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1. 发明专利

JPH11111205A PARTICLE BEAM DEVICE EQUIPPED WITH ELECTRON GUN OF FIELD EMISSION TYPE AND HEAT-DEGASSING METHOD THEREOF 失效
公开(公告)号：JPH11111205A
公开(公告)日：1999-04-23
申请号：JP26468197
申请日：1997-09-29
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： OKURA AKIMITSU , NAGASE AKIHITO , MIYAMOTO RYOICHI , HIYAMA SABURO , FUKUHARA SATORU , SONOBE NOBUYUKI , KOKUBO SHIGERU , NITTA HISAO
IPC分类号： H01J9/39 , H01J37/073 , H01J37/141 , H01J37/18
摘要： PROBLEM TO BE SOLVED: To efficiently exhaust evolved gas in an electron gun chamber of a field-emission type. SOLUTION: Temperature-detecting means, 27 to 31, are installed on the outer wall of an electron gun chamber 12, near a magnet 23 of an ion pump IP1 which evacuates the electron gun chamber 12, on the outer wall of an electromagnetic lens part 11 near the connecting part with the electron gun chamber 12, near a magnet 24 of an ion pump IP2 which evacuates the electromagnetic lens part 11, and near an air-locking part 25, respectively. A power source 14 for baking, which is connected to heaters, 15 to 19, is controlled by a control means 32, as the temperatures detected by each temperature-detecting means, 27 to 31, fall in the prescribed range respectively during a heat-degassing period.

2. 发明专利

JPH10289681A SCANNING ELECTRON MICROSCOPE 失效
公开(公告)号：JPH10289681A
公开(公告)日：1998-10-27
申请号：JP9557097
申请日：1997-04-14
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： OKURA AKIMITSU , FURUYA HISAHIRO , MIYAMOTO RYOICHI , NAGASE AKIHITO , TOMIZAWA JUNICHIRO , ITO MASUHIRO
IPC分类号： H01J37/244 , H01J37/28
摘要： PROBLEM TO BE SOLVED: To improve secondary electron detection efficiency and facilitate combined observation of a cathode luminescence image and a secondary electron image by providing a means for applying a voltage opposed to a sample surface, in an electron beam transmission hole in the cathode luminescence detection means. SOLUTION: A cathode luminescence detection means 6 is arranged between an objective lens 10 and a sample 3, the center of a transmission hole 20 of an electron probe 12 is made to coincide with an electronic optical axis of a scanning electronic microscope and an extraction electrode 21 is provided in the transmission hole 20 in such a state as being axially symmetric with the axis. When a sample 3 has the same earth potential 23 with a stage 11 and a bias voltage VB0 22 is applied thereon, the secondary element 4 generated from the sample 3 by irradiation of the electronic probe 12 is energized upward, passed through an objective lens magnetic pole hole 5, and reached a secondary electron detector 1. This constitution can efficiently guide the secondary electron to the secondary electron detector 1 and allows to observe the secondary electron image and the cathode luminescence image without putting a detection means 6 in/out the sample surface.

3. 发明专利

JPH07169429A SCANNING TRANSMISSION ELECTRON MICROSCOPE 失效
公开(公告)号：JPH07169429A
公开(公告)日：1995-07-04
申请号：JP27643693
申请日：1993-11-05
申请人： HITACHI LTD , HITACHI SCIENCE SYSTEMS LTD
发明人： OKURA AKIMITSU , MIYAMOTO RYOICHI
IPC分类号： H01J37/09 , H01J37/26
摘要： PURPOSE:To provide a means capable of observing a transmissible electron image together with other detectors even with limitation of a distance between a sample and an objective lens. and of easily observing either of a bright field image and a dark field image according to an object. CONSTITUTION:A scanning type electron microscope is provided with a means for holding a disphram for providing a bright field image contrast and another diaphram for providing a dark field image contrast on a common diapharm table 25 between a sample 9 and a transmissible electron detector 23. The means is aligned on or out of an optical axis, thus obtaining a desired transmissible electron image. The diaphram for providing a bright field image contrast is constituted of a member having an electron beam passing hole at a scattering electron angle (half opening angle) from the sample of 10 mrad or less. The diaphram for providing a dark field image contrast is constituted of a member having an electron beam cutting width at a scattering electron angle (half opening angle) from the sample of at least 50 mrad or more.

4. 发明专利

JPS63148525A BULK SAMPLE HOLDER FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPS63148525A
公开(公告)日：1988-06-21
申请号：JP29487686
申请日：1986-12-12
申请人： HITACHI LTD
发明人： MIYAMOTO RYOICHI , KANDA KIMIO
IPC分类号： H01J37/20
摘要： PURPOSE:To easily adjust the height of the observation plane of a sample by providing an aperture storing a sample pan and clamping and holding the sample pan mounted with the sample to be checked at this portion. CONSTITUTION:A holder sample section 1 has an opening, the first supporter 6 and the second supporter 8 are provided face to face on both sides and clamp and hold a sample pan 9 mounted with a sample 10. When the sample pan 9 is to be set, the holder sample section 1 of a bulk sample holder is fitted to a height adjusting jig 11, a set screw 7 is loosened to displace the first supporter 6, and the distance between the first supporter 6 and the second supporter 8 is increased. Next, the sample pan 9 fixed and mounted with the sample 10 is mounted on the lift mechanism 12 of the height adjusting jig 11. The sample pan 9 is vertically moved by the lift mechanism 11 so that the highest position of the sample surface matches the predetermined mechanical position. Accordingly, positioning of the sample height can be simply performed.

5. 发明专利

JPH0419951A BULK SAMPLE HOLDER FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPH0419951A
公开(公告)日：1992-01-23
申请号：JP12133690
申请日：1990-05-14
申请人： HITACHI LTD
发明人： MIYAMOTO RYOICHI
IPC分类号： H01J37/20
摘要： PURPOSE:To enhance workability and also stably support a sample pan by moving against a spring force a moving support stand provided with a stopper to hold the sample pan, to which stopper the spring force is applied. CONSTITUTION:A sample pan 12 is sandwiched and fixed between a fixed support stand 3 provided on a holder shaft 1 and a moving support stand 4 which is exerted with an elastic force from a spring 5 and locked in its fixed position by a stopper 7. When a pair of tweezers, etc., are inserted into the channel 8 of the stopper 7 and the stopper 7 is pushed against an upward elastic force exerted by a spring 6, the stopper 7 is disengaged, and when the pair of tweezers are moved along the constricted portion of the channel 9 of the shaft 1 the stand 4 is moved accordingly and the pan 12 is released from its sandwiched state. By this constitution workability in attaching and removing the pan is remarkably heightened and also the pan is always supported in its stable state.

6. 发明专利

JPS6188441A Fluorescent panel for electron microscope or the like 失效
标题翻译：用于电子显微镜或类似物的荧光板
公开(公告)号：JPS6188441A
公开(公告)日：1986-05-06
申请号：JP20821284
申请日：1984-10-05
申请人： Hitachi Ltd
发明人： MIYAUCHI KYOICHI , MIYAMOTO RYOICHI
IPC分类号： H01J37/22
CPC分类号： H01J37/224 , H01J2237/2443
摘要： PURPOSE:To reduce charging from electron ray so as to prevent damage, by forming a fluorescent panel in such a way as forming clear conductive membranes on the surfaces of transparent, piling up several of them, and furnishing phosphorus membrane and aluminum vacuum evaporated film thereover. CONSTITUTION:A fluorescent panel used for TV observation of an electron microscope etc. is formed in a following procedure: On each surface of transparent plates 1a-1c such as glass plates, clear conductive membranes 2a-2c are formed, and they are piled up placing their conductive membranes like a sandwich, over which a phosphorus paint is applied. Moreover, over and outside them, Al film is vacuum evaporated to give a metal packing effect and conductivity. Therefore, even though an accelerated electron ray of high voltage penetrates the surface of the fluorescent panel several mm deep, charging is avoided because it is discharged through the conductive membrane 2 which is of grounding potential, and disturbance for image observation or damage to the fluorescent panel owing to sparks etc. is prevented.
摘要翻译：目的：为了减少电子束的充电以防止损坏，通过在透明表面上形成透明导电膜，堆积几片荧光板，并在其上提供磷膜和铝真空蒸镀膜。构成：用于电子显微镜等的电视观察的荧光板按照以下顺序形成：在玻璃板等透明板1a-1c的各表面上形成透明导电膜2a-2c，并将其堆积将它们的导电膜如三明治放置在其上，施加磷涂料。此外，它们之外，Al膜被真空蒸发以产生金属填充效应和导电性。因此，尽管高电压的加速电子束穿透了几毫米深的荧光板表面，但由于通过接地电位的导电膜2而被排出，并且对于图像观察或荧光损坏的干扰，避免了充电防止由于火花等引起的面板等。

7. 发明专利

JPH02181351A BULK SAMPLE HOLDER FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPH02181351A
公开(公告)日：1990-07-16
申请号：JP33689
申请日：1989-01-06
申请人： HITACHI LTD
发明人： MIYAMOTO RYOICHI
IPC分类号： H01J37/20 , H01F17/06 , H01J37/28 , H04B15/02
摘要： PURPOSE:To make it possible to position the height of a sample simply by providing a lid with springs inside opposing to a recess arranged at the tip. CONSTITUTION:By placing a sample holder 1 by making its recess 15 face upward and the observation surface of a sample 13 face downward, and pushing down a lid 5 to a cap 9 side, the lid 6 is closed to the cap 9 side with a holder shaft 2 as the fulcrum. In this case, the cap 9 and a slope provided at a projection 16 are composed to superpose each other, and the cap 9 makes a cylinder 10 slided to the right side while rotating until the cylinder 10 is removed from the slope, and then it is pushed back by a coil spring 11 again to be held closely to the key-form surface of the projection 16. At the same time, the sample 13 is held closely attached to the bottom surface of the recess 15 by plate springs 6 and 7. As a result, the observation surface of the sample 13 is closely attached with the recess 15, and held at the standard sample height necessarily. The positioning of the sample height can be carried out simply, consequently.

8. 发明专利

JPS62229744A SAMPLE HEATING DEVICE 失效
公开(公告)号：JPS62229744A
公开(公告)日：1987-10-08
申请号：JP7099486
申请日：1986-03-31
申请人： HITACHI LTD
发明人： SATO MITSUGI , KURODA KATSUHIRO , MIYAMOTO RYOICHI , HOSOKI SHIGEYUKI
IPC分类号： H01J37/20
摘要： PURPOSE:To make it feasible of high temperature heating exceeding 1000 deg.C by directly attaching a sample to a heating filament to perform sample heating. CONSTITUTION:A tungsten filament 2 or the like is used as a heating heater for directly attaching a sample 1 to said filament 2. Further, lead wires 3 and 4 are fixed by glass 5 so that stress may not by given to the filament 2. Since also welding or the like can be considered as a means for attaching the sample 1 to the filament 2, it is to be so constituted that attaching to and detaching from a sample stand 15 can be made at each filament. Thereby, heat is directly transmitted to the sample 1 from the filament 2 for heating so that in the case of the sample 1 with small thermal capacity can be easily heated at a high temperature exceeding 1000 deg.C and moreover of simple construction since no heating furnace is applied.

9. 发明专利

JPH07130316A BULK SAMPLE HOLDER FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPH07130316A
公开(公告)日：1995-05-19
申请号：JP27644393
申请日：1993-11-05
申请人： HITACHI LTD
发明人： MIYAMOTO RYOICHI , NAKAIZUMI YASUSHI , KUMADA TAKAO
IPC分类号： H01J37/20
摘要： PURPOSE:To provide a sample holder of an ultra high resolution scanning electron microprobe that can stably hold a sample without generating difference in the work of loading samples. CONSTITUTION:In a sample holder 11, an intermediate shaft 18 is fitted from a sample loading part 14 to a holder shaft 13 through an O-ring 20, and the atmospheric pressure of a sample chamber 2 is worked on the intermediate shaft 18, while a sample 15 or a sample board 16 is held by the pressure working on the intermediate shaft. A sample can be held stably and difference in operation is eliminated, while the reliability is improved drastically. The range of utilization is easily extended, and the cost can be reduced by a large margin.

10. 发明专利

JPS6410558A BULKY SAMPLE STORAGE VESSEL FOR ELECTRON MICROSCOPE 失效
公开(公告)号：JPS6410558A
公开(公告)日：1989-01-13
申请号：JP16535587
申请日：1987-07-03
申请人： HITACHI LTD
发明人： MIYAMOTO RYOICHI
IPC分类号： H01J37/20 , H01J37/28
摘要： PURPOSE:To store a side entry type bulky sample efficiently by holding the sample loaded on saucers in holes which are arranged opposing concentrically to a vessel and to a lid respectively, properly, not to fall down, and being airtight. CONSTITUTION:A storage vessel is formed of and divided into a vessel 3 and a lid 4, holes 9 are furnished on the vessel 3 while holes 10 are furnished on the lid 4, opposing each other concentrically, and the sample 2 loaded on saucers 1 is stored in the spaces formed by the holes 9 and the holes 10. The vessel 3 and the lid 4 are sealed up airtight through an O ring 7, and the part of the lid 3 opposing to the holes 10 is visualized by using a transparent glass window 11. The size of the holes 9 is made equal to the size of the largest diagonal of the saucer 1 at the diameter, and equal to the thickness of the saucer 1 at the depth, while the size of the holes 10 is made less than the largest diagonal of the saucer 1 at the diameter, and larger than the highest size of the sample 2 at the depth. In such a composition, the sample 2 can be put in and out in any direction of the circumference of the holes 9 easily, and kept airtight and not to fall down.

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