTD
发明人： KOBAYASHI YOSHIAKI , KOBAYASHI HIDE , HAMADA TOYOHIDE , WAKIYAMA FUMITOSHI , SHIMIZU MICHIYUKI , YAGYU MITSUYASU
IPC分类号： B65G1/00 , B65G1/137 , H01L21/02 , H01L21/677 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To reduce the cost, the occupied space and the carry waiting time by comprising a controller for managing the information on the existence position and the processing information of a matter to be handled in a carrier. SOLUTION: When an operator registers a lot ID and the process flow ID of a lot A to a progress management controller 900, the apparatus alocating instruction of the lot A is given to an equipment group management controller 800B for managing a manufacturing apparatus which processes the next process of the lot A, and one manufacturing apparatus 700B is selected from the operation plan of the manufacturing apparatus which can process the next process of the lot A. When the operator places the lot A on an inlet and outlet port of a carrying and storing device, a carrying and storing device controller 150A confirms the operating state of a crane, retrieves the vacant shelf in order of shelf boards from the shelves in the carrying and storing device when the crane is not occupied by the other work, and gives the instruction the crane for carrying the lot from the inlet and outlet port to the vacant shelf when the vacant shelf exists.

7. 发明专利

JPH11288990A PROCESSING METHOD AND DEVICE THEREOF, AND SEMICONDUCTOR PRODUCTION LINE AND TRANSFER METHOD OF PROCESSED SUBSTRATE THEREOF 失效
公开(公告)号：JPH11288990A
公开(公告)日：1999-10-19
申请号：JP8892698
申请日：1998-04-01
申请人： HITACHI LTD
发明人： IWATA YOSHIO , KOBAYASHI HIDE , UCHINO TOSHIYUKI , YAMADA TAKASHI , TOKUNAGA KENJI , NISHIHARA SHINJI , MASUI TOMOYUKI , ICHIKAWA KAZUYA , IKEDA MINORU , YAGYU MITSUYASU , KOBAYASHI YOSHIAKI
IPC分类号： H01L21/677 , H01L21/02 , H01L21/68
摘要： PROBLEM TO BE SOLVED: To provide a processing method and a device thereof, a semiconductor production line and a processed substrate transfer method thereof, wherein a tact time is shortened, and a throughput is improved in a mixed flow production line system where substrates such as wafers are mixedly manufactured. SOLUTION: A processing method, a device and a semiconductor production line have a constitution, where substrates kept in a carrier stored in a processed substrate transfer device (EFEM) are fed into a manufacturing equipment(EQ) equipped with a process treatment means (PM), in accordance with various kinds of substrate feed rules on the basis of data on one or more carriers which are stored in the processed substrate transfer device (EFEM) for keeping the processed substrates and other data on the substrates, the substrates fed to the manufacturing equipment(EQ) are processed by the processing means(PM).

8. 发明专利

JPH10275017A CARRIER CONTROL METHOD AND CARRIER DEVICE 失效
公开(公告)号：JPH10275017A
公开(公告)日：1998-10-13
申请号：JP7965797
申请日：1997-03-31
申请人： HITACHI LTD
发明人： KOBAYASHI YOSHIAKI , HAMADA TOYOHIDE
IPC分类号： B65G43/08 , G05D1/02
摘要： PROBLEM TO BE SOLVED: To improve the carrier capability without adding any extra carrier system to a carrier device by selecting the traveling path of the carrier device so as to secure the optimum carrier capability that is calculated by using the number of carrier vehicles set for every track area or the operation information on every carrier vehicle as a variable. SOLUTION: A line controller 100 sends a carrier instruction to a physical distribution controller 110 based on the total work progress state set on a line. The controller 110 performs an operation to decide the traveling path of a carrier vehicle 200 based on the carrier vehicle information received from a carrier device controller 130 and gives an instruction to the controller 130. The controller 130 designates the operations of the carrier vehicle to the area controllers 140a to 140d of tracks which are related to the carrier path. The controllers 140a to 140d receive the carrier vehicle pass signals from a sensor 143, notify the controller 130 of the position and state of the vehicle 200 and then instructs an inverter 141 to control the operations of the carrier vehicle.

9. 发明专利

JPH08172706A GAS FLOAT CONVEYOR 失效
公开(公告)号：JPH08172706A
公开(公告)日：1996-07-02
申请号：JP31622794
申请日：1994-12-20
申请人： HITACHI LTD
发明人： KOBAYASHI YOSHIAKI , DAIROKU NORIYUKI
IPC分类号： B61B13/08 , B60L13/03 , B65G54/02
摘要： PURPOSE: To provide a gas float conveyor in which a moving body is branched without reducing the moving speed of the body at a branch unit. CONSTITUTION: The gas float conveyor comprises a moving body 30 placed with a work, reference rails (rails 10a, 10b) and branch rails (rails 10c, 10d) laid along the conveying route of the work, a gas injection port 50 for injecting gas toward the body 30 to float the body 30 from the rails, and electromagnets 60a, 60b. Permanent magnets 20a to 20d are provided at the body 30, the electromagnets 60a, 60b operate attracting force to or repelling force from the magnets 20a to 20d to guide the body 30 to the reference or branch rails.

10. 发明专利

JPH07228346A CONVEYER, CONVEYING PROCESSOR AND PROCESSED OBJECT CONVEYANCE PROCESSING METHOD 失效
公开(公告)号：JPH07228346A
公开(公告)日：1995-08-29
申请号：JP30858294
申请日：1994-12-13
申请人： HITACHI LTD
发明人： DAIROKU NORIYUKI , MURASE TOMOHIKO , KOBAYASHI YOSHIAKI , SUZUKI TAKAMICHI
IPC分类号： B65G54/02 , B60L13/03 , B65G47/64 , B65G47/68 , B65G49/07 , H01L21/677 , H01L21/68
摘要： PURPOSE:To apply a process, in a device wherein a conveyed object of mounting a processed object of semiconductor substrate or the like can be conveyed to be switched at a high speed without sliding between a main conveying path and a conveying path branching from or crossing with the main conveying path, to input the processed object to each of many manufacturing devices. CONSTITUTION:A device comprises a main conveying path 120 and auxiliary conveying path 121 for conveying a conveyed object and a cross or branch conveying path part for making the main conveying path 120 and auxiliary conveying path 121 cross or branch in a crossing or branching point. Further, the device comprises a float means 14 for floating the conveyed object, guide means for guiding the floated conveyed object along each of the main conveying path 120 and auxiliary conveying path 121 in the vicinity of the crossing point or branching point to suppress rotating the conveyed object in the cross or branch conveying path part, magnetic or electromagnetic drive means for magnetically or electromagnetically driving the conveyed object conveyed and an electromagnetic drive switching control means in the cross or branch conveying path part 10c.

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